Multi-station chip surface detection device

Abstract

The utility model relates to the technical field of chip detection, and discloses a multi-station chip surface detection device which comprises a device body, a fixing column is fixedly arranged at the upper end in the device body, a sliding groove is formed in the lower end of the fixing column, and detection cameras are fixedly arranged on the two sides of the device body. Light supplementing lamps are fixedly arranged at the front ends and the rear ends of the two detection cameras correspondingly, a detection mechanism is arranged at the lower end in the device body and comprises a motor, a rotating disc is fixedly arranged at the output end of the motor, and a gear ring is fixedly arranged on the side, away from the motor, of the rear end of a fixing column; and a plurality of fixing blocks are fixedly arranged outside the rotating disc, and worms are rotationally arranged in the multiple fixing blocks. According to the utility model, when chips in the placing plates are detected, the detection mechanism can carry out comprehensive detection on the chips, and a plurality of chips equipped with the placing plates can be processed at the same time, so that the detection efficiency is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to chip detection technical field especially relates to a multi -station chip surface detection device. BACKGROUND

[0002] Chip is a kind of micro electronic circuit, also called integrated circuit, it integrates a large number of micro electronic components, such as transistor, resistance and capacitance etc. on single semiconductor substrate, it is indispensable part of computer and other electronic equipment, in the semiconductor manufacturing and quality control process, chip surface detection device is often installed in the quality detection department of semiconductor manufacturing enterprise, as the key link of production line rear end, ensure that each batch of chip that leaves factory meets strict quality standard.

[0003] The existing chip surface detection device mostly can only detect the single surface of chip, after completing the detection of one side of chip, detection personnel have to manually carry out the disassembly and assembly operation of chip to detect the other side, this method not only reduces the overall detection efficiency, but also increases the work burden and labor intensity of detection personnel, unnecessary complexity and time consumption are brought to detection process.

[0004] Therefore, the person skilled in the art provides a multi-station chip surface detection device to solve the problems in the background art. CONTENT OF UTILITY MODEL

[0005] The utility model aims at solving the shortcomings in the prior art and provides a multi-station chip surface detection device, which realizes comprehensive detection of chips through a detection mechanism.

[0006] To achieve the above object, the utility model provides the following technical scheme.

[0007] A multi-station chip surface detection device, comprising a device main body, a fixed column is fixedly arranged at the upper end inside the device main body, a sliding groove is arranged at the lower end of the fixed column, detection cameras are fixedly arranged on both sides of the device main body, and light supplementing lamps are fixedly arranged at the front and rear ends of the two detection cameras.

[0008] A detection mechanism is arranged at the lower end inside the device main body, the detection mechanism comprises a motor, a turntable is fixedly arranged at the output end of the motor, a gear ring is fixedly arranged at the side of the rear end of the fixed column away from the motor, a plurality of fixed blocks are fixedly arranged outside the turntable, a worm is rotatably arranged inside each of the plurality of fixed blocks, a gear is fixedly arranged at the upper end of each of the plurality of worms, a rotating shaft is rotatably arranged inside each of the plurality of fixed blocks, and rotating plates are fixedly arranged at the opposite sides of each of the plurality of rotating shafts.

[0009] Further, the upper end of the rotating disc is rotationally arranged at the lower end of the fixed column, and the motor is externally fixed at the lower end of the device body.

[0010] Further, the plurality of worm gears are externally fixed at the side close to the motor, and the plurality of worm gears are externally meshed with the plurality of worm shafts.

[0011] Further, the plurality of electric telescopic rods are internally fixed at the rotating plates, and the plurality of rotating blocks are rotationally arranged at the two sides of the output ends of the electric telescopic rods.

[0012] Further, the plurality of clamping plates are arranged with the plurality of placement plates, and the plurality of second transparent plates are arranged at the upper ends of the plurality of placement plates.

[0013] Further, the plurality of worm gears are externally fixed at the side close to the motor, and the plurality of worm gears are externally meshed with the plurality of worm shafts.

[0014] Further, the device body is hingedly arranged with two cabinet doors at the front end, and the two cabinet doors are fixedly arranged with handles at the front ends.

[0015] The utility model has the advantages of the following beneficial effects:

[0016] 1. The multi-station chip surface detection device disclosed by the utility model, in the operation process, the electric telescopic rod is used to make the clamping plates close to each other, so that the placement plate is fixed, then the motor is started to drive the rotating disc to rotate, the movement of the rotating disc is transmitted to the fixed block, so that the fixed block rotates, and the rotating plate and the placement plate rotate together, when the placement plate rotates to one side of the device body, the detection camera starts to detect the chip in the placement plate, then the rotating disc continues to rotate, so that the placement plate reaches the rear end of the device body, at this time, the gear meshes with the gear ring, so that the gear and the worm rotate, and the worm drives the worm shaft to rotate, and the rotation of the worm shaft turns over the rotating plate, so that the automatic turning operation of the placement plate is completed, the manual intervention is reduced, and the detection efficiency is improved.

[0017] 2. The multi-station chip surface detection device disclosed by the utility model, when the placement plate is turned over, the rotating disc continues to rotate, so that the placement plate moves to the other side of the device body, and the detection camera on the side detects the turned-over chip, so that the comprehensiveness and accuracy of the detection process are ensured, and the detection efficiency is improved, when the placement plate returns to the initial position, the output end of the electric telescopic rod is extended, at this time, the clamping plates move in the opposite direction, so that the next round of detection is prepared, not only the continuity of the detection process is ensured, but also the detection efficiency is improved, so that the whole detection process is smooth and efficient. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 is the overall axial schematic view of the utility model;

[0019] Figure 2 is the axial schematic view of the utility model's front section;

[0020] Figure 3 is the axial schematic view of the utility model's fixed column's bottom section;

[0021] Figure 4 is the axial schematic view of the utility model's detection mechanism's front view;

[0022] Figure 5 is the axial schematic view of the utility model's partial bottom view close to the gear ring;

[0023] Figure 6 is the axial schematic view of the utility model's fixed column's bottom section;

[0024] Figure 7 is the axial schematic view of the utility model's fixed column's bottom section;

[0025] Legend:

[0026] 1, device main body;2, control panel;3, detection mechanism;4, placement plate;5, cabinet door;6, handle;7, fixed column;8, detection camera;9, light supplement lamp;10, sliding slot;301, rotating disc;302, motor;303, clamping plate;304, rotating plate;305, worm;306, gear ring;307, fixed block;308, gear;309, worm wheel;310, rotating shaft;311, electric telescopic rod;312, rotating block;401, first transparent plate;402, second transparent plate. DETAILED DESCRIPTION

[0027] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model.

[0028] With reference to Figures 1-4 , the utility model provides an embodiment:

[0029] The utility model provides a multi -position chip surface detection device, including device main part 1, fixedly installed with fixed column 7 in device main part 1 inside upper end, the lower end of fixed column 7 is opened with sliding slot 10, both sides of device main part 1 are fixedly installed with detection camera 8, and both ends of two detection cameras 8 are fixedly installed with fill light 9, and device main part 1 front end is hingedly arranged with two cabinet doors 5, and both ends of two cabinet doors 5 are fixedly installed with handle 6, and one side of device main part 1 is fixedly installed with control panel 2;

[0030] Specifically, when the chip-equipped placement plate 4 passes through the detection camera 8, the detection camera 8 and the fill light 9 will detect the chip and collect images, thereby completing the detection of the chip surface. The detection camera 8 and the fill light 9 can ensure that clear chip surface images are obtained under various lighting conditions, improving the detection accuracy. The control panel 2 on one side of the device main body 1 makes the operation process simple and intuitive, reducing the operation difficulty. The cabinet door 5 and the handle 6 facilitate the retrieval of the completed placement plate 4, and the operation is convenient. When the rotating disc 301 rotates, the worm 305 inside the fixed block 307 will slide inside the sliding slot 10, thereby ensuring the stability and reliability during the detection process.

[0031] Referring to Figures 1-7 , the detection mechanism 3 is arranged at the lower end of the device main body 1. The detection mechanism 3 includes a motor 302, a rotating disc 301 fixedly arranged at the output end of the motor 302, a gear ring 306 fixedly arranged at the side of the motor 302 away from the rotating disc 301, a plurality of fixed blocks 307 fixedly arranged at the outside of the rotating disc 301, a worm 305 rotatably arranged inside each of the fixed blocks 307, a gear 308 fixedly arranged at the upper end of each of the worms 305, a rotating shaft 310 rotatably arranged inside each of the fixed blocks 307, a rotating plate 304 fixedly arranged at the side of each of the rotating shafts 310 opposite to each other, the rotating disc 301 rotatably arranged at the lower end of the fixed column 7, the motor 302 fixedly arranged at the lower end of the device main body 1, a worm gear 309 fixedly arranged at the side of each of the rotating shafts 310 close to the motor 302, the worm gears 309 meshingly connected to the outside of the worms 305, an electric telescopic rod 311 fixedly arranged inside each of the rotating plates 304, a rotating block 312 rotatably arranged at the output end of each of the electric telescopic rods 311, a clamping plate 303 rotatably arranged at the front end of each of the rotating blocks 312, a placement plate 4 arranged between each of the clamping plates 303, the placement plate 4 including a plurality of second transparent plates 402, a first transparent plate 401 hingedly arranged at the upper end of each of the second transparent plates 402, the upper end of each of the worms 305 slidingly arranged inside the sliding slot 10, and one of the gears 308 meshingly connected to the rear end of the gear ring 306.

[0032] Specifically, in use, by making the output end of the electric telescopic rod 311 retract, the rotating block 312 is driven to rotate inside the rotating plate 304, and the clamping plate 303 is driven to move towards the inside of the rotating plate 304, thereby achieving clamping of the placement plate 4, so that the device can adapt to placement plates 4 of different sizes, increasing the application range of the detection device, and the placement plate 4 is composed of a first transparent plate 401 and a second transparent plate 402, ensuring that the light of the detection camera 8 can penetrate, so as to facilitate the detection camera 8 to detect the chip inside, then, by starting the motor 302 inside the device main body 1, the turntable 301 at the output end thereof is rotated, the rotation of the turntable 301 will drive the fixed block 307 outside to rotate inside the device main body 1, when the fixed block 307 rotates, the rotating plate 304 and the placement plate 4 will be synchronously rotated, when the placement plate 4 is rotated to the appropriate set position, the detection camera 8 on one side of the device main body 1 will detect the surface of the chip inside the placement plate 4, then the placement plate 4 will be continuously driven to rotate, when the gear 308 at the upper end of the worm 305 and the gear ring 306 at the rear end of the fixed column 7 are disengaged, the gear 308 will drive the worm 305 to rotate, since the worm wheel 309 is meshed and connected with the worm 305, the worm wheel 309 drives the rotating shaft 310 to rotate, the rotation of the rotating shaft 310 will drive the rotating plate 304 fixedly connected thereto to rotate, thereby driving the rotating plate 304 to rotate, causing the placement plate 4 to automatically turn over, then the turntable 301 continues to rotate, when the placement plate 4 is rotated to the appropriate position, the detection camera 8 on the other side of the device main body 1 will detect the chip inside the placement plate 4, when the placement plate 4 is rotated to the original position, by starting the electric telescopic rod 311, the output end thereof is extended, thereby driving the clamping plate 303 to move in the opposite direction, then the placement plate 4 after detection is taken out, thereby completing the entire detection process, a plurality of fixed blocks 307 and rotating plates 304 allow a plurality of chips with placement plates 4 to be detected at the same time, improving the detection efficiency, and the entire operation process is simple.

[0033] Working principle: in the operation process, first make the output end of the electric telescopic rod 311 retract, promote the rotation of the rotating block 312, drive the clamping plate 303 to move towards each other, realize the stable clamping of the placement plate 4, then activate the motor 302 to promote the rotation of the rotating disc 301, the rotating disc 301 drives the fixed block 307 to rotate, and then makes the rotating plate 304 and the placement plate 4 rotate, when the placement plate 4 is rotated to one side inside the device body 1, the detection camera 8 will detect the surface of the chip inside the placement plate 4, with the continuous rotation of the rotating disc 301, the placement plate 4 is also continuously driven to rotate, when the placement plate 4 is driven to rotate to the rear end of the device body 1, the gear 308 on the upper end of the worm 305 meshes with the gear ring 306 at the rear end of the fixed column 7, and then the gear 308 rotates and drives the worm 305 to rotate, causing the worm wheel 309 connected with the worm 305 to drive the rotating shaft 310 to rotate synchronously, the rotation of the rotating shaft 310 makes the rotating plate 304 connected with it overturn, and then the placement plate 4 is turned over, then the rotating disc 301 continues to rotate, when the placement plate 4 is rotated to the other side of the device body 1 again, the detection camera 8 on the other side will detect the chip after turning over, ensuring the comprehensiveness and accuracy of detection, and improving the detection efficiency, finally, when the placement plate 4 is rotated back to the original position, the electric telescopic rod 311 is started again and its output end is extended, the rotating block 312 will drive the clamping plate 303 to move in the opposite direction, fully preparing for the next detection, the inside of the device body 1 can process multiple chips at the same time due to multiple stations, improving the detection efficiency.

[0034] Finally, it should be noted that: the above only for preferred embodiments of the present application, and not for limiting the present application, although the foregoing detailed description of the present application, for those skilled in the art, it still can be modified, or part of the technical features of the equivalent replacement, within the spirit and principles of the present application, any modification, equivalent replacement, improvement, etc., should be included in the scope of protection of the present application.

Claims

1. A multi-station chip surface inspection device, comprising a device body (1), characterized in that: A fixed column (7) is fixedly installed at the upper end of the main body (1) of the device. A sliding groove (10) is opened at the lower end of the fixed column (7). Detection cameras (8) are fixedly installed on both sides of the main body (1). Fill lights (9) are fixedly installed at both ends of the two detection cameras (8). The device body (1) has a detection mechanism (3) at its lower end. The detection mechanism (3) includes a motor (302). A turntable (301) is fixedly installed at the output end of the motor (302). A gear ring (306) is fixedly installed on the side of the fixed column (7) that is close to the motor (302). Multiple fixed blocks (307) are fixedly installed on the outside of the turntable (301). A worm gear (305) is rotatably installed inside each of the multiple fixed blocks (307). A gear (308) is fixedly installed at the upper end of each of the multiple worm gears (305). A rotating shaft (310) is rotatably installed inside each of the multiple fixed blocks (307). A rotating plate (304) is fixedly installed on each opposite side of each of the multiple rotating shafts (310).

2. The multi-station chip surface inspection device according to claim 1, characterized in that: The upper end of the turntable (301) is rotatably mounted on the lower end of the fixed column (7), and the motor (302) is externally fixedly mounted on the lower end of the device body (1).

3. The multi-station chip surface inspection device according to claim 1, characterized in that: A worm gear (309) is fixedly provided on the side of the multiple rotating shafts (310) near the motor (302), and the multiple worm gears (309) are respectively meshed with the outside of multiple worms (305).

4. The multi-station chip surface inspection device according to claim 1, characterized in that: Each of the multiple rotating plates (304) is fixedly provided with an electric telescopic rod (311), and each of the multiple electric telescopic rods (311) is rotatably provided with a rotating block (312) on both sides of the output end, and each of the multiple rotating blocks (312) is rotatably provided with a clamping plate (303) at the front end.

5. The multi-station chip surface inspection device according to claim 4, characterized in that: Each of the plurality of clamping plates (303) is provided with a placement plate (4) between each pair of the plurality of placement plates (4), and the plurality of placement plates (4) include a plurality of second transparent plates (402), and a first transparent plate (401) is hinged to the upper end of each of the plurality of second transparent plates (402).

6. The multi-station chip surface inspection device according to claim 1, characterized in that: The upper ends of the multiple worm gears (305) are slidably disposed inside the slide groove (10), and one of the multiple gears (308) is meshed with the rear end of the gear ring (306).

7. The multi-station chip surface inspection device according to claim 1, characterized in that: The device body (1) has two cabinet doors (5) hinged at the front end, and each cabinet door (5) has a handle (6) fixedly installed at the front end. The device body (1) has a control panel (2) fixedly installed on one side.

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