Plane target material base body for spraying
By designing a slope structure and a tensile structure on the surface of the planar target substrate, the problem of coating delamination from the substrate during thermal spraying was solved, and effective bonding between the coating and the substrate was achieved.
Patent Information
- Application Number
- CN202520139573.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-21
- Publication Date
- 2025-12-16
- Estimated Expiration
- 2035-01-21
AI Technical Summary
Existing thermal spraying processes cannot be effectively applied to planar target substrates, resulting in delamination between the coating and the substrate during temperature changes.
Design a planar target substrate with a slope structure that gradually decreases from the center to the outer periphery, and set multiple grooves and/or steps along the slope direction, combined with an alloy underlayer to enhance the adhesion strength and prevent the coating from delaminating from the substrate.
The slope structure and tensile structure effectively compensate for coating warpage, prevent delamination between the coating and the substrate due to thermal stress during spraying, and improve the spraying effect and bonding strength.
Smart Images
Figure CN223674715U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to plane target material technical field more specifically, relate to a kind of plane target material base body for spraying. BACKGROUND
[0002] Spraying target material has unique application advantage in coating industry due to its unique amorphous or microcrystalline characteristics.But thermal spraying target material is not suitable for spraying plane target material due to its process limitations, because thermal spraying process exists the mismatch phenomenon of thermal expansion and stress between substrate and coating (for example, the temperature of substrate is relatively low during spraying process, and the temperature of coating is higher, and the coating shrinks greatly during temperature balance process), so in the application of thermal spraying thick coating, if the substrate is plane, due to the pulling of coating and substrate, the whole deformation is serious, and the coating and substrate delaminate, and if the substrate is tubular, it can balance the tensile stress of coating in the shrinkage process (the component of tensile stress along the diameter direction can offset each other), so the current thermal spraying target material is only applied in rotary target material.
[0003] Therefore, how to provide a plane target material base body capable of being applied to thermal spraying becomes a technical problem to be solved in the field. CONTENT OF UTILITY MODEL
[0004] The utility model aims at providing a plane target material base body capable of being applied to thermal spraying.
[0005] The utility model provides a kind of plane target material base body for spraying, including to be sprayed surface, to be sprayed surface includes the slope surface structure of gradually reducing horizontal height from center to outer periphery;And,
[0006] A plurality of tensile structures are sequentially arranged along the gradient direction of slope surface structure, and the tensile structure includes a groove and / or a step perpendicular to the straight line where the gradient direction is located.
[0007] Optionally, the surface to be sprayed is a surface with a predetermined cleanliness.
[0008] Optionally, the surface layer of the surface to be sprayed is covered with an alloy primer layer, and the material of the alloy primer layer includes copper-aluminum alloy or nickel-aluminum alloy.
[0009] Optionally, the surface to be sprayed is obtained by sandblasting treatment of white corundum or brown corundum.
[0010] Optionally, the number and spacing of the steps are determined by the material to be sprayed, and the included angle between the vertical surface of the step and the supporting surface is less than or equal to 150°.
[0011] Optionally, the included angle between the vertical surface of the step and the supporting surface is equal to 90°.
[0012] Optionally, the material of the plane target material base body includes one of copper, titanium or stainless steel.
[0013] Optionally, the surface to be sprayed includes a conical surface or an arched surface.
[0014] Optionally, when the surface to be sprayed is a conical surface, the grooves and / or steps are annular structures, and the grooves and / or steps are arranged in sequence and concentrically about an axis of the conical surface.
[0015] Optionally, the planar target substrate is circular in a top view.
[0016] According to the technical content disclosed by the utility model, the following beneficial effects are achieved:
[0017] The planar target substrate for spraying provided by the utility model has a slope surface structure with a gradually decreasing horizontal height from the center to the outer periphery. The upper surface of the planar target substrate is processed into a slope surface before spraying, which can compensate for the upward warping of the substrate and the coating to a certain extent, and the slope is determined according to the sprayed material and the thermal expansion coefficient of the substrate. The multiple grooves and / or steps arranged in sequence along the slope direction of the slope surface structure can prevent the coating and the substrate from being pulled off due to the stress of the coating during the spraying process.
[0018] Other features and advantages of the utility model will become apparent from the following detailed description of exemplary embodiments thereof, with reference to the drawings. BRIEF DESCRIPTION OF DRAWINGS
[0019] The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate embodiments of the utility model and, together with the description, serve to explain the principles of the utility model.
[0020] Figure 1 It is a sectional view of the planar target substrate for spraying with the groove anti-pulling structure of the utility model.
[0021] Figure 2 It is a sectional view of the planar target substrate for spraying with the step anti-pulling structure of the utility model.
[0022] Figure 3 It is an enlarged view of A in the utility model. Figure 2
[0023] Figure 4 It is a state diagram of the planar target substrate after spraying of the utility model.
[0024] Figure 5 It is a state diagram of the planar target substrate after spraying and shaping treatment of the utility model.
[0025] Figure 6 It is a planar target substrate spraying processing flowchart of the utility model.
[0026] Explanation of reference numerals in the attached figures: 1. Planar target substrate; 2. Surface to be coated; 3. Groove; 4. Step; 5. Angle; 6. Lower cone; 7. Coating; a. Center thickness of the target; b. Edge thickness of the target. Detailed Implementation
[0027] Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that, unless otherwise specifically stated, the relative arrangement, numerical expressions, and values of the components and steps set forth in these embodiments do not limit the scope of the present invention.
[0028] The following description of at least one exemplary embodiment is merely illustrative and is in no way intended to limit the invention or its application or use.
[0029] Techniques, methods, and equipment known to those skilled in the art may not be discussed in detail, but where appropriate, they should be considered part of the specification.
[0030] In all the examples shown and discussed herein, any specific values should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values.
[0031] It should be noted that similar labels and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be discussed further in subsequent figures.
[0032] See Figure 1 This utility model discloses a planar target substrate 1 for spraying, which includes a top surface and a bottom surface arranged opposite to each other. The top surface is the surface to be sprayed 2, which includes a sloping structure with a gradually decreasing horizontal height from the center to the outer periphery. The surface to be sprayed 2 can be a conical surface or an arched surface; in this embodiment, the surface to be sprayed 2 is a conical surface, and the planar target substrate 1 appears circular when viewed from above.
[0033] The cone-shaped surface to be sprayed 2 includes multiple tensile structures arranged sequentially along the slope direction of the slope structure. These tensile structures include those intersecting the straight line of the slope direction, such as... Figure 1 The groove 3 shown and / or as shown Figure 2 and Figure 3 The step 4 is shown. The groove 3 and / or step 4 are a ring structure, and multiple grooves 3 and / or steps 4 are arranged concentrically about the axis of the conical surface.
[0034] In some embodiments, the tensile structure includes grooves and / or steps perpendicular to the straight line of the slope direction.
[0035] The surface 2 to be sprayed is a surface with a preset cleanliness and a preset roughness, and the surface is prepared by sand blasting treatment of white corundum or brown corundum. The surface is covered with an alloy primer layer, and the alloy primer layer is made of copper-aluminum alloy or nickel-aluminum alloy.
[0036] Further, the angle 5 between the vertical surface of the step and the supporting surface is less than or equal to 150°. Preferably, the angle 5 is equal to 90°.
[0037] Further, the number and spacing of the steps 4 are determined according to the material to be sprayed, and / or the number and spacing of the grooves 3 are determined according to the material to be sprayed. If the adhesion between the material to be sprayed and the planar target base 1 is small, the number of steps and grooves is set to be larger, and the spacing is smaller; on the contrary, if the adhesion between the material to be sprayed and the planar target base 1 is large, the number of steps and grooves is set to be smaller, and the spacing is larger; the purpose is to adjust the number and spacing of the steps 4 and / or the number and spacing of the grooves 3 to make the bonding strength of the coating and the planar target base 1 meet the actual demand, and prevent the coating from separating from the base.
[0038] Further, the material of the planar target base 1 includes one of copper, titanium or stainless steel.
[0039] In combination Figure 6 The processing steps and spraying steps of the planar target base 1 are described in detail as follows:
[0040] 1. According to the technical parameter requirements, the planar target base 1 disc is prepared with corresponding materials, and the materials are copper, titanium and stainless steel. Before spraying, the upper surface of the planar target base 1 is processed into a conical shape, which is used to compensate for the upward warping of the planar target base 1 and the coating 7 to a certain extent, and the taper is determined according to the material to be sprayed and the thermal expansion coefficient of the base.
[0041] 2. Special grooves 3 or steps 4 are made on the conical surface, the angle 5 of the steps 4 is less than or equal to 150°, and preferably 90° (right angle) to prevent the coating 7 and the planar target base 1 from being pulled off due to the stress of the coating 7 during the spraying process.
[0042] 3. The conical surface is subjected to sand blasting treatment, and the sand is preferably white corundum or brown corundum, so that the surface is clean and has a certain roughness.
[0043] 4. The conical surface after sand blasting is subjected to self-fluxing alloy arc priming, and the alloy material is preferably copper-aluminum alloy or nickel-aluminum alloy. Then, target spraying is performed.
[0044] 5. If Figure 4 and Figure 5As shown, after the spraying is completed, the planar target substrate 1 and the edge of the coating layer 7 will be warped upward to a certain extent due to the thermal stress shrinkage of the coating layer 7, and a certain degree of lower cone 6 will be caused on the bottom surface. The lower cone 6 formed after the spraying is completed needs to be flattened by a lathe.
[0045] Specific embodiment: spraying of zirconia planar target
[0046] 1. Prepare a φ100*8mm copper substrate.
[0047] 2. Process the upper surface of the planar circular metal substrate into a cone, a-b=3mm. a is the central thickness of the target, and b is the edge thickness of the target.
[0048] 3. Make a special groove 3 on the conical surface, such as Figure 1 the shape of the groove 3 is shown, the groove 3 is 3mm wide and 0.5mm deep.
[0049] 4. Perform sandblasting treatment on the above surface, and the sand is preferably 60 mesh brown corundum. Since the hardness of copper is small, the sandblasting air pressure can be controlled at 3kg.
[0050] 5. Arc strike bottoming with copper aluminum wire, that is, bottoming layer, to improve the adhesion strength of the target coating layer 7 and the substrate, and the bottoming thickness is about 0.3mm.
[0051] 6. Spray zirconia target on the above prepared substrate, program the robot, and spray zirconia powder on the substrate layer by layer until the thickness is equal to 6mm.
[0052] 7. Polish the surface of the zirconia target and the surrounding area, and perform turning treatment to meet the size requirements.
[0053] 8. Finally, the unevenness of the lower surface caused by the difference in thermal expansion coefficient between the substrate and the target material is flattened.
[0054] In summary, the planar target substrate 1 for spraying provided by the utility model, the spraying surface 2 includes a slope structure with a gradually decreasing horizontal height from the center to the periphery; the upper surface of the planar target substrate 1 is processed into a slope before spraying, which can compensate for the upward warping of the substrate and the coating layer 7 to a certain extent, and the slope is determined according to the thermal expansion coefficient of the sprayed material and the substrate. A plurality of grooves 3 and / or steps 4 arranged in the slope direction of the slope structure can prevent the coating layer 7 and the substrate from being pulled off and delaminated due to the stress of the coating layer 7 during the spraying process.
[0055] While specific embodiments of the application have been described in detail, those familiar with the art will appreciate that the examples given are by way of example and are not meant to limit the scope of the application. Those skilled in the art will recognize or be able to ascertain using no more than routine experimentation, many equivalents to the specific embodiments of the application described herein. It is therefore intended that the scope of the application be determined by the following claims.
Claims
1. A planar target substrate for sputtering, characterized in that Comprise: a surface to be sprayed, the surface to be sprayed comprising a slope structure with a gradually decreasing horizontal height from the center to the periphery; and, a plurality of tensile structures arranged in sequence along the slope direction of the slope structure, the tensile structures comprising grooves and / or steps perpendicular to the straight line where the slope direction is located.
2. The planar target substrate for spraying according to claim 1, wherein: the surface to be sprayed is a surface with a predetermined cleanliness.
3. The planar target substrate for spraying according to claim 2, wherein: a surface layer of the surface to be sprayed is covered with an alloy primer layer, and the material of the alloy primer layer comprises copper-aluminum alloy or nickel-aluminum alloy.
4. The planar target substrate for spraying according to claim 2, wherein: the surface to be sprayed is obtained by white corundum or brown corundum sandblasting treatment.
5. The planar target substrate for spraying according to any one of claims 1 to 4, wherein: the included angle between the vertical surface of the step and the bearing surface is less than or equal to 150°.
6. The planar target substrate for spraying according to claim 5, wherein: the included angle of the step is equal to 90°.
7. The planar target substrate for spraying according to any one of claims 1 to 4, wherein: the material of the planar target substrate comprises one of copper, titanium or stainless steel.
8. The planar target substrate for spraying according to any one of claims 1 to 4, wherein: the surface to be sprayed comprises a conical surface or an arched surface.
9. The planar target substrate for spraying according to claim 8, wherein: when the surface to be sprayed is a conical surface, the grooves and / or steps are annular structures, and a plurality of the grooves and / or the steps are arranged concentrically about the axis of the conical surface in sequence.
10. The planar target substrate for spraying according to any one of claims 1 to 4, wherein: the planar target substrate is circular in plan view.