Film coating and annealing integrated device

Abstract

The utility model discloses a coating and annealing integrated device which comprises a lifting driving part, a rotary furnace cover mechanism, a material storage cavity, an evaporation cavity, a vacuum assembly and a heating assembly, the rotary furnace cover mechanism is arranged at the driving end of the lifting driving part and located above a feeding port of the material storage cavity, the material storage cavity and the evaporation cavity are sequentially connected and communicated, and the vacuum assembly is arranged on the vacuum assembly. The transverse inner diameter of the material storage cavity is larger than that of the evaporation cavity, an evaporation area is formed in the area, opposite to the evaporation cavity, of the material storage cavity, the vacuum assembly is communicated with the evaporation cavity, the heating assembly is arranged on the material storage cavity close to the evaporation cavity, and the area, opposite to the heating assembly, of the material storage cavity is an annealing area. According to the scheme, the problems that in the prior art, due to the fact that the inner cavity of the passivation furnace comprises the evaporation cavity and the material cavity which are communicated and equal in diameter, the volume is large, vacuumizing of the passivation furnace is time-consuming, the time is also needed for transferring the battery pieces into the annealing furnace in a fragmented mode, and the passivation efficiency of the battery pieces is affected can be solved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of battery piece section passivation, especially relates to a plating annealing integrated device. BACKGROUND

[0002] The section of the battery piece formed after the battery piece is divided does not pass through passivation treatment, leading to increased edge recombination, and the conversion efficiency will be reduced, thereby further reducing the conversion efficiency of the photovoltaic module. Depositing on the section of the battery piece can reduce this loss.

[0003] In the prior art, the passivation furnace is vacuumized, the metal, alloy or compound is evaporated by heating in the vacuum environment, and then deposited on the section, and then the battery piece is transported from the passivation furnace to the annealing furnace for high-temperature annealing treatment to change the interface structure of the section. In this process, since the inner cavity of the passivation furnace includes a deposition cavity and a material cavity which are connected and have the same diameter, the volume is large, which leads to a long time for vacuumizing the passivation furnace, and the battery piece needs time to be transported to the annealing furnace, thereby affecting the passivation efficiency of the battery piece. SUMMARY

[0004] The utility model aims at providing a plating annealing integrated device to solve the problems in the background art.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical scheme: a plating annealing integrated device, comprising a lifting drive, a rotary furnace cover mechanism, a storage cavity, a deposition cavity, a vacuum assembly and a heating assembly, the rotary furnace cover mechanism is arranged on the driving end of the lifting drive, the rotary furnace cover mechanism is located above the material inlet of the storage cavity, the rotary furnace cover mechanism can carry and drive a plurality of boxes to rotate, the storage cavity and the deposition cavity are connected and communicated in sequence along the gravity direction, the cross-sectional inner diameter of the storage cavity is larger than the cross-sectional inner diameter of the deposition cavity, the area opposite to the deposition cavity of the storage cavity and the deposition cavity forms a deposition area, the vacuum assembly is communicated with the deposition cavity, the heating assembly is arranged on the storage cavity adjacent to the deposition cavity, and the area opposite to the heating assembly of the storage cavity is an annealing area.

[0006] Preferably, at least part of the vacuum assembly, the deposition cavity and the heating assembly are projected in the projection of the storage cavity along the gravity direction.

[0007] Preferably, the heating assembly comprises a light-transmitting plate, an infrared lamp tube and a support, the storage cavity is provided with a through hole, the light-transmitting plate is arranged on the end face of the through hole, the support is arranged on the storage cavity, and the infrared lamp tube is arranged on the support and opposite to the light-transmitting plate.

[0008] Preferably, the height of the storage cavity is less than the height of the evaporation cavity along the gravity direction.

[0009] Preferably, the rotating furnace cover mechanism comprises a rotating driving member, a furnace cover and a clamping tool, the furnace cover is arranged on the driving end of the lifting driving member, the rotating driving member is arranged on the furnace cover, the clamping tool is rotationally arranged on the bottom surface of the furnace cover, the driving end of the rotating driving member is connected with the clamping tool through the furnace cover, and the furnace cover is located above the material inlet of the storage cavity.

[0010] Preferably, the heating assembly is multiple and is arranged around the lower end surface of the storage cavity.

[0011] Preferably, the evaporation cavity comprises a furnace body and an evaporation member, the furnace body is provided with an inner cavity, the evaporation member is arranged in the inner cavity, and the evaporation end of the evaporation member faces the storage cavity.

[0012] Preferably, the furnace body is provided with a material replacement hole in the side wall adjacent to the evaporation member, and the evaporation cavity further comprises a furnace door which is hingedly connected with the furnace body and can be sealingly arranged outside the material replacement hole.

[0013] Preferably, the furnace door is provided with an observation window.

[0014] The technical scheme adopted in the present application can achieve the following beneficial effects:

[0015] In the film coating and annealing integrated device disclosed in the present application, the rotating furnace cover mechanism carries multiple boxes, the lifting driving member drives the rotating furnace cover mechanism to descend and sealingly cover the end surface of the material inlet of the storage cavity, the vacuum assembly is opened to perform vacuumization on the storage cavity and the evaporation cavity and form a negative pressure environment, the heating assembly can heat the internal environment of the storage cavity and the evaporation cavity to accelerate air flow to assist the vacuum assembly to perform vacuumization faster, in the process of forming gaseous deposits by target evaporation, the inner cavity of the evaporation cavity forms a channel, the gaseous deposits move linearly into the evaporation area (the area opposite to the position where the storage cavity and the evaporation cavity are connected), and the multiple battery pieces of at least one of the multiple boxes located in the evaporation area can be deposited with a passivation layer by the gaseous deposits, and the rotating furnace cover mechanism can drive the multiple boxes to stepwise rotate or slowly rotate to complete passivation coating.

[0016] Then, in the annealing stage, the rotating furnace cover mechanism drives at least one of the multiple boxes to stepwise rotate to the annealing area, i.e. the area opposite to the heating assembly, and the heating assembly performs high-temperature annealing treatment on the at least one of the multiple boxes one by one.

[0017] In the structure, when meeting the storage of multiple material boxes, compared with the design that the cross-section inner diameter of the material storage cavity is equal to the cross-section inner diameter of the evaporation cavity, the cross-section inner diameter of the material storage cavity is greater than the cross-section inner diameter of the evaporation cavity, the volume of the evaporation cavity is smaller than the volume of the material storage cavity, so as to accelerate the working efficiency of the vacuum assembly, and also be beneficial to the miniaturization design of the evaporation cavity, and meanwhile, the heating assembly can improve the molecular fluidity by heating the inside of the material storage cavity, so as to assist the vacuum assembly to shorten the vacuumizing time, and the battery piece slicing can also complete the passivation and annealing processes in the material storage cavity in turn, so as to avoid the complicated process of transfer, and then ensure the passivation efficiency of the battery piece. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or the prior art description. Obviously, the drawings in the following description are only embodiments of the present application, and for those skilled in the art, other drawings can also be obtained without creative labor on the basis of the provided drawings.

[0019] Fig. 1 Part of the front view of the film plating and annealing integrated device disclosed by the embodiments of the present application;

[0020] Fig. 2 Part of the structural schematic diagram of the film plating and annealing integrated device disclosed by the embodiments of the present application;

[0021] Fig. 3 The schematic diagram of the rotary furnace cover mechanism disclosed by the embodiments of the present application;

[0022] Fig. 4 The cross-sectional view of the heating assembly disclosed by the embodiments of the present application.

[0023] In the drawings: 100, lifting driving part; 200, rotary furnace cover mechanism; 210, rotary driving part; 220, furnace cover; 300, material storage cavity; 400, evaporation cavity; 410, furnace body; 420, furnace door; 500, vacuum assembly; 600, heating assembly; 610, light transmission plate; 620, infrared lamp tube; 630, support; 700, observation window. DETAILED DESCRIPTION

[0024] In order to facilitate the understanding of the present application, the present application will be described more fully below with reference to the related drawings. The preferred embodiments of the present application are shown in the drawings. However, the present application can be realized in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present application more thorough and comprehensive.

[0025] It is to be noted that when an element is referred to as being "on" another element, it can be directly on the other element or intervening elements can also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements can also be present.

[0026] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in the description herein is for describing particular embodiments only and is not intended to be limiting of the application.

[0027] As shown in Figs. 1 to 4 The application discloses a coating and annealing integrated device. The disclosed passivation and annealing integrated device comprises a lifting driving element 100, a rotary furnace cover mechanism 200, a storage cavity 300, an evaporation cavity 400, a vacuum assembly 500 and a heating assembly 600. The lifting driving element 100 can be a driving motor, a telescopic pneumatic cylinder, a telescopic electric cylinder or other specific driving structures, and the application does not make any limitation in this regard.

[0028] Specifically, the rotary furnace cover mechanism 200 is arranged on the driving end of the lifting driving element 100 and is located above the material inlet of the storage cavity 300. The lifting driving element 100 can drive the rotary furnace cover mechanism 200 to ascend and descend to cover or move away from the storage cavity 300. The rotary furnace cover mechanism 200 can carry and drive a plurality of material boxes to rotate. Any one of the plurality of material boxes carries a plurality of stacked battery piece segments. The storage cavity 300 and the evaporation cavity 400 are sequentially connected and communicated along the gravity direction. The storage cavity 300 and the rotary furnace cover mechanism 200 cooperate to provide evaporation space for the plurality of battery piece segments in the plurality of material boxes. The cross-sectional inner diameter of the storage cavity 300 is greater than the cross-sectional inner diameter of the evaporation cavity 400. The area opposite to the storage cavity 300 and the evaporation cavity 400 forms an evaporation area. The vacuum assembly 500 is communicated with the evaporation cavity 400. The heating assembly 600 is arranged on the storage cavity 300 adjacent to the evaporation cavity 400. The area opposite to the storage cavity 300 and the heating assembly 600 is an annealing area.

[0029] In the use process of the coating and annealing integrated device, in the evaporation stage, the rotary cover mechanism 200 carries a plurality of boxes, the lifting drive 100 drives the rotary cover mechanism 200 to descend and seal the end face of the material inlet of the storage cavity 300, the vacuum assembly 500 is opened, the storage cavity 300 and the evaporation cavity 400 are vacuumized to form a negative pressure environment, and the heating assembly 600 can heat the internal environment of the storage cavity 300 and the evaporation cavity 400 to accelerate air flow to assist the vacuum assembly 500 to vacuumize faster. In the process of forming gaseous deposits by target evaporation, the inner cavity of the evaporation cavity 400 forms a channel, and the gaseous deposits move linearly into the evaporation area (the area opposite to the position where the storage cavity 300 and the evaporation cavity 400 are connected), and the plurality of battery pieces in at least one of the plurality of boxes in the evaporation area can be deposited with a passivation layer by the gaseous deposits. The rotary cover mechanism 200 can drive the plurality of boxes to step rotation or slow rotation to complete the passivation coating.

[0030] Then, in the annealing stage, the rotary cover mechanism 200 drives at least one of the plurality of boxes to step rotation to the annealing area, that is, the area opposite to the heating assembly 600 relative to the storage cavity 300, and the heating assembly 600 performs high-temperature annealing processing on each of them one by one.

[0031] In the above structure, under the condition of meeting the storage of a plurality of boxes, compared with the design that the cross-sectional inner diameter of the storage cavity 300 is equal to the cross-sectional inner diameter of the evaporation cavity 400, the cross-sectional inner diameter of the storage cavity 300 is greater than the cross-sectional inner diameter of the evaporation cavity 400, and the volume of the evaporation cavity 400 is smaller than the volume of the storage cavity 300, thereby accelerating the working efficiency of the vacuum assembly 500, and also being beneficial to the miniaturization design of the evaporation cavity 400. At the same time, the heating assembly 600 can improve the molecular flowability by heating the inside of the storage cavity 300, thereby assisting the vacuum assembly 500 to shorten the vacuumizing time, and the battery piece fragments can also complete the passivation and annealing processes in the storage cavity 300 in turn, thereby avoiding the cumbersome process of transfer, and further ensuring the passivation efficiency of the battery piece.

[0032] In the embodiment of the present application, at least part of the vacuum assembly 500, the evaporation cavity 400 and the heating assembly 600 are projected in the projection of the storage cavity 300 in the direction of gravity, so that the storage cavity 300, the evaporation cavity 400, the heating assembly 600 and at least part of the vacuum assembly 500 can be designed integrally to avoid collision with other components.

[0033] The heating assembly 600 can be an electric heating rod, and a heating end of the electric heating rod can extend into the storage cavity 300. In an optional embodiment, the heating assembly 600 can include a light-transmitting plate 610, an infrared lamp tube 620, and a bracket 630. Specifically, the storage cavity 300 is provided with a through hole, the light-transmitting plate 610 is sealingly arranged on an end face of the through hole, the bracket 630 is arranged on the storage cavity 300, and the infrared lamp tube 620 is arranged on the bracket 630 and opposite to the light-transmitting plate 610. The infrared light emitted by the infrared lamp tube 620 can be directly absorbed by the plurality of battery pieces of at least one of the plurality of boxes carried by the inner wall of the storage cavity 300 or the rotary cover mechanism 200, so as to assist in completing the vacuumizing process or the annealing process.

[0034] In the embodiment of the present application, the height of the storage cavity 300 in the direction of gravity can be less than the height of the evaporation cavity 400. The small size of the storage cavity 300 is conducive to meeting the requirements of the rotary evaporation and annealing of the plurality of boxes, thereby further improving the efficiency of the vacuum assembly 500 in vacuumizing.

[0035] In the embodiment of the present application, the rotary cover mechanism 200 can include a rotary driving member 210, a cover 220, and a clamping tool. Specifically, the cover 220 is arranged on the driving end of the lifting driving member 100, the rotary driving member 210 is arranged on the cover 220, and the clamping tool is rotatably arranged on the bottom surface of the cover 220. The clamping tool is used for clamping the box, the driving end of the rotary driving member 210 penetrates through the cover 220 and is connected with the clamping tool, the rotary driving member 210 can drive the clamping tool to rotate, and the cover 220 is located above the inlet of the storage cavity 300.

[0036] Of course, the rotary driving member 210 can be a servo motor, a stepping motor, or a combination of an internal gear set, and the present application does not make any limitation in this regard.

[0037] In the embodiment of the present application, the heating assembly 600 is a plurality of assemblies and is arranged around the lower end surface of the storage cavity 300, so that at least two of the plurality of boxes can be simultaneously annealed, thereby improving the annealing efficiency.

[0038] In the embodiment of the present application, the evaporation cavity 400 can include a furnace body 410 and an evaporation member. The furnace body 410 is provided with an inner cavity, and the evaporation member is arranged in the inner cavity. The evaporation end of the evaporation member faces the storage cavity 300. The evaporation end of the evaporation member is heated to sublimate and deposit on the section surface of the plurality of battery pieces in the box along the ray.

[0039] In a further technical solution, the furnace body 410 can be provided with a material replacement hole in the side wall adjacent to the evaporation member, and the evaporation cavity 400 can further include a furnace door 420 hingedly connected to the furnace body 410, the furnace door 420 being sealably arranged outside the material replacement hole, and the replacement of the target material being completed by opening and closing the furnace door 420.

[0040] In yet another technical solution, the furnace door 420 can be provided with an observation window 700, thereby facilitating observation of the consumption of the target material.

[0041] Although the embodiments of the present application have been shown and described, it should be understood by those skilled in the art that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the present application, and the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A coating and annealing integrated apparatus, characterized in that, The device comprises a lifting driving element (100), a rotary furnace cover mechanism (200), a storage cavity (300), an evaporation cavity (400), a vacuum assembly (500) and a heating assembly (600). The rotary furnace cover mechanism (200) is arranged on the driving end of the lifting driving element (100). The rotary furnace cover mechanism (200) is located above the material inlet of the storage cavity (300). The rotary furnace cover mechanism (200) can carry and drive multiple material boxes to rotate. The storage cavity (300) and the evaporation cavity (400) are sequentially connected and communicated. The cross-sectional inner diameter of the storage cavity (300) is larger than that of the evaporation cavity (400). The area opposite to the storage cavity (300) and the evaporation cavity (400) forms an evaporation area. The vacuum assembly (500) is communicated with the evaporation cavity (400). The heating assembly (600) is arranged on the storage cavity (300) adjacent to the evaporation cavity (400). The area opposite to the storage cavity (300) and the heating assembly (600) is an annealing area.

2. The coater and annealing integrated apparatus according to claim 1, wherein In the direction of gravity, the projections of the vacuum assembly (500), at least part of the evaporation cavity (400) and the heating assembly (600) are located in the projection of the storage cavity (300).

3. The coater and annealer integrated apparatus according to claim 1, wherein The heating assembly (600) comprises a light-transmitting plate (610), an infrared lamp tube (620) and a bracket (630). The storage cavity (300) is provided with a through hole. The light-transmitting plate (610) is sealingly arranged on the end face of the through hole. The bracket (630) is arranged on the storage cavity (300). The infrared lamp tube (620) is arranged on the bracket (630) and opposite to the light-transmitting plate (610).

4. The coater and annealer integrated apparatus according to claim 1, wherein In the direction of gravity, the height of the storage cavity (300) is smaller than that of the evaporation cavity (400).

5. The coater and annealer integrated apparatus according to claim 1, wherein The rotary furnace cover mechanism (200) comprises a rotary driving element (210), a furnace cover (220) and a clamping tool. The furnace cover (220) is arranged on the driving end of the lifting driving element (100). The rotary driving element (210) is arranged on the furnace cover (220). The clamping tool is rotationally arranged on the bottom surface of the furnace cover (220). The driving end of the rotary driving element (210) penetrates through the furnace cover (220) and is connected with the clamping tool. The furnace cover (220) is located above the material inlet of the storage cavity (300).

6. The coater and annealer integrated apparatus according to claim 1, wherein The heating assembly (600) is multiple and is arranged on the lower end surface of the storage cavity (300).

7. The coater and annealer integrated apparatus according to claim 1, wherein The evaporation cavity (400) comprises a furnace body (410) and an evaporation element. The furnace body (410) is provided with an inner cavity. The evaporation element is arranged in the inner cavity. The evaporation end of the evaporation element faces the storage cavity (300).

8. The coater and annealer integrated apparatus according to claim 7, wherein The furnace body (410) is provided with a material replacement hole in the side wall adjacent to the evaporation element. The evaporation cavity (400) further comprises a furnace door (420). The furnace door (420) is hingedly connected with the furnace body (410). The furnace door (420) is sealingly arranged outside the material replacement hole.

9. The coater and annealer integrated apparatus according to claim 8, wherein The furnace door (420) is provided with an observation window (700). The furnace door (420) is provided with an observation window (700).

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