Auxiliary mounting jig for positioning and mounting sealing ring

Abstract

The utility model provides an auxiliary mounting jig for positioning and mounting a sealing ring. The auxiliary mounting jig comprises a first supporting plate, a second supporting plate, an elastic piece, a guide mechanism and a locking mechanism. The elastic piece is arranged between the first supporting plate and the second supporting plate in a compressed mode. In the compression direction of the elastic piece, one end of the elastic piece abuts against the first supporting plate, and the other end of the elastic piece abuts against the second supporting plate. The guiding mechanism is arranged on the first supporting plate and connected with the second supporting plate in a guiding mode. The locking mechanism is arranged at the end away from the guide mechanism and detachably connected with the first supporting plate and the second supporting plate in a locking mode. The sealing ring is placed on the auxiliary mounting jig, the sealing ring placed on the second supporting plate is horizontally jacked to the to-be-mounted position through the elasticity of the elastic piece, the horizontal state of the sealing ring in the positioning and mounting process is continuously maintained, cooperation of multiple persons is not needed, the operation difficulty and the labor intensity are reduced, and the working efficiency is improved. And the installation accuracy and reliability are improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of auxiliary installation tooling, and particularly relates to an auxiliary installation jig for positioning and installing a sealing ring. BACKGROUND

[0002] A dry vacuum pump is a key device for creating and maintaining a vacuum environment in a semiconductor manufacturing process. In the connection between the dry vacuum pump and the etching machine chamber, a vacuum extraction opening and closing angle control device (TGV) needs to be connected, and the locking ring as a connector can ensure the close connection between the vacuum extraction opening and closing angle control device and the etching machine chamber, thereby preventing gas leakage from the connection during the vacuum extraction process and ensuring the vacuum degree of the entire system and the stability of the process. Due to the particularity of the narrow space of the sealing ring installation chamber, the current installation method of the sealing ring requires one operator to hold the handle part of the sealing ring, and the other operator needs to hold the other end of the sealing ring from the other side of the machine chamber to ensure that the sealing ring is in a horizontal position for alignment with the positioning pin of the installation position of the etching machine. After the sealing ring is positioned horizontally and the positioning pin is positioned, the sealing ring is tightened counterclockwise to achieve close connection. However, the existing installation process is complicated, and the sealing ring is difficult to maintain in a horizontal state during installation, and two people need to operate simultaneously to complete the installation of the sealing ring. SUMMARY

[0003] In view of the problems existing in the prior art, the utility model provides an auxiliary installation jig for positioning and installing a sealing ring to improve the technical problem that two people need to cooperate to complete the positioning and installation in the existing sealing ring installation process.

[0004] To achieve the above object and other related objects, the utility model provides an auxiliary installation jig for positioning and installing a sealing ring in the first aspect, which comprises a first support plate, a second support plate, an elastic member, a guide mechanism and a locking mechanism. The second support plate is located above the first support plate. The elastic member is compressed between the first support plate and the second support plate, one end of the elastic member along the compression direction abuts against the first support plate, and the other end of the elastic member along the compression direction abuts against the second support plate. The guide mechanism is arranged on the first support plate and guides the connection of the second support plate. The locking mechanism is arranged at one end away from the guide mechanism and detachably locks the first support plate and the second support plate.

[0005] In an embodiment of the auxiliary installation jig of the utility model, the elastic member is located between the locking mechanism and the guide mechanism.

[0006] In the auxiliary installation jig one embodiment of the utility model, the elastic piece adopts compression spring, the number of compression spring is multiple groups.

[0007] In the auxiliary installation jig one embodiment of the utility model, the guiding mechanism includes at least two groups of interval setting guiding column, at least two groups of guiding column one end fixed connection first support plate, the other end through the connection second support plate.

[0008] In the auxiliary installation jig one embodiment of the utility model, the locking mechanism includes at least two groups of interval setting locking piece, and at least two groups of interval setting locking piece are locked connection first support plate with second support plate respectively.

[0009] In the auxiliary installation jig one embodiment of the utility model, the locking piece includes locking bolt and locking nut, and the locking bolt is through first support plate and second support plate and is connected with locking nut by screwing.

[0010] In the auxiliary installation jig one embodiment of the utility model, the locking nut is set on the board surface of first support plate away from second support plate.

[0011] In the auxiliary installation jig one embodiment of the utility model, the second support plate adopts acrylic plate.

[0012] In the auxiliary installation jig one embodiment of the utility model, the second support plate includes second round plate part and second arc plate part, and the second round plate part and the second arc plate part are integrated structure, and the locking mechanism is connected with the second arc plate part, and the guiding mechanism is connected with the second round plate part.

[0013] In the auxiliary installation jig one embodiment of the utility model, the first support plate and the second support plate are consistent in structure.

[0014] The utility model provides a kind of auxiliary installation jig for sealing ring positioning installation, the auxiliary installation jig design compact, can adapt to the installation cavity space of small sealing ring, sealing ring is placed on the auxiliary installation jig, using the elasticity of elastic piece, sealing ring placed on second support plate is horizontally lifted to the position to be installed, and continuously maintain the horizontal state of sealing ring in positioning installation process, while second support plate is the support and adjustment platform of sealing ring, facilitate the positioning connection of positioning pin.The positioning installation process of sealing ring can be completed by single person using the auxiliary installation jig, without additional auxiliary tool or multi-person cooperation, greatly reduce the operation difficulty and labor intensity.Installation time and labor cost are saved, and the error of artificial operation is reduced, the accuracy and reliability of installation are improved. BRIEF DESCRIPTION OF DRAWINGS

[0015] In order to more clearly illustrate the technical solutions of the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or the prior art description. Obviously, the drawings in the following description only constitute some embodiments of the present application, and for those skilled in the art, other embodiments can also be obtained from these drawings without creative labor.

[0016] Figure 1 It is a second support plate jacking state schematic view in an embodiment of the auxiliary installation jig of the present application.

[0017] Figure 2 It is a second support plate initial state schematic view in an embodiment of the auxiliary installation jig of the present application.

[0018] Figure 3 It is a sealing ring placement position structure plan view in an embodiment of the auxiliary installation jig of the present application.

[0019] Figure 4 It is a jig working state schematic view in an embodiment of the auxiliary installation jig of the present application.

[0020] Element number explanation:

[0021] 100, first support plate; 200, second support plate; 210, second round plate part; 220, second arc plate part; 230, guide hole; 300, elastic piece; 400, guide mechanism; 410, guide column; 500, locking mechanism; 510, locking piece; 511, locking bolt; 512, locking nut. DETAILED DESCRIPTION

[0022] The embodiments of the present application will be described below through specific concrete examples, and those skilled in the art can easily understand other advantages and effects of the present application from the content disclosed in the present specification. The present application can also be implemented or applied through other different specific embodiments, and each detail in the present specification can be modified or changed based on different viewpoints and applications without departing from the spirit of the present application. It should be noted that the following embodiments and features in the embodiments can be combined with each other without conflict. It should also be understood that the terms used in the embodiments of the present application are for describing specific specific embodiments, and are not intended to limit the protection scope of the present application. The test methods not specified in the following embodiments are usually performed under conventional conditions or under conditions recommended by each manufacturer.

[0023] When the embodiments give a numerical range, it should be understood that, unless otherwise stated by the utility model, both ends of each numerical range and any one numerical between the two ends can be selected. Unless otherwise defined, all technical and scientific terms used in the utility model can be used with any method, equipment and material of the prior art similar or equivalent to the method, equipment and material of the embodiments of the utility model to realize the utility model, and the prior art is mastered by the person skilled in the art and the description of the utility model.

[0024] It should be understood that the terms such as "upper", "lower", "left", "right", "intermediate" and "one" cited in the specification are only for the convenience of clear description, and are not used to limit the scope of the utility model, and the change or adjustment of the relative relationship is also regarded as the scope of the utility model without substantial change of the technical content.

[0025] Please refer to Figures 1 to 4 In order to improve the technical problem that two people need to cooperate to complete positioning and installation in the existing sealing ring installation process, the utility model provides a kind of auxiliary installation jig for sealing ring positioning and installation. The auxiliary installation jig is compact in design, not only can adapt to the narrow installation cavity space of sealing ring, but also can improve installation accuracy and reliability, save installation time and labor cost.

[0026] Please refer to Figures 1 to 4The auxiliary installation jig comprises a first support plate 100, a second support plate 200, an elastic member 300, a guide mechanism 400 and a locking mechanism 500. The first support plate 100 serves as a base plate and is placed on the horizontal plane of the corresponding part of the equipment below the sealing ring installation cavity during use, thereby serving as the base support structure of the auxiliary installation jig and providing stable basic support for the entire auxiliary installation jig. The second support plate 200 serves as the direct support structure of the sealing ring and is located above the first support plate 100. The elastic member 300 serves as the power component for achieving the jacking movement of the second support plate 200 relative to the first support plate 100, and is compressed between the first support plate 100 and the second support plate 200. Along the compression direction of the elastic member 300, one end of the elastic member 300 abuts against the first support plate 100, and the other end of the elastic member 300 abuts against the second support plate 200. Since the elastic member 300 is in a compressed state during use, the elastic member 300 exerts elastic thrust on the first support plate 100 and the second support plate 200, respectively, so that the first support plate 100 and the second support plate 200 can move relatively. It should be noted that the elastic member 300 is in a compressed state during the entire positioning and installation process of the sealing ring, so as to ensure the continuous jacking force on the second support plate 200, thereby enabling the vertical movement of the sealing ring to be adjusted artificially during the installation process of the sealing ring, and only the horizontal position to be adjusted. The connection mode of the elastic member 300 between the first support plate 100 and the second support plate 200 is not limited, and the elastic member 300 can be simply clamped between the first support plate 100 and the second support plate 200. However, in order to prevent the elastic member 300 from moving between the first support plate 100 and the second support plate 200 and affecting the jacking state or jacking direction of the second support plate 200, in the utility model, at least one end of the elastic member 300 is fixed to the first support plate 100 or the second support plate 200. Specifically, in the embodiment, one end of the elastic member 300 is fixedly installed on the first support plate 100, and the other end of the elastic member 300 jacks the second support plate 200, so that the second support plate 200 can move upward. The type of the elastic member 300 is not limited, and can be any suitable type of product having elastic deformation capability and restoring force, thereby enabling the second support plate 200 to drive the sealing ring to move upward to a certain extent. In an embodiment of the utility model, the elastic member 300 can be a spring, a rubber air bag, a metal sheet having elastic deformation capability, etc., but is not limited thereto.

[0027] One end of the guide mechanism 400 is mounted on the first support plate 100, and the other end is guided to connect the second support plate 200. When the second support plate 200 is lifted relative to the first support plate 100 under the pushing action of the elastic member 300, the guide mechanism 400 can limit the displacement of the second support plate 200 relative to the first support plate 100 in the horizontal direction due to irregular elastic deformation of the elastic member 300, thereby ensuring that the second support plate 200 relative to the first support plate 100 is always in a relatively parallel state during the pushing process of the elastic member 300, thereby ensuring the horizontal state of the sealing ring after reaching the corresponding height, thereby improving the installation accuracy and reliability. The structure of the guide mechanism 400 is not limited, and can be any suitable structure type that can achieve the guide mechanism 400 to keep the second support plate 200 vertical parallel sliding. For example, in an embodiment, the guide mechanism 400 uses a guide column, one end of the guide column is fixed on the first support plate 100, and the other end of the guide column penetrates the second support plate 200, and when the second support plate 200 is lifted, it is lifted horizontally along the axis direction of the guide column. In other embodiments, the guide mechanism 400 can also use a linear sliding guide structure, one end of the linear guide is mounted vertically on the first support plate 100, and the sliding block is fixedly installed on the second support plate 200 and is in sliding connection with the linear guide.

[0028] The locking mechanism 500 is a control mechanism for controlling the elastic compression and elastic recovery of the elastic member 300 between the first support plate 100 and the second support plate 200, which is located away from one end of the guide mechanism 400 and is detachably locked and connected to the first support plate 100 and the second support plate 200. The cooperation of the locking mechanism 500 and the guide mechanism 400 prevents accidental movement or misplacement caused by the elastic force of the elastic member 300 during the pushing process, thereby ensuring that the relative position between the second support plate 200 and the first support plate 100 remains stable. The locking mechanism 500 gradually recovers the elastic member 300 by adjusting the locking position or force until the sealing ring is lifted to the designated position. The locking mechanism 500 is located outside the installation cavity area of the sealing ring. The structure of the locking mechanism 500 is not limited, and can be any suitable structure type that can achieve the relative locking and fixing of the first support plate 100 and the second support plate 200 and limit the deformation ability of the elastic member 300. In an embodiment, the locking mechanism 500 can be a bolt, which penetrates the first support plate 100 and the second support plate 200 and is threadedly connected, and by rotating the bolt at the threaded connection position of the second support plate 200, the locking and relative position adjustment between the first support plate 100 and the second support plate 200 are achieved. In other embodiments, the locking mechanism 500 can also use a buckle, clamp structure or manually achieve the clamping of the first support plate 100 and the second support plate 200.

[0029] Please refer to Figures 1 to 2In the auxiliary installation jig one embodiment of the utility model, elastic piece 300 is located between guide mechanism 400 and locking mechanism 500, specifically, elastic piece 300 is installed in the clamping region of first support plate 100 and second support plate 200 between guide mechanism 400 and locking mechanism 500. Through the guidance of guide mechanism 400 to the lifting process of one end second support plate 200 and the locking release of locking mechanism 500 to the other end second support plate 200 and first support plate 100, the elastic guidance of elastic piece 300 in the elastic force release process is better controlled, the jacking thrust and jacking direction of elastic piece 300 to second support plate 200 are guaranteed, and the thrust of elastic piece 300 is relatively more evenly distributed to second support plate 200, the unnecessary inclination tendency of second support plate 200 and the friction between guide mechanism 400 are reduced.

[0030] Please refer to Figures 1 to 2 In the auxiliary installation jig one embodiment of the utility model, elastic piece 300 adopts compression spring, when compression spring is compressed, potential energy is stored. When jacking is needed, locking mechanism 500 is loosened to release potential energy. Compression spring can provide more stable, controllable elastic force and more sufficient elastic deformation variable compared with other elastic pieces, and the type of compression spring can be more flexibly selected according to the height of sealing ring installation space, the appropriate wire diameter, coil pitch and coil quantity, so that the jacking distance requirement of second support plate 200 is better matched, and compression spring makes the jig cost lower and the jig easier to operate. If the jacking capacity of compression spring is sufficient, the number of compression springs can be a group, and the plate surface central position between first support plate 100 and second support plate 200 is preferably installed. When the number of a group of compression springs is insufficient to jacking the sealing ring of alloy material, the number of compression springs can be multiple groups to improve the jacking capacity to second support plate 200.

[0031] Please refer to Figures 2 to 3In the auxiliary installation jig one embodiment of the utility model, the guide mechanism 400 includes at least two groups of interval setting guide column 410, the shape of guide column 410 is preferably cylindrical, one end of guide column 410 is fixedly installed on the board surface of first support plate 100, the other end of guide column 410 penetrates second support plate 200, when second support plate 200 is in the jacking movement, it is vertically displaced along the axial direction of guide column 410, to realize the guiding effect of second support plate 200.In this embodiment, the number of guide column 410 is two groups, compared with the guiding effect of a group of guide column 410, two groups of guide column 410 can limit the rotation of second support plate 200 in the plane direction, that is, the horizontal direction of board surface, to prevent the misplacement horizontal displacement of second support plate 200 and first support plate 100.The length of guide column 410 is not limited, and can be determined comprehensively according to the installation space height of sealing ring and the maximum jacking displacement of second support plate 200.Second support plate 200 is provided with guide hole 230, guide column 410 passes through guide hole 230 to realize the guiding of second support plate 200, the diameter size of guide hole 230 is slightly larger than the diameter size of guide column 410, and the clearance of guide hole 230 and guide column 410 is required to ensure the guiding of guide column 410 and prevent the inclination of second support plate 200 due to the irregular pushing of elastic member 300.

[0032] Please refer to Figure 3 And Figure 4 In the auxiliary installation jig one embodiment of the utility model, the locking mechanism 500 includes at least two groups of interval setting locking piece 510, and the at least two groups of interval setting locking piece 510 are locked to connect first support plate 100 and second support plate 200 respectively, in this embodiment, the number of locking piece 510 is two groups, and the second support plate 200 region between the two groups of locking piece 510 is used to place the handle part of sealing ring, since the handle part of sealing ring is located outside the installation cavity when the sealing ring is installed, the sealing ring is locked to the corresponding connecting equipment by rotating the handle part of sealing ring, and the two groups of symmetrically interval setting locking piece 510 provide support area for the handle part on second support plate 200, and the two groups of symmetrically setting locking piece 510 can better control the locking of first support plate 100 and second support plate 200, to avoid the deflection of second support plate 200.

[0033] Please refer to Figure 4In the auxiliary installation jig one embodiment of the utility model, locking piece 510 adopts bolt connecting piece, specifically, locking piece 510 includes locking bolt 511 and locking nut 512, locking bolt 511 is connected with locking nut 512 in screw thread through first support plate 100 and second support plate 200, and the relative position of locking nut 512 on locking bolt 511 is adjusted, thereby realizing the spacing adjustment between first support plate 100 and second support plate 200, and the unscrewing action of locking nut 512 is more easily controlled the elastic recovery of elastic member 300.

[0034] In order to further control the influence of locking piece 510 unscrewing process on second support plate 200 and sealing ring positioning installation, in the auxiliary installation jig one embodiment of the utility model, locking nut 512 is set on the board surface of first support plate 100 away from second support plate 200, specifically, compared with locking nut 512 adhering to second support plate 200 locking, when locking nut 512 adheres to first support plate 100 locking, the unscrewing of locking nut 512 does not interfere with second support plate 200, avoids the mis-touching depression operation to second support plate 200 or the compression of elastic member 300, guarantees the relative stability of second support plate 200, and meanwhile, the handle part of sealing ring can also be avoided to be touched, and operation is more convenient.

[0035] In order to reduce the thrust burden of elastic member 300 to second support plate 200 and the sealing ring supported thereon, reduce the overall weight, in the auxiliary installation jig one embodiment of the utility model, second support plate 200 preferably adopts the light weight plate material, in the embodiment, second support plate 200 adopts acrylic plate, and in other embodiments, second support plate 200 can also adopt wooden board, polypropylene plastic plate, polyethylene plastic plate, PVC plastic plate or light metal plate etc.

[0036] Please refer to Figure 3 In the auxiliary installation jig one embodiment of the utility model, second support plate 200 includes second circular plate part 210 and second arc plate part 220, and second circular plate part 210 and second arc plate part 220 are integrated structure. Locking mechanism 500 is connected with second arc plate part 220 and first support plate 100, and guide mechanism 400 is connected with second circular plate part 210, wherein second circular plate part 210 is used to support the annular main body part of sealing ring, second arc plate part 220 is used to support the handle part of sealing ring and provide the installation space of two groups of locking pieces 510 arranged relatively spaced apart, and the arc-shaped board surface of second arc plate part 220 is designed to facilitate the horizontal direction fine adjustment of the positioning process of sealing ring, and provides more sufficient holding space during jig placing.

[0037] Further, in order to facilitate standardized manufacturing, avoid the complexity of jig design and manufacturing, and improve the practicability of the jig, in an embodiment of the auxiliary installation jig, the first support plate 100 and the second support plate 200 have the same structure, and thus will not be described here.

[0038] The auxiliary installation jig for positioning and installing the sealing ring has a compact structure, can adapt to the narrow installation cavity space of the sealing ring, horizontally lifts the sealing ring placed on the second support plate to the position to be installed through the elasticity of the elastic member, and continuously maintains the horizontal state of the sealing ring during the positioning and installing process, and the second support plate is a support and adjusting platform for the sealing ring installation, facilitating the positioning and connecting of the positioning pin. One person can complete the positioning and installing process of the sealing ring by using the jig, without the need of additional auxiliary tools or cooperation of multiple persons, so that the operation difficulty and labor intensity are greatly reduced. The installation time and labor cost are saved, the human operation error is reduced, and the installation accuracy and reliability are improved. The technical problem that it is difficult to maintain the horizontal state during the existing sealing ring installation process and two persons are needed to cooperate to complete the positioning and installing process is solved. Therefore, the auxiliary installation jig effectively overcomes some practical problems in the prior art, and has high utilization value and use significance.

[0039] The above embodiment only exemplarily illustrates the principle and effect of the auxiliary installation jig, and is not used to limit the auxiliary installation jig. Any person skilled in the art can modify or change the above embodiment without departing from the spirit and scope of the auxiliary installation jig. Therefore, all equivalent modifications or changes completed by those skilled in the art without departing from the spirit and technical thought disclosed by the auxiliary installation jig should be covered by the claims of the auxiliary installation jig.

Claims

1. An auxiliary mounting fixture for positioning and installing a sealing ring, characterized in that, include, First support plate, The second support plate is disposed above the first support plate; An elastic element is compressed and disposed between the first support plate and the second support plate, with one end of the elastic element along the compression direction abutting against the first support plate and the other end of the elastic element along the compression direction abutting against the second support plate; A guiding mechanism is disposed on the first support plate and guides and connects to the second support plate; A locking mechanism is located at one end away from the guide mechanism and is detachably locking the first support plate and the second support plate.

2. The auxiliary installation fixture according to claim 1, characterized in that, The elastic element is located between the guiding mechanism and the locking mechanism.

3. The auxiliary installation fixture according to claim 1 or 2, characterized in that, The elastic element is a compression spring, and there are multiple sets of compression springs.

4. The auxiliary installation fixture according to claim 1, characterized in that, The guiding mechanism includes at least two sets of spaced guide posts, one end of each set of guide posts being fixedly connected to the first support plate, and the other end being connected through the second support plate.

5. The auxiliary installation fixture according to claim 1, characterized in that, The locking mechanism includes at least two sets of locking members spaced apart, which respectively lock the first support plate and the second support plate.

6. The auxiliary installation fixture according to claim 5, characterized in that: The locking component includes a locking bolt and a locking nut. The locking bolt passes through the first support plate and the second support plate and is threadedly connected to the locking nut.

7. The auxiliary installation fixture according to claim 6, characterized in that, The locking nut is disposed on the surface of the first support plate away from the second support plate.

8. The auxiliary installation fixture according to claim 1, characterized in that, The second support plate is made of acrylic sheet.

9. The auxiliary installation fixture according to claim 1, characterized in that, The second support plate includes a second circular plate portion and a second arc plate portion, the second circular plate portion and the second arc plate portion are an integral structure, the locking mechanism is connected to the second arc plate portion, and the guiding mechanism is connected to the second circular plate portion.

10. The auxiliary installation fixture according to claim 9, characterized in that, The first support plate has the same structure as the second support plate.

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