Porous ceramic adsorption platform with protective structure

Abstract

The utility model relates to the technical field of ceramic adsorption platforms, in particular to a porous ceramic adsorption platform with a protective structure, which comprises a top plate, the top of the top plate is fixedly connected with a fixing plate, the top of the fixing plate is abutted against a porous ceramic plate, a through groove is arranged in the fixing plate, and the through groove is arranged on the side surface of the porous ceramic plate. A pressing block is slidably connected into the through groove and abuts against the surface of the porous ceramic plate, and the bottom of the pressing block is fixedly connected with an extrusion plate through a steel rod. The device can drive an extrusion plate and a pressing block to move downwards under the power action of an air cylinder, so that the pressing block abuts against a porous ceramic plate, then the porous ceramic plate can be preliminarily fixed, then a side plate and an inserting rod are driven to move under the power action of a driving motor, and the inserting rod is inserted into the pressing block; the stability of the pressing block and the porous ceramic plate is further improved, accidental loosening of the porous ceramic plate is avoided, the protection effect on the porous ceramic plate is improved, and the porous ceramic plate can fix the semiconductor wafer more firmly.

Description

Technical Field

[0001] This utility model relates to the field of ceramic adsorption platform technology, specifically a porous ceramic adsorption platform with a protective structure. Background Technology

[0002] Microporous ceramic adsorption heating plates are specialized tools used for adsorption and support in various semiconductor wafer processing processes. They are widely used in processes such as thinning machines, dicing machines, and ring polishing machines. They have the characteristics of high flatness and parallelism, dense and uniform structure, high strength and good permeability, uniform adsorption force and easy trimming.

[0003] The announcement number CN212371890U describes an adjustable-angle porous ceramic adsorption platform for a ring polisher. By controlling the extension and retraction of the first electric push rods on both sides via a control box, the mounting plate, porous ceramic plate, and sphere can be tilted around the arc-shaped base. This allows for easy adjustment of the angle of the porous ceramic plate, thus facilitating the adsorption and fixation of items to be ring polished.

[0004] There are some shortcomings in its use. The ceramic adsorption platform is fixed with bolts. When the ceramic adsorption platform is used for a long time, vibration will occur, and the bolts will slip, which will reduce the stability of the ceramic adsorption platform and make the adsorption effect poor. It cannot provide multiple protections for the ceramic adsorption platform, which will cause the semiconductor sheet to shake. Therefore, we propose a porous ceramic adsorption platform with a protective structure. Utility Model Content

[0005] The purpose of this invention is to provide a porous ceramic adsorption platform with a protective structure to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, this utility model provides the following technical solution:

[0007] A porous ceramic adsorption platform with a protective structure includes a top plate, a fixing plate fixedly connected to the top of the top plate, abutting against a porous ceramic plate at the top of the fixing plate, a through groove formed in the fixing plate and located on the side of the porous ceramic plate, a pressure block slidably connected within the through groove, the pressure block abutting against the surface of the porous ceramic plate, a pressing plate fixedly connected to the bottom of the pressure block by a steel rod, a cylinder mounted on the bottom surface of the fixing plate, the cylinder being fixedly connected to the surface of the pressing plate, a drive motor mounted on the top of the fixing plate, a threaded rod fixedly connected to the output end of the drive motor, and a threaded sleeve connected to the external thread of the threaded rod.

[0008] As a preferred embodiment of this utility model, a connecting rod is fixedly connected to the side of the threaded sleeve, a side plate is fixedly connected to the side of the connecting rod, and an insert rod is fixedly connected to the side of the side plate.

[0009] As a preferred embodiment of this utility model, the insertion rod extends into the fixed plate and is slidably connected to the fixed plate, the side end of the insertion rod is inserted into the pressure block, and the side plate is disposed on the side of the fixed plate.

[0010] As a preferred embodiment of this utility model, a sliding plate is fixedly connected to the bottom of the top plate, a fixed box is slidably connected to the bottom of the sliding plate, and a base plate is fixedly connected to the bottom of the fixed box.

[0011] As a preferred embodiment of this utility model, a limiting rod is inserted into the outside of the fixing box, the limiting rod is inserted into the slide plate, and a stepper motor is installed on the surface of the base plate.

[0012] As a preferred embodiment of this utility model, a disk is fixedly connected to the output end of the stepper motor, and a round rod is fixedly connected to the surface of the disk.

[0013] As a preferred embodiment of this utility model, a stop rod is fixedly connected to the bottom of the top plate, and a collar is fixedly connected to the bottom of the stop rod. The collar is disposed outside the round rod and is slidably connected to the round rod.

[0014] As a preferred embodiment of this utility model, the bottom of the base plate is provided with casters, and the casters are movably connected to the base plate.

[0015] Compared with the prior art, the beneficial effects of this utility model are:

[0016] 1. In this utility model, by using a cylinder, extrusion plate, pressure block, drive motor, threaded rod, threaded sleeve, side plate, and insertion rod in combination, the extrusion plate and pressure block can be moved downward under the power of the cylinder, so that the pressure block abuts against the porous ceramic plate, thereby initially fixing the porous ceramic plate. Then, under the power of the drive motor, the side plate and insertion rod are moved, so that the insertion rod is inserted into the pressure block, further improving the stability of the pressure block and the porous ceramic plate, preventing the porous ceramic plate from loosening accidentally, improving the protection effect of the porous ceramic plate, and making the porous ceramic plate more firmly fixed to the semiconductor wafer.

[0017] 2. In this utility model, by setting up a stepper motor, a disc, a rod, a collar, a stop rod, a limit rod, a fixing box, and a sliding plate for coordinated use, the top plate and the perforated ceramic plate can be driven to move vertically under the power of the stepper motor. This allows for the adjustment of the height of the perforated ceramic plate, making it suitable for different processes and improving the application range of the perforated ceramic plate. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0019] Figure 2 This is a schematic diagram of the side plate and insert rod of this utility model;

[0020] Figure 3 This is a schematic diagram of the structure of the fixing box and the sliding plate of this utility model;

[0021] Figure 4 This is a schematic diagram of the structure of the fixing plate and the porous ceramic plate of this utility model.

[0022] In the diagram: 1. Base plate; 2. Casters; 3. Fixing box; 4. Slide plate; 5. Stepper motor; 6. Disc; 7. Top plate; 8. Fixing plate; 9. Cylinder; 10. Extrusion plate; 11. Pressure block; 12. Threaded rod; 13. Threaded sleeve; 14. Drive motor; 15. Side plate; 16. Insert rod; 17. Steel rod; 18. Connecting rod; 19. Collar; 20. Round rod; 21. Abutment rod; 22. Limiting rod; 23. Through groove; 24. Perforated ceramic plate. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the protection scope of the present utility model.

[0024] For examples, please refer to Figures 1-4 This utility model provides a technical solution:

[0025] A porous ceramic adsorption platform with a protective structure includes a top plate 7, a fixing plate 8 fixedly connected to the top of the top plate 7, abutting a porous ceramic plate 24 at the top of the fixing plate 8, a through groove 23 opened in the fixing plate 8, the through groove 23 being located on the side of the porous ceramic plate 24, a pressure block 11 slidably connected in the through groove 23, the pressure block 11 abutting against the surface of the porous ceramic plate 24, a pressing plate 10 fixedly connected to the bottom of the pressure block 11 by a steel rod 17, a cylinder 9 installed on the bottom surface of the fixing plate 8, the cylinder 9 being fixedly connected to the surface of the pressing plate 10, a drive motor 14 installed on the top of the fixing plate 8, a threaded rod 12 fixedly connected to the output end of the drive motor 14, and a threaded sleeve 13 threadedly connected to the external thread of the threaded rod 12.

[0026] In this embodiment, as Figure 1 and Figure 2As shown, a connecting rod 18 is fixedly connected to the side of the threaded sleeve 13, a side plate 15 is fixedly connected to the side of the connecting rod 18, and an insert rod 16 is fixedly connected to the side of the side plate 15. The insert rod 16 extends into the fixed plate 8 and is slidably connected to the fixed plate 8. The side end of the insert rod 16 is inserted into the pressure block 11. The side plate 15 is set on the side of the fixed plate 8. A sliding plate 4 is fixedly connected to the bottom of the top plate 7. A fixed box 3 is slidably connected to the bottom of the sliding plate 4. A bottom plate 1 is fixedly connected to the bottom of the fixed box 3.

[0027] The cylinder 9 can drive the pressing plate 10 and the pressing block 11 to move downwards, so that the pressing block 11 abuts against the porous ceramic plate 24, thereby initially fixing the porous ceramic plate 24. Then, the drive motor 14 drives the side plate 15 and the insertion rod 16 to move, so that the insertion rod 16 is inserted into the pressing block 11, further improving the stability of the pressing block 11 and the porous ceramic plate 24, preventing the porous ceramic plate 24 from loosening accidentally, improving the protection effect of the porous ceramic plate 24, and making the porous ceramic plate 24 more firmly fixed to the semiconductor wafer.

[0028] In this embodiment, as Figure 3 and Figure 4 As shown, a limiting rod 22 is inserted into the outside of the fixed box 3. The limiting rod 22 is inserted into the slide plate 4. A stepper motor 5 is installed on the surface of the base plate 1. A disc 6 is fixedly connected to the output end of the stepper motor 5. A round rod 20 is fixedly connected to the surface of the disc 6. A stop rod 21 is fixedly connected to the bottom of the top plate 7. A collar 19 is fixedly connected to the bottom of the stop rod 21. The collar 19 is located outside the round rod 20 and is slidably connected to the round rod 20. A caster 2 is provided at the bottom of the base plate 1. The caster 2 is movably connected to the base plate 1.

[0029] The stepper motor 5 can drive the top plate 7 and the perforated ceramic plate 24 to move vertically, thereby adjusting the height of the perforated ceramic plate 24 to make it suitable for different processes and improve its application range.

[0030] The working process of this utility model is as follows: When the porous ceramic adsorption platform with a protective structure designed in this scheme is in operation, the porous ceramic plate 24 is placed on the surface of the fixed plate 8. Then, the pressure block 11 is pressed against the surface of the porous ceramic plate 24. The cylinder 9 drives the pressing plate 10 and the pressure block 11 to move downwards, improving the pressing effect of the pressure block 11 on the porous ceramic plate 24. Then, under the power of the drive motor 14, the threaded rod 12 rotates. When the threaded rod 12 rotates, it drives the threaded sleeve 13, the side plate 15, and the insertion rod 16 to move, so that the insertion rod 16 is inserted into the pressure block 11, thereby... To improve the stability between the pressure block 11 and the porous ceramic plate 24, prevent the porous ceramic plate 24 from loosening unexpectedly, and improve the protection effect of the porous ceramic plate 24, when the position of the porous ceramic plate 24 needs to be adjusted, the stepper motor 5 drives the disc 6 and the round rod 20 to rotate, and under the sliding action of the round rod 20 and the collar 19, the abutment rod 21, the top plate 7 and the porous ceramic plate 24 move in the vertical direction. Then, the limiting rod 22 is inserted into the slide plate 4 and the fixing box 3, which can prevent the top plate 7 and the porous ceramic plate 24 from falling unexpectedly and improve the quality of semiconductor wafer processing.

[0031] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A porous ceramic adsorption platform with a protective structure, comprising a top plate (7), characterized in that: A fixing plate (8) is fixedly connected to the top of the top plate (7). The top of the fixing plate (8) abuts against a porous ceramic plate (24). A through groove (23) is provided in the fixing plate (8). The through groove (23) is located on the side of the porous ceramic plate (24). A pressure block (11) is slidably connected in the through groove (23). The pressure block (11) abuts against the surface of the porous ceramic plate (24). A pressing plate (10) is fixedly connected to the bottom of the pressure block (11) by a steel rod (17). A cylinder (9) is installed on the bottom surface of the fixing plate (8). The cylinder (9) is fixedly connected to the surface of the pressing plate (10). A drive motor (14) is installed on the top of the fixing plate (8). A threaded rod (12) is fixedly connected to the output end of the drive motor (14). A threaded sleeve (13) is connected to the external thread of the threaded rod (12).

2. The porous ceramic adsorption platform with a protective structure according to claim 1, characterized in that: A connecting rod (18) is fixedly connected to the side of the threaded sleeve (13), a side plate (15) is fixedly connected to the side of the connecting rod (18), and an insert rod (16) is fixedly connected to the side of the side plate (15).

3. The porous ceramic adsorption platform with a protective structure according to claim 2, characterized in that: The insertion rod (16) extends into the fixing plate (8) and is slidably connected to the fixing plate (8). The side end of the insertion rod (16) is inserted into the pressure block (11). The side plate (15) is disposed on the side of the fixing plate (8).

4. The porous ceramic adsorption platform with a protective structure according to claim 1, characterized in that: The bottom of the top plate (7) is fixedly connected to a sliding plate (4), the bottom of the sliding plate (4) is slidably connected to a fixing box (3), and the bottom of the fixing box (3) is fixedly connected to a bottom plate (1).

5. The porous ceramic adsorption platform with a protective structure according to claim 4, characterized in that: A limiting rod (22) is inserted into the outside of the fixed box (3), and the limiting rod (22) is inserted into the slide plate (4). A stepper motor (5) is installed on the surface of the base plate (1).

6. The porous ceramic adsorption platform with a protective structure according to claim 5, characterized in that: The output end of the stepper motor (5) is fixedly connected to a disc (6), and a round rod (20) is fixedly connected to the surface of the disc (6).

7. The porous ceramic adsorption platform with a protective structure according to claim 3, characterized in that: The bottom of the top plate (7) is fixedly connected to a stop rod (21), and the bottom of the stop rod (21) is fixedly connected to a collar (19). The collar (19) is located outside the round rod (20) and is slidably connected to the round rod (20).

8. The porous ceramic adsorption platform with a protective structure according to claim 4, characterized in that: The bottom of the base plate (1) is provided with casters (2), which are movably connected to the base plate (1).

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