Vertical furnace control system and machine for preparing semiconductor structure
By setting up parallel first and second output control modules in the vertical furnace control system, the problem of process interruption caused by module failure was solved, the continuity and stability of the process were achieved, the scrap rate of products was reduced, and production efficiency and economic benefits were improved.
Patent Information
- Application Number
- CN202520017127.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-03
- Publication Date
- 2025-12-12
- Estimated Expiration
- 2035-01-03
AI Technical Summary
For vertical furnaces, there is a lack of effective fault tolerance mechanisms to address the issues of process interruption and product scrap caused by output control module failures during the manufacturing process.
The control system design employs a parallel connection of a first output control module and a second output control module. When the first module fails, the second module immediately takes over the signal output to ensure the continuity and stability of the process.
This reduced process interruptions and false alarms, lowered product scrap rates, and improved production efficiency and economic benefits.
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Figure CN223663774U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to the technical field of semiconductor manufacturing, and in particular to a vertical furnace control system and a machine table for preparing a semiconductor structure. BACKGROUND
[0002] A vertical tube furnace (for example, ASM D poly vertical furnace, which can be referred to as a vertical furnace for short) is also called a vertical tube furnace, which is an advanced heating equipment with a vertical tube structure, and has the characteristics of high temperature, rapid heating, and large area heating.
[0003] During the process, the output of multiple gases needs to be accurately controlled to ensure the stable progress of the deposition process. Due to the complexity of the gas deposition process, any failure or abnormality of the output module during operation may cause the process to be interrupted or even terminated, thereby causing the product to be scrapped and causing great economic losses to the production.
[0004] Therefore, there is an urgent need for an improved scheme to improve the fault tolerance and system stability of the output control of the vertical furnace, so as to reduce the process interruption caused by the failure of the output control module, and to ensure that the system can continue to output signals stably when the output control module fails, thereby avoiding product loss.
[0005] It should be noted that the information disclosed in the above background section is only used to strengthen the understanding of the background of the present application, and therefore can include information that does not constitute prior art known to those of ordinary skill in the art. Content of the utility model
[0006] Based on this, the embodiments of the present application provide a vertical furnace control system and a machine table for preparing a semiconductor structure, which reduces false alarm phenomena and product scrap rate, ensures the continuity of the process, helps to improve production efficiency, reduces scrapped products, reduces waste of production materials and process flow, and helps to enhance the economic benefits of production.
[0007] According to some embodiments, the present application provides a vertical furnace control system, comprising: a first output control module and a second output control module;
[0008] The first output control module is configured to receive an input instruction and control the vertical furnace control system to output a processing signal according to the input instruction.
[0009] The second output control module is connected in parallel with the first output control module, and when the first output control module fails, the second output control module receives the input instruction and controls the vertical furnace control system to output the processing signal according to the input instruction.
[0010] In some embodiments, the vertical furnace control system further comprises a power module;
[0011] The power module is connected with the second output control module, and is configured to provide working power for the second output control module.
[0012] In some embodiments, the vertical furnace control system further comprises an alarm module.
[0013] The alarm module is connected with the second output control module, and generates an alarm signal when the second output control module fails.
[0014] In some embodiments, the first output control module comprises a first PLC controller, and the second output control module comprises a second PLC controller.
[0015] In some embodiments, the first PLC controller is configured to:
[0016] According to the input instruction, the first to sixth output signals of the first PLC controller are effective, so that the first PLC controller outputs the processing signal.
[0017] When the first output control module fails, the first to sixth output signals of the second PLC controller are effective, so that the second PLC controller outputs the processing signal.
[0018] In some embodiments, the first output control module and the second output control module are both phosphine output control modules.
[0019] In other embodiments, the first output control module and the second output control module are both silane output control modules.
[0020] According to some embodiments, another aspect of the present application also provides a machine for preparing a semiconductor structure, the machine comprising the vertical furnace control system provided by any of the preceding embodiments.
[0021] In some embodiments, the machine further comprises:
[0022] A deposition system connected with the vertical furnace control system, configured to receive a processing signal and execute a target deposition recipe on a target chip according to the processing signal, so as to change the target chip from a first chip state to a second chip state.
[0023] In some embodiments, the first output control module and the second output control module are both phosphine output control modules.
[0024] The deposition system comprises a phosphine output module connected with the phosphine output control module, configured to receive the processing signal output by the phosphine output control module and control the output state of phosphine according to the processing signal.
[0025] In some other embodiments, the first output control module and the second output control module are both silane output control modules.
[0026] The deposition system comprises a silane output module connected with the silane output control module, configured to receive the processing signal output by the silane output control module and control the output state of silane according to the processing signal.
[0027] It should be understood that the foregoing general description and the following detailed description are only exemplary and explanatory, and are not limiting to the present application.
[0028] The embodiments of the present application can have / at least have the following advantages:
[0029] In the embodiments of the present application, since the first output control module and the second output control module are connected in parallel, when the first output control module is working normally, both of them can jointly perform output control to make the vertical furnace control system output the processing signal. The parallel structure composed of the first output control module and the second output control module provides double protection for the vertical furnace control system. When one of the modules (for example, the first output control module) fails, the other module (for example, the second output control module) can still take over the control, ensuring that the processing signal output by the vertical furnace control system will not be interrupted, so that the output processing signal is more reliable, which is conducive to improving the process stability of the vertical furnace and can reduce the false alarm phenomenon caused by the failure of the output control module.
[0030] The traditional control system relies on a single output signal. Once the signal fails, the entire process will be interrupted, resulting in product scrap. The embodiments of the present application set the second output control module in parallel with the first output control module. Even if the first output control module fails, the second output control module can immediately take over the output of the processing signal, realizing automatic fault tolerance and redundancy protection, so as to reduce the waste caused by process interruption, significantly reducing the scrap rate in the production process.
[0031] Therefore, by reducing the false alarm phenomenon and the product scrap rate, the embodiments of the present application not only help to ensure the continuity of the process, improve the production efficiency, but also can reduce the scrapped products, thereby reducing the waste of production materials and process flow, and help to enhance the economic benefits of production.
[0032] Additional advantages, objects, and features of the application will be apparent to those skilled in the art upon examination of the following specification. It is intended that the application not be limited by any of the details of the specification. Instead, the true scope of the application is to be determined by the following claims. BRIEF DESCRIPTION OF DRAWINGS
[0033] Other features, objects, and advantages of the application will become apparent to those skilled in the art from the following detailed description, when read in connection with the accompanying drawings.
[0034] Figure 1 is a structural block diagram of a vertical furnace control system provided by some embodiments of the application;
[0035] Figure 2 is a circuit schematic diagram of a conventional control system;
[0036] Figure 3 is a circuit schematic diagram of a vertical furnace control system provided by some embodiments of the application.
[0037] BRIEF DESCRIPTION OF DRAWINGS
[0038] 10, vertical furnace control system; 101, first output control module; 102, second output control module; 20, deposition system. DETAILED DESCRIPTION
[0039] For the purposes of this application, the following description will be made with reference to the accompanying drawings. The drawings illustrate embodiments of the application. However, the application can be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete. It will be apparent, however, to one of ordinary skill in the art that the application can be embodied in other forms without departing from the spirit or scope of the application.
[0040] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in the description of the application herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.
[0041] It will be understood that the terms "first", "second", etc. can be used herein to describe various elements, but the elements should not be limited by these terms. These terms are only used to distinguish one element from another. For example, a first output control module can be called a second output control module without departing from the scope of the application, and similarly, a second output control module can be called a first output control module. The first output control module and the second output control module are both output control modules, but they are not the same output control module.
[0042] It can be understood that, in the following embodiments, if the circuits, modules, units and the like connected to each other have the transmission of electrical signals or data, the connection should be understood as "electrically connected", "communicatively connected" and the like.
[0043] As used herein, the singular forms "a", "an" and "the" include plural referents unless the context clearly dictates otherwise. It will be further understood that the terms "comprises", "comprising", "includes" and / or "including", or the like, when used in this specification, specify the presence of stated features, integers, components, parts, or combinations thereof, but do not preclude the presence or addition of one or more other features, integers, components, parts, or combinations thereof.
[0044] During the process, the vertical furnace needs to accurately control the output of multiple gases to ensure the stable progress of the deposition process. Due to the complexity of the gas deposition process, any failure or abnormality of the output module during operation may cause the process to be interrupted or even terminated, thereby causing the product to be scrapped and causing great economic losses to the production.
[0045] Therefore, the present application aims to provide a solution to solve the above technical problems, which can reduce false alarm and product scrap rate, ensure the continuity of the process, improve production efficiency, reduce scrapped products, reduce waste of production materials and process flow, and enhance the economic benefits of production. The detailed content will be described in the subsequent embodiments.
[0046] Please refer to Figure 1 The present application provides a vertical furnace control system 10. The vertical furnace control system 10 can specifically include a first output control module 101, and a second output control module 102 connected in parallel with the first output control module 101.
[0047] As Figure 1 shown, the first output control module 101 can be used to receive an input instruction and control the vertical furnace control system 10 to output a processing signal according to the input instruction; since the second output control module 102 is connected in parallel with the first output control module 101, when the first output control module 101 fails, the second output control module 102 can receive the input instruction and control the vertical furnace control system 10 to output the processing signal according to the input instruction.
[0048] In the embodiment of the present application, since the first output control module 101 and the second output control module 102 are connected in parallel, when the first output control module 101 is working normally, the two can jointly perform output control to make the vertical furnace control system 10 output the processing signal. The parallel structure composed of the first output control module 101 and the second output control module 102 provides double protection for the vertical furnace control system 10. When one of the modules (for example, the first output control module 101) fails, the other module (for example, the second output control module 102) can still take over the control, ensuring that the processing signal output by the vertical furnace control system 10 will not be interrupted, so that the output processing signal is more reliable, which is conducive to improving the process stability of the vertical furnace and can reduce the false alarm phenomenon caused by the failure of the output control module.
[0049] Traditional control systems, for example Figure 2 , rely on a single output signal. Once the signal fails, the entire process will be interrupted, resulting in product scrap. In combination with Figure 2 and Figure 3 , the embodiment of the present application sets the second output control module 102 in parallel with the first output control module 101. Even if the first output control module 101 fails, the second output control module 102 can immediately take over the output of the processing signal, realizing automatic fault tolerance and redundancy protection, thereby reducing the waste caused by process interruption and significantly reducing the scrap rate in the production process.
[0050] Therefore, by reducing the false alarm phenomenon and the product scrap rate, the embodiment of the present application not only helps to ensure the continuity of the process and improve production efficiency, but also reduces scrap products, thereby reducing the waste of production materials and process flow, and helps to enhance the economic benefits of production.
[0051] Taking the process of preparing a polysilicon (Poly) layer as an example, in the process of preparing a polysilicon layer, silane (SiH4) gas and phosphorus doping gas, such as phosphine (PH3), need to be introduced. During the deposition process of preparing a polysilicon layer, if the first output control module 101 fails, the valve is closed and the gas flow is reduced, resulting in recipe abort. At this time, the product with part of the material deposited can only be scrapped, which further leads to a serious product accident.
[0052] Exemplarily, the first output control module 101 and the second output control module 102 can be phosphine (PH3) output control modules for controlling PH3 gas used in a deposition process, reducing gas flow fluctuations caused by failure of the first output control module 101 during PH3 output. Alternatively, the first output control module 101 and the second output control module 102 can also be silane (SiH4) output control modules for controlling SiH4 gas used in a deposition process, reducing gas flow fluctuations caused by failure of the first output control module 101 during SiH4 output. Thus, the vertical furnace control system 10 described above can effectively ensure the accuracy of the deposition process and product consistency.
[0053] Please continue to refer to Figure 3 In some embodiments, the first output control module 101 can specifically include a first PLC controller, and the second output control module 102 can specifically include a second PLC controller. By configuring the first output control module 101 and the second output control module 102 as independent PLC controllers, the redundancy and reliability of the vertical furnace control system 10 are enhanced.
[0054] In the vertical furnace control system 10 described above, each PLC controller can independently receive input instructions and generate processing signals, ensuring that when any one of the controllers fails, the other controller can immediately take over control, thereby achieving seamless switching, ensuring the continuity of the process, and avoiding production interruption caused by failure of a single PLC controller.
[0055] Please continue to refer to Figure 3 In some embodiments, according to the input instructions, the first to sixth output signals of the first PLC controller are valid, so that the first PLC controller outputs the processing signals; when the first output control module 101 fails, the first to sixth output signals of the second PLC controller are valid, so that the second PLC controller outputs the processing signals.
[0056] In the vertical furnace control system 10 described above, the first PLC controller and the second PLC controller control the output of the processing signals through their respective first to sixth output signals, further enhancing the stability and accuracy of the output of the processing signals. When the first PLC controller fails, the second PLC controller can immediately make its corresponding output signals valid, maintaining the continuous output of the processing signals. Such multi-output design can improve the anti-interference ability of the vertical furnace control system 10, alleviate fluctuations in the processing signals, and ensure the stability of the production process.
[0057] In some embodiments, the vertical furnace control system 10 can further be provided with a power module connected to the second output control module 102. The power module can be used to provide working power for the second output control module 102.
[0058] The vertical furnace control system 10 described above is configured with a separate power module for the second output control module 102, which ensures that the second output control module 102 can obtain stable power supply during the process, thereby further improving the response capability and stability of the second output control module 102 in the event of a fault.
[0059] For example, even if the external power supply fluctuates or fails, the power module can still provide reliable working power for the second output control module 102, preventing signal output interruption due to unstable working power, and thereby ensuring the process stability of the vertical furnace control system 10.
[0060] In some embodiments, the vertical furnace control system 10 can further be provided with an alarm module connected to the second output control module 102. When the second output control module 102 fails, the alarm module can immediately generate an alarm signal to prompt the operator to take timely intervention measures. In this way, it helps to improve the monitoring and self-checking capability of the vertical furnace control system 10, so that faults can be discovered and handled in time, reducing the potential process risk, thereby effectively reducing large-scale product scrapping due to failure to be discovered in time, further improving production safety and production efficiency.
[0061] It can be understood that each module in the foregoing vertical furnace control system 10 can be implemented wholly or partially by software, hardware, and combinations thereof. The foregoing modules can be embedded in or independent of the processor in the computer device in hardware form, or can be stored in the memory in the computer device in software form, so as to be called and executed by the processor to perform the operations corresponding to each module.
[0062] Based on the same inventive concept, the embodiments of the present application further provide a machine for preparing a semiconductor structure. The machine includes the vertical furnace control system 10 provided in any of the foregoing embodiments, and therefore, the machine can achieve the technical effects achieved by the vertical furnace control system 10, which will not be described in detail here.
[0063] Please continue to refer to Figure 3In some embodiments, the machine can further include a deposition system 20 connected to the vertical furnace control system 10. By connecting the deposition system 20 to the vertical furnace control system 10, the deposition system 20 can receive the processing signal output by the vertical furnace control system 10 and accurately perform the preset target deposition recipe on the target chip according to the processing signal, thereby stably transforming the target chip from a first chip state (e.g., before the deposition process) to a second chip state (e.g., after the deposition process).
[0064] For example, the deposition system 20 can include a phosphine output module connected to a phosphine output control module, for receiving the processing signal output by the phosphine output control module and controlling the output state of PH3 according to the processing signal. Alternatively, the deposition system 20 can further include a silane output module connected to a silane output control module, for receiving the processing signal output by the silane output control module and controlling the output state of SiH4 according to the processing signal.
[0065] The technical features of the above embodiments can be combined in any manner. For the sake of brevity, not all possible combinations of the technical features of the above embodiments are described, but it should be understood that any combination of the technical features is within the scope of the present disclosure as long as the combination does not result in contradictions.
[0066] The above embodiments only express several implementation manners of the present application, and the description is specific and detailed, but it should not be understood as a limitation on the patent scope of the present application. It should be noted that for those skilled in the art, several modifications and improvements can be made without departing from the concept of the present application, and these are within the protection scope of the present application. Therefore, the patent protection scope of the present application should be subject to the appended claims.
Claims
1. A vertical furnace control system, characterized by, The vertical furnace control system comprises: a first output control module and a second output control module; the first output control module is configured to receive an input instruction and control a processing signal output by the vertical furnace control system according to the input instruction; the second output control module is connected in parallel with the first output control module, and when the first output control module fails, the second output control module receives the input instruction and controls the processing signal output by the vertical furnace control system according to the input instruction.
2. The vertical furnace control system of claim 1, wherein, The vertical furnace control system further comprises a power supply module; the power supply module is connected with the second output control module and configured to provide working power for the second output control module.
3. The vertical furnace control system of claim 1, wherein, The vertical furnace control system further comprises an alarm module; the alarm module is connected with the second output control module, and when the second output control module fails, the alarm module generates an alarm signal.
4. The vertical furnace control system of claim 1, wherein, The first output control module comprises a first PLC controller, and the second output control module comprises a second PLC controller.
5. The vertical furnace control system of claim 4, wherein, The first PLC controller is configured to: according to the input instruction, the first to sixth output signals of the first PLC controller are valid, so that the first PLC controller outputs the processing signal; when the first output control module fails, the first to sixth output signals of the second PLC controller are valid, so that the second PLC controller outputs the processing signal.
6. The shaft furnace control system of any one of claims 1 to 5, wherein, The first output control module and the second output control module are both phosphine output control modules.
7. The shaft furnace control system of any one of claims 1 to 5, wherein, The first output control module and the second output control module are both silane output control modules.
8. A machine for producing a semiconductor structure, characterized in that it comprises: The machine table comprises the vertical furnace control system according to any one of claims 1 to 7.
9. The apparatus of claim 8, wherein the apparatus is configured to perform the following steps: The machine table further comprises: a deposition system connected with the vertical furnace control system, configured to receive a processing signal and execute a target deposition recipe on a target chip according to the processing signal, so as to change the target chip from a first chip state to a second chip state.
10. The apparatus of claim 9, wherein the apparatus is configured to perform the following steps: The first output control module and the second output control module are both phosphine output control modules. The deposition system comprises a phosphine output module connected with the phosphine output control module, configured to receive the processing signal output by the phosphine output control module and control the output state of phosphine according to the processing signal.
11. The apparatus of claim 9, wherein the apparatus is configured to perform the operations of: The first output control module and the second output control module are both silane output control modules. The deposition system comprises a silane output module connected with the silane output control module, configured to receive the processing signal output by the silane output control module and control the output state of silane according to the processing signal.