Ultra-precise flow measurement control system

Abstract

The utility model discloses an ultra-precise flow measurement control system which comprises a gas transmission container, a first flow controller connected with the gas transmission container and a flow detector connected with a second gas outlet connector of the first flow controller, and the flow detector is connected with a second flow controller through a second gas inlet connector. A density stabilizer is connected behind the second flow controller, and an air outlet pipe is connected behind the density stabilizer; the flow, the pressure and the density of the whole gas path are stabilized in a set value range through the mass flow meter and the density stabilizer, so that the test requirements of the ultra-light elements are ensured.

Description

TECHNICAL FIELD

[0001] The utility model relates to high -power wavelength dispersion X fluorescence spectrometer field, specifically is a kind of ultra-precision gas flow measurement control system. BACKGROUND

[0002] In prior art, high-power wavelength dispersion X fluorescence spectrometer measures ultra-light element and needs to use flow gas detector, one of the key elements of flow gas detector, P10 gas is transported into ionization chamber of flow gas detector by a set of flow gas control system, when X-ray enters ionization chamber, avalanche ionization of gas atom is caused, thereby generating pulse signal. In order to ensure measurement quality, gas must maintain stable flow state, current flow gas control can meet the test of ordinary heavy element, when ultra-light element needs to be tested, existing equipment cannot meet the corresponding requirement. SUMMARY

[0003] Therefore, the present application mainly aims at overcoming at least one of the above-mentioned defects in the prior art when testing ultra-light elements.

[0004] The utility model provides a kind of ultra-precision gas flow measurement control system, including gas container, with the first flow controller being connected with the gas container, with the second flow controller being connected with the second gas outlet interface of the first flow controller, the gas flow detector is connected with the second flow controller by the second gas inlet interface behind the gas flow detector, the density stabilizer is connected behind the second flow controller, the gas outlet pipe is connected behind the density stabilizer, wherein gas container and gas flow detector belong to external equipment, it is contacted with other equipment by first gas inlet joint, second gas inlet joint and first gas outlet joint, second gas outlet joint, as shown in Figure 1 .

[0005] According to the background art of the present application, the current flow gas control can meet the test of ordinary heavy element, when ultra-light element needs to be tested, the existing equipment cannot meet the corresponding requirement;And the ultra-precision gas flow measurement control system disclosed by the utility model can ensure the high-precision stability of gas flow by the combination of multiple pressure reducing valves, flow controllers and density stabilizers, so as to realize the detection of ultra-light elements. Specifically, the gas pressure is first reduced to the appropriate range by primary and secondary pressure reducing valves, then the impurities in the gas are filtered by filter, and then one end of the tee is connected with pressure sensor to monitor the pressure fluctuation in real time. The flow, pressure and density of the entire gas circuit are stabilized within the set value range by mass flow meter and density stabilizer, so as to meet the testing requirements of ultra-light elements.

[0006] In addition, the ultra-precision gas flow measurement control system disclosed by the utility model also has the following additional technical features:

[0007] Further, the gas supply container is connected to a primary pressure reducing valve, the primary pressure reducing valve is connected to a filter through a first gas inlet, the filter is connected to a secondary pressure reducing valve, the secondary pressure reducing valve is connected to the first flow controller, and the gas supply container is connected to the primary pressure reducing valve through a first gas inlet.

[0008] Further, a pressure gauge is arranged between the secondary pressure reducing valve and the first flow controller, a three-way component is arranged at the rear side of the first flow controller, one branch of the three-way component is connected to the first flow controller, one branch is connected to the pressure gauge, and one branch is connected to a rear side output to a gas flow detector.

[0009] Further, the first flow controller is a proportional regulating valve.

[0010] Further, the second flow controller is a throttle valve or a mass flow meter or a combination of both.

[0011] Further, when the second flow controller is a combination of a throttle valve and a mass flow meter, the throttle valve / mass flow meter is connected to a second gas inlet at the front side, connected to an electronic flow meter for displaying flow at the rear side, and the electronic flow meter is connected to a density stabilizer at the rear side.

[0012] Further, the density stabilizer comprises a shell with a cavity, an internal contraction container, an electromagnetic adjusting piece connected to the outside of the contraction container, the volume of the contraction container is controlled by adjusting the front and rear positions of the electromagnetic adjusting piece, the gas flow enters the contraction container from the gas inlet, the electromagnetic adjusting piece is arranged at the gas outlet side, the volume of the contraction container is adjusted by moving the electromagnetic adjusting piece forward and backward, so as to adjust the gas flow density, the detection component detects the current volume change or the front and rear positions of the electromagnetic adjusting piece, the volume of the contraction container is changed by adjusting the forward and backward moving distance of the electromagnetic adjusting piece, thereby realizing the control of the flow stability, and the contraction container can be a structure like a cylinder with a piston.

[0013] Further, the first flow controller, the second flow controller and the density stabilizer are all one-way components, and the throttle valve, the mass flow meter, the primary pressure reducing valve, the secondary pressure reducing valve and the like are preferably one-way components.

[0014] The additional aspects and advantages of the utility model will be partially given in the following description, partially will become obvious from the following description, or will be understood by the practice of the utility model. BRIEF DESCRIPTION OF DRAWINGS

[0015] The above and / or additional aspects and advantages of the utility model will become apparent and more readily appreciated from the following description of the embodiments, with reference to the following drawings, in which:

[0016] Figure 1It is a structure schematic view of the super-precision flow gas measurement control system in the embodiment of the utility model;

[0017] Among them, 1. primary pressure reducing valve, 2. first gas inlet joint, 3. filter, 4. secondary pressure reducing valve, 5. air pressure gauge, 6. proportional regulating valve, 7. pressure gauge, 8. three-way valve, 9. detector, 10. second gas outlet joint, 11. second gas inlet joint, 12. throttle valve, 13. float flowmeter, 14. electronic flowmeter, 15. density stabilizer, 16. first gas outlet joint, the arrow in the drawing is the flow direction. DETAILED DESCRIPTION

[0018] The embodiments of the utility model will be described in detail below, and the examples of the embodiments are shown in the drawings, wherein the same or similar reference signs represent the same or similar elements or elements with the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary and are only used to explain the utility model, and cannot be interpreted as a limitation on the utility model.

[0019] In the description of the utility model, it is understood that the terms "upper", "lower", "bottom", "top", "front", "rear", "inner", "outer", "horizontal", "vertical" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the utility model and simplifying the description, and therefore cannot be understood as a limitation on the utility model.

[0020] In the description of the utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "coupling", "communication", "connection", "connection", "cooperation" should be broadly understood, for example, it can be fixedly connected, integrally connected, or detachably connected, it can be the communication inside two elements, it can be directly connected, or indirectly connected through an intermediate medium, "cooperation" can be the cooperation of surfaces, or the cooperation of points and surfaces or lines and surfaces, and also includes the cooperation of holes and shafts, and those skilled in the art can understand the specific meaning of the above terms in the utility model according to the specific circumstances.

[0021] The utility model has the utility model concept as follows, first, through the primary and secondary pressure reducing valve, the gas pressure is reduced to the appropriate interval, then the impurities in the gas are filtered through the filter, then through the three-way valve, one end of which is connected with the pressure sensor to monitor the pressure fluctuation in real time, the flow, pressure and density of the whole gas circuit are stabilized in the set value range through the mass flowmeter and the density stabilizer, and the testing requirements of the ultra-light elements are ensured.

[0022] A super-precision flow gas measurement control system of the utility model will be described below with reference to the drawings, whereinFigure 1 is a structure schematic diagram of a super-precision gas flow measurement control system in the embodiment of the present application.

[0023] As Figure 1 shown, according to the embodiment of the present application, it comprises a gas delivery container, a first flow controller connected with the gas delivery container, a gas flow detector connected with the second gas outlet interface of the first flow controller, the gas flow detector is connected with the second flow controller through the second gas inlet interface, the second flow controller is connected with the density stabilizer, and the density stabilizer is connected with the gas outlet pipe.

[0024] According to the embodiment of the present application, the gas delivery container is connected with a primary pressure reducing valve, the primary pressure reducing valve is connected with a filter through the first gas inlet interface, the filter is connected with a secondary pressure reducing valve, and the secondary pressure reducing valve is connected with the first flow controller.

[0025] According to the embodiment of the present application, a pressure gauge is arranged between the secondary pressure reducing valve and the first flow controller, a three-way component is arranged at the rear side of the first flow controller, one way is connected with the first flow controller, one way is connected with a pressure gauge, and one way is connected with the rear side output to the gas flow detector, and the first flow controller is a proportional regulating valve.

[0026] According to the embodiment of the present application, the second flow controller is a throttle valve or a mass flow meter or a combination of both.

[0027] According to the embodiment of the present application, when the second flow controller is combined with the mass flow meter, the front side of the throttle valve / mass flow meter is connected with the second gas inlet interface, the rear side is connected with an electronic flow meter for displaying flow, and the rear side of the electronic flow meter is connected with the density stabilizer.

[0028] According to the embodiment of the present application, the density stabilizer comprises a shell with a cavity, an internal contraction container, an electromagnetic adjusting sheet connected with the outside of the contraction container, the volume of the contraction container is controlled by adjusting the front and rear positions of the electromagnetic adjusting sheet, the density control is realized, the airflow enters the contraction container from the gas inlet, the electromagnetic adjusting sheet is arranged on the gas outlet side, the volume of the contraction container can be adjusted by moving the electromagnetic adjusting sheet forward and backward, so that the airflow density is adjusted, the detection component detects the current volume change or the front and rear positions of the electromagnetic adjusting sheet, the volume change of the contraction container is realized by adjusting the forward and backward moving distance of the electromagnetic adjusting sheet, and the control of the flow stability is realized, and the contraction container can be a structure like a cylinder with a piston.

[0029] According to the embodiment of the present application, the first flow controller, the second flow controller and the density stabilizer are all one-way components.

[0030] Any reference to "one embodiment," "an embodiment," "certain embodiments," etc. means that a particular element, structure, or characteristic described in connection with the embodiment is included in at least one embodiment of the application. The appearances of the phrase "in one embodiment" or "in an embodiment" in various places in the specification are not necessarily referring to the same embodiment. Further, when a particular element, structure, or characteristic is described in connection with any embodiment, it is submitted that it is within the purview of one of ordinary skill in the art to effect such element, structure, or characteristic in connection with other

[0031] While the application has been particularly shown and described with reference to particular embodiments thereof, it will be understood by those skilled in the art that various changes in the details of the embodiments of the application can be made. For example, it will be understood that various elements described herein can be implemented in hardware, software, or a combination thereof. In addition, it will be understood that various modifications can be made to the embodiments of the application described herein, including the combination of elements from different embodiments, without departing from the spirit of the application. For example, it will be understood that elements described herein can be implemented in hardware, software, or a combination thereof. In addition, it will be understood that various modifications can be made to the embodiments of the application described herein, including the combination of elements from different embodiments, without departing from the spirit of the application.

Claims

1. An ultra-precise flow gas measurement control system, characterized by , including a gas supply container, a first flow controller connected to the gas supply container, a gas flow detector connected to the second gas outlet interface of the first flow controller, the gas flow detector connected to a second flow controller through a second gas inlet interface, the second flow controller connected to a density stabilizer, and the density stabilizer connected to a gas outlet pipe.

2. The ultra-precise flow rate measurement control system of claim 1, wherein, The gas supply container is connected to a primary pressure reducing valve, the primary pressure reducing valve connected to a filter through a first gas inlet interface, the filter connected to a secondary pressure reducing valve, and the secondary pressure reducing valve connected to the first flow controller.

3. The ultra-precise flow rate measurement control system of claim 2, wherein, A gas pressure gauge is arranged between the secondary pressure reducing valve and the first flow controller, a three-way component is arranged at the rear side of the first flow controller, one way connected to the first flow controller, one way connected to a pressure gauge, and one way connected to the rear side output to the gas flow detector.

4. The ultra-precise flow rate measurement control system according to any one of claims 1, 2, 3, characterized in that, The first flow controller is a proportional regulating valve.

5. The ultra-precise flow rate measurement control system of claim 1, wherein, The second flow controller is a throttle valve or a mass flow meter or a combination of both.

6. The ultra-precise flow rate measurement control system of claim 5, wherein, When the second flow controller is a combination of a throttle valve and a mass flow meter, the throttle valve / mass flow meter is connected to the second gas inlet interface at the front side, connected to an electronic flow meter displaying flow rate at the rear side, and the electronic flow meter is connected to the density stabilizer at the rear side.

7. The ultra-precise flow rate measurement control system of claim 1, wherein, The density stabilizer includes a shell with a cavity, an internal shrinkable container, and an electromagnetic adjusting piece connected to the outside of the shrinkable container to control the volume change of the shrinkable container and achieve density control.

8. The ultra-precise flow rate measurement control system of claim 1, wherein, The first flow controller, the second flow controller, and the density stabilizer are all one-way components.

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