Rotary adsorption carrying platform compatible with 2-8-inch steel ring

Abstract

The utility model relates to a rotary adsorption platform deck compatible with 2-8 inch steel rings, which is characterized in that a rotary DD motor mounted on a DD motor bottom plate drives a product adsorption lower jig plate above the rotary DD motor to rotate through a DD motor upper adapter plate, and a product adsorption upper jig plate is mounted on the product adsorption lower jig plate; the first adsorption cavity and the first adsorption sealing plate jointly form a first adsorption area, the second adsorption cavity and the second adsorption sealing plate jointly form a second adsorption area, and the multiple suction cups jointly form a third adsorption area. The utility model can be compatible with bare wafers in any shape within 2-8 inches, even various square ceramics, and can also be compatible with 8-inch wafer band steel rings.

Description

Technical Field

[0001] This utility model relates to the technical field of semiconductor wafer processing, and in particular to a rotary adsorption stage compatible with 2-8 inch steel rings. Background Technology

[0002] Silicon and silicon carbide are raw materials for manufacturing semiconductor silicon devices and can be used in wafer fabrication, making them pillars of the modern information technology industry. Furthermore, they are environmentally friendly and have a very broad future prospect, making wafer fabrication a popular sector within the semiconductor industry. With the continuous development and innovation of semiconductor technology, customer demands for individual machines are becoming more diversified. This patent can be used to adsorb silicon wafers and silicon carbide to meet micro-machining needs such as irregular cutting and drilling.

[0003] Extensive searching revealed a Chinese patent publication number, CN217444361U, which discloses a quartz rotary adsorption stage. From top to bottom, it includes a grooved quartz carrier disk, a quartz mounting plate, a stage base, a rotary motor, and a rotary shaft pad. The rotary motor is mounted in the center of the rotary shaft pad, and its top drive end is connected to the stage base. The quartz mounting plate is mounted on the stage base, and the grooved quartz carrier disk is mounted on the inner top of the mounting plate. Several suction cup supports are evenly mounted along the circumference of the stage base, and suction cups are mounted on the supports. This invention provides a stage for adsorbing and fixing processed products in wafer dicing equipment, solving the problem of adsorption flatness. It provides firm and uniform adsorption force, while also providing an illumination source. Backlighting combined with image processing improves positioning accuracy, and the rotary shaft combined with a grating ruler system significantly enhances positioning precision.

[0004] In summary, the problems with the existing technology are as follows:

[0005] Wafer adsorption technology is a seemingly insignificant but crucial step. Whether it's etching, deposition, or photolithography, the wafer must be stably and precisely fixed in the correct position to ensure efficient chip production. With today's diverse prototyping process requirements, customers often want to verify the process requirements of different wafer sizes on the same equipment, or even verify the process of non-standard wafers. However, our typical adsorption stages are only compatible with fixed-size wafers, such as 4-inch, 6-inch, and 8-inch wafers. If they also need to be compatible with other non-standard products such as 2-inch square, 3-inch square, and 4-inch square wafers, general stages will not be able to adsorb them.

[0006] In view of the above-mentioned shortcomings, the designer actively researched and innovated in order to create a rotating adsorption platform compatible with 2-8 inch steel rings, making it more valuable for industrial applications. Utility Model Content

[0007] To solve any of the above-mentioned technical problems, the purpose of this utility model is to provide a rotary adsorption platform compatible with 2-8 inch steel rings.

[0008] To achieve the above objectives, the present invention adopts the following technical solution:

[0009] The rotary adsorption platform, compatible with 2-8 inch steel rings, consists of a DD motor base plate, a rotary DD motor, a lower product adsorption fixture plate, and an upper product adsorption fixture plate, arranged from bottom to top. The rotary DD motor, mounted on the DD motor base plate, drives the upper lower product adsorption fixture plate to rotate via an upper DD motor adapter plate. The upper product adsorption fixture plate is mounted on the lower product adsorption fixture plate. Several suction cups are evenly distributed along the circumference on the outer side of the upper product adsorption fixture plate, and the suction cups are mounted on the lower product adsorption fixture plate via suction cup mounting brackets.

[0010] The bottom surface of the upper fixture plate for product adsorption is provided with a first adsorption cavity and a second adsorption cavity from the inside to the outside. The top surface of the lower fixture plate for product adsorption is provided with a first adsorption sealing plate and a second adsorption sealing plate from the inside to the outside. The first adsorption cavity and the first adsorption sealing plate together constitute the first adsorption area. The second adsorption cavity and the second adsorption sealing plate together constitute the second adsorption area. Several suction cups together constitute the third adsorption area.

[0011] As a further improvement of this utility model, a right sensor is installed on the right side of the DD motor base plate via a right sensor mounting bracket, and a left sensor is installed on the left side of the DD motor base plate via a left sensor mounting bracket. A sensing plate is installed on the adapter plate of the DD motor.

[0012] As a further improvement of this utility model, a control valve is installed on one side of the product adsorption fixture plate via a control valve mounting bracket.

[0013] As a further improvement of this utility model, the control valve is a manual valve or an electric valve.

[0014] As a further improvement of this utility model, a pipe rack is installed on the rotating DD motor on the outer side below the product adsorption fixture plate, and a pipe is installed inside the pipe rack. The pipe connector on one side of the pipe is installed on the pipe rack through the pipe rack fixing plate.

[0015] As a further improvement of this utility model, a number of pipe limiting posts for limiting the pipe arrangement are also provided inside the pipe fixing frame.

[0016] As a further improvement of this utility model, the top surface of the product adsorption fixture plate is provided with a first mark and a second mark from the inside to the outside.

[0017] By means of the above solution, this utility model has at least the following advantages:

[0018] This invention is compatible with bare wafers of any shape (including fragments) ranging from 2 to 8 inches, and even various square ceramic wafers. It is also compatible with 8-inch wafers with steel rings.

[0019] The above description is only an overview of the technical solution of this utility model. In order to better understand the technical means of this utility model and to implement it in accordance with the contents of the specification, the preferred embodiments of this utility model are described in detail below with reference to the accompanying drawings. Attached Figure Description

[0020] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This is a schematic diagram of the structure of a rotating adsorption platform compatible with 2-8 inch steel rings according to this utility model;

[0022] Figure 2 yes Figure 1 A schematic diagram of the structure of the bottom surface of the adsorption fixture plate for the product;

[0023] Figure 3 yes Figure 1 A schematic diagram of the structure of the top surface of the fixture plate for product adsorption.

[0024] The meanings of the labels in the figures are as follows.

[0025] DD motor base plate 1, Rotary DD motor 2, DD motor upper adapter plate 3, Product adsorption lower fixture plate 4, Product adsorption upper fixture plate 5, Right sensor mounting bracket 6, Right sensor 7, Sensing plate 8, Left sensor mounting bracket 9, Left sensor 10, Control valve mounting bracket 11, Control valve 12, Suction cup 13, Suction cup mounting bracket 14, Pipe fixing bracket 15, Pipe 16, Pipe limiting post 17, Pipe fixing plate 18, Pipe connector 19, First mark 20, Second mark 21, First adsorption chamber 22, Second adsorption chamber 23, First adsorption sealing plate 24, Second adsorption sealing plate 25. Detailed Implementation

[0026] The specific embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate this utility model, but are not intended to limit its scope.

[0027] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of them. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0028] like Figures 1-3 As shown, a rotary adsorption platform compatible with 2-8 inch steel rings includes, from bottom to top, a DD motor base plate 1, a rotary DD motor 2, a lower product adsorption fixture plate 4, and an upper product adsorption fixture plate 5. The rotary DD motor 2, mounted on the DD motor base plate 1, drives the upper lower product adsorption fixture plate 4 to rotate via a DD motor upper adapter plate 3. The upper product adsorption fixture plate 5 is mounted on the lower product adsorption fixture plate 4. Several suction cups 13 are evenly distributed along the circumference on the outer side of the upper product adsorption fixture plate 5. The suction cups 13 are mounted on the lower product adsorption fixture plate 4 via suction cup mounting brackets 14. The vacuum suction cups have external threads and sealing rings, and are directly fixed to the suction cup mounting brackets to ensure no air leakage.

[0029] The bottom surface of the upper jig plate 5 for product adsorption has a first adsorption cavity 22 and a second adsorption cavity 23 arranged sequentially from the inside to the outside. The top surface of the lower jig plate 4 for product adsorption has a first adsorption sealing plate 24 and a second adsorption sealing plate 25 arranged sequentially from the inside to the outside. The first adsorption cavity 22 and the first adsorption sealing plate 24 together constitute the first adsorption area, the second adsorption cavity 23 and the second adsorption sealing plate 25 together constitute the second adsorption area, and several suction cups 13 together constitute the third adsorption area. The top surface of the upper jig plate 5 for product adsorption has a first mark 20 and a second mark 21 arranged sequentially from the inside to the outside. The area inside the first mark 20 is the first adsorption area, the area inside the second mark 21 is the second adsorption area, and the area outside the second mark 21 is the third adsorption area.

[0030] A right sensor 7 is mounted on the right side of the DD motor base plate 1 via a right sensor mounting bracket 6, and a left sensor 10 is mounted on the left side of the DD motor base plate 1 via a left sensor mounting bracket 9. A sensor plate 8 is mounted on the DD motor adapter plate 3.

[0031] A control valve 12 is mounted on one side of the product adsorption fixture plate 5 via a control valve mounting bracket 11. The control valve 12 is either a manual valve or an electric valve.

[0032] A pipe mounting bracket 15 is installed on the rotary DD motor 2 located on the outer side below the product adsorption fixture plate 4. A pipe 16 is installed inside the pipe mounting bracket 15, and a pipe connector 19 on one side of the pipe 16 is mounted on the pipe mounting bracket 15 via a pipe mounting plate 18. Several pipe limiting posts 17 are also provided inside the pipe mounting bracket 15 to limit the movement of the pipe 16. The air pipe is inserted into the pipe mounting plate through the pipe connector and is restricted to a fixed area by the pipe limiting posts during movement, preventing interference.

[0033] This patent uses a microporous ultra-dense aluminum plate perforation method and connects to two external vacuum generators. It can be compatible with the adsorption of products of any shape within 2-8 inches, and has steel ring adsorption suction cups on the edge, which can also be compatible with 8-inch steel rings.

[0034] The working principle of this invention is as follows: When the equipment is ventilated, the vacuum generator generates a negative pressure air source, which draws air away from the area through the air pipe, creating negative pressure and causing the product to be firmly adsorbed onto the fixture. This rotating stage has three independent adsorption areas, achieved through two external vacuum generators. The first adsorption area is for products of any shape up to 6 inches; the second adsorption area is for wafers between 6 inches and 8 inches; and the third adsorption area is for steel rings. When the first vacuum generator is turned on, the first adsorption area is used, and wafers of all sizes up to 6 inches can be adsorbed. The measured negative pressure value is below -50 kPa (tested for 2-inch, 3-inch, and irregular ceramic wafers). When the second vacuum generator is turned on and the control valve is closed, the second adsorption area is used, i.e., 8-inch wafers are adsorbed. When the control valve is open, the third adsorption area is used, i.e., 8-inch wafers are adsorbed. Thus, bare wafers of any shape (including fragments) between 2 and 8 inches can be adsorbed, and the control valve switching can accommodate the adsorption of 8-inch standard steel rings. Because it is an ultra-dense perforated adsorption fixture, it can firmly hold irregular products.

[0035] Compared to traditional fixed-size wafer adsorption, this stage is compatible with bare wafers of any shape (including fragments) ranging from 2 to 8 inches, and even various square ceramic wafers. It is also compatible with 8-inch wafers with steel rings. Moreover, it only requires two vacuum generators for control, reducing the bending caused by the rotation of the air tubes, lowering costs, and simplifying the programming of the software logic.

[0036] This invention is compatible with bare wafers of any shape (including fragments) ranging from 2 to 8 inches, and even various square ceramic wafers. It is also compatible with 8-inch wafers with steel rings.

[0037] In the description of this utility model, it should be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implying the number of indicated technical features. Thus, features defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0038] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0039] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present utility model, and these improvements and modifications should also be considered within the protection scope of the present utility model.

Claims

1. A rotary adsorption platform compatible with 2-8 inch steel rings, comprising, from bottom to top, a DD motor base plate (1), a rotary DD motor (2), a lower product adsorption fixture plate (4), and an upper product adsorption fixture plate (5). The rotary DD motor (2) mounted on the DD motor base plate (1) drives the upper lower product adsorption fixture plate (4) to rotate via a DD motor upper adapter plate (3). The upper product adsorption fixture plate (5) is mounted on the lower product adsorption fixture plate (4). Several suction cups (13) are evenly distributed along the circumferential direction on the outer side of the upper product adsorption fixture plate (5). The suction cups (13) are mounted on the lower product adsorption fixture plate (4) via suction cup mounting brackets (14). Its features are: The bottom surface of the upper fixture plate (5) for product adsorption is provided with a first adsorption cavity (22) and a second adsorption cavity (23) from the inside to the outside. The top surface of the lower fixture plate (4) for product adsorption is provided with a first adsorption sealing plate (24) and a second adsorption sealing plate (25) from the inside to the outside. The first adsorption cavity (22) and the first adsorption sealing plate (24) together constitute a first adsorption area. The second adsorption cavity (23) and the second adsorption sealing plate (25) together constitute a second adsorption area. A plurality of suction cups (13) together constitute a third adsorption area.

2. The rotary adsorption platform compatible with 2-8 inch steel rings as described in claim 1, characterized in that, A right sensor (7) is mounted on the right side of the DD motor base plate (1) via a right sensor mounting bracket (6), and a left sensor (10) is mounted on the left side of the DD motor base plate (1) via a left sensor mounting bracket (9). A sensor plate (8) is mounted on the DD motor adapter plate (3).

3. The rotary adsorption platform compatible with 2-8 inch steel rings as described in claim 1, characterized in that, A control valve (12) is mounted on one side of the product adsorption fixture plate (5) via a control valve mounting bracket (11).

4. The rotary adsorption platform compatible with 2-8 inch steel rings as described in claim 3, characterized in that, The control valve (12) is a manual valve or an electric valve.

5. The rotary adsorption platform compatible with 2-8 inch steel rings as described in claim 1, characterized in that, A pipe rack (15) is installed on the rotating DD motor (2) below the product adsorption fixture plate (4). A pipe (16) is installed inside the pipe rack (15). The pipe connector (19) on one side of the pipe (16) is installed on the pipe rack (15) through the pipe fixing plate (18).

6. The rotary adsorption platform compatible with 2-8 inch steel rings as described in claim 5, characterized in that, Several pipe limiting posts (17) are also provided inside the pipe fixing frame (15) to limit the pipe (16).

7. The rotary adsorption platform compatible with 2-8 inch steel rings as described in claim 1, characterized in that, The top surface of the product adsorption fixture plate (5) is provided with a first mark (20) and a second mark (21) from the inside to the outside.

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