Clamping assembly and photoetching device with same

Abstract

The utility model discloses a clamping assembly and a photoetching device with the clamping assembly, the clamping assembly comprises a bearing piece and a clamping piece, the bearing piece is used for bearing a circuit board; the plurality of clamping pieces are arranged on the bearing piece at intervals, the clamping pieces are in contact with the edge of the circuit board, and the clamping pieces are configured to clamp the circuit board. According to the circuit board clamping assembly, the plurality of clamping pieces are arranged on the bearing piece, and the free ends of the clamping pieces are opposite to the edges of the circuit boards, so that the clamping pieces can correct and clamp the circuit boards, the arrangement of the circuit boards on the clamping assembly is more reliable, and the circuit boards can be conveniently conveyed to subsequent processes for use; and meanwhile, the circuit board can be arranged at a proper position for subsequent working procedures. Moreover, the circuit board is centered and clamped by using the clamping piece, so that the clamping assembly has relatively high applicability and a relatively compact structure, and the use convenience of the clamping assembly is improved.

Description

Technical Field

[0001] This utility model relates to the field of clamping device technology, and in particular to a clamping assembly and a photolithography device having the same. Background Technology

[0002] In existing technologies, circuit boards require clamping assemblies to hold and align them during transportation and etching before being transported. However, in these technologies, the clamping structure of the clamping assembly can only hold a certain type of circuit board, resulting in poor clamping performance and easy detachment, which affects production efficiency. Utility Model Content

[0003] This utility model aims to solve at least one of the technical problems existing in the prior art. Therefore, one objective of this utility model is to provide a clamping assembly, wherein the clamping assembly includes a clamping member capable of clamping and aligning a circuit board to improve the clamping effect, thereby facilitating subsequent processing and improving production efficiency.

[0004] Another objective of this invention is to provide a photolithography apparatus, wherein the photolithography apparatus is provided with the clamping assembly shown above.

[0005] The clamping assembly according to an embodiment of the present invention includes: a carrier and a clamping member, wherein the carrier carries a circuit board; the clamping member is a plurality of members and is spaced apart on the carrier, the clamping member contacts the edge of the circuit board, and the clamping member is configured to clamp the circuit board.

[0006] According to the clamping assembly of this utility model embodiment, multiple clamping members are provided on the carrier. Since the free ends of the clamping members are arranged opposite to the edge of the circuit board, the clamping members can straighten and clamp the circuit board, making the circuit board more reliably positioned on the clamping assembly. This facilitates the transport of the circuit board to subsequent processes and allows the circuit board to be placed in a suitable position for subsequent processes. Furthermore, the use of clamping members to center and clamp the circuit board gives the clamping assembly high applicability and a compact structure, thus improving its ease of use.

[0007] In some embodiments, the clamping member further includes: a base, a driving member, and a transmission member. The base is connected to the bottom of the support member and has a receiving space inside. The driving member is disposed on one side of the base and its output end extends into the base. The transmission member is disposed in the receiving space, one end of which is tractively connected to the output end of the driving member, and the other end of which is tractively connected to the clamping member.

[0008] In some embodiments, the transmission component includes: a first transmission component and a second transmission component, the first transmission component being convectively connected to the drive component and rotating within the base, the second transmission component being convectively engaged with the first transmission component, the clamping component being disposed on the second transmission component, and the second transmission component moving along the extending direction of the first transmission component.

[0009] In some embodiments, the first transmission component is a lead screw, and the second transmission component is a movable seat with threads.

[0010] In some embodiments, the transmission component further includes: a guide rod disposed within the base and spaced apart from the first transmission component; the second transmission component also has a guide hole, and the guide rod is clearance-fitted with the guide hole.

[0011] In some embodiments, the device further includes a movable cylinder disposed on the base, and the free end of the movable cylinder is connected to the clamping member.

[0012] In some embodiments, the movable cylinder is rotatably configured.

[0013] In some embodiments, the clamping member further includes: a pressure bar and a connecting rod, wherein there are two connecting rods symmetrically connected to the pressure bar, the free end of the pressure bar abuts against the circuit board, and the connecting rod is disposed on the movable cylinder.

[0014] In some embodiments, the device further includes two detection elements, which are spaced apart in the accommodating space along the moving direction.

[0015] The photolithography apparatus according to an embodiment of the present invention includes: the clamping assembly as described above.

[0016] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0017] The above and / or additional aspects and advantages of this utility model will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which:

[0018] Figure 1 This is a schematic diagram of the clamping assembly according to an embodiment of the present utility model;

[0019] Figure 2 This is a schematic diagram of the clamping assembly according to an embodiment of the present utility model;

[0020] Figure 3 This is a schematic diagram of the clamping assembly according to an embodiment of the present utility model;

[0021] Figure label:

[0022] Clamping assembly 10, circuit board 11,

[0023] 100 load-bearing components

[0024] Clamping component 200, base 210, driving component 220, transmission component 230, first transmission component 231, second transmission component 232, guide rod 233, pressure bar 240, connecting rod 250.

[0025] 300 movable cylinders

[0026] 400 items were inspected. Detailed Implementation

[0027] The embodiments of the present invention are described in detail below. The embodiments described with reference to the accompanying drawings are exemplary. The embodiments of the present invention are described in detail below.

[0028] The following is for reference. Figures 1-3 The clamping assembly 10 according to an embodiment of the present invention includes: a carrier 100 and a clamping member 200.

[0029] Specifically, the carrier 100 supports the circuit board 11; multiple clamping members 200 are spaced apart on the carrier 100, and the clamping members 200 contact the edge of the circuit board 11, thus clamping the circuit board 11.

[0030] It should be noted that during the operation of the circuit board 11, it is suitable to place the circuit board 11 on the clamping assembly 10 so that the clamping assembly 10 can correct the position of the circuit board 11, thereby facilitating subsequent processing of the circuit board 11, such as transferring the circuit board 11 between different processes, or placing the circuit board 11 in a suitable position for etching.

[0031] Specifically, the clamping assembly 10 provided in this application is suitable to include: a carrier 100 and a clamping member 200. The carrier 100 is suitable to carry the circuit board 11, and a plurality of clamping members 200 are provided on the carrier 100. The output end of the clamping member 200 abuts against the edge of the circuit board 11 so that the clamping member 200 drives the circuit board 11 to be aligned. After the circuit board 11 is aligned, it is suitable to clamp the circuit board 11 to realize subsequent transportation and etching.

[0032] According to the clamping assembly 10 of this utility model embodiment, by providing a plurality of clamping members 200 on the carrier 100, and since the free ends of the clamping members 200 are arranged opposite to the edge of the circuit board 11, the clamping members 200 can align and clamp the circuit board 11, making the arrangement of the circuit board 11 on the clamping assembly 10 more reliable, so as to facilitate the transportation of the circuit board 11 to subsequent processes, and also to arrange the circuit board 11 in a suitable position for subsequent processes. Furthermore, by using the clamping members 200 to center and clamp the circuit board 11, the clamping assembly 10 has high applicability and a compact structure, thereby improving the ease of use of the clamping assembly 10.

[0033] In some embodiments, the clamping member 200 further includes: a base 210, a driving member 220, and a transmission member 230. The base 210 is connected to the bottom of the support member 100 and has a receiving space inside. The driving member 220 is disposed on one side of the base 210 and its output end extends into the base 210. The transmission member 230 is disposed in the receiving space, one end of which is connected to the output end of the driving member 220, and the other end of which is connected to the clamping member 200.

[0034] In other words, the clamping member 200 is also adapted to include a base 210, a drive member 220, and a transmission member 230. The base 210 is adapted to provide load-bearing capacity so that other structures can be arranged on the base 210 for use. At the same time, the receiving space on the base 210 is adapted to accommodate other structures, and the drive member 220 is adapted to be connected to the base 210. The drive member 220 is adapted to provide a driving action, which is transmitted through the transmission member 230. Since the other end of the transmission member 230 is adapted to be connected to the clamping member 200, the transmission member 230 is adapted to drive the clamping member 200 to work, so that the clamping assembly 10 can be used as designed, thereby improving the reliability of the clamping assembly 10.

[0035] In some embodiments, the transmission member 230 includes: a first transmission member 231 and a second transmission member 232. The first transmission member 231 is connected to the drive member 220 and rotates within the base 210. The second transmission member 232 is in transmission engagement with the first transmission member 231. The clamping member 200 is disposed on the second transmission member 232 and the second transmission member 232 moves along the extending direction of the first transmission member 231. It is understood that the transmission component 230 is adapted to include a first transmission component 231 and a second transmission component 232. The first transmission component 231 is adapted to be connected to the drive component 220 for transmission, while the second transmission component 232 is adapted to be engaged with the first transmission component 231 for transmission. Since the first transmission component 231 is rotatably set within the base 210, the drive component 220 is adapted to drive the first transmission component 231 to rotate. The rotation of the first transmission component 231 is adapted to drive the second transmission component 232 to move along the extension direction of the first transmission component 231, so as to adjust the position of the second transmission component 232, thereby driving the clamping component 200 to adjust its position, so that the clamping assembly 10 can align and clamp the circuit board 11. In this way, the performance of the clamping assembly 10 is improved.

[0036] In some specific embodiments, the first transmission member 231 is a lead screw, and the second transmission member 232 is a movable seat with threads. It is understood that the first transmission member 231 is adapted to be a lead screw, while the second transmission member 232 is adapted to be threaded, so that the lead screw and the threads cooperate. In this way, during the transmission process between the first transmission member 231 and the second transmission member 232, the first rotating member is adapted to receive the driving force of the driving member 220 and rotate according to the rotation of the driving member 220. The rotation of the first transmission member 231 is adapted to be transmitted via the lead screw. Since the second transmission member 232 is threaded, it drives the movable seat with threads to move, thereby realizing the positional movement of the clamping member 200 mounted on the second transmission member 232, making the use of the clamping assembly 10 simpler and more reliable.

[0037] In some embodiments, the transmission member 230 further includes a guide rod 233, which is disposed within the base 210 and spaced apart from the first transmission member 231. The second transmission member 232 also has a guide hole, and the guide rod 233 is clearance-fitted with the guide hole. It is understood that during the construction of the transmission member 230, it is also suitable to construct the guide rod 233, which is suitable to be spaced parallel to the first transmission member 231, so that during the use of the second transmission member 232, the guide rod 233 is suitable to provide a guiding function, so that the second transmission member 232 can move under the guidance of the guide rod 233, thereby allowing the transmission member 230 to be used as designed, and making the performance of the clamping assembly 10 more reliable.

[0038] In some embodiments, the clamping assembly 10 further includes a movable cylinder 300, which is disposed on the base 210 and whose free end is connected to the clamping member 200. It is understood that the movable cylinder 300 is adapted to drive the clamping member 200 to move, so that the clamping member 200 can be used as designed to clamp and flatten the circuit board 11, thereby improving the performance of the clamping assembly 10.

[0039] In some specific embodiments, the movable cylinder 300 is rotatable. It is understood that because the movable cylinder 300 is rotatable, it can drive the clamping member to move in position, thereby constituting the clamping assembly 10 clamping the circuit board 11, so that the clamping assembly can perform corrective clamping and flattening of the circuit board 11, thereby improving the performance of the clamping assembly.

[0040] In some embodiments, the clamping member 200 further includes a pressure bar 240 and connecting rods 250. Two connecting rods 250 are symmetrically connected to the pressure bar 240. The free end of the pressure bar 240 abuts against the circuit board 11. The connecting rods 250 are mounted on the moving cylinder 300. Thus, the connecting rods 250 are adapted to transmit a driving force to move the pressure bar 240. Since the pressure bar 240 can abut against the circuit board 11, it restricts the circuit board 11, making the placement of the circuit board 11 within the clamping assembly 10 more reliable.

[0041] In some specific embodiments, the pressure bar 240 is adapted to be configured as two, and the two pressure bars 240 are respectively connected to two connecting rods 250, so that each moving cylinder 300 can drive the pressure bar 240 to move through the connecting rod 250, so that the pressure bar 240 can better achieve the clamping and restriction of the circuit board 11.

[0042] In some embodiments, the clamping member 200 further includes two detection members 400, which are spaced apart in the accommodating space along the moving direction. It is understood that during the use of the clamping assembly, it is suitable to provide detection members 400 within the base 210 so that the detection members 400 can be positioned opposite to the second transmission member 232 to detect the position of the second transmission member 232. This allows for the detection and feedback of the current usage state of the clamping assembly 10, enabling the clamping assembly 10 to adjust its performance based on feedback during use, thereby making the use of the clamping assembly 10 more reliable.

[0043] The photolithography apparatus according to an embodiment of the present invention includes: the clamping assembly 10 as described above.

[0044] According to the photolithography apparatus of this utility model embodiment, since the photolithography apparatus is provided with the clamping assembly 10 as shown above, and by providing a plurality of clamping members 200 on the carrier 100, and since the free ends of the clamping members 200 are arranged opposite to the edge of the circuit board 11, the clamping members 200 can align and clamp the circuit board 11, making the setting of the circuit board 11 on the clamping assembly 10 more reliable, so as to facilitate the transportation of the circuit board 11 to subsequent processes, and at the same time, the circuit board 11 can be arranged in a suitable position for subsequent processes. Furthermore, since the clamping members 200 are used to center and clamp the circuit board 11, the clamping assembly 10 has high applicability and a compact structure, thereby improving the ease of use of the clamping assembly 10.

[0045] Other configurations and operations of the photolithography apparatus according to embodiments of the present invention are known to those skilled in the art and will not be described in detail here.

[0046] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example.

[0047] Although embodiments of the present invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the claims and their equivalents.

Claims

1. A clamping assembly, characterized in that, include: A support member that supports the circuit board; A clamping member, wherein there are multiple clamping members and they are spaced apart on the carrier member, the clamping members contact the edge of the circuit board, and the clamping members are configured to clamp the circuit board; The clamping member further includes: A base, which is connected to the bottom of the support member, and has a receiving space inside the base; A driving component, wherein the driving component is disposed on one side of the base, and the output end of the driving component extends into the base; A transmission component is disposed within the accommodating space, one end of which is connected to the output end of the driving component, and the other end of which is connected to the clamping component. The transmission component includes: A first transmission component is connected to the driving component and rotates within the base. The second transmission component is in transmission cooperation with the first transmission component, the clamping component is disposed on the second transmission component, and the second transmission component moves along the extension direction of the first transmission component.

2. The clamping assembly according to claim 1, characterized in that, The first transmission component is a lead screw, and the second transmission component is a movable seat with threads.

3. The clamping assembly according to claim 1, characterized in that, The transmission component further includes a guide rod, which is disposed inside the base and spaced apart from the first transmission component. The second transmission component also has a guide hole, and the guide rod is clearance-fitted with the guide hole.

4. The clamping assembly according to claim 1, characterized in that, Also includes: A movable cylinder is mounted on the base, and the free end of the movable cylinder is connected to the clamping member.

5. The clamping assembly according to claim 4, characterized in that, The movable cylinder is rotatable.

6. The clamping assembly according to claim 4, characterized in that, The clamping component further includes a pressure bar and connecting rods. There are two connecting rods symmetrically connected to the pressure bar. The free end of the pressure bar abuts against the circuit board. The connecting rods are mounted on the moving cylinder.

7. The clamping assembly according to claim 1, characterized in that, Also includes: The detection element comprises two elements, which are spaced apart along the moving direction within the accommodating space.

8. A photolithography apparatus, characterized in that, include: The clamping assembly as described in any one of claims 1-7.

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