Connecting structure for heater and electrode column of single crystal furnace

Abstract

The utility model discloses a connecting structure of a heater and an electrode column of a single crystal furnace, which comprises an electrode column and a heater detachably arranged at the top end of the electrode column, the heater is tightly contacted with the electrode column through a special-shaped combination structure, and the special-shaped combination structure comprises a contact convex surface arranged at the upper end of the electrode column. A contact concave surface matched with the contact convex surface is arranged at the bottom of the heater, the contact convex surface is matched with the contact concave surface in an inserting manner, and the contact convex surface and the contact concave surface are conical; and the positioning piece comprises positioning convex parts which are uniformly arranged on the contact convex surface in a surrounding manner. According to the connecting structure for the heater and the electrode column of the single crystal furnace, the heater and the electrode column are in close contact through the special-shaped combination structure and are locked through the fastener, so that high-temperature silicon steam and other volatile matters entering the contact surface can be reduced, high-purity graphite paper is not needed, the heater and the electrode column are separated more easily, and the service life of the heater is prolonged. The service life of the thermal field device is prolonged.

Description

Technical Field

[0001] This utility model relates to the field of single crystal furnaces, and in particular to a connection structure between a single crystal furnace heater and an electrode column. Background Technology

[0002] The Czochralski method is a commonly used method for growing single crystals. Its working principle involves melting the raw materials that make up the crystal in a crucible, attaching a seed crystal to the surface of the melt, and pulling the melt. Under controlled conditions, the atoms or molecules of the seed crystal and the melt continuously rearrange at the interface, gradually solidifying as the temperature decreases to grow a single crystal. The heat source in a single crystal furnace is generally a heater, and the bottom of the heater is usually connected to an electrode post to heat the raw materials.

[0003] like Figure 1 As shown, the contact surface between the existing heater 1 and electrode post 2 is generally a planar structure or a similar design structure. After contact, it is directly fastened by fastener 3. When the current of the single crystal furnace is conducted to the heater 1 through the electrode post 2, due to the tolerance of the surface processing of the heater 1 and the electrode post 2, they generally do not make tight contact, which will lead to arcing. Currently, high-purity graphite paper is usually placed at the contact point between the heater 1 and the electrode post 2 to ensure that the current can be smoothly conducted to the heater 1 through the electrode post 2. However, considering the actual use, high-temperature silicon vapor and other volatiles will corrode the high-purity graphite paper in the middle, causing the heater 1 and the electrode post 2 to be unable to separate smoothly after the furnace is shut down. Forcibly opening it will cause the contact surface of the heater 1 and the electrode post 2 to be damaged at the same time. In severe cases, the heater 1 and the electrode post 2 will be completely damaged and scrapped, reducing the service life of the heater 1 and the electrode post 2 and seriously affecting the normal use of the heater 1 and the electrode post 2.

[0004] Therefore, it is necessary to propose a connection structure between the single crystal furnace heater and the electrode column to solve the above problems. Utility Model Content

[0005] The main objective of this invention is to provide a connection structure between a single crystal furnace heater and an electrode column, which can effectively solve the problems in the background art.

[0006] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0007] A connection structure between a heater and an electrode column in a single crystal furnace includes an electrode column and a heater detachably disposed at the top of the electrode column. The heater and the electrode column are in close contact through an irregularly shaped joint structure. The irregularly shaped joint structure includes a contact convex surface disposed at the upper end of the electrode column and a contact concave surface disposed at the bottom of the heater that is adapted to the contact convex surface. The contact convex surface and the contact concave surface are inserted into each other. The contact convex surface and the contact concave surface are conical.

[0008] It also includes a positioning component, which includes a positioning protrusion uniformly arranged around the contact convex surface, and a positioning recess uniformly arranged around the inner wall of the contact concave surface, which corresponds to and fits the positioning protrusion one by one, and the positioning protrusion and the positioning recess are inserted into each other.

[0009] The heater and the electrode post are detachably connected by fasteners. The lower end of the heater is provided with a mounting through hole corresponding to the contact concave surface, and the top of the electrode post is provided with a mounting threaded hole corresponding to the mounting through hole. One end of the fastener passes through the mounting through hole and is threadedly connected to the mounting threaded hole.

[0010] Preferably, both the positioning protrusion and the positioning recess have a certain taper.

[0011] Preferably, the fastener is a bolt, and the fastener includes a bolt head located at the end and a threaded post fixedly connected to the bottom of the bolt head. The fastener passes through the mounting through hole and is threadedly connected to the mounting threaded hole via the threaded post.

[0012] Preferably, the fastener is provided with an anti-loosening component, which includes a drive groove disposed inside the bolt head, a movable groove disposed inside the threaded post, a force-bearing block movably connected along the axial direction of the threaded post to the inner side of the drive groove, a traction post extending into the movable groove fixedly connected to the side of the force-bearing block near the threaded post, a drive block movably connected to the sidewall of the bolt head along the radial direction of the threaded post, one end of the drive block engaging with the lower inclined surface of the force-bearing block, and configured such that when the drive block moves in the axial direction of the threaded post, the force-bearing block moves upward, and the end of the drive block away from the force-bearing block is arc-shaped. An elastic element is provided between the top of the block and the top of the inner cavity of the drive groove. When the elastic element is in the reset state, the end of the drive block away from the force-bearing block protrudes from the side wall of the bolt head, and the protruding part is used to engage with the wrench. The side wall of the traction column is inclinedly provided with a guide rod. The side wall of the threaded column is movably connected with an abutment pin along the radial direction of the threaded column. One end of the abutment pin extends to the inner side of the movable groove and is movably guided and connected to the guide rod. It is configured such that when the traction column moves upward, the abutment pin moves towards the axial direction of the threaded column. The abutment pin is configured such that when the elastic element is in the reset state, the end of the abutment pin away from the guide rod protrudes from the side wall of the threaded column.

[0013] Preferably, the elastic element is a spring, and the spring is arranged vertically.

[0014] Preferably, the lower end of the heater is movably provided with a ball bearing corresponding to the bolt head.

[0015] Compared with the prior art, this utility model provides a connection structure between a single crystal furnace heater and an electrode column, which has the following advantages:

[0016] 1. The connection structure between the heater and the electrode column of this single crystal furnace, through the set irregular joint structure, enables the heater and the electrode column to make close contact and lock it with fasteners. This can reduce the entry of high-temperature silicon vapor and other volatiles into the contact surface, eliminate the need to use high-purity graphite paper, make it easier to separate the heater and the electrode column, improve the service life of the thermal field components, and the auxiliary setting of the positioning component can prevent relative rotation after the heater and the electrode column are combined, facilitate the tightening of fasteners, and prevent relative friction damage between the contact concave surface and the contact convex surface.

[0017] 2. The connection structure between the single crystal furnace heater and the electrode column, by setting anti-loosening components on the fasteners, can increase the stability of the fasteners and the mounting threaded holes after tightening. When the wrench is locked on the bolt head and tightened, the abutment pin is hidden. After the wrench is released, the abutment pin goes outward and contacts the inner wall of the mounting threaded hole, thereby avoiding the possibility of loosening. This increases the possibility of loosening between the heater and the electrode column, thus increasing safety. Attached Figure Description

[0018] Figure 1 This is a structural diagram of existing technology;

[0019] Figure 2 This is a schematic diagram of the structure of this utility model;

[0020] Figure 3 This is a structural diagram of the present invention in its disassembled state;

[0021] Figure 4 This is a cross-sectional structural diagram of the heater and electrode post of this utility model;

[0022] Figure 5 This is a cross-sectional structural diagram of the fastener of this utility model.

[0023] In the diagram: 1. Heater; 2. Electrode post; 3. Fastener; 4. Mounting through hole; 5. Mounting threaded hole; 6. Contact convex surface; 7. Positioning convex part; 8. Abutment pin; 9. Ball bearing; 10. Contact concave surface; 11. Positioning concave part; 12. Bolt head; 13. Threaded post; 14. Drive groove; 15. Movable groove; 16. Traction post; 17. Force-bearing block; 18. Elastic element; 19. Drive block; 20. Guide rod. Detailed Implementation

[0024] To make the technical means, creative features, objectives and effects of this utility model easier to understand, the present utility model will be further described below in conjunction with specific embodiments.

[0025] like Figure 1-5As shown, a connection structure between a single crystal furnace heater and an electrode post includes an electrode post 2 and a heater 1 detachably disposed at the top of the electrode post 2. The heater 1 and the electrode post 2 are in close contact through an irregularly shaped joint structure. The irregularly shaped joint structure includes a contact convex surface 6 disposed at the upper end of the electrode post 2 and a contact concave surface 10 disposed at the bottom of the heater 1 that is adapted to the contact convex surface 6. The contact convex surface 6 and the contact concave surface 10 are inserted into each other. The contact convex surface 6 and the contact concave surface 10 are conical.

[0026] It also includes positioning components, which include positioning protrusions 7 uniformly arranged around the contact convex surface 6, and positioning recesses 11 uniformly arranged around the inner wall of the contact concave surface 10, which correspond one-to-one with and fit the positioning protrusions 7. The positioning protrusions 7 and the positioning recesses 11 are inserted and engaged, and both the positioning protrusions 7 and the positioning recesses 11 have a certain taper to facilitate insertion.

[0027] The heater 1 and the electrode post 2 are detachably connected by a fastener 3. The lower end of the heater 1 is provided with a mounting through hole 4 corresponding to the contact concave surface 10, and the top of the electrode post 2 is provided with a mounting threaded hole 5 corresponding to the mounting through hole 4. One end of the fastener 3 passes through the mounting through hole 4 and is threadedly connected to the mounting threaded hole 5.

[0028] Furthermore, the fastener 3 is a bolt, and the fastener 3 includes a bolt head 12 located at the end and a threaded post 13 fixedly connected to the bottom of the bolt head 12. The fastener 3 passes through the mounting through hole 4 through the threaded post 13 and is threadedly connected to the mounting threaded hole 5.

[0029] Furthermore, the fastener 3 is provided with an anti-loosening component, which includes a drive groove 14 disposed inside the bolt head 12, a movable groove 15 disposed inside the threaded post 13, a force-bearing block 17 movably connected to the inner side of the drive groove 14 along the axial direction of the threaded post 13, a traction post 16 extending into the inner side of the movable groove 15 fixedly connected to the side of the force-bearing block 17 near the threaded post 13, and a drive block 19 movably connected to the sidewall of the bolt head 12 along the radial direction of the threaded post 13. One end of the drive block 19 engages with the lower inclined surface of the force-bearing block 17, and is configured such that when the drive block 19 moves in the axial direction of the threaded post 13, the force-bearing block 17 moves upward. The end of the drive block 19 away from the force-bearing block 17 is arc-shaped, and the top of the force-bearing block 17 is connected to the inner side of the drive groove 14. An elastic element 18 is provided between the tops of the cavity. The elastic element 18 is preferably a spring, and the spring is vertically arranged. When the elastic element 18 is in the reset state, the end of the drive block 19 away from the force block 17 protrudes from the side wall of the bolt head 12, and the protruding part is used to engage with the wrench. The side wall of the traction column 16 is inclinedly provided with a guide rod 20. The side wall of the threaded column 13 is movably connected with an abutment pin 8 along the radial direction of the threaded column 13. One end of the abutment pin 8 extends to the inner side of the movable groove 15 and is movably guided and connected to the guide rod 20. It is configured such that when the traction column 16 moves upward, the abutment pin 8 moves towards the axial direction of the threaded column 13. The abutment pin 8 is configured such that when the elastic element 18 is in the reset state, the end of the abutment pin 8 away from the guide rod 20 protrudes from the side wall of the threaded column 13.

[0030] In addition, in order to reduce the friction between the bolt head 12 and the lower end of the heater 1, a ball bearing 9 corresponding to the bolt head 12 is movably provided at the top of the lower end of the heater 1.

[0031] In use, the contact protrusion 6 on the electrode post 2 is aligned with the contact concave surface 10 at the bottom of the heater 1, and the positioning protrusion 7 is aligned with the positioning concave surface 11. Then, the electrode post 2 is inserted. Next, the lower end of the fastener 3 is passed through the mounting through hole 4 and extends into the mounting threaded hole 5. Then, the fastener 3 is tightened by using a wrench to grip the bolt head 12. When the wrench is gripped on the bolt head 12, the drive block 19 is pressed and displaced inwards, causing the force-bearing block 17 to be pressed upwards and compressing the elastic element 18. This causes the traction post 16 to move the guide rod 20 upwards, and the abutment needle 8 to move inwards. The displacement is hidden. As the bolt head 12 is gradually tightened, it will roll with the ball 9 to avoid the bolt head 12 causing sliding friction damage to the heater 1. After tightening, the contact convex surface 6 and the contact concave surface 10 are in close contact. Finally, when the wrench is released, the elastic element 18 returns to its original position a certain distance. However, due to the restriction of the inner wall of the mounting threaded hole 5, the abutment pin 8 will not fully return to its original position. The end of the abutment pin 8 will abut against the inner wall of the mounting threaded hole 5, thereby increasing the friction between the threaded post 13 and the mounting threaded hole 5, preventing loosening and increasing the firmness.

[0032] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claims. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A connecting structure of a single crystal furnace heater and an electrode column, comprising an electrode column (2) and a heater (1) detachably arranged at the top end of the electrode column (2), characterized in that: The heater (1) and the electrode column (2) are in close contact through a special-shaped combination structure, the special-shaped combination structure includes a contact convex surface (6) arranged on the upper end of the electrode column (2), the bottom of the heater (1) is provided with a contact concave surface (10) matched with the contact convex surface (6), the contact convex surface (6) and the contact concave surface (10) are in plug-in cooperation, and the contact convex surface (6) and the contact concave surface (10) are conical; The positioning member includes positioning convex parts (7) arranged on the contact convex surface (6) in uniform surrounding, and the inner wall of the contact concave surface (10) is uniformly and circularly provided with positioning concave parts (11) corresponding to the positioning convex parts (7) one by one and matched with the positioning convex parts (7), and the positioning convex parts (7) and the positioning concave parts (11) are in plug-in cooperation; The heater (1) and the electrode column (2) are detachably connected through the fastener (3), the lower end of the heater (1) is provided with a mounting through hole (4) corresponding to the contact concave surface (10), the top of the electrode column (2) is provided with a mounting threaded hole (5) corresponding to the mounting through hole (4), and one end of the fastener (3) passes through the mounting through hole (4) and is threadedly connected with the mounting threaded hole (5).

2. The connecting structure of a heater and an electrode column of a single crystal furnace according to claim 1, characterized in that: The positioning convex parts (7) and the positioning concave parts (11) have a certain taper.

3. The connecting structure of the heater and the electrode column of the single crystal furnace according to claim 1, characterized in that: The fastener (3) is a bolt, the fastener (3) includes a bolt head (12) at the end and a threaded column (13) fixedly connected to the bottom of the bolt head (12), and the fastener (3) passes through the mounting through hole (4) and is threadedly connected with the mounting threaded hole (5) through the threaded column (13).

4. The connecting structure of the heater and the electrode column of a single crystal furnace according to claim 3, characterized in that: The fastener (3) is provided with an anti-loosening assembly, the anti-loosening assembly comprises a driving groove (14) arranged in the inner side of the bolt head (12), the inner side of the threaded column (13) is provided with a movable groove (15), the inner side of the driving groove (14) is movably connected with a stress block (17) along the axial direction of the threaded column (13), the stress block (17) is movably connected with a traction column (16) extending to the inner side of the movable groove (15) on the side close to the threaded column (13), the side wall of the bolt head (12) is movably connected with a driving block (19) along the radial direction of the threaded column (13), one end of the driving block (19) is matched with the lower end of the stress block (17) in a slope mode, and the stress block (17) is configured to be displaced upward when the driving block (19) is displaced along the axial direction of the threaded column (13), the end of the driving block (19) away from the stress block (17) is in an arc shape, the top of the stress block (17) and the top of the inner cavity of the driving groove (14) are provided with an elastic element (18), and the end of the driving block (19) away from the stress block (17) protrudes from the side wall of the bolt head (12) when the elastic element (18) is in a reset state, and the protruding part is used for abutting and matching with a wrench, the side wall of the traction column (16) is obliquely provided with a guide rod (20), the side wall of the threaded column (13) is movably connected with an abutting needle (8) along the radial direction of the threaded column (13), one end of the abutting needle (8) extends to the inner side of the movable groove (15) and is movably connected with the guide rod (20) in a guide mode, and the abutting needle (8) is configured to be displaced along the axial direction of the threaded column (13) when the traction column (16) is moved upward, and the abutting needle (8) is configured to protrude from the side wall of the threaded column (13) at the end away from the guide rod (20) when the elastic element (18) is in a reset state.

5. The connecting structure of a heater and an electrode column of a single crystal furnace according to claim 4, characterized in that: The elastic element (18) is a spring, and the spring is arranged vertically.

6. The connecting structure of a heater and an electrode column of a single crystal furnace according to claim 3, characterized in that: The top of the lower end of the heater (1) is movably provided with a ball (9) corresponding to the bolt head (12).

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