Material shuttle conveying device and chip sorting machine

By designing a shuttle conveyor device and utilizing the angular arrangement of the Y-axis and X-axis conveyor groups and the movement of the interference zone, the problems of large space occupation and low feeding cycle in the existing technology were solved, and efficient chip feeding and conveying were achieved.

CN223673709UActive Publication Date: 2025-12-16HANGZHOU CHANGCHUAN TECH CO LTD
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Patent Information

Application Number
CN202423289367.8
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-12-30
Publication Date
2025-12-16
Estimated Expiration
2034-12-30

AI Technical Summary

Technical Problem

In existing chip manufacturing processes, rotary table feeding devices and robotic arm feeding methods occupy a lot of space and have low feeding cycle continuity, which affects efficiency.

Method used

Design a shuttle conveying device, including a first conveying mechanism and a second conveying mechanism, both of which include Y-axis and X-axis conveying groups. The X-axis and Y-axis are arranged at an angle and are provided with a loading area, a unloading area and an interference area. The X-axis conveying group can move within the interference area to avoid interference. Y-axis and X-axis detection components are used to ensure the continuity and efficiency of conveying.

Benefits of technology

It reduces assembly space, improves feeding cycle time and efficiency, reduces interference in the X and Y directions, and achieves efficient material conveying without the need for additional auxiliary structures.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to the technical field of chip manufacturing, and provides a material shuttle conveying device and a chip sorting machine. The material shuttle conveying device comprises a first conveying mechanism and a second conveying mechanism. The first conveying mechanism and the second conveying mechanism each comprise a Y-direction conveying set and an X-direction conveying set connected to the Y-direction conveying set, the two Y-direction conveying sets are arranged in the X direction, and an angle is formed between the X direction and the Y direction. At least one of the two Y-direction conveying sets is provided with a feeding area, a discharging area and an interference area which are arranged in the Y direction, the interference area is arranged between the feeding area and the discharging area, and at least one of the two X-direction conveying sets can move in the interference area in the direction away from the other one in the X direction. According to the material shuttle conveying device, a large assembling space is not needed, and the feeding rhythm and efficiency are improved.
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Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of chip manufacturing, in particular to a magazine conveying device and a chip sorting machine. BACKGROUND

[0002] In the manufacturing process of chips, detection, packaging, sorting and other processes are needed. When sorting chips, the feeding method is basically to use a turntable feeding device or a mechanical hand for feeding.

[0003] When using a turntable feeding device for feeding, a plurality of workstations are usually provided on the turntable, and a plurality of magazines are needed to participate in conveying. Such a setting not only occupies more workstations of the turntable, resulting in a larger size of the turntable and the need for a larger assembly space; moreover, the setting of multiple magazines causes the stroke size of the subsequent handling mechanical hand to become larger, increasing the cost. When using a mechanical hand for feeding, a magazine and X, Y and Z movements of the mechanical hand are still needed, but there is still a waiting time when the mechanical hand feeds, resulting in low continuity of the feeding rhythm. Even if two parallel magazines are matched to ensure the feeding rhythm, there is still a waiting time, affecting the feeding efficiency. CONTENT OF THE UTILITY MODEL

[0004] Therefore, it is necessary to provide a magazine conveying device which not only does not need a larger assembly space, but also improves the feeding rhythm and efficiency.

[0005] A magazine conveying device comprises a first conveying mechanism and a second conveying mechanism; the first conveying mechanism and the second conveying mechanism each comprise a Y-direction conveying group and an X-direction conveying group connected to the Y-direction conveying group, two Y-direction conveying groups are arranged at intervals along the X-direction, and the X-direction and the Y-direction are at an angle; at least one of the two Y-direction conveying groups is provided with a feeding area, a discharging area and an interference area arranged along the Y-direction, the interference area is arranged between the feeding area and the discharging area, and at least one of the two X-direction conveying groups can move in the X-direction away from the other in the interference area.

[0006] It can be understood that, by using the arrangement of the first conveying mechanism and the second conveying mechanism, material conveying can be carried out respectively, for example, the first conveying mechanism can be used for loading in the loading area, and the second conveying mechanism can be used for unloading in the unloading area. When the second conveying mechanism unloads and the corresponding X-direction conveying group returns to the loading area, the first conveying mechanism carries the material to the unloading area for unloading. When the two X-direction conveying groups move to the interference area, at least one of them moves away from the other side along the X-direction to avoid interference. Such an arrangement reduces the waiting time of the two conveying mechanisms on both sides along the Y-axis direction, and improves the conveying rhythm. Moreover, due to the arrangement of the interference area, the two X-direction conveying groups can adjust to each other to reduce interference and further improve the conveying efficiency. In addition, the first conveying mechanism and the second conveying mechanism cooperate to realize material loading and conveying, without the need to add other auxiliary structures, thereby reducing the occupied assembly space. Moreover, by using the arrangement of the interference area, the size along the X-direction is effectively reduced, further reducing the occupied space.

[0007] In some embodiments, the shuttle conveying device further comprises a Y-direction detection assembly connected to the Y-direction conveying group and / or the corresponding X-direction conveying group. At least one of the X-direction conveying groups is configured to move back along the X-direction in response to a detection signal of the Y-direction detection assembly.

[0008] In some embodiments, the Y-direction conveying group comprises a Y-direction rail and a Y-direction support seat slidingly connected to the Y-direction rail. The Y-direction detection assembly comprises a detection rail and a Y-direction sensor. The length of the detection rail is along the Y-direction. The Y-direction sensor is mounted on the Y-direction support seat or the corresponding X-direction conveying group. The Y-direction sensor can move along the Y-direction to cooperate with the detection rail to feed back different detection signals.

[0009] In some embodiments, the detection rail comprises at least two shielding pieces arranged at intervals along the X-direction. Each of the shielding pieces corresponds to a Y-direction sensor. The length of the shielding pieces along the Y-direction is less than the length of the Y-direction rail. One of the shielding pieces is provided with a gap area. Alternatively, at least two of the shielding pieces are provided with gap areas, and each of the gap areas is arranged staggered along the Y-direction.

[0010] In some embodiments, the Y-direction conveying group comprises at least a Y-direction support seat. The shuttle conveying device further comprises an X-direction detection assembly arranged on the Y-direction support seat. The Y-direction conveying group is configured to drive the X-direction conveying group to move along the Y-direction in response to a detection signal of the X-direction detection assembly.

[0011] In some embodiments, the X-direction conveying group comprises an X-direction rail and an X-direction support base slidably connected to the X-direction rail, and the X-direction rail is arranged on the Y-direction support base;

[0012] The X-direction detection assembly comprises a trigger piece and an X-direction sensor, one of which is arranged on the Y-direction support base and the other of which is arranged on the X-direction support base, and the X-direction sensor can be triggered by the trigger piece to send a detection signal.

[0013] In some embodiments, the X-direction support base comprises a first support arm and a second support arm connected to the first support arm, and the two are arranged at an angle, and the first support arm is slidably connected to the X-direction rail; in the two X-direction conveying groups, the second support arm corresponding to each is arranged on the same side of the Y-direction with respect to the first support arm corresponding to each.

[0014] In some embodiments, the shuttle conveying device further comprises a plurality of groups of material tilting detection assemblies, and the plurality of groups of material tilting detection assemblies are arranged at intervals along the Y-direction, and each group of material tilting detection assemblies comprises a transmitting end and a receiving end, which are arranged opposite and at intervals along the X-direction.

[0015] In some embodiments, the Y-direction conveying group and / or the X-direction conveying group adopts a lead screw drive; and / or, the shuttle conveying device further comprises a support base, and the first conveying mechanism and the second conveying mechanism are both mounted on the support base.

[0016] The application also provides a chip sorting machine, which comprises a feeding device, a testing device, a discharging device, and the above-mentioned shuttle conveying device, and the shuttle conveying device is arranged between the feeding device and the testing device and / or between the discharging device and the testing device.

[0017] That is, the feeding device is used to convey the chips to be tested to the testing device, and the chips tested by the testing device are conveyed to the discharging device. In this process, the shuttle conveying device can be used to continuously convey the chips without interruption, thereby improving the feeding rhythm and efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the embodiments of the application or the prior art, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the application, and other drawings can be obtained by those skilled in the art without creative labor.

[0019] Figure 1 A schematic view of a shuttle conveying device provided by an embodiment of the application;

[0020] Figure 2 This is a top view of a shuttle conveying device provided in an embodiment of this application;

[0021] Figure 3 This is a partial schematic diagram of a shuttle conveying device provided in an embodiment of this application;

[0022] Figure 4 for Figure 3 The side view of the shuttle conveyor provided in the image;

[0023] Figure 5 This is a schematic diagram of the second conveying mechanism in a shuttle conveying device provided in an embodiment of this application;

[0024] Figure 6 This is another schematic diagram of the second conveying mechanism in a shuttle conveying device provided in an embodiment of this application;

[0025] Figure 7 This is a schematic diagram of a material tilting detection component in a shuttle conveying device provided in an embodiment of this application.

[0026] Reference numerals: 11. Y-axis lead screw; 12. Y-axis nut; 13. Y-axis belt drive; 14. Y-axis power source; 15. X-axis lead screw; 16. X-axis nut; 17. X-axis belt drive; 18. X-axis power source; 101. Y-axis conveyor group; 102. X-axis conveyor group; 103. Loading area; 104. Unloading area; 105. Interference area; 110. First conveying mechanism; 120. Second conveying mechanism; 130. Y-axis detection component; 131. Detection guide rail; 132. Y-axis sensor; 140. X-axis detection component; 141. Contact... 142. Transmitter; 150. Material warping detection assembly; 151. Transmitter; 152. Receiver; 153. First support; 154. Second support; 155. Crossbeam; 156. Support leg; 160. Support base plate; 200. Material tray; 210. Material trough; 220. Groove; 1011. Y-axis track; 1012. Y-axis support seat; 1021. X-axis track; 1022. X-axis support seat; 1022a. First support arm; 1022b. Second support arm; 1310. Notch area; 1311. Shielding plate. Detailed Implementation

[0027] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0028] It is to be understood that where the terms "fixed" or "attached" are used herein with respect to one element attached to another element, the elements can be directly connected to each other or intervening elements can be present. Where, as in this case, an element is referred to as being "connected" or "coupled" to another element, it can be directly connected to the other element or intervening elements can be present. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar terms as used herein for the purpose of description only and are not intended to be limiting.

[0029] In addition, the terms "first", "second", and the like, do not denote any order, quantity, combination or important / primary use, but are used to identify one of the features described. Thus, the features with "first", "second" can explicitly or implicitly include at least one of the features. In the description of the present application, the meaning of "a plurality of" is at least two, for example, two, three, etc., unless otherwise explicitly specified and limited.

[0030] In the present application, unless otherwise explicitly specified and limited, the first feature is "on", "under" the second feature, which can be directly in contact with the second feature, or indirectly in contact with the second feature through an intermediate medium. Moreover, the first feature "above", "over" and "on" the second feature can be directly above or obliquely above the second feature, or only indicate that the first feature is higher than the second feature in horizontal height. The first feature "below", "under" and "under" the second feature can be directly below or obliquely below the second feature, or only indicate that the first feature is lower than the second feature in horizontal height.

[0031] Unless otherwise defined, all technical and scientific terms used in the specification of the present application have the same meaning as commonly understood by one of ordinary skill in the art to which the present application belongs. The terms used in the specification of the present application are only for the purpose of describing specific embodiments and are not intended to limit the present application. The term "and / or" used in the specification of the present application includes any and all combinations of one or more related listed items.

[0032] Please refer to Figures 1 to 3 An embodiment of the present application provides a shuttle conveying device for feeding in the chip manufacturing process, which not only does not need a large assembly space, but also improves the feeding rhythm and efficiency. Specifically, the shuttle conveying device includes a first conveying mechanism 110 and a second conveying mechanism 120, both of which include a Y-direction conveying group 101 and an X-direction conveying group 102 connected to the Y-direction conveying group 101. The conveying directions of the two Y-direction conveying groups 101 are along the Y-direction and are arranged at intervals along the X-direction. The conveying directions of the two X-direction conveying groups 102 are along the X-direction. The X-direction and the Y-direction are arranged at an angle, for example, the X-direction and the Y-direction are perpendicular.

[0033] At least one of the two Y-direction conveying groups 101 is provided with a loading area 103, a discharging area 104 and an interference area 105 arranged along the Y-direction, and the interference area 105 is arranged between the loading area 103 and the discharging area 104. The loading area 103 is used for the magazine conveying device to load materials from other processes, for example, the chips after detection. The discharging area 104 is used for the magazine conveying device to unload materials, so as to transfer the chips to the next process. The interference area 105 is the area where the two X-direction conveying groups 102 interfere with each other when moving along the Y-direction. In the embodiment, at least one of the two X-direction conveying groups 102 can move along the X-direction away from the other in the interference area 105.

[0034] It should be noted that the movement of the X-direction conveying group 102 along the X-direction is specifically the movement of the part of the X-direction conveying group 102 loaded with the tray 200 along the X-direction. In actual use, each X-direction conveying group 102 includes an X-direction driving part (not shown in the figure) and an X-direction support seat 1022 connected to the X-direction driving part, the X-direction support seat 1022 moves along the X-direction under the action of the X-direction driving part, and the X-direction support seat 1022 is used to load the tray 200. Therefore, the movement of at least one of the two X-direction conveying groups 102 along the X-direction away from the other in the interference area 105 means that the corresponding X-direction support seat 1022 of at least one of the two X-direction conveying groups 102 can move along the X-direction away from the other in the interference area 105.

[0035] Among them, in order to facilitate the description, the first conveying mechanism 110 corresponds to the first X-direction conveying group and the first Y-direction conveying group, and the second conveying mechanism 120 corresponds to the second X-direction conveying group and the second Y-direction conveying group.

[0036] That is, by cooperating the first conveying mechanism 110 and the second conveying mechanism 120, the material conveying can be carried out respectively, for example, the first X-direction conveying group in the first conveying mechanism 110 can move to the loading area 103 to load materials, and the second X-direction conveying group in the second conveying mechanism 120 can move to the discharging area 104 to unload materials. When the two X-direction conveying groups 102 complete the corresponding loading and unloading respectively, the first X-direction conveying group moves along the Y-direction towards the discharging area 104 under the action of the corresponding first Y-direction conveying group, and the second X-direction conveying group returns to the loading area 103 along the Y-direction under the action of the corresponding second Y-direction conveying group. Therefore, when the two X-direction conveying groups 102 move to the interference area 105, the X-direction support seat 1022 of at least one of the X-direction conveying groups 102 can move along the X-direction away from the other side, so as to avoid interference; and the movement of the X-direction support seat 1022 along the X-direction will not affect the movement of the X-direction conveying group 102 along the Y-direction.

[0037] For example, the X-direction support seat 1022 of the first X-direction conveying group can move along the X-direction to the side away from the second X-direction conveying group; or, the X-direction support seat 1022 of the second X-direction conveying group can move along the X-direction to the side away from the first X-direction conveying group; or, the X-direction support seats 1022 of the first X-direction conveying group and the second X-direction conveying group can move away from each other along the X-direction.

[0038] In summary, the material shuttle conveying device provided in the embodiment reduces the waiting time of each conveying mechanism for loading and unloading on both sides along the Y-axis direction and improves the conveying rhythm by using the first conveying mechanism 110 and the second conveying mechanism 120 to cooperate with the conveying along the Y-direction and the X-direction, respectively. Meanwhile, during the conveying process, the interference area 105 is arranged to adjust the two X-direction conveying groups 102 to reduce the interference and further improve the conveying efficiency. In particular, when the two X-direction conveying groups 102 have driving along the X-direction in the interference area 105, the movement path of each X-direction conveying group 102 can be reduced to further reduce the waiting time. Moreover, due to the arrangement of the interference area 105, a coincident area is arranged in the X-direction of the two X-direction conveying groups 102, which further reduces the size of the material shuttle conveying device along the X-direction and reduces the occupied space. In addition, the material shuttle conveying device does not need to add other auxiliary structures, and only relies on the cooperation of the first conveying mechanism 110 and the second conveying mechanism 120 to realize the material loading and conveying, thereby reducing the overall occupied assembly space and facilitating integration in more different use devices.

[0039] Please refer to Figure 1 , Figure 3 , Figure 4 and Figure 5 As some examples, the material shuttle conveying device further comprises a Y-direction detection assembly 130 connected to the Y-direction conveying group 101 and / or the corresponding X-direction conveying group 102, and at least one X-direction conveying group 102 is configured to move away along the X-direction in response to the detection signal of the Y-direction detection assembly 130. That is, the Y-direction detection assembly 130 can be arranged to detect the position of the X-direction conveying group 102 along the Y-direction, and then feedback in time so that the X-direction support seat 1022 in the X-direction conveying group 102 can move along the X-direction to reduce the interference of the two X-direction conveying groups 102 along the X-direction and ensure the conveying reliability. Each Y-direction conveying group 101 is correspondingly provided with a set of Y-direction detection assemblies 130.

[0040] As Figures 3 to 5As shown, specifically, each of the two Y-direction conveying groups 101 comprises a Y-direction rail 1011 and a Y-direction support seat 1012 slidingly connected to the Y-direction rail 1011. Meanwhile, each of the two Y-direction conveying groups 101 further comprises a Y-direction driving part (not shown in the figure), and the Y-direction support seat 1012 is connected to the Y-direction driving part and moves along the length direction of the Y-direction rail 1011 under the action of the corresponding Y-direction driving part. The length direction of the Y-direction rail 1011 is the Y-axis direction (referred to as Y-direction). The two X-direction conveying groups 102 are respectively mounted on the corresponding Y-direction support groups, thereby realizing the Y-direction movement of the X-direction conveying group 102.

[0041] The Y-direction detection assembly 130 comprises a detection rail 131 extending along the Y-direction and a Y-direction sensor 132 mounted on the Y-direction support seat 1012. Of course, the Y-direction sensor 132 can also be mounted on the corresponding X-direction conveying group 102 of the Y-direction support seat 1012; or, part of the Y-direction sensor 132 is mounted on the Y-direction support seat 1012, and the other part is connected to the X-direction conveying group 102. As long as it can ensure that the Y-direction sensor 132 can move along the Y-direction with the X-direction conveying group 102.

[0042] When the Y-direction sensor 132 moves with the Y-direction support seat 1012, it can cooperate with the detection rail 131 to feedback different detection signals in the Y-direction. Specifically, it prompts the X-direction conveying group 102 to be located in one of the feeding area 103, the discharging area 104 and the interference area 105, thereby facilitating timely movement feedback and avoidance in the interference area 105, improving response timeliness, and further improving the feeding rhythm.

[0043] As shown in some specific embodiments, Figures 3 to 5 The length L1 of the two shielding pieces 1311 along the Y-direction is less than the length L2 of the Y-direction rail 1011, and one of the shielding pieces 1311 is provided with a gap area 1310. That is, different detection signals can be fed back through the structural arrangement of the detection rail 131, thereby judging the position area of the X-direction conveying group 102 in the Y-direction.

[0044] Taking the Y-direction sensor 132 as an example, two Y-direction sensors 132 are arranged along the X-direction on the Y-direction support seat 1012, and each Y-direction sensor 132 corresponds to a shielding piece 1311. Among them, the two Y-direction sensors 132 can both adopt a reflection type sensor. Therefore, when the Y-direction sensor 132 is shielded by the shielding piece 1311, the Y-direction sensor 132 feeds back a "1" signal, and when the Y-direction sensor 132 is not shielded, it feeds back a "0" signal.

[0045] Based on this, since the lengths of the two shielding pieces 1311 along the Y direction are both less than the length of the Y direction track 1011, the part of the Y direction track 1011 protruding the shielding piece 1311 in the Y direction can be defined as a blank area. Therefore, when the two Y direction sensors 132 move to the blank area with the Y direction support seat 1012, neither of the two Y direction sensors 132 is shielded, and then a "00" signal is fed back. Meanwhile, the part of the shielding piece 1311 used for shielding the Y direction sensor 132 is defined as a shielding area, and then when the two Y direction sensors 132 move to the shielding area, a "11" signal is fed back. Moreover, since one of the shielding pieces 1311 is provided with a notch area 1310, when the corresponding Y direction sensor 132 moves to the notch area 1310, it will not be shielded, while the other shielding piece 1311 does not have a notch area 1310, and then shields the corresponding Y direction sensor 132, at this time, the two Y direction sensors 132 feed back a "10" signal. In this way, the Y direction track 1011 along the Y direction can be divided into the feeding area 103, the interference area 105 and the discharging area 104 according to the different signals fed back.

[0046] Among them, the area corresponding to the blank area is used as the discharging area 104, the area corresponding to the two shielding areas is used as the interference area 105, and the area corresponding to the one shielding area and the one notch area 1310 is used as the feeding area 103. Or, the area corresponding to the blank area is used as the feeding area 103, the area corresponding to the two shielding areas is used as the discharging area 104, and the area corresponding to the one shielding area and the one notch area 1310 is used as the interference area 105. Or, the area corresponding to the blank area is used as the discharging area 104, the area corresponding to the two shielding areas is used as the feeding area 103, and the area corresponding to the one shielding area and the one notch area 1310 is used as the interference area 105. Here, only examples are given.

[0047] Alternatively, both of the shielding pieces 1311 can be provided with a notch area 1310, and the two notch areas 1310 are arranged staggered along the Y direction. This results in that the signals fed back by the different notch areas 1310 are "10" and "01", which can be used to distinguish different areas.

[0048] In other embodiments, the shielding piece 1311 can also be three. At this time, one of the shielding pieces 1311 can have a length along the Y direction substantially the same as the length of the Y direction track 1011, and the lengths of the other two shielding pieces 1311 are less than the length of the Y direction track 1011, and one of the two shielding pieces 1311 with smaller length is provided with a notch area 1310. Or, the lengths of two of the shielding pieces 1311 are the same as the length of the Y direction track 1011, and the length of the other shielding piece 1311 is less than the length of the Y direction track 1011, and one of the two shielding pieces 1311 with longer length is provided with a notch area 1310. Here, only examples are given.

[0049] Alternatively, each Y-direction track 1011 can be provided with three shielding pieces 1311 arranged at intervals along the Y direction, and each Y-direction support base 1012 can be provided with a Y-direction sensor 132, which can be triggered when moving to a region.

[0050] Please refer to Figure 5 As another example, the shuttle conveying device further comprises an X-direction detection assembly 140 arranged between the Y-direction support base 1012 and the X-direction conveying assembly 102, and the Y-direction conveying assembly 101 is configured to drive the X-direction conveying assembly 102 to move along the Y direction in response to a detection signal of the X-direction detection assembly 140. That is, the X-direction detection assembly 140 is arranged to detect and determine the position of the X-direction support base 1022, and the Y-direction conveying is performed only when the X-direction support base 1022 is in a safe position, thereby improving the conveying safety. When the X-direction support base 1022 is not moved to the safe position, the X-direction driving part can be started to drive the X-direction support base 1022 to move.

[0051] In actual use, the X-direction detection assembly 140 comprises a trigger piece 141 and an X-direction sensor 142, one of which is arranged on the Y-direction support base 1012 and the other is arranged on the X-direction support base 1022. The X-direction sensor 142 can be triggered by the trigger piece 141 to emit a detection signal. That is, only when the trigger piece 141 triggers the X-direction sensor 142 to emit a detection signal, it is proved that the X-direction support base 1022 is in a safe position, and then the Y-direction driving part is started to drive the Y-direction support base 1012 to move along the Y direction, thereby driving the entire X-direction conveying assembly 102 to move along the Y direction. If the trigger piece 141 does not trigger the X-direction sensor 142, it is proved that the position of the X-direction support base 1022 still needs to be adjusted.

[0052] Further, the X-direction sensor 142 can be arranged on the Y-direction support base 1012, and the trigger piece 141 can be arranged on the X-direction support base 1022. At this time, with respect to the two X-direction detection assemblies 140 corresponding to the two X-direction conveying assemblies 102 respectively, the X-direction sensor 142 corresponding to each of them is located on the side opposite to the two Y-direction support bases 1012, thereby defining the safe position of the Y-direction conveying assembly 101 driven, and reducing the movement interference of the two X-direction conveying assemblies 102.

[0053] Further, one X-direction sensor 142 is further arranged on the side opposite to the two X-direction sensors 142 respectively, for limiting the movement of the X-direction support base 1022. When this X-direction sensor 142 is triggered, the X-direction support base 1022 needs to be adjusted to move along the X direction away from the other X-direction support base 1022.

[0054] Among them, the X-direction sensor 142 adopts a reflection type sensor.

[0055] Please refer to Figure 2 , Figure 5 and Figure 6 , in optional embodiments, each X-direction support base 1022 comprises a first support arm 1022a and a second support arm 1022b connected to the first support arm 1022a, and both are arranged at an angle, for example, in an L shape. The first support arm 1022a is in sliding connection with the X-direction rail 1021 and is connected with the X-direction driving part. The first support arm 1022a extends along the X-direction. The second support arm 1022b is connected to one end of the first support arm 1022a along the X-direction, and is mainly used for loading the tray 200. For two X-direction conveying groups 102, the respective corresponding second support arm 1022b is located on the same side of the respective corresponding first support arm 1022a along the Y-direction. For example, both second support arms 1022b can be located on the lower side of the respective corresponding first support arm 1022a along the Y-direction, or on the upper side. Figure 2

[0056] It can be understood that by arranging the first support arm 1022a and the second support arm 1022b at an angle, the occupied space in a single direction, especially along the Y-direction, can be reduced, thereby reducing the interference of each X-direction conveying group 102 in the X-direction and optimizing the space utilization. At the same time, due to the same side arrangement of the second support arms 1022b of the two X-direction conveying groups 102, the occupied space along the Y-direction is further reduced, and the cooperation reference of the two X-direction conveying groups 102 relative to other structures is basically the same, without the need to adjust the loading or unloading position each time.

[0057] Please refer to Figure 3 , Figure 5 and Figure 6 , in some embodiments, the two Y-direction conveying groups 101 adopt screw drive. Taking the Y-direction driving part of the Y-direction conveying group 101 as an example, the Y-direction driving part comprises a Y-direction lead screw 11 and a Y-direction nut 12 in threaded transmission connection with the Y-direction lead screw 11, and a Y-direction support base 1012 connected to the Y-direction nut 12. The Y-direction lead screw 11 rotates around its own axis to drive the Y-direction nut 12 to move along the Y-direction lead screw 11 in the axial direction (i.e. Y-direction), thereby synchronously moving the Y-direction support base 1012. The Y-direction driving part further comprises a Y-direction belt transmission 13 and a Y-direction power source 14, the Y-direction power source 14 is in transmission connection with one pulley of the Y-direction belt transmission 13, and the other pulley of the Y-direction belt transmission 13 is in transmission connection with the Y-direction lead screw 11, thereby realizing the rotation of the Y-direction lead screw 11. By arranging the Y-direction belt transmission 13, the installation position of the Y-direction power source 14 can be adjusted to a position parallel to the Y-direction lead screw 11, thereby reducing the assembly space occupied along the Y-direction.

[0058] ​The X-direction driving part in the X-direction conveying group 102 can also adopt a lead screw transmission. Specifically, the X-direction driving part includes an X-direction lead screw 15 and an X-direction nut 16 threadedly connected to the X-direction lead screw 15, and the X-direction support base 1022 is connected to the X-direction nut 16. The X-direction driving part further includes an X-direction belt transmission 17 and an X-direction power source 18, the X-direction power source 18 is drivingly connected to one of the pulleys of the X-direction belt transmission 17, and the other pulley of the X-direction belt transmission 17 is drivingly connected to the X-direction lead screw 15. The X-direction power source 18 drives the X-direction lead screw 15 to rotate through the X-direction belt transmission 17, and in turn drives the X-direction nut 16 to move to drive the X-direction support base 1022 to move synchronously.

[0059] Further, the magazine conveying device further includes a support base plate 160, and the first conveying mechanism 110 and the second conveying mechanism 120 are both integrally installed on the support base plate 160, so as to facilitate installation of the magazine conveying device to a target position through the support base plate 160. Meanwhile, the detection guide rail 131 in the aforementioned Y-direction detection assembly 130 is also installed on the support base plate 160.

[0060] Please refer to Figure 1 , Figure 2 and Figure 7 In some examples, the magazine conveying device further includes a plurality of sets of chip warping detection assemblies 150, which are arranged along the Y direction at intervals. Each set of chip warping detection assemblies 150 includes a transmitting end 151 and a receiving end 152, which are arranged opposite to each other along the X direction at intervals.

[0061] In the actual use, the magazine conveying device further includes a first support 153 and a second support 154 for installing the chip warping detection assembly 150, which are arranged opposite to each other along the X direction at intervals, one of which is provided with the receiving end 152, and the other of which is provided with the transmitting end 151. A cross beam 155 is connected between the first support 153 and the second support 154, which not only connects the two supports into an integral structure, but also improves the support strength. Meanwhile, the first support 153, the second support 154 and the cross beam 155 are all connected with support legs 156, which are connected to the aforementioned support base through screws to realize support.

[0062] In the actual use, the magazine conveying device further includes a first support 153 and a second support 154 for installing the chip warping detection assembly 150, which are arranged opposite to each other along the X direction at intervals, one of which is provided with the receiving end 152, and the other of which is provided with the transmitting end 151. A cross beam 155 is connected between the first support 153 and the second support 154, which not only connects the two supports into an integral structure, but also improves the support strength. Meanwhile, the first support 153, the second support 154 and the cross beam 155 are all connected with support legs 156, which are connected to the aforementioned support base through screws to realize support.

[0063] The number of the warpage detection assembly 150 is consistent with the number of the grooves 210 arranged along the Y direction on the tray 200.

[0064] Another embodiment of the present application provides a chip handler, which comprises a feeding device, a testing device, a discharging device and the shuttle conveying device described above. The shuttle conveying device is arranged between the feeding device and the testing device, and the shuttle conveying device is also arranged between the discharging device and the testing device, so as to improve the conveying efficiency of the whole handler. The feeding device is used to convey the chips to be tested to the testing device, and the chips tested by the testing device are conveyed to the discharging device. In this process, the shuttle conveying device can be used to continuously convey the chips, so as to improve the feeding rhythm and efficiency.

[0065] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description simple, all possible combinations of the technical features in the above-mentioned embodiments are not described, however, as long as the combinations of the technical features do not exist contradictory, they should be considered as the scope of the present application.

[0066] The above-mentioned embodiments only express several implementation manners of the present application, the description is more specific and detailed, however, it should not be understood as the limitation of the patent application scope. It should be pointed out that, for the ordinary skilled in the art, several modifications and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the patent protection scope of the present application should be subject to the appended claims.

Claims

1. A magazine conveying device, characterized by The first conveying mechanism (110) and the second conveying mechanism (120) are provided; The first conveying mechanism (110) and the second conveying mechanism (120) each comprise a Y-direction conveying group (101) and an X-direction conveying group (102) connected to the Y-direction conveying group (101), two Y-direction conveying groups (101) are arranged at intervals along the X-direction, and the X-direction is at an angle with the Y-direction; At least one of the two Y-direction conveying groups (101) is provided with a feeding area (103), a discharging area (104) and an interference area (105) arranged along the Y-direction, the interference area (105) is arranged between the feeding area (103) and the discharging area (104), and at least one of the two X-direction conveying groups (102) can move in the interference area (105) along the X-direction away from the other.

2. The magazine conveyor of claim 1, wherein, The shuttle conveying device further comprises a Y-direction detection assembly (130) connected to the Y-direction conveying group (101) and / or the corresponding X-direction conveying group (102), and at least one X-direction conveying group (102) is configured to move away along the X-direction in response to the detection signal of the Y-direction detection assembly (130).

3. The magazine conveyor of claim 2, wherein, The Y-direction conveying group (101) comprises a Y-direction rail (1011) and a Y-direction support seat (1012) slidably connected to the Y-direction rail (1011); The Y-direction detection assembly (130) comprises a detection rail (131) and a Y-direction sensor (132), the length of the detection rail (131) is along the Y-direction, the Y-direction sensor (132) is installed on the Y-direction support seat (1012) or the corresponding X-direction conveying group (102), and the Y-direction sensor (132) can move along the Y-direction to cooperate with the detection rail (131) to feedback different detection signals.

4. The magazine conveyor of claim 3, wherein, The detection rail (131) comprises at least two shielding pieces (1311) arranged at intervals along the X-direction, each shielding piece (1311) corresponds to a Y-direction sensor (132); the length of the shielding piece (1311) along the Y-direction is less than the length of the Y-direction rail (1011); One of the shielding pieces (1311) is provided with a notch area (1310); or, at least two shielding pieces (1311) are provided with notch areas (1310), and each notch area (1310) is arranged staggered along the Y-direction.

5. The magazine conveyor of claim 1, wherein, The Y-direction conveying group (101) at least comprises a Y-direction support seat (1012); The shuttle conveying device further comprises an X-direction detection assembly (140) arranged on the Y-direction support seat (1012), and the Y-direction conveying group (101) is configured to drive the X-direction conveying group (102) to move along the Y-direction in response to the detection signal of the X-direction detection assembly (140).

6. The magazine conveyor of claim 5, wherein, The X-direction conveying group (102) comprises an X-direction rail (1021) and an X-direction support seat (1022) slidably connected to the X-direction rail (1021), and the X-direction rail (1021) is arranged on the Y-direction support seat (1012); The X-direction detection assembly (140) comprises a trigger piece (141) and an X-direction sensor (142), one of which is arranged on the Y-direction support base (1012) and the other is arranged on the X-direction support base (1022), and the X-direction sensor (142) can be triggered by the trigger piece (141) to send a detection signal.

7. The magazine conveyor of claim 6, wherein, The X-direction support base (1022) comprises a first support arm (1022a) and a second support arm (1022b) connected to the first support arm (1022a), which are arranged at an angle, and the first support arm (1022a) is in sliding connection with the X-direction rail (1021). In the two X-direction conveying groups (102), the second support arm (1022b) corresponding to each is arranged on the same side of the Y-direction relative to the first support arm (1022a) corresponding to each.

8. The magazine conveyor of claim 1, wherein, The shuttle conveying device further comprises a plurality of material tilting detection assemblies (150), and each group of the material tilting detection assemblies (150) comprises a transmitting end (151) and a receiving end (152), which are arranged opposite to each other along the X-direction and are spaced apart.

9. The magazine conveyor of claim 1, wherein, The Y-direction conveying group (101) and / or the X-direction conveying group (102) adopts a lead screw transmission; and / or, the shuttle conveying device further comprises a support base plate (160), and the first conveying mechanism (110) and the second conveying mechanism (120) are both mounted on the support base plate (160).

10. A chip handler characterized by, The device comprises a feeding device, a testing device, a discharging device, and the shuttle conveying device according to any one of claims 1 to 9, and the shuttle conveying device is arranged between the feeding device and the testing device and / or between the discharging device and the testing device.