Vacuum isolation control swing valve

Abstract

The utility model relates to the technical field of swing valve devices, and discloses a vacuum isolation control swing valve, which comprises a valve body, a pressure plate and a valve plate, the flange is detachably arranged on the edge of the outer surface of the valve body; the spring guide assembly is detachably arranged in the flange; the connecting rod is connected to the pressing plate; the piston is arranged at the end, away from the pressing plate, of the connecting rod, and the end, away from the connecting rod, of the piston is clamped with one end of the spring guide assembly in a matched mode. The spring guide assembly is stressed to work, force is transmitted to the connecting rod through the piston, and at the moment, the connecting rod drives the pressing plate to abut against the surface of the valve plate. And through the clamping arrangement between the spring guide assembly and the piston, the elastic force of the spring can be uniformly transmitted into the piston until reaching the valve plate, so that the sealing effect can be improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to swing valve device technical field, concretely relates to a vacuum isolation control swing valve. BACKGROUND

[0002] As a key control element, the vacuum control pressure swing valve is widely used in semiconductor and display production systems, mainly bearing the fluid transmission and pressure control effect between the cavity and the vacuum pump; the valve needs to operate under high vacuum and ultra-high vacuum conditions, which puts forward very high requirements on the sealing property, stability and service life of the equipment; however, with the rapid development of domestic semiconductor industry, the technical bottleneck of the vacuum control pressure swing valve is increasingly apparent, and the demand for its function improvement and performance improvement is increasingly urgent.

[0003] The existing vacuum control pressure swing valve is usually composed of a driver and a valve body, wherein the driver realizes the accurate opening and closing of the valve through motor integrated position control; its main application scenarios include pressure regulation and fluid isolation between the cavity and the vacuum pump; in order to ensure the stability of the production process, the vacuum control pressure swing valve must ensure that the vacuum degree of the cavity is not affected during the opening and closing process, while providing high controllability within the flow range; however, the current vacuum control pressure swing valve has the following problems: first, the guiding effect of the valve body is missing when sealing, so the sealing property is unstable; second, it is inconvenient to assemble the spring, and it is difficult to assemble all the springs consistently. Therefore, it is urgent to design a vacuum control pressure swing valve that can realize excellent sealing property, highest stability, simplest operability and longest service life.

[0004] In view of the above, the present application proposes a vacuum isolation control swing valve to solve the above problems, so that the pressure ring can be uniformly pressed on the surface of the valve plate during the descending process to improve the sealing effect. UTILITY MODEL CONTENTS

[0005] In view of the deficiencies of the prior art, the utility model provides a vacuum isolation control swing valve, which solves the problems proposed in the above background art.

[0006] To achieve the above purpose, the utility model realizes the following technical scheme:

[0007] A vacuum isolation control swing valve, comprising,

[0008] The valve body is provided with a pressure plate and a valve plate;

[0009] The flange is detachably arranged at the edge of the outer surface of the valve body;

[0010] The spring guiding assembly is detachably arranged in the flange;

[0011] The connecting rod is connected to the pressure plate.

[0012] Piston, set in the connecting rod away from the one end of the plate, its away from the one end of the spring guide assembly with the end of the card;

[0013] The spring guide assembly force work, force through the piston to the connecting rod, at this time the connecting rod driven plate tightly in the valve plate surface.

[0014] Optionally, the flange is provided with a groove, the spring guide assembly is adapted to be provided in the groove.

[0015] Optionally, the spring guide assembly includes a spring and a guide shaft; the guide shaft is provided with a receiving groove, and the spring is arranged in the receiving groove, and an outer diameter and an inner diameter of the spring are tightly attached to the receiving groove.

[0016] Optionally, the piston is provided with a shallow groove towards the spring guide assembly, and the end of the spring guide assembly away from the flange is adapted to be clamped in the shallow groove.

[0017] The utility model provides a kind of vacuum isolation control swing valve, with the following beneficial effects:

[0018] 1, by the clamping setting between spring guide assembly and piston, it can promote that spring elasticity is evenly transmitted to piston, until to valve plate, to improve the effect of sealing in this way.

[0019] 2, by the setting of spring guide assembly, it promotes an independent connecting structure, after forming clamping with piston, it can be installed by flange sleeve, reduces the problem that spring pops out when being placed unevenly, and when replacing and maintaining, it can be realized only by disassembling flange. DETAILED DESCRIPTION

[0020] Figure 1 It is the structure diagram of the utility model;

[0021] Figure 2 It is the structure diagram of the utility model Figure 1 Enlarged structure diagram of A place in the utility model;

[0022] Figure 3 It is the structure diagram of the utility model shallow groove.

[0023] In the drawing: 1, valve body; 2, pressing plate; 3, valve plate; 4, flange; 41, groove; 5, spring guide assembly; 51, spring; 52, guide shaft; 521, receiving groove; 6, connecting rod; 7, piston; 71, shallow groove. DETAILED DESCRIPTION

[0024] In order to make the technical means, creative characteristics, purposes and effects of the utility model easy to understand, the utility model is further described in combination with specific embodiments.

[0025] In the description of the utility model, it needs to be understood that the directions or position relations indicated by the terms "transverse", "longitudinal", "end", "edge", "side wall", "upper", "lower", "upper part", "lower part", "directly above", "surface", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", "end", "head", "tail" are based on the directions or position relations shown in the drawings, and are only for the convenience of describing the technical scheme of the utility model and simplifying the description, and therefore cannot be understood as limiting the utility model.

[0026] The utility model provides a vacuum isolation control swing valve, it is as follows specifically:

[0027] For reference Figure 1 The utility model mainly comprises a valve body 1, a pressing plate 2 and a valve plate 3 which are arranged in the valve body 1, a flange 4 which is detachably arranged at the edge of the outer surface of the valve body 1, a spring guide assembly 5 which is detachably arranged in the flange 4, a connecting rod 6 which is connected to the pressing plate 2 and a piston 7 which is arranged at the end of the connecting rod 6 away from the pressing plate 2, through the cooperation between various groups of structures, when the flange 4 is stressed, the force is evenly transmitted to the piston 7 through the spring guide assembly 5, the piston 7 drives the connecting rod 6 to move the pressing plate 2 towards the valve plate 3 and abuts against the surface of the valve plate 3, so as to form a seal.

[0028] For reference Figures 1-2 The flange 4 is provided with a groove 41, and the size of the groove 41 is matched with the size of the spring guide assembly 5.

[0029] The spring guide assembly 5 comprises a spring 51 and a guide shaft 52, the guide shaft 52 is provided with a receiving groove 521, the spring 51 is arranged in the receiving groove 521, and the outer diameter and the inner diameter of the spring 51 are in close contact with the receiving groove 521, so that when the spring 51 is installed or replaced, the spring can be arranged in the receiving groove 521, the spring 51 is limited by the receiving groove 521, and problems such as uneven placement and ejection of the spring 51 do not need to be worried again; only after the spring 51 is clamped in the receiving groove 521 of the guide shaft 52 and located in the groove 41 of the flange 4, the flange 4 can be installed on the valve body 1; if the spring needs to be replaced, the flange 4 can be disassembled, the whole installation is simple and easy to operate, and the subsequent maintenance work is facilitated.

[0030] For reference Figures 1-2, the spring guide assembly 5 is composed of two parts of spring 51 and guide shaft 52, so that the spring 51 is not directly connected with the piston 7 after installation, avoiding the spring 51 directly contacting the piston 7, which is easy to scratch the surface, and the spring 51 will inevitably have some rust marks in the cavity of the valve body 1, which will enter the piston 7; thus into the valve itself, a certain risk is generated; and in the setting of the application, through the guide shaft 52, the defect can be effectively avoided, so that the spring does not directly contact the piston, and the surface of the piston is always kept clean.

[0031] For reference Figures 2-3 In order to make the spring 51 uniformly conduct spring force, the bottom of the spring guide assembly 5 is connected with the end of the piston 7 away from the connecting rod 6 in the form of clamping, and a shallow groove 71 is arranged at the end of the piston 7 towards the spring guide assembly 5, and the guide shaft 52 in the spring guide assembly 5 is adaptively clamped in the shallow groove 71, when the spring 51 is forced to move, the guide shaft 52 is limitedly matched through the shallow groove 71, and the force is uniformly transmitted to the piston 7, and the piston 7 moves downward after receiving the force, so that the connecting rod 6 drives the pressing plate 2 at the bottom of the connecting rod 6 to move downward and contact the surface of the valve plate 3, at this time, the pressing plate 2 is uniformly pressed on the surface of the valve plate due to the cooperation of the guide shaft 52 and the shallow groove 71, so that the sealing effect is improved.

[0032] In the utility model, the working steps of the device are as follows:

[0033] 1. First, the spring 51 in the spring guide assembly 5 is installed in the receiving groove 521 of the guide shaft 52, and the bottom of the guide shaft 52 with the installed spring 51 is inserted into the shallow groove 71 of the piston 7;

[0034] 2. Secondly, the flange 4 is sleeved on the spring guide assembly 5 and stably installed on the valve body 1;

[0035] 3. Then, when the valve plate returns to the same coaxial center as the valve body under the driving of the motor, the gas below the piston is discharged along the gas path, the spring 51 is pressed on the surface of the guide shaft 52, and the force is uniformly transmitted to the piston 7 through the guide shaft 52;

[0036] 4. Finally, the piston 7 drives the connecting rod 6 to move downward synchronously, and drives the pressing plate 2 connected at the bottom of the connecting rod 6 to move downward synchronously, so that the pressing plate 2 is pressed on the surface of the valve plate 3 under the action of the force, thereby forming a seal.

[0037] The basic principle, main features and advantages of the present application are shown and described above. Those skilled in the art should understand that the present application is not limited by the above-mentioned embodiments, and various changes and improvements can be made without departing from the spirit and scope of the present application. These changes and improvements are all within the scope of the present application. The scope of protection of the present application is defined by the appended claims and their equivalents.

Claims

1. A vacuum isolation control flap valve characterized by: The utility model relates to a valve body (1) is provided with pressure plate (2) and valve plate (3) inside, Flange (4) can be detachably arranged at the edge of the outer surface of valve body (1), Spring guide assembly (5) is detachably arranged in flange (4), Connecting rod (6) is connected to pressure plate (2), Piston (7) is arranged at the end of connecting rod (6) away from pressure plate (2), and the end of piston (7) away from connecting rod (6) is adaptively connected with one end of spring guide assembly (5), The spring guide assembly (5) works under stress, and force is transmitted to connecting rod (6) through piston, at this time, connecting rod (6) drives pressure plate (2) to tightly contact the surface of valve plate (3). The flange (4) is provided with a groove (41), and the spring guide assembly (5) is adaptively arranged in the groove (41).

2. The vacuum isolation control flap valve of claim 1, wherein: The spring guide assembly (5) comprises a spring (51) and a guide shaft (52), the guide shaft (52) is provided with a receiving groove (521), the spring (51) is arranged in the receiving groove (521), and the outer diameter and the inner diameter of the spring (51) are tightly attached to the receiving groove (521).

3. The vacuum isolation control flap valve of claim 1, wherein: The end of the piston (7) towards the spring guide assembly (5) is provided with a shallow groove (71), and the end of the spring guide assembly (5) away from the flange (4) is adaptively connected in the shallow groove (71).

4. The vacuum isolation control flap valve of claim 1, wherein: ​

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