Anti-splashing evaporation boat

Abstract

The utility model discloses an anti-splashing evaporation boat which comprises an evaporation boat base plate and an anti-splashing protection frame, and the anti-splashing protection frame is installed on the evaporation boat base plate. The middle area of the evaporation boat chassis is an evaporation surface, a deposition tank is arranged between the evaporation surface and the edge side wall of the evaporation boat chassis, and the evaporation surface is higher than the deposition tank; an adjustable wire feeding opening is formed in the anti-splashing protection frame; the adjustable wire feeding port is composed of a shielding face and a wire feeding opening, a rotating plate is arranged on the upper layer of the shielding face and the upper layer of the wire feeding opening, and the rotating plate can cover part or all of the wire feeding opening through rotation. And the periphery of the adjustable wire feeding port is provided with a perforated baffle plate. According to the anti-splashing evaporation boat, the problem of film damage caused by the fact that molten metal splashes to a base film in the evaporation process can be solved, and the film coating quality is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to evaporation coating technology field, concretely relates to a kind of anti-splashing evaporation boat. BACKGROUND

[0002] Functional current collector is a kind of new composite material with nanometer metal formed on the surface of polymer base film by vacuum evaporation, magnetron sputtering and other ways with polymer material as base film, with low cost, high safety, high specific energy and long life and other advantages.For functional aluminum current collector, vacuum evaporation method is generally used.In the process of aluminum evaporation, the carrier of aluminum evaporation includes graphite or metal crucible and ceramic evaporation boat, and the evaporation boat has the advantages of convenient operation and low cost.

[0003] In the actual production process of vacuum evaporation using evaporation boat, problems such as aluminum splashing and uneven plating may occur, among which, aluminum splashing may cause aluminum metal bumps on the film surface, and even burn through the base film to form pinholes, thereby affecting the quality of functional current collector products.The influence of aluminum splashing points also extends to the battery end made of functional current collector: aluminum metal bumps may form scratches on the coating surface during pole piece coating, and even cause belt breakage;metal bumps and perforation may cause large difference in extension between defect area and surrounding position under high pressure, and cause belt breakage during rolling under belt tension;aluminum metal particles splashed on the film directly contact the separator inside the battery, which may easily cause the separator to be pierced, increase the short-circuit rate of the process, and cause self-discharge risk.Therefore, it is crucial to control splashing during vacuum evaporation. UTILITY MODEL CONTENTS

[0004] The utility model aims to provide an anti-splashing evaporation boat, which is improved and optimized based on the traditional evaporation boat to avoid the influence of splashing during evaporation and plating.

[0005] To achieve the above-mentioned purpose, the technical solution provided by the utility model is as follows:

[0006] An anti-splashing evaporation boat includes an evaporation boat chassis and an anti-splashing protection frame, and the anti-splashing protection frame is installed on the evaporation boat chassis.

[0007] The middle area of the evaporation boat chassis is an evaporation surface, and a deposition groove is formed between the evaporation surface and the edge side wall of the evaporation boat chassis, and the evaporation surface is higher than the deposition groove.

[0008] An adjustable wire feeding port is arranged on the anti-splashing protection frame, and the adjustable wire feeding port is composed of a shielding surface and a wire feeding opening, a rotating plate is arranged on the upper layer of the shielding surface and the wire feeding opening, the rotating plate can shield part or all of the wire feeding opening by rotating, and an open hole baffle is arranged around the adjustable wire feeding port.

[0009] To optimize the above-mentioned technical solution, the following specific measures are taken:

[0010] The top surface of the anti-splashing protection frame comprises a peripheral protection surface, an open hole baffle and an adjustable wire feeding opening, the adjustable wire feeding opening is arranged in the middle of the open hole baffle, the peripheral protection surface is arranged at the outer periphery of the open hole baffle, and the position of the peripheral protection surface corresponds to the upper side of the position of the deposition groove.

[0011] The anti-splashing protection frame is installed on the evaporation boat base through the support frames.

[0012] Further, the outer periphery of the evaporation boat base is provided with a mounting groove, and the bottom of the support frame of the anti-splashing protection frame is provided with a mounting block corresponding to the mounting groove, and the mounting block is clamped and mounted in the mounting groove.

[0013] The side surface of the anti-splashing protection frame is provided with a flow guide plate, and the flow guide plate is connected to the two adjacent support frames on the side surface.

[0014] As a preferred scheme, the inner side of the flow guide plate is provided with a ceramic coating.

[0015] The area of the rotating plate is greater than that of the wire feeding opening, and the rotating plate is movably installed in the adjustable wire feeding opening through a connecting shaft.

[0016] Further, the middle part of the top surface of the anti-splashing protection frame has a groove, the bottom of the groove is composed of a shielding surface and a wire feeding opening, the rotating plate is embedded in the groove, and the rotating plate is located on the upper layer of the shielding surface and the wire feeding opening.

[0017] As a preferred scheme, the rotating plate and the shielding surface have an open hole surface or a mesh surface.

[0018] Compared with the prior art, the anti-splashing evaporation boat has the following beneficial effects:

[0019] The evaporation boat is divided into an evaporation boat base and an anti-splashing protection frame, and the anti-splashing protection is performed during wire feeding and evaporation and deposition, so that the film perforation and splash aluminum point caused by aluminum liquid splashing on the base film during evaporation and deposition can be reduced, and the film forming effect is good, and the film quality is high, so that the quality of the battery prepared by the film function collector can be improved.

[0020] The anti-splashing evaporation boat can greatly reduce the number of film damage, has good film surface forming effect, has high film coating quality, and can improve the quality of the battery prepared by the film function collector. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 The utility model discloses an evaporation boat base's planar structure schematic diagram.

[0022] Figure 2 The utility model discloses an evaporation boat base's three -dimensional structure schematic diagram.

[0023] Figure 3 The top view structural schematic diagram of the anti-splashing protection frame.

[0024] Figure 4 The side view structural schematic diagram of the anti-splashing protection frame.

[0025] Figure 5 The structural schematic diagram of the adjustable wire feeding port.

[0026] In the figure: 1-evaporation boat bottom disc, 2-anti-splashing protection frame, 3-evaporation surface, 4-deposition groove, 5-adjustable wire feeding port, 6-surrounding protection surface, 7-opening baffle, 8-mounting groove, 9-mounting block, 10-rotary plate, 11-shielding surface, 12-wire feeding opening, 13-flow guide plate. DETAILED DESCRIPTION

[0027] The above content of the utility model will be further explained in the form of examples, but this should not be understood as the range of the above subject matter of the utility model is limited to the following examples, and all the technologies realized based on the above content of the utility model belong to the range of the utility model.

[0028] In the description of the utility model, it also needs to be explained that:

[0029] The orientation or position relationship therein is the relationship shown based on the drawings, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the indicated device or component must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the utility model.

[0030] The utility model provides a kind of anti-splashing evaporation boat, including evaporation boat bottom disc and anti-splashing protection frame, anti-splashing protection frame is installed on evaporation boat bottom disc;

[0031] As shown in Figure 1 , As shown in 2 , the middle area of evaporation boat bottom disc 1 is evaporation surface 3, and deposition groove 4 is between evaporation surface 3 and the edge side wall of evaporation boat bottom disc 1, evaporation surface 3 is higher than deposition groove 4;

[0032] As shown in Figure 3 , adjustable wire feeding port 5 is provided on anti-splashing protection frame 2;Adjustable wire feeding port 5 is composed of shielding surface 11 and wire feeding opening 12, rotary plate 10 is provided on the upper layer of shielding surface 11 and wire feeding opening 12, and rotary plate 10 can shield part or all of wire feeding opening 12 by rotating;The surrounding of adjustable wire feeding port 5 is opening baffle 7.

[0033] The utility model discloses a evaporation boat bottom disc 1 and the protection frame 2 of preventing splashing are divided into two parts, and the process of guaranteeing the wire feeding and evaporation is normally carried out, and the protection of preventing splashing is carried out.

[0034] The protection frame 2 of preventing splashing preferably can adopt metal material, and the evaporation boat bottom disc 1 can adopt graphite, ceramic or metal material etc.

[0035] In the process of evaporation and plating, the deposit formed by some impurities in the metal wire and the mixed splashing liquid of the metal liquid are part of the important reasons of splashing, the utility model discloses the deposition groove 4 is set up around the evaporation face 3, can make the deposition impurity formed gradually in the metal evaporation process to the deposition groove 4 around, avoid with the mixed splashing of subsequent continuous melting metal liquid formation.

[0036] As Figure 3 The top surface of the protection frame 2 of preventing splashing includes the surrounding protection surface 6, the opening baffle 7 and the adjustable wire feeding port 5, the adjustable wire feeding port 5 is arranged in the middle of the opening baffle 7, the surrounding protection surface 6 is arranged on the outer periphery of the opening baffle 7, the position of the surrounding protection surface 6 corresponds to the upper side of the position of the deposition groove 4, and the surrounding protection surface 6 covers the projection surface of the deposition groove 4.

[0037] The opening in the opening baffle 7 is the main passage of the metal vapor in the process of evaporation and plating, although the opening baffle 7 is additionally arranged to reduce some evaporation area and reduce the evaporation efficiency, but can block more splashing, and is suitable for the preparation of high-quality products. In some preferred embodiments, the opening baffle 7 can be provided as a double-layer opening baffle, which can effectively block more splashing.

[0038] There are more impurity deposits around the deposition groove 4, and the bottom surface of the deposition groove 4 is relatively low, so as to avoid the violent splashing caused by the action of the bottom heating source, and the surrounding protection surface 6 arranged above the deposition groove 4 can form blocking.

[0039] In some embodiments, the protection frame 2 of preventing splashing is installed on the evaporation boat bottom disc 1 through the support frame. The outer periphery of the evaporation boat bottom disc 1 is provided with a mounting groove 8, and the bottom of the support frame of the protection frame 2 has a mounting block 9 corresponding to the mounting groove 8, and the mounting block 9 is clamped and mounted in the mounting groove 8.

[0040] In some preferred embodiments, the side surface of the protection frame 2 of preventing splashing is provided with a guide plate 13, as Figure 4 The guide plate 13 is connected to the two adjacent support frames on the side surface. The setting of the guide plate 13 can make the metal vapor mainly pass through the top surface of the protection frame 2 of preventing splashing upwards to evaporate on the base film material to be plated. Preferably, the inner side of the guide plate 13 adopts a ceramic coating with a smooth surface, and the guide effect is better. The outer side of the guide plate 13 can adopt metal material etc.

[0041] The middle part of the anti-splashing protection frame is provided with an adjustable wire feeding port 5, and after wire feeding, the wire feeding port can be partially or completely covered by the rotating plate 10.

[0042] In some embodiments, the area of the rotating plate 10 is larger than the wire feeding opening 12, and the rotating plate 10 is movably installed at the adjustable wire feeding port 5 through a connecting shaft.

[0043] In some embodiments, the middle part of the top surface of the anti-splashing protection frame 2 has a groove, the bottom of the groove is composed of the shielding surface 11 and the wire feeding opening 12, and the rotating plate 10 is embedded in the groove and located on the upper layer of the shielding surface 11 and the wire feeding opening 12.

[0044] Since the corresponding lower position of the wire feeding port is also the main part of evaporation, the rotating plate 10 and the shielding surface 11 are preferably provided with an open hole surface or a mesh surface to maintain a high evaporation efficiency.

[0045] The composition and state of the adjustable wire feeding port 5 are shown in Figure 5 , in which the upper left is the shielding surface 11 and the wire feeding opening 12 without the rotating plate 10, the upper right is the rotating plate 10, the lower left is the rotating plate 10 shielding part of the wire feeding opening 12, and the lower right is the rotating plate 10 shielding all of the wire feeding opening 12.

[0046] In some embodiments, the open hole baffle can also be replaced by a mesh plate structure, but the cleaning of the open hole baffle is easier than that of the mesh plate, and the maintenance is more convenient, and the evaporation effect is similar. Figure 3 、 5 For a clearer illustration, the rotating plate 10 and the shielding surface 11 adopt a mesh surface, but can also be replaced by an open hole surface.

[0047] The utility model can prevent the film perforation and splash aluminum point caused by the metal liquid splashing on the base film during the evaporation process, and can solve the film damage problem; through the setting of the mesh surface or the open hole, the evaporation efficiency is as high as possible.

[0048] In the implementation operation, the anti-splashing evaporation boat of the utility model is installed on the vacuum coating equipment, the evaporation surface at the bottom of the evaporation boat bottom plate is heated by a heat source, and the film coating is carried out by adjusting the wire feeding amount and the film coating speed and other parameters according to the process setting. Through testing, the number of film damage obtained in this way is greatly reduced, the film surface is well formed, and the film coating quality is good.

[0049] The above merely describes preferred embodiments of the present application, and is not intended to limit the present application in any form. Any modification, equivalent replacement, and improvement of the above embodiments made by any person skilled in the art, without departing from the technical scope of the present application, shall fall within the protection scope of the present application.

Claims

1. A splash guard evaporation boat characterized by: The evaporation boat base is provided with a splash-proof protection frame. The middle area of the evaporation boat base is an evaporation surface, and the evaporation surface is higher than the deposition groove. The adjustable wire feeding port is composed of a shielding surface and a wire feeding opening.

2. The splash guard evaporation boat of claim 1, wherein: The top surface of the splash-proof protection frame comprises a surrounding protection surface, an open hole baffle and an adjustable wire feeding port.

3. The anti-splashing evaporation boat according to claim 1, wherein: The adjustable wire feeding port is arranged in the middle of the open hole baffle, and the surrounding protection surface is arranged on the outer periphery of the open hole baffle.

4. The anti-splashing evaporation boat according to claim 3, wherein: The splash-proof protection frame is installed on the evaporation boat base through the support frames.

5. The anti-splashing evaporation boat according to claim 3, wherein: The outer periphery of the evaporation boat base is provided with a mounting groove, and the bottom of the support frame of the splash-proof protection frame is provided with a mounting block corresponding to the mounting groove.

6. The anti-splashing evaporation boat according to claim 5, wherein: The inner side of the guide plate is provided with a ceramic coating.

7. The anti-splashing evaporation boat of claim 1, wherein: The area of the rotating plate is larger than the wire feeding opening, and the rotating plate is movably installed on the adjustable wire feeding port through a connecting shaft.

8. The anti-splashing evaporation boat of claim 1, wherein: The middle part of the top surface of the splash-proof protection frame has a groove, the bottom of the groove is composed of a shielding surface and a wire feeding opening, and the rotating plate is embedded in the groove and located on the upper layer of the shielding surface and the wire feeding opening.

9. The anti-splashing evaporation boat of claim 1, wherein: The rotating plate and the shielding surface have an open hole surface or a mesh surface.

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