Feeder for single crystal furnace and single crystal furnace
By introducing a bottom cone support and an elastic connecting rope into the feeder, the problem of silicon raw material contamination caused by falling quartz cones was solved, achieving feeding stability and cost savings.
Patent Information
- Application Number
- CN202520104754.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-16
- Publication Date
- 2025-12-16
- Estimated Expiration
- 2035-01-16
AI Technical Summary
Falling quartz cones can cause the lifting rod to detach from the isolation tube, resulting in metal contamination of the silicon raw material. Furthermore, fallen quartz cones are difficult to remove, increasing the company's equipment and raw material costs.
A feeder was designed, comprising a feed cylinder, a bottom cone, a lifting rod, a bottom cone support, and a connecting rope. The connecting rope fixes the bottom cone support relative to the feed cylinder, providing cushioning to prevent the bottom cone from falling off the lifting rod, and the elastic connecting rope ensures normal feeding.
This effectively prevents silicon raw material contamination caused by the bottom cone falling off, improves production efficiency, ensures product quality, and saves costs.
Smart Images
Figure CN223674798U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to the technical field of single crystal silicon production, in particular to a feeder for a single crystal furnace and a single crystal furnace. BACKGROUND
[0002] A single crystal furnace is a device for producing single crystal silicon. In the production process of single crystal silicon, solid silicon material needs to be filled in the crucible of the single crystal furnace, then the solid silicon material is melted by heating, and then the seed crystal is inserted into the surface of the melt for fusion, and the single crystal silicon is produced by slowly lifting the seed crystal upwards using the rotation of the seed crystal and the tension between the seed crystal and the melt. The feeding amount of solid silicon material is one of the key factors affecting the production efficiency of single crystal silicon. At present, the method of secondary feeding is usually used to increase the feeding amount, that is, the solid silicon material of a specified specification is first added to the feeder, and then more silicon material is added to the single crystal furnace through the feeder.
[0003] In the related art, the feeder includes a feeding cylinder, an isolation pipe and a lifting rod. The inside of the feeding cylinder is used to hold silicon material. The isolation pipe is arranged through the inside of the feeding cylinder. The quartz cone is movably connected at the discharge port of the feeding cylinder. The lifting rod is movably arranged in the isolation pipe. The bottom end of the lifting rod extends downward and out of the bottom of the isolation pipe and is fixedly connected with the quartz cone. The top end of the lifting rod extends upward and out of the top of the isolation pipe.
[0004] However, the bottom of the feeding cylinder is the quartz cone, and the entire weight of the feeding cylinder is pressed on the quartz cone. If the feeding time is too long or the feeding speed is too fast, the quartz cone may fall off, causing the lifting rod to come out of the isolation pipe and causing metal pollution of the silicon raw material. In addition, the fallen quartz cone is difficult to take out from the silicon melt, which increases the cost of equipment and raw materials of the enterprise.
[0005] Therefore, there is a need in the art for a new technical solution to solve the above problems. UTILITY MODEL CONTENT
[0006] In order to solve at least one of the above problems in the prior art, that is, to solve the problem that the falling of the quartz cone will cause the lifting rod to come out of the isolation pipe and cause metal pollution of the silicon raw material, and the fallen quartz cone is difficult to take out from the silicon melt, which increases the cost of equipment and raw materials of the enterprise.
[0007] In a first aspect, the application provides a feeder for a single crystal furnace, the feeder comprising: a feeding cylinder, an interior of the feeding cylinder being configured to hold silicon material; a bottom cone movably clamped at a discharge port of the feeding cylinder; a lifting rod movably arranged in the feeding cylinder, a bottom end of the lifting rod being fixedly connected to the bottom cone, and a top end of the lifting rod extending upwardly out of a top of the feeding cylinder; an isolation tube sleeved on a portion of the lifting rod located in the feeding cylinder; the feeder further comprising: a bottom cone holder movably arranged at the bottom cone; and a connecting rope having one end fixedly connected to the bottom cone holder and the other end fixedly connected to the feeding cylinder to hold the bottom cone in cooperation with the bottom cone holder, wherein at least a portion of the connecting rope is elastic and the connecting rope is always in a stretched state.
[0008] In some embodiments, the top of the feeding cylinder is provided with a fixing seat; an interior of the bottom cone is provided with an avoiding passage, one end of the connecting rope is fixedly connected to the bottom cone holder, and the other end of the connecting rope is connected to the fixing seat after passing through the avoiding passage and the isolation tube.
[0009] In some embodiments, the interior of the bottom cone is provided with a containing cavity and a connecting passage, the containing cavity is open at a bottom of the bottom cone, a top of the containing cavity is in communication with the connecting passage, and a top of the connecting passage is in sealed communication with a bottom of the isolation tube when the bottom cone is clamped at the discharge port; and two ends of the avoiding passage are in communication with the containing cavity and the connecting passage, respectively.
[0010] In some embodiments, the bottom of the bottom cone is an annular bottom, the bottom cone holder comprises a plurality of clamping claws, the clamping claws comprise a clamping section, a holding section and an extending section; the clamping section is bent upwardly along an outer edge of the annular bottom and clamped at the bottom cone, the holding section is in contact with the annular bottom, and the extending section is inclined upwardly along an inner wall of the containing cavity, and a top of the holding section is fixedly connected to the connecting rope.
[0011] In some embodiments, the containing cavity is provided in a circular truncated cone shape.
[0012] In some embodiments, the bottom cone holder comprises at least three clamping claws.
[0013] In some embodiments, the clamping claws are uniformly distributed along a circumference of the annular bottom.
[0014] In some embodiments, the clamping claws, the connecting rope and the avoiding passage are one-to-one corresponding.
[0015] In some embodiments, an upper end of the connecting rope is provided with a positioning bead, the fixing seat is provided with a positioning hole, and the positioning bead is movably clamped in the positioning hole.
[0016] In some embodiments, the connecting rope comprises a spring segment.
[0017] In some embodiments, the connecting rope further comprises a first connecting segment and a second connecting segment, one end of the first connecting segment is connected with the bottom cone holder, the other end of the first connecting segment is provided with a first locking knot, one end of the second connecting segment is fixedly connected with the feeding cylinder, the other end of the second connecting segment is provided with a second locking knot, and two ends of the spring segment are movably connected with the first locking knot and the second locking knot respectively.
[0018] In some embodiments, the feeder further comprises a guide disc and a limiting ring, the guide disc and the limiting ring are sleeved on the feeding cylinder, and the guide disc and the limiting ring are connected through a flange connecting rod.
[0019] In the second aspect, the application provides a single crystal furnace, which comprises the feeder for a single crystal furnace according to any one of the preceding embodiments.
[0020] With the above technical solutions, when the lifting rod is lifted, the feeding cylinder is pressed on the bottom cone at the lower end of the lifting rod, the bottom cone is clamped with the discharge port of the feeding cylinder, and the feeding cylinder is lifted and moved together with the bottom cone; when the lifting rod is lowered to separate the bottom cone from the discharge port of the feeding cylinder, the silicon material in the feeding cylinder falls into the crucible below from the discharge port to complete the feeding. The application sets the bottom cone holder, and the bottom cone holder is fixedly connected with the feeding cylinder by the connecting rope. The connecting rope and the bottom cone holder cooperate to support the bottom cone, can provide a certain buffer for the bottom cone, prevent the bottom cone from falling off the lifting rod, thereby prevent the pollution of the silicon raw material caused by the falling of the bottom cone, and is beneficial to improve the production efficiency, ensure the product quality, and save the cost. In addition, the connecting rope has elasticity, which can ensure that the bottom cone can leave the discharge port during feeding, and ensure the normal feeding. BRIEF DESCRIPTION OF DRAWINGS
[0021] The preferred embodiments of the application will be described below with reference to the accompanying drawings, in which:
[0022] Figure 1 is a schematic view of the overall structure of the feeder in the application;
[0023] Figure 2 is a schematic view of the perspective structure of the bottom of the feeder in the application;
[0024] Figure 3 is a schematic view of the cross-sectional structure of the bottom cone in the application;
[0025] Figure 4 is a schematic view of the structure of the connection between the claw and the connecting rope in the application;
[0026] Figure 5 is a schematic view of the structure of the connection between the claw and the bottom cone in the application;
[0027] Figure 6 is a schematic view of the fixed seat in the present application;
[0028] Figure 7 is a schematic view of the connecting rope in the present application.
[0029] Reference signs:
[0030] 1, charging cylinder; 2, isolation tube; 3, bottom cone; 301, avoiding passage; 302, containing cavity; 303, connecting passage; 4, connecting rope; 401, positioning bead; 402, spring section; 403, first connecting section; 404, second connecting section; 405, first locking; 406, second locking; 5, lifting rod; 6, bottom cone support; 601, clamping jaw; 602, clamping section; 603, supporting section; 604, extending section; 7, fixed seat; 701, positioning hole; 8, guide disc; 9, limiting ring; 10, flange connecting rod. DETAILED DESCRIPTION
[0031] The preferred embodiments of the present application will be described below with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are only used to explain the technical principles of the present application, and are not intended to limit the protection scope of the present application. Those skilled in the art can make adjustments as needed to adapt to specific application scenarios. Such changes related to application scenarios do not deviate from the basic principles of the present application and are within the protection scope of the present application.
[0032] In the embodiments of the present application, the terms "upper", "lower", "inner", "middle", "outer", "front", "rear" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. These terms are mainly used to better describe the embodiments of the present application and its embodiments, and are not intended to limit the indicated devices, elements or components to have a specific orientation, or to be constructed and operated in a specific orientation. In addition, in addition to indicating the orientation or positional relationship, the above-mentioned terms can also be used to indicate other meanings, for example, the term "upper" can also be used to indicate a certain dependent relationship or connection relationship in some cases. For those skilled in the art, the specific meaning of these terms in the present application can be understood according to the specific situation.
[0033] It should be noted that in the description of the preferred embodiments of the present application, unless otherwise explicitly specified and limited, the terms "connected", "communicated" should be understood broadly, for example, it can be mechanical connection, or electrical connection, it can be direct connection, or indirect connection through intermediate medium, or the connection between two elements inside, these cannot be understood as limiting the present application. In addition, the terms "first", "second", "third", "fourth" are only for the purpose of description, and those skilled in the art can understand the specific meaning of the above terms in the present application according to the specific situation.
[0034] In a first aspect, the application provides a feeder for a single crystal furnace.
[0035] In combination Figure 1 and Figure 2 as shown in the drawings, the feeder provided by the application comprises a feeding cylinder 1, an isolation tube 2, a bottom cone 3, a lifting rod 5, a bottom cone support 6 and a connecting rope 4.
[0036] The inside of the feeding cylinder 1 is used to hold silicon material.
[0037] The bottom cone 3 is movably clamped at the discharge port of the feeding cylinder 1. When the bottom cone 3 is away from the discharge port, silicon material can fall from the discharge port.
[0038] The lifting rod 5 is movably arranged in the feeding cylinder 1, the bottom end of the lifting rod 5 is fixedly connected with the bottom cone 3, and the top end of the lifting rod 5 extends upward and out of the top of the feeding cylinder 1.
[0039] The isolation tube 2 is sleeved on the part of the lifting rod 5 located in the feeding cylinder 1. It is used to isolate the lifting rod 5 from the silicon material in the feeding cylinder 1, so as to prevent the lifting rod 5 from contaminating the silicon material.
[0040] The bottom cone support 6 is movably arranged on the bottom cone 3.
[0041] One end of the connecting rope 4 is fixedly connected with the bottom cone support 6, the other end of the connecting rope 4 is fixedly connected with the feeding cylinder 1, the connecting rope 4 and the bottom cone support 6 cooperate to support the bottom cone 3, wherein at least part of the connecting rope 4 is elastic and the connecting rope 4 is always in a stretched state.
[0042] When the lifting rod 5 is lifted, the feeding cylinder 1 is pressed on the bottom cone 3 at the bottom end of the lifting rod 5, the bottom cone 3 is clamped with the discharge port of the feeding cylinder 1, and the feeding cylinder 1 is lifted and moved together. When the lifting rod 5 is lowered to separate the bottom cone 3 from the discharge port of the feeding cylinder 1, the silicon material in the feeding cylinder 1 falls from the discharge port into the crucible below to complete the feeding. The application sets the bottom cone support 6, and uses the connecting rope 4 to fix the bottom cone support 6 relative to the feeding cylinder 1, the connecting rope 4 and the bottom cone support 6 cooperate to support the bottom cone 3, which can provide a certain buffer for the bottom cone 3, prevent the bottom cone 3 from falling off the lifting rod 5, and thus prevent the contamination of the silicon raw material caused by the falling of the bottom cone 3, which is conducive to improving the production efficiency, ensuring the product quality and saving the cost. In addition, the elastic connecting rope 4 can ensure that the bottom cone 3 can leave the discharge port during feeding, ensuring the normal feeding. The connecting rope 4 is always in a stretched state, which can pull the bottom cone support 6, ensuring that the bottom cone support 6 stably supports the bottom cone 3.
[0043] Optionally, the isolation tube 2 is a quartz isolation tube, and the bottom cone 3 is a quartz bottom cone.
[0044] In some embodiments, in combination Figure 1 andFigure 3 As shown in the drawings, the top of the charging cylinder 1 is provided with a fixed seat 7. Among them, the inside of the bottom cone 3 is provided with an avoiding channel 301, one end of the connecting rope 4 is fixedly connected with the bottom cone holder 6, and the other end of the connecting rope 4 is connected to the fixed seat 7 after passing through the avoiding channel 301 and the isolation pipe 2.
[0045] In this way, the bottom cone holder 6 can be fixed relative to the charging cylinder 1 by using the connecting rope 4, and the upper end of the connecting rope 4 is connected to the fixed seat 7 to provide support for the bottom cone holder 6. In addition, the avoiding channel 301 is arranged in the inside of the bottom cone 3, and the connecting rope 4 enters the isolation pipe 2 after passing through the avoiding channel 301 and is connected to the fixed seat 7, which can avoid the connecting rope from contacting the silicon material and affecting the quality of the silicon material. In addition, the avoiding channel 301 can play a certain limiting role to prevent the position of the connecting rope 4 from deviating, thereby improving the reliability of the bottom cone holder 6.
[0046] In some embodiments, in combination with Figure 1 and Figure 3 As shown in the drawings, the inside of the bottom cone 3 is provided with a containing cavity 302 and a connecting channel 303, the containing cavity 302 is open at the bottom of the bottom cone 3, the top of the containing cavity 302 is communicated with the connecting channel 303, and the top of the connecting channel 303 is in sealed communication with the bottom of the isolation pipe 2 in the case that the bottom cone 3 is clamped with the discharge port. Among them, the two ends of the avoiding channel 301 are communicated with the containing cavity 302 and the connecting channel 303, respectively.
[0047] In this way, the connecting rope 4 enters the avoiding channel 301 from the containing cavity 302, and is connected to the fixed seat 7 after passing through the avoiding channel 301, the connecting channel 303 and the isolation pipe 2 in sequence, which not only can fix the connecting rope 4 and prevent the position of the connecting rope 4 from deviating, but also can avoid the connecting rope 4 from contacting the silicon material, thereby ensuring the quality of the silicon material.
[0048] In some embodiments, in combination with Figure 2 and Figure 5 As shown in the drawings, the bottom of the bottom cone 3 is annular, and the bottom cone holder 6 includes a plurality of clamping claws 601, each clamping claw 601 including a clamping section 602, a supporting section 603 and an extending section 604. Among them, the clamping section 602 is curved and extended upward along the outer edge of the annular bottom, clamped on the bottom cone 3, the supporting section 603 is in contact with the annular bottom, and the extending section 604 is inclined and extended upward along the inner wall of the containing cavity 302, and the top of the supporting section 603 is fixedly connected with the connecting rope 4.
[0049] The clamping section 602 is bent and extends upwards along the outer edge of the annular bottom, and the clamping section 602 can be fixed on the outer edge of the bottom cone 3. The supporting section 603 is in direct contact with the annular bottom of the bottom cone 3, and the supporting section 603 can support the bottom cone 3 and ensure the stability of the bottom cone 3. The extending section 604 extends upwards along the inner wall of the accommodating cavity 302, and the shape of the clamping jaw 601 matches the bottom of the bottom cone 3, which helps the positioning of the bottom cone holder 6 inside the bottom cone 3, prevents the displacement of the bottom cone holder 6, and further enhances the connection strength between the bottom cone 3 and the bottom cone holder 6, and ensures the reliability of the support of the bottom cone holder 6. The top of the supporting section 603 is fixedly connected with the connecting rope 4, the upper end of the clamping jaw 601 is fixed by the connecting rope 4, and the lower end of the clamping jaw 601 is clamped on the outer edge of the bottom cone 3, so that the bottom cone holder 6 is stably arranged at the bottom of the bottom cone 3, and the bottom cone 3 is supported.
[0050] In some embodiments, the bottom cone holder 6 includes at least three clamping jaws 601. In this way, the stability of the support of the bottom cone holder 6 can be ensured. For example, the bottom cone holder 6 includes three, four, five or six clamping jaws 601.
[0051] Preferably, the bottom cone holder 6 includes five clamping jaws 601. In this way, the stability of the support of the bottom cone holder 6 can be ensured and the cost can be saved.
[0052] In some embodiments, the clamping jaws 601 are uniformly distributed along the circumference of the annular bottom.
[0053] The plurality of clamping jaws 601 cooperatively support the bottom cone 3, and the clamping jaws 601 are uniformly distributed along the circumference of the annular bottom, which helps to improve the stability of the support of the bottom cone 3.
[0054] For example, the bottom cone holder 6 includes five clamping jaws 601, and the five clamping jaws 601 are uniformly distributed along the circumference of the annular bottom. Correspondingly, the bottom cone 3 is provided with five avoiding channels 301, and the feeder includes five connecting ropes 4, and the connecting ropes 4, the avoiding channels 301 and the clamping jaws 601 correspond one by one.
[0055] In some embodiments, in combination with Figure 4 As shown, the upper end of the connecting rope 4 is provided with a positioning bead 401, and the fixing seat 7 is provided with a positioning hole 701, and the positioning bead 401 is movably clamped in the positioning hole 701. In this way, the movable connection between the connecting rope 4 and the fixing seat 7 can be realized, and the replacement of the connecting rope 4 is facilitated.
[0056] Alternatively, the side edge of the fixing seat 7 is provided with an avoiding gap (not shown in the figure), and the avoiding gap is used to communicate the positioning hole 701 with the outside of the fixing seat 7. In the installation process of the connecting rope 4, the connecting rope 4 passes through the avoiding gap and enters the positioning hole 701, and the positioning bead 401 is clamped into the positioning hole 701 under the action of gravity and elastic force.
[0057] In some embodiments, combined with Figure 7 As shown, the connecting rope 4 includes a spring section 402. This design ensures that the bottom cone 3 can move away from the discharge port during feeding, guaranteeing normal feeding.
[0058] In some embodiments, combined with Figure 1 and Figure 7 As shown, the connecting rope 4 also includes a first connecting section 403 and a second connecting section 404. One end of the first connecting section 403 is connected to the bottom cone support 6, and the other end of the first connecting section 403 is provided with a first locking knot 405. One end of the second connecting section 404 is fixed relative to the feeding cylinder 1, and the other end of the second connecting section 404 is provided with a second locking knot 406. The two ends of the spring section 402 are movably connected to the first locking knot 405 and the second locking knot 406, respectively. This arrangement facilitates the replacement of the spring section 402.
[0059] It is understandable that a positioning bead 401 is provided at the end of the second connecting section 404 away from the spring section 402. The positioning bead 401 is movably locked in the positioning hole 701 of the fixed seat 7 to achieve a relatively fixed connection with the feeding cylinder 1.
[0060] In some embodiments, combined with Figure 1 As shown, the feeder also includes a guide plate 8 and a limiting ring 9. The guide plate 8 and the limiting ring 9 are fitted onto the feeding cylinder 1 and are connected by a flange connecting rod 10. The guide plate 8, in conjunction with the guiding structure in the single crystal furnace, can adjust the direction of the feeder to ensure that the feeder is installed in place. The diameter of the limiting ring 9 is larger than the diameter of the feeding cylinder 1, and it can cooperate with the limiting structure in the single crystal furnace to limit the distance the feeder enters the crucible. In addition, the distance the feeder enters the crucible can be finely adjusted by adjusting the flange connecting rod 10, which helps to improve the accuracy of feeding.
[0061] Secondly, this application also provides a single crystal furnace (not shown in the figure).
[0062] The single crystal furnace provided in this application includes the feeder described in any of the above embodiments.
[0063] Because of the above-mentioned feeder, the bottom cone 3 of the feeder of the single crystal furnace of this application is not easy to fall off, which can prevent silicon raw material contamination caused by the bottom cone 3 falling off, which is conducive to improving the production efficiency of the single crystal furnace, ensuring product quality and saving costs.
[0064] The technical solutions of this application have been described in conjunction with the accompanying drawings. However, it will be readily understood by those skilled in the art that the scope of protection of this application is obviously not limited to these specific embodiments. Without departing from the principles of this application, those skilled in the art can make equivalent changes or substitutions to the relevant technical features, and the technical solutions resulting from these changes or substitutions will all fall within the scope of protection of this application.
Claims
1. A feeder for a single crystal furnace, the feeder comprising: a feeding cylinder, an interior of which is used for containing silicon material; a bottom cone, which is movably clamped at a discharge port of the feeding cylinder; a lifting rod, which is movably arranged in the feeding cylinder, a bottom end of which is fixedly connected with the bottom cone, and a top end of which extends upwardly out of a top of the feeding cylinder; an isolation tube, which is sleeved on a portion of the lifting rod located in the feeding cylinder; characterized in that the feeder further comprises: a bottom cone holder, which is movably arranged on the bottom cone; a connecting rope, one end of which is fixedly connected with the bottom cone holder, and the other end of which is fixedly connected with the feeding cylinder to hold the bottom cone in cooperation with the bottom cone holder, at least a portion of the connecting rope being elastic and the connecting rope being always in a stretched state.
2. The feeder for a single crystal furnace according to claim 1, wherein The top of the feeding cylinder is provided with a fixing seat; wherein the interior of the bottom cone is provided with an avoiding passage, one end of the connecting rope is fixedly connected with the bottom cone holder, and the other end of the connecting rope is connected on the fixing seat after passing through the avoiding passage and the isolation tube.
3. The feeder for a single crystal furnace according to claim 2, wherein The interior of the bottom cone is provided with a containing cavity and a connecting passage, the containing cavity is open at a bottom of the bottom cone, a top of the containing cavity is communicated with the connecting passage, and a top of the connecting passage is sealingly communicated with a bottom of the isolation tube in the case that the bottom cone is clamped with the discharge port; wherein two ends of the avoiding passage are respectively communicated with the containing cavity and the connecting passage.
4. The feeder for a single crystal furnace according to claim 3, wherein The bottom of the bottom cone is an annular bottom, the bottom cone holder comprises a plurality of clamping claws, the clamping claws comprise a clamping section, a holding section and an extending section; wherein the clamping section is bent and extended upwardly along an outer edge of the annular bottom to be clamped on the bottom cone, the holding section is in contact with the annular bottom, and the extending section is inclinedly extended upwardly along an inner wall of the containing cavity, and a top of the holding section is fixedly connected with the connecting rope.
5. The feeder for a single crystal furnace according to claim 4, characterized in that: the containing cavity is provided in a circular truncated cone shape; and / or the bottom cone holder comprises at least three clamping claws; and / or the clamping claws are uniformly distributed along a circumference of the annular bottom; and / or the clamping claws, the connecting rope and the avoiding passage are one-to-one corresponding.
6. The feeder for a single crystal furnace according to claim 2, wherein An upper end of the connecting rope is provided with a positioning bead, the fixing seat is provided with a positioning hole, and the positioning bead is movably clamped in the positioning hole.
7. The feeder for a single crystal furnace according to any one of claims 1 to 6, characterized by, The connecting rope comprises a spring section.
8. The feeder for a single crystal furnace according to claim 7, wherein The connecting rope further comprises a first connecting section and a second connecting section, one end of the first connecting section is connected with the bottom cone holder, the other end of the first connecting section is provided with a first lock, one end of the second connecting section is fixedly connected with the feeding cylinder, the other end of the second connecting section is provided with a second lock, and two ends of the spring section are movably connected with the first lock and the second lock respectively.
9. The feeder for a single crystal furnace according to any one of claims 1 to 6, characterized by, The feeder further comprises a guide disc and a limiting ring, the guide disc and the limiting ring are sleeved on the feeding cylinder, and the guide disc and the limiting ring are connected through a flange connecting rod.
10. A single crystal furnace characterized by comprising: The single crystal furnace comprises the feeder for a single crystal furnace according to any one of claims 1 to 9.