Voice coil motor and distance adjusting device

By introducing an air chamber structure and a pressure regulating valve into the voice coil motor to adjust the air pressure, the design difficulty and cost increase caused by changes in load weight are solved, achieving high-precision, high-frequency response adaptive control, and reducing equipment size and maintenance costs.

CN223666152UActive Publication Date: 2025-12-12SHENZHEN ANGSTROM EXCELLENCE TECH CO LTD
View PDF 0 Cites 0 Cited by

Patent Information

Application Number
CN202423065371.6
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-12-11
Publication Date
2025-12-12
Estimated Expiration
2034-12-11

AI Technical Summary

Technical Problem

Existing voice coil motors require spring replacement to maintain stable support when the load weight changes, which increases design difficulty and usage cost. Furthermore, long-term use of the springs affects the motor's motion characteristics and control accuracy.

Method used

It adopts an air cavity structure between the base and the support, combined with a pressure regulating valve to adjust the air pressure. The air cavity supports the load weight and adapts to load changes, and uses magnetic components and conductive coils to achieve precise control.

Benefits of technology

It improves the performance of voice coil motors, reduces output requirements, reduces equipment size, enhances motion accuracy and stability, and adapts to load changes without the need to replace parts.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN223666152U_ABST
    Figure CN223666152U_ABST
Patent Text Reader

Abstract

The utility model provides a voice coil motor and a distance adjusting device. A base of the voice coil motor is provided with a first boss along a first direction; the supporting seats are arranged on the base at intervals and used for abutting against a load. A second boss is arranged on the side, close to the base, of the supporting base in the second direction opposite to the first direction, and the second boss and the first boss are oppositely arranged. One of the first boss and the second boss is provided with a magnet piece, the other one of the first boss and the second boss is provided with a conductive coil, and the first boss is configured to be far away from or close to the second boss under the condition that the conductive coil is electrified; a first air cavity is formed between the base and the supporting seat, a first air channel communicated with the first air cavity is arranged in the base, and a pressure regulating valve used for regulating the air pressure in the first air cavity is arranged on an air supply path of the first air channel; the supporting seat is supported through the first air cavity so as to counteract the load weight; the air pressure of the first air cavity is adjusted through the pressure adjusting valve so as to adapt to the change of the load weight, and the use performance of the voice coil motor can be improved.
Need to check novelty before this filing date? Find Prior Art

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of motor processing, and particularly relates to a voice coil motor and a distance adjusting device. BACKGROUND

[0002] In the modern industry and precise control field, a voice coil motor (VCM) is widely used as a high-performance linear or rotary driver due to its fast response speed, high positioning accuracy, simple control and the like. The working principle of the voice coil motor is based on electromagnetic induction. A linear or rotary motion is generated by the force of current in a magnetic field, so as to realize fast and accurate control of a load.

[0003] In the related art, the weight of the load is balanced by setting a spring. However, the size and stiffness of the spring need to be accurately calculated to ensure that a stable supporting force can be provided within the load change range, which increases the design difficulty. Moreover, if the load weight changes, the spring needs to be replaced, which increases the use cost.

[0004] Therefore, how to improve the use performance of the voice coil motor is a problem to be solved by those skilled in the art at present. CONTENT OF THE INVENTION

[0005] The application aims to provide a voice coil motor and a distance adjusting device, and aims to solve the problem of low use performance of the current voice coil motor.

[0006] A first aspect of the embodiment of the application provides a voice coil motor, which comprises:

[0007] a base, wherein a first boss is arranged on the base along a first direction;

[0008] a support seat, which is arranged on the base in a spaced manner and is used to abut against a load; a second boss is arranged on one side of the support seat close to the base along a second direction, the second direction is opposite to the first direction, and the second boss is arranged opposite to the first boss;

[0009] one of the first boss and the second boss is arranged with a magnet, and the other is arranged with a conductive coil; the first boss is configured to be separated from the second boss along the second direction or close to the second boss along the first direction under the condition that the conductive coil is electrified.

[0010] The first gas cavity is arranged between the base and the support seat, the first gas channel is arranged in the base, the first gas channel is in communication with the first gas cavity, the pressure regulating valve is arranged on the gas supply path of the first gas channel, and the pressure regulating valve is used to regulate the air pressure in the first gas cavity.

[0011] In some embodiments of this application, a groove is provided on the side of the first boss near the support base, and the groove is provided along the second direction;

[0012] The second boss includes a first sub-boss and a second sub-boss. The first sub-boss is inserted into and adapted to the groove, and the second sub-boss is sleeved on the side of the first boss away from the first sub-boss.

[0013] In some embodiments of this application, the conductive coil is wound between the first boss and the second sub-boss, and the conductive coil is fixed on the first boss;

[0014] The magnet is at least partially disposed on the first sub-bore and / or the second sub-bore.

[0015] In some embodiments of this application, a third protrusion is further provided on the base along the first direction, and the third protrusion is spaced apart on the side of the first protrusion away from the first sub-protrusion; the second sub-protrusion is disposed within the interval between the first protrusion and the third protrusion.

[0016] In some embodiments of this application, the conductive coil is wound between the second sub-protrusion and the third protrusion, and the conductive coil is fixed on the second sub-protrusion;

[0017] The magnet is at least partially disposed on the first boss and / or the third boss.

[0018] In some embodiments of this application, the groove and the first sub-protrusion enclose each other to form the first air cavity; and / or, a second air cavity is formed between the first protrusion and the first sub-protrusion.

[0019] In some embodiments of this application, the voice coil motor includes a first air chamber and a second air chamber, the expansion directions of the first air chamber and the second air chamber are opposite; a second air passage is provided in the base or support, the second air passage is used to supply air to the second air chamber.

[0020] In some embodiments of this application, the pressure regulating valve is a proportional pressure reducing valve.

[0021] In some embodiments of this application, a sealing ring is provided between the groove wall of the groove in the first air cavity and the outer wall of the first sub-protrusion; and / or, a sealing ring is provided between the outer wall of the first protrusion and the outer wall of the first sub-protrusion in the second air cavity.

[0022] In some embodiments of this application, a sliding sleeve is provided at the connection between the first boss and the second boss.

[0023] In some embodiments of this application, the first direction is perpendicular to the base, and the second direction is perpendicular to the support.

[0024] Secondly, this application also provides a pitch adjustment device, including the aforementioned voice coil motor.

[0025] The beneficial effects of this utility model embodiment compared with the prior art are as follows: In the above-mentioned voice coil motor and pitch adjustment device, the voice coil motor includes a base and a support base. A first protrusion is provided on the base along a first direction; the support base is spaced apart on the base and is used to abut against the load; a second protrusion is provided on the side of the support base near the base along a second direction, the second direction being opposite to the first direction, and the second protrusion is opposite to the first protrusion; a magnet is provided on one of the first protrusion and the second protrusion, and a conductive coil is provided on the other. The first protrusion is configured to be energized when the conductive coil is energized. In this case, the first protrusion separates from the second protrusion along the second direction, or moves closer to the second protrusion along the first direction; a first air chamber is provided between the base and the support in this application, and a first air passage is provided inside the base or support. The first air passage is connected to the first air chamber, and a pressure regulating valve is provided on the air supply line of the first air passage. The pressure regulating valve is used to regulate the air pressure in the first air chamber; on the one hand, the first air chamber supports the support to offset the load weight; on the other hand, the pressure regulating valve can be used to adjust the air pressure in the first air chamber to adapt to changes in load weight; this is beneficial to improving the performance of the voice coil motor. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the structure of a voice coil motor provided in an embodiment of this application;

[0027] Figure 2 This is a schematic diagram of the structure of a voice coil motor provided in another embodiment of this application;

[0028] Figure 3 This is a schematic diagram of the structure of a voice coil motor provided in another embodiment of this application;

[0029] Figure 4 This is a schematic diagram of the structure of a voice coil motor provided in another embodiment of this application;

[0030] Figure 5 This is a schematic diagram of the structure of a voice coil motor provided in yet another embodiment of this application;

[0031] Figure 6 This is a structural schematic diagram of a voice coil motor provided in yet another embodiment of this application;

[0032] Figure 7 This is another structural schematic diagram of a voice coil motor provided in yet another embodiment of this application.

[0033] Specific element symbol explanations: 100-base, 110-first boss, 120-first air passage, 130-third boss, 200-support seat, 210-second boss, 211-first sub-boss, 212-second sub-boss, 300-load, 400-conductive coil, 410-pin structure, 500-magnet component, 600-first air chamber, 700-second air chamber, 800-second air passage, 900-pressure regulating valve, 1000-air supply source, 1100-sealing ring, 1200-sliding sleeve, a-first direction, b-second direction. Detailed Implementation

[0034] To make the technical problems, technical solutions, and beneficial effects to be solved by this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and are not intended to limit the scope of this application.

[0035] It should be noted that when a component is referred to as being "set on" another component, it can be directly on or indirectly on that other component. When a component is referred to as being "connected to" another component, it can be directly connected to or indirectly connected to that other component.

[0036] It should be understood that the terms "length", "width", "upper", "lower", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0037] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0038] It's important to know that in modern industry and precision control, voice coil motors (VCMs) are widely used as high-performance linear or rotary actuators due to their advantages such as fast response speed, high positioning accuracy, and simple control. The working principle of a voice coil motor is based on electromagnetic induction; it generates linear or rotary motion by the force exerted by an electric current in a magnetic field, thereby achieving rapid and precise control of the load.

[0039] Voice coil motors (VCOs), as motors driving linear motion, are characterized by their simple structure, high precision, high frequency response, maintenance-free operation, lack of cogging effect, and no need for commutation. They are particularly suitable for short-stroke, fast-response, and high-precision closed-loop servo control. They can achieve nanometer-level resolution, sub-micron repeatability, and micron-level positioning accuracy. In semiconductor manufacturing and packaging processes, high-speed, high-precision motion control is required in most applications. The excellent characteristics of VCOs perfectly meet these needs. They are used in dispensing machines, wire bonding machines, PCB drilling machines, lithography machines, wafer handling, and component inspection equipment. However, VCOs have disadvantages such as low power density, low output for the same volume, and short stroke, making them unsuitable for long-stroke applications. Especially when used vertically, a balancing structure such as a spring or other gravity compensator is usually required to balance the load weight; otherwise, a large-output, large-size VCO motor is needed, often leading to increased structural size and hindering miniaturization.

[0040] However, in practical applications, voice coil motors often need to bear loads of varying weights, and these weight variations can affect the motor's motion characteristics and control accuracy. To effectively balance the load weight, the current mainstream approach is to incorporate a spring mechanism into the voice coil motor design. The spring mechanism, through its inherent elastic deformation capability, can provide a supporting force opposite to the direction of the load's gravity, thereby achieving load balance and reducing the impact of load weight variations on the motor's motion characteristics.

[0041] While the spring-based load balancing method addresses some of the problems caused by load variations, it still faces numerous challenges in practical applications. First, the spring's dimensions and stiffness require precise calculation to ensure stable support across varying load ranges. This necessitates a comprehensive analysis and calculation of the load's weight, motion characteristics, and motor control requirements during the initial design phase to determine suitable spring parameters. However, due to the diversity and uncertainty of loads, accurately calculating spring parameters is often extremely difficult, and once the load changes, the original spring parameters may no longer be applicable, necessitating spring replacement to meet the new load requirements.

[0042] Furthermore, prolonged use of springs can lead to a gradual decline in their elasticity, which in turn affects the motor's motion characteristics and control precision. Therefore, regular inspection and replacement of springs are crucial for ensuring the stable operation of voice coil motors. However, replacing springs not only increases maintenance costs but may also impact the continuous operation of the equipment and production efficiency.

[0043] Therefore, this application makes improvements to the related voice coil motor and pitch adjustment device.

[0044] Please see Figure 1 , Figure 1A schematic diagram of the voice coil motor provided in this embodiment is shown. The voice coil motor of this embodiment includes a base 100 and a support 200. A first boss 110 is provided on the base 100 along a first direction a. The support 200 is spaced apart on the base 100 and is used to abut against a load 300. A second boss 210 is provided on the side of the support 200 near the base 100 along a second direction b, the second direction b being opposite to the first direction a, and the second boss 210 is opposite to the first boss 110. A magnet 500 is provided on one of the first boss 110 and the second boss 210, and the other... A conductive coil 400 is provided on the top. When the conductive coil 400 is energized, the first protrusion 110 is configured to either disengage from the second protrusion 210 along the second direction b or approach the second protrusion 210 along the first direction a. A first air chamber 600 is provided between the base 100 and the support 200. A first air passage 120 is provided inside the base 100 and is connected to the first air chamber 600. A pressure regulating valve 900 is provided on the air supply line of the first air passage 120 and is used to regulate the air pressure inside the first air chamber 600.

[0045] It should be explained that the base 100, as the fixed part of the motor, provides stable support; on the side of the support 200 near the base 100, a second boss 210 is provided along a second direction b, opposite to the first direction a. In the first boss 110 and the second boss 210, one is equipped with a magnet 500, and the other with a conductive coil 400. This opposing arrangement of bosses provides the basis for the linear movement of the motor and ensures the stability and accuracy of the movement. When the conductive coil 400 is energized, according to the principle of electromagnetic induction, it interacts with the magnet 500, generating a thrust or pull force, thereby realizing the linear movement of the motor. A first air chamber 600 is provided between the base 100 and the support 200 to provide cushioning and support during motor movement; a pressure regulating valve 900 is installed on the air supply line of the first air passage 120 to precisely regulate the air pressure within the first air chamber 600.

[0046] It is understandable that, such as Figure 1 As shown, the support base 200 is used to support the load 300, and the weight of the load 300 can be offset by adjusting the air pressure in the first air chamber 600. However, in this application, the support base 200 can also be used to push or pull the load 300. The position of the load 300 can be coarsely adjusted by adjusting the air pressure in the first air chamber 600, and the position of the load 300 can be finely adjusted by the interaction between the magnet 500 and the conductive coil 400, which is beneficial to improving the adjustment accuracy of the voice coil motor.

[0047] In related technologies, a spring is required inside the voice coil motor to balance the weight of the load 300. The spring needs to be replaced to accommodate loads 300 of varying weights, which reduces the performance of the voice coil motor. However, in this application, on the one hand, the first air chamber 600 supports the support base 200 to counteract the weight of the load 300; on the other hand, the air pressure in the first air chamber 600 can be adjusted via the pressure regulating valve 900 to adapt to changes in the weight of the load 300. This improves the performance of the voice coil motor.

[0048] In this embodiment, the balancing characteristics of the cylinder are used to balance the weight of the load 300. Combined with the high dynamic response and precise control of the voice coil motor, adaptive high-precision high-frequency response control of the load 300 can be achieved. The design fully considers the characteristics of the voice coil motor, and clever design minimizes the influence of the air chamber structure on the output of the voice coil motor.

[0049] When the voice coil motor is used vertically, this solution can automatically balance the weight of the load 300, reducing the output requirements of the voice coil motor and thus its size. When used as an end effector in a motion structure, the reduced structural size effectively lightens the load 300, improving the overall motion performance of the equipment. When used as a general actuator, the cylinder provides high output and coarse motion. When the motor reaches the vicinity of the target position, the high-frequency response and high-precision characteristics of the voice coil motor can fix the load 300 in a very precise position. When the load 300 changes, the control strategy becomes crucial. For single-acting cylinder motion mode, changes in the load 300 can be fed back to the controller via current feedback (actually force feedback) for dynamic balancing. For double-acting cylinder motion mode, position feedback can be sent to the controller, with the cylinder controlling coarse motion and the voice coil motor controlling precision motion.

[0050] Please refer to the embodiments described in this application. Figure 1 In this embodiment, the first boss 110 is provided with a groove on the side near the support base 200, and the groove is provided along the second direction b; the second boss 210 includes a first sub-boss 211 and a second sub-boss 212, the first sub-boss 211 is inserted into and adapted to the groove, and the second sub-boss 212 is sleeved on the side of the first boss 110 away from the first sub-boss 211.

[0051] It should be explained that the groove provides space for the insertion and adaptation of the first sub-protrusion 211, thereby enhancing the connection stability and precision between the first protrusion 110 and the second protrusion 210. The second sub-protrusion 212 is fitted onto the side of the first protrusion 110 opposite to the first sub-protrusion 211. This design further enhances the connection strength between the first protrusion 110 and the second protrusion 210, while also providing additional support for the linear movement of the motor.

[0052] Please refer to the embodiments described in this application. Figure 1 In this embodiment, the conductive coil 400 is wound between the first boss 110 and the second sub-boss 212, and the conductive coil 400 is fixed on the first boss 110; the magnet 500 is at least partially disposed on the first sub-boss 211 and / or the second sub-boss 212.

[0053] It should be explained that the magnet component 500 includes at least a yoke or a stator soft iron shell. The yoke (magnet), as a device that enhances the magnetic field effect, plays a crucial role in the motor. It focuses and strengthens the magnetic field generated by the conductive coil 400, thereby improving the motor's driving force and efficiency. The stator soft iron shell is an outer shell made of soft iron. Soft iron is a type of iron with low carbon content and high ductility, which is easy to process and shape, and is easily magnetized in a magnetic field, but quickly demagnetizes after the external magnetic field is removed.

[0054] It is understood that the magnet component 500 can be distributed on the first sub-protrusion 211, or distributed on the second sub-protrusion 212, or disposed on both the first sub-protrusion 211 and the second sub-protrusion 212. In some embodiments, the first sub-protrusion 211 or the second sub-protrusion 212 can be entirely composed of the magnet component 500, or it can be partially composed of the magnet component 500. For example... Figure 1 As shown, the magnet component 500 includes a magnetic yoke and a stator soft iron shell. The magnetic yoke is disposed on the first sub-protrusion 211, and the stator soft iron shell is disposed on the first sub-protrusion 211 and the second sub-protrusion 212.

[0055] In some embodiments, a soft iron piston is disposed in the first air chamber 600, and the soft iron piston abuts against the magnetic yoke.

[0056] In some embodiments of this application, please refer to Figure 2 , Figure 2 A schematic diagram of the voice coil motor provided in this embodiment is shown. A third boss 130 is also provided on the base 100 along the first direction a in this embodiment. The third boss 130 is spaced apart from the first boss 110 on the side opposite to the first sub-boss 211; a second sub-boss 212 is located within the interval between the first boss 110 and the third boss 130.

[0057] It should be explained that a certain gap is maintained between the third boss 130 and the first boss 110, providing space for the second sub-boss 212. The placement of the third boss 130 not only enhances the structural stability of the base 100 but also provides additional support for the second sub-boss 212. This design helps reduce vibration and swaying of the motor during operation, thereby improving its motion accuracy and stability. The second sub-boss 212 is positioned within the gap between the first boss 110 and the third boss 130. This arrangement not only makes full use of the space on the base 100 but also ensures a stable connection between the second sub-boss 212 and the first and third bosses 110 and 130. By placing the second sub-boss 212 between the first and third bosses 110, the overall structure of the motor is further strengthened. This design not only improves the motor's load-bearing capacity but also enhances its resistance to vibration and swaying.

[0058] Please refer to the embodiments described in this application. Figure 2 In this embodiment, the conductive coil 400 is wound between the second sub-protrusion 212 and the third protrusion 130, and the conductive coil 400 is fixed on the second sub-protrusion 212; the magnet 500 is at least partially disposed on the first protrusion 110 and / or the third protrusion 130.

[0059] It is understood that the magnet component 500 may be distributed on the first boss 110, or distributed on the third boss 130, or disposed on both the first boss 110 and the third boss 130. In some embodiments, the first boss 110 and the third boss 130 may be entirely composed of the magnet component 500, or may be partially composed of the magnet component 500. For example... Figure 2 As shown, the magnet component 500 includes a magnetic yoke and a stator soft iron shell. The magnetic yoke is disposed on the first boss 110, and the stator soft iron shell is disposed on the first boss 110 and the third boss 130.

[0060] Please refer to the embodiments described in this application. Figure 1 and see Figure 3 , Figure 3 The diagram shows the structure of the voice coil motor provided in this embodiment. In this embodiment, the groove and the first sub-protrusion 211 enclose a first air cavity 600; and / or, a second air cavity 700 is formed between the first protrusion 110 and the first sub-protrusion 211.

[0061] It is understandable that a first air chamber 600 and / or a second air chamber 700 can be provided inside the voice coil motor. The first air chamber 600 and the second air chamber 700 can work together to support the load 300, or provide support in opposite directions under inflation conditions, so as to play a role in bidirectional automatic adjustment and balance.

[0062] Please refer to the embodiments described in this application. Figure 3 And see Figure 4 and Figure 5 , Figure 4 A schematic diagram of the voice coil motor provided in this embodiment is shown. Figure 5 A schematic diagram of the structure of the voice coil motor provided in this embodiment is shown. The voice coil motor of this embodiment includes a first air chamber 600 and a second air chamber 700, the expansion directions of the first air chamber 600 and the second air chamber 700 are opposite; a second air passage 800 is provided in the base 100 or the support 200, the second air passage 800 is used to supply air to the second air chamber 700.

[0063] In some embodiments of this application, please refer to Figure 6 and Figure 7 , Figure 6 A schematic diagram of the voice coil motor provided in this embodiment is shown. Figure 7 Another structural schematic diagram of the voice coil motor provided in this embodiment is shown. This embodiment Figure 6 The pressure regulating valve 900 in the middle is a proportional pressure reducing valve. Figure 7 The pressure regulating valve 900 is a manual pressure reducing valve. The proportional pressure reducing valve is an automatic pressure reducing valve.

[0064] In some embodiments, when a first air chamber 600 and a second air chamber 700 are provided, a pressure regulating valve 900 is provided in the air supply line of both.

[0065] In some embodiments, such as Figure 6 and Figure 7 As shown, an air supply source 1000 is provided at the other end of the air supply line.

[0066] In some embodiments, the pressure regulating valve 900 may also be a standard manual pressure reducing valve.

[0067] Please refer to the embodiments described in this application. Figure 1 A sealing ring 1100 is provided between the groove wall of the inner groove of the first air chamber 600 and the outer wall of the first sub-protrusion 211; and / or, a sealing ring 1100 is provided between the outer wall of the first protrusion 110 and the outer wall of the first sub-protrusion 211 in the second air chamber 700.

[0068] Please refer to the embodiments described in this application. Figure 1 In this embodiment, a sliding sleeve 1200 is provided at the connection between the first boss 110 and the second boss 210.

[0069] In some embodiments, there are at least two sliding sleeves 1200. One sliding sleeve 1200 is a shaft end sliding sleeve 1200, which is disposed at the end of the first boss 110. The other sliding sleeve 1200 is a piston sliding sleeve 1200, which is disposed on the piston.

[0070] In some embodiments of this application, the first direction a is perpendicular to the base 100, and the second direction b is perpendicular to the support 200.

[0071] Please refer to the embodiments described in this application. Figure 7 In this embodiment, the conductive coil 400 is routed through the base 100 or the support 200, and the lead wires pass through the base 100 or the support 200 to form a pin structure 410.

[0072] Furthermore, in order to better implement the voice coil motor in any of the above embodiments, this application also provides a pitch adjustment device, which includes the voice coil motor described above, based on the voice coil motor.

[0073] In some embodiments, the adjustment device can be applied in the field of optical systems, where the voice coil motor is used for optical scanning, positioning, aiming, tracking, and stabilization in the fields of optics, microelectronics, and measurement, enabling precise motion control of lenses or mirrors. Examples include automatic focusing in cameras, digital cameras, and microscopes; dynamic focusing along the Z-axis in laser cutting equipment; focusing and tracking in optical disc drives; and yaw control of fast-reflecting mirrors in astronomical telescopes.

[0074] In some embodiments, the pitch adjustment device can be applied in the field of semiconductor equipment. In most semiconductor manufacturing and packaging processes, high-speed, high-precision motion control is required. The excellent characteristics of voice coil motors perfectly meet these needs. They are used in equipment such as dispensing machines, wire bonding machines, PCB drilling machines, lithography machines, wafer handling, and component inspection.

[0075] In some embodiments, the distance adjustment device can be applied in the field of vibration control. One application is as a vibration source, i.e., an excitation device. Electric vibrators are commonly used for vibration and shock testing, dynamic characteristic testing of mechanical structures, and fatigue testing. Generally, small vibrators often use permanent magnet types, while larger vibrators (i.e., vibration tables) often use excitation types. Another application is as a vibration damper, i.e., to eliminate the adverse effects of vibration. Electric vibration dampers can absorb the vibration energy of a vibration system by actively applying appropriate damping force to offset or reduce the excitation force, thereby reducing or isolating the transmission of vibration.

[0076] In some embodiments, the pitch adjustment device can be applied in the fields of linear compressors and control valves. Linear compressors, when constructed using a linear motor to directly drive the piston, can eliminate the wear, vibration, and noise caused by the lateral force between the piston and cylinder in traditional reciprocating compressors. They are widely used in equipment such as refrigerators and Stirling refrigerators. Voice coil / linear motors can also be used in precision control valves for industrial and medical equipment, such as automotive engine valves, electro-hydraulic servo valves, auxiliary respiratory pressure control valves, and blood circulation auxiliary pumps.

[0077] In some embodiments, the distance adjustment device can be applied in the field of machining. Ordinary lathes can generally only machine rotating parts with circular cross-sections, and it is difficult to machine certain parts with non-circular cross-sections. By using a high-thrust linear motor to directly drive the cutting tool to perform high-frequency reciprocating radial motion, it is possible to machine parts with non-circular cross-sections.

[0078] In the above embodiments, the descriptions of each embodiment have different focuses. For parts that are not described in detail or recorded in a certain embodiment, please refer to the relevant descriptions of other embodiments.

[0079] The basic concepts have been described above. Obviously, for those skilled in the art, the detailed disclosure above is merely illustrative and does not constitute a limitation of this application. Although not explicitly stated herein, those skilled in the art may make various modifications, improvements, and corrections to this application. Such modifications, improvements, and corrections are suggested in this application, and therefore remain within the spirit and scope of the exemplary embodiments of this application.

[0080] Furthermore, this application uses specific terms to describe embodiments of the application. For example, "an embodiment," "one embodiment," and / or "some embodiments" refer to a particular feature, structure, or characteristic associated with at least one embodiment of the application. Therefore, it should be emphasized and noted that "an embodiment," "one embodiment," or "an alternative embodiment" mentioned twice or more in different locations in this specification do not necessarily refer to the same embodiment. In addition, certain features, structures, or characteristics in one or more embodiments of the application can be appropriately combined.

[0081] Similarly, it should be noted that, in order to simplify the description of the present application and thus aid in the understanding of one or more embodiments of the utility model, the foregoing description of the embodiments of the present application sometimes combines multiple features into a single embodiment, drawing, or description thereof. However, this disclosure method does not imply that the subject matter of the present application requires more features than those mentioned in the claims. In fact, the embodiments contain fewer features than all the features of the single embodiments disclosed above.

[0082] The above-described embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application, and should all be included within the protection scope of this application.

Claims

1. A voice coil motor, characterized in that, The voice coil motor includes: A base, wherein a first protrusion is provided on the base along a first direction; A support base is spaced apart on the base and is used to abut against the load; a second protrusion is provided on the side of the support base near the base along a second direction, the second direction being opposite to the first direction, and the second protrusion being disposed opposite to the first protrusion; One of the first boss and the second boss is provided with a magnet and the other is provided with a conductive coil. When the first boss is configured such that the conductive coil is energized, the first boss moves away from the second boss along the second direction or moves closer to the second boss along the first direction. A first air chamber is provided between the base and the support, and a first air passage is provided inside the base. The first air passage is connected to the first air chamber, and a pressure regulating valve is provided on the air supply line of the first air passage. The pressure regulating valve is used to regulate the air pressure in the first air chamber.

2. The voice coil motor according to claim 1, characterized in that, The first boss has a groove on the side near the support base, and the groove is arranged along the second direction; The second boss includes a first sub-boss and a second sub-boss. The first sub-boss is inserted into and adapted to the groove, and the second sub-boss is sleeved on the side of the first boss away from the first sub-boss.

3. The voice coil motor according to claim 2, characterized in that, The conductive coil is wound between the first boss and the second sub-boss, and the conductive coil is fixed on the first boss; The magnet is at least partially disposed on the first sub-bore and / or the second sub-bore.

4. The voice coil motor according to claim 2, characterized in that, A third protrusion is also provided on the base along the first direction, and the third protrusion is spaced apart on the side of the first protrusion away from the first sub-protrusion; the second sub-protrusion is located within the interval between the first protrusion and the third protrusion.

5. The voice coil motor according to claim 4, characterized in that, The conductive coil is wound between the second sub-protrusion and the third protrusion, and the conductive coil is fixed on the second sub-protrusion; The magnet is at least partially disposed on the first boss and / or the third boss.

6. The voice coil motor according to any one of claims 2 to 5, characterized in that, The groove and the first sub-protrusion enclose the first air cavity; and / or, a second air cavity is formed between the first protrusion and the first sub-protrusion.

7. The voice coil motor according to claim 6, characterized in that, The voice coil motor includes a first air chamber and a second air chamber, the expansion directions of the first air chamber and the second air chamber are opposite; a second air passage is provided in the base or support, the second air passage is used to supply air to the second air chamber.

8. The voice coil motor according to claim 6, characterized in that, The pressure regulating valve is a proportional pressure reducing valve.

9. The voice coil motor according to claim 6, characterized in that, A sealing ring is provided between the groove wall of the first air cavity and the outer wall of the first sub-protrusion; and / or, a sealing ring is provided between the outer wall of the first protrusion and the outer wall of the first sub-protrusion in the second air cavity.

10. The voice coil motor according to any one of claims 1 to 5, characterized in that, A sliding sleeve is provided at the connection between the first boss and the second boss.

11. The voice coil motor according to any one of claims 1 to 5, characterized in that, The first direction is perpendicular to the base, and the second direction is perpendicular to the support.

12. A distance adjustment device, characterized in that, Includes the voice coil motor as described in any one of claims 1 to 11.