Sucker group switching mechanism
By designing a chuck assembly switching mechanism, a servo motor is used to drive a ball screw and a ball linear guide to achieve linear movement of the chuck assembly, solving the problem of switching silicon wafers in the process boat and improving the passivation film preparation effect and wafer carrying efficiency.
Patent Information
- Application Number
- CN202423278049.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-30
- Publication Date
- 2025-12-16
- Estimated Expiration
- 2034-12-30
AI Technical Summary
In the ALD coating process of photovoltaic cells, existing technologies make it difficult to achieve efficient and flexible switching of silicon wafers within the process boat, resulting in poor passivation film preparation.
A suction cup group switching mechanism was designed, including first and second suction cup groups. The linear movement of the suction cup groups is achieved by a ball screw driven by a servo motor and a ball linear guide. Combined with an electrostatic elimination mechanism, the staggered arrangement and switching of the suction cup groups are realized.
This technology enables flexible switching of silicon wafers within the process boat, improves the passivation film preparation effect, meets the arrangement requirements of different configurations, and increases the wafer carrying efficiency of silicon wafers within the process boat.
Smart Images
Figure CN223673783U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model belongs to the technical field of chuck group switching, and in particular to a chuck group switching mechanism. BACKGROUND
[0002] The ALD film coating process of a photovoltaic cell is a method for manufacturing a photovoltaic cell through atomic layer deposition technology, the ALD film coating process of a photovoltaic cell performs a chemical reaction on the surface of a silicon wafer to form one or more dense passivation films, and is a core process for preparing a solar photovoltaic cell.
[0003] In the preparation process of a BC cell (back contact cell), a passivation film needs to be prepared on both sides of a silicon wafer through an ALD process, in order to meet the requirement of preparing a passivation film on both sides, a silicon wafer is usually placed in a slot of a passivation container (hereinafter referred to as a process boat), and there is only one silicon wafer in the slot of the process boat, and after the ALD process, the required passivation film can be formed on both sides of the silicon wafer.
[0004] The silicon wafer after the completion of the previous process is transferred into the ALD equipment by a flower basket transmission line, and a silicon wafer or an empty slot needs to be placed in the slot of the process boat, a group of vacuum chucks are usually used to take the wafer from the flower basket, the silicon wafer is placed in the process boat through other processing mechanisms, in order to facilitate the wafer transfer between the process boat and the flower basket, the wafer carrying capacity of the process boat and the wafer carrying capacity of the flower basket are in a multiple relationship, and in the actual preparation process of the passivation film, in order to achieve better passivation effect, the silicon wafers in the process boat need to be arranged according to different configurations.
[0005] Therefore, a chuck group switching mechanism is provided to solve the above problems. INVENTION CONTENTS
[0006] In order to make up for the shortcomings of the prior art and solve the existing problems, a chuck group switching mechanism is provided.
[0007] The utility model discloses a kind of chuck group switching mechanisms, including base, the base top fixed installation has first chuck group, fixed disc and fixed frame, the fixed frame one side fixed installation has lifting drive module, the fixed disc top fixed installation has lifting fixed module, the first chuck group top fixed installation has second chuck group, the first chuck group one side fixed installation has first chuck group switching guide mechanism, the first chuck group switching guide mechanism includes mounting block and ball linear guide rail, the base top fixed installation has lifting fixed module, the ball linear guide rail and lifting fixed module are fixedly installed on the outer surface of mounting block together.
[0008] Preferably, one side of the first suction cup group switching guide mechanism is fixedly installed with a first suction cup group driving guide mechanism, the first suction cup group driving guide mechanism comprises a servo motor, the servo motor is fixedly installed at the top of the base, a ball screw is fixedly connected to the output shaft of the servo motor, two bearing sets are fixedly installed on the outer surface of the ball screw, a support is slidably installed on the outer surface of the ball screw, and the support is fixedly installed at the top of the base.
[0009] Preferably, a second suction cup group switching guide mechanism is fixedly installed at the top of the second suction cup group, the first suction cup group and the second suction cup group are respectively provided with a second suction cup group switching driving mechanism and an electrostatic elimination mechanism at the top, and the first suction cup group and the second suction cup group are arranged in a staggered mode in the horizontal direction.
[0010] The utility model has the advantages of the following:
[0011] 1. The utility model provides a suction cup group switching mechanism, a plurality of ceramic suction cups and a plurality of machining parts constitute the first suction cup group and the second suction cup group, the first suction cup group and the second suction cup group are provided with negative pressure by a vacuum generator, the ceramic suction cup and the silicon wafer are attached to form a vacuum, the sum of the number of ceramic suction cups of the first suction cup group and the second suction cup group is the number of wafer of the flower basket, the first suction cup group is fixed on the first suction cup group switching guide mechanism, the switching guide mechanism is composed of a ball linear guide rail and a mounting block, the mounting block is connected with the ball linear guide rail slider and the lifting fixed module, the first suction cup group switching driving mechanism provides power, the first suction cup group switching driving mechanism is driven by the ball screw as the transmission part, the bearing set is as the support part, the servo motor is connected with the ball screw through the shaft coupling, the linear movement of the first suction cup group can be realized by the rotation of the servo motor, and the second suction cup group is fixed on the second suction cup group switching guide mechanism.
[0012] 2. The utility model provides a suction cup group switching mechanism, the second suction cup group switching guide mechanism and the first suction cup group switching guide mechanism structure are consistent, the second suction cup group switching driving mechanism provides power, the second suction cup group switching driving mechanism and the first suction cup group switching driving mechanism structure are consistent, and the linear movement of the second suction cup group is realized, the first suction cup group and the second suction cup group are arranged in a staggered mode along the space X direction, and the electrostatic elimination mechanism is fixed on the first suction cup group and the second suction cup group respectively. ACCURACY
[0013] The drawings described herein are used to provide further understanding of the utility model and constitute a part of the application, and the illustrative embodiments of the utility model and the description thereof are used to explain the utility model, and do not constitute improper limitation on the utility model.
[0014] Figure 1 It is the whole structure schematic diagram of the utility model;
[0015] Figure 2 is a side view structure schematic diagram of the utility model;
[0016] Figure 3 is a top view structure schematic diagram of the utility model;
[0017] Figure 4 is a first suction disc group drive guide mechanism structure schematic diagram of the utility model;
[0018] Figure 5 is a mounting block installation structure schematic diagram of the utility model;
[0019] Figure 6 is a ball screw connection structure schematic diagram of the utility model;
[0020] Figure 7 is a first suction disc group switching guide mechanism connection structure schematic diagram of the utility model.
[0021] Legend: 1, first suction disc group;11, base;12, fixed disc;13, fixed frame;2, lifting drive module;3, lifting fixed module;4, second suction disc group;5, first suction disc group switching guide mechanism;501, mounting block;502, ball linear guide rail;6, first suction disc group drive guide mechanism;601, ball screw;602, support;603, bearing group;604, servo motor;7, second suction disc group switching drive mechanism;8, second suction disc group switching guide mechanism;9, static electricity elimination mechanism. DETAILED DESCRIPTION
[0022] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of the utility model.
[0023] The specific embodiments are given below.
[0024] Please refer to Figures 1-7The utility model provides a kind of chuck set switching mechanism, it is characterized by: including base 11, the base 11 top is fixedly installed with first chuck set 1, fixed disc 12 and fixed frame 13, the fixed frame 13 one side is fixedly installed with lifting drive module 2, the fixed disc 12 top is fixedly installed with lifting fixed module 3, the first chuck set 1 top is fixedly installed with second chuck set 4, the first chuck set 1 one side is fixedly installed with first chuck set switching guide mechanism 5, the first chuck set switching guide mechanism 5 includes mounting block 501 and ball linear guide 502, the base 11 top is fixedly installed with lifting fixed module, the ball linear guide 502 and lifting fixed module are fixedly installed in the outer surface of mounting block 501 in common;
[0025] The first chuck set switching guide mechanism 5 one side is fixedly installed with first chuck set drive guide mechanism 6, and the first chuck set drive guide mechanism 6 includes a servo motor 604, the servo motor 604 is fixedly installed on the top of base 11, the output shaft of the servo motor 604 is fixedly connected with ball screw 601, two bearing sets 603 are fixedly installed on the outer surface of the ball screw 601, a bracket 602 is slidably installed on the outer surface of the ball screw 601, and the bracket 602 is fixedly installed on the top of the base 11.
[0026] The second chuck set 4 top is fixedly installed with second chuck set switching guide mechanism 8, the first chuck set 1 and the second chuck set 4 are respectively provided with second chuck set switching drive mechanism 7 and static electricity elimination mechanism 9 on the top, respectively, and the first chuck set 1 and the second chuck set 4 are arranged in horizontal direction.
[0027] In use, the first chuck set 1 and the second chuck set 4 are pulled apart along the space Y direction by switching guide mechanism and switching drive mechanism, and an empty slot is formed in the middle of the process boat. The first chuck set 1 and the second chuck set 4 are attached along the space Y direction by switching guide mechanism and switching drive mechanism, and the first chuck set 1 and the second chuck set 4 after attachment can take and place a sheet at any one end position of the process boat, so that an empty slot is formed at any one end of the process boat.
[0028] Working principle: the utility model discloses in use, first by a certain number of ceramic suction disc and a plurality of number of machining parts constitute the first suction disc group 1 and second suction disc group 4, the first suction disc group 1 and second suction disc group 4 are provided with negative pressure by vacuum generator, ceramic suction disc and silicon sheet are pasted and form vacuum, the sum of the ceramic suction disc number of the first suction disc group 1 and second suction disc group 4 is the number of the slide of flower basket, the first suction disc group 1 is fixed on the first suction disc group switching guide mechanism 5, and the switching guide mechanism is formed by ball linear guide 502 and mounting block 501, and the mounting block 501 is connected with ball linear guide slide block and lifting fixed module 3 respectively, and the first suction disc group switching drive mechanism 6 provides power, the first suction disc group switching drive mechanism 6 is driven by ball screw 601 as transmission part, bearing set 603 as support piece, servo motor and ball screw 601 are connected through shaft coupling, and the linear movement of the first suction disc group 1 can be realized by the rotation of servo motor, the second suction disc group 4 is fixed on the second suction disc group switching guide mechanism 8, and the second suction disc group switching guide mechanism 8 is consistent with the structure of the first suction disc group switching guide mechanism 6, and the second suction disc group switching drive mechanism 7 provides power, and the second suction disc group switching drive mechanism 7 is consistent with the structure of the first suction disc group switching drive mechanism 6 and the driving principle, realizes the linear movement of the second suction disc group 4, and the first suction disc group 1 and second suction disc group 4 are arranged along the space X direction staggeredly, and the electrostatic elimination mechanism 9 is fixed on the first suction disc group 1 and second suction disc group 4 respectively.
[0029] The basic principle, main features and advantages of the utility model are shown and described above. It should be understood by the person skilled in the art that the utility model is not limited by the above-mentioned embodiments, and the above-mentioned embodiments and description in the specification only illustrate the principle of the utility model, and various changes and improvements can be made to the utility model without departing from the spirit and scope of the utility model, and these changes and improvements all fall within the scope of the claimed utility model.
Claims
1. A chuck set switching mechanism characterized by: The base (11) top fixedly installed with the first suction cup group (1), fixed disc (12) and fixed frame (13), the fixed frame (13) one side fixedly installed with lifting drive module (2), the fixed disc (12) top fixedly installed with lifting fixed module (3), the first suction cup group (1) top fixedly installed with second suction cup group (4), the first suction cup group (1) one side fixedly installed with first suction cup group switching guide mechanism (5), the first suction cup group switching guide mechanism (5) includes mounting block (501) and ball linear guide (502), the base (11) top fixedly installed with lifting fixed module, the ball linear guide (502) and lifting fixed module are fixedly installed together on the outer surface of mounting block (501).
2. A chuck set switching mechanism according to claim 1, characterized in that: The first suction cup group switching guide mechanism (5) one side fixedly installed with first suction cup group drive guide mechanism (6), the first suction cup group drive guide mechanism (6) includes servo motor (604), the servo motor (604) fixedly installed on the top of base (11), the servo motor (604) output shaft fixedly connected with ball screw (601).
3. A chuck set switching mechanism according to claim 2, wherein: The ball screw (601) outer surface fixedly installed with two bearing groups (603), the ball screw (601) outer surface slidingly installed with support (602), the support (602) fixedly installed on the top of base (11).
4. A chuck set switching mechanism according to claim 1, characterized in that: The second suction cup group (4) top fixedly installed with second suction cup group switching guide mechanism (8), the first suction cup group (1) and second suction cup group (4) are respectively provided with second suction cup group switching drive mechanism (7) and static elimination mechanism (9) respectively on the top.
5. A chuck set switching mechanism according to claim 4, wherein: The first suction cup group (1) and second suction cup group (4) are arranged in horizontal direction staggered.