Detection device for probe card production and processing

Abstract

The utility model relates to the technical field of probe card production, in particular to a detection device for probe card production and processing, which comprises a detection table, a placement detection mechanism for quickly detecting a probe card is arranged on the detection table, and a protective dust removal mechanism for removing dust on the surface of the probe card is arranged on the detection table. According to the utility model, through the arrangement of the protection and dust removal mechanism, the probe card is protected in the process of size detection of the probe card, dust is prevented from being attached to the probe card to influence the accuracy of the detection result of the probe card, dust around the probe card can be eliminated in the detection process, the production quality of the probe card is improved, and the production efficiency is improved. According to the probe card detection device, the accuracy of the detection result of the probe card is enhanced, the placement detection mechanism is arranged, the probe card can be rapidly and stably detected in the process of detecting the probe card, so that the detection rate of the probe card is improved, and the mechanism is easy to operate.

Description

TECHNICAL FIELD

[0001] The utility model relates to probe card production technical field especially relates to a detection device for probe card production and processing. BACKGROUND

[0002] The probe card is a kind of test interface, mainly used to test bare chip, by connecting test machine and chip, transmission signal is tested to chip parameter, in the probe card production and processing process, it needs to be detected to ensure quality and performance.

[0003] The existing detection device is in detection process, due to the probe card surface easy adsorption dust and other impurities, these dust not only can influence detection precision, also possibly causes damage to probe card itself, reduces its service life.In view of this, we provide a detection device for probe card production and processing. UTILITY MODEL CONTENT

[0004] In view of the deficiencies of the prior art, the utility model provides a detection device for probe card production and processing, solves the technical problem that the dust around the probe card is attached to the surface of the probe card when detecting the probe card in the prior art, which affects the accuracy of detection results, eliminates the dust around the probe card, improves the production quality of the probe card, and enhances the accuracy of detection results.

[0005] To solve the above technical problems, the utility model provides the following technical scheme: a detection device for probe card production and processing, including detection table, the detection table is provided with the detection mechanism of placing detection that quickly detects probe card, the detection table is provided with the protective dust removal mechanism that eliminates the dust on the surface of probe card.

[0006] The protective dust removal mechanism includes two groups of bases fixedly installed on the detection table, the base is slidably connected with the protective frame, the protective frame is provided with square groove, the protective frame is installed with installation box, the installation box is installed with mounting bracket in it, the mounting bracket is installed with fan, the installation box is installed with wind cylinder, the installation box is installed with refrigerator, the refrigerator is connected with the cold pipe that passes through installation box, the installation box is slidably connected with dustproof plate.

[0007] The placing detection mechanism comprises a fixed column mounted on a detection table, a driving motor is mounted on the fixed column, a bevel gear one is connected to the output end of the driving motor, a rotating rod is rotatably connected in the fixed column, a bevel gear two meshing with the bevel gear one is mounted on the rotating rod, a fixed disc is mounted on the rotating rod, a connecting belt is connected to the fixed disc, a rotating shaft is rotatably connected to the detection table, a connecting disc connected with the connecting belt is mounted on the rotating shaft, a driving piece is mounted on the top end of the rotating shaft, a linkage piece adapted to the driving piece is rotatably connected in the detection table, a placing disc is mounted on the linkage piece, a plurality of groups of placing grooves are formed in the placing disc, and a supporting piece is mounted in each placing groove.

[0008] The detection assembly comprises a support mounted on the fixed column, a connecting rod rotatably connected with the support is connected to the output end of the driving motor, a connecting piece is rotatably mounted on the connecting rod, a limiting square cylinder is mounted on the fixed column, an installation rod penetrating through the inside of the limiting square cylinder is rotatably connected to the connecting piece, a detector is mounted at the bottom end of the installation rod, and an illuminating lamp is mounted on the limiting square cylinder.

[0009] The detection table is provided with a mounting rail connected with a collecting box on the side edge, and the position of the square groove corresponds to the position of the driving motor.

[0010] The fixed disc and the connecting disc are in the same horizontal plane, and the position of the placing groove corresponds to the position of the linkage piece clamping groove.

[0011] The detectors are distributed directly above the placing disc, and the illuminating lamps are distributed on the side edge of the detectors.

[0012] By means of the above technical scheme, the detection device for probe card production and processing provided by the utility model has at least the following beneficial effects:

[0013] 1、The protective dust removal mechanism is arranged, the protective effect of the probe card is achieved during the size detection of the probe card, the dust around the probe card can be removed during the detection process, the production quality of the probe card is improved, and the accuracy of the detection result of the probe card is enhanced.

[0014] 2、The placing detection mechanism is arranged, the probe card can be quickly and stably detected during the detection of the probe card, the detection rate of the probe card is improved, and the mechanism is simple to operate and easy to operate. BRIEF DESCRIPTION OF DRAWINGS

[0015] The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this application, illustrate embodiments of the application and together with the description serve to explain the application. The detailed description of the application refers to the accompanying drawings.

[0016] In the drawings:

[0017] Figure 1 It is the overall structure schematic view of the utility model;

[0018] Figure 2 It is the side view structure schematic view of the utility model;

[0019] Figure 3 It is the structure schematic view of the utility model placing detection mechanism;

[0020] Figure 4 It is the split structure schematic view of the utility model placing detection mechanism;

[0021] Figure 5 It is the overall structure schematic view of the utility model protective dust removal mechanism;

[0022] Figure 6 It is the split structure schematic view of the utility model protective dust removal part.

[0023] In the drawings: 1, detection table;

[0024] 2, placing detection mechanism; 21, fixed column; 22, drive motor; 23, bevel gear one; 24, rotating rod; 25, bevel gear two; 26, fixed disc; 27, connecting belt; 28, rotating shaft; 29, connecting disc; 210, driving part; 211, linkage; 212, placing disc; 213, placing groove; 214, supporting part;

[0025] 201, detection assembly; 2011, support; 2012, connecting rod; 2013, connecting piece; 2014, limit square cylinder; 2015, mounting rod; 2016, detector; 2017, mounting column; 2018, illuminating lamp;

[0026] 3, protective dust removal mechanism; 31, base; 32, protective frame; 33, square groove; 34, mounting box; 35, mounting frame; 36, fan; 37, air duct; 38, refrigerating device; 39, cold pipe; 310, dustproof plate. DETAILED DESCRIPTION

[0027] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative efforts fall within the scope of the present application.

[0028] Embodiment one

[0029] In the prior art, when a probe card is detected, dust around the probe card is easily attached to the surface of the probe card, thereby affecting the accuracy of the detection result. The embodiment provides a detection device for probe card production and processing, please refer to Figures 1-6 , which can eliminate dust around the probe card, improve the production quality of the probe card, and also enhance the accuracy of the detection result. The detection device for probe card production and processing comprises a detection table 1, a mounting rail connected with a collection box is mounted on the side of the detection table 1, the collection box is convenient to install, so that the detected probe card can be collected and stored, a placing and detecting mechanism 2 for quickly detecting the probe card is arranged on the detection table 1, and a protective dust removal mechanism 3 for eliminating dust on the surface of the probe card is arranged on the detection table 1. The placing and detecting mechanism 2 can stably and quickly detect the probe card, thereby improving the detection efficiency, the protective dust removal mechanism 3 can not only protect the probe card during detection, but also has a dust removal effect, thereby improving the accuracy of the detection result.

[0030] In the process of detecting the probe card, in order to timely eliminate dust around the probe card and enhance the accuracy of the detection result, the protective dust removal mechanism 3 comprises two groups of bases 31 fixedly installed on the detection table 1, a protective frame 32 is slidably connected to the base 31, a square groove 33 is formed in the protective frame 32, the position of the square groove 33 corresponds to the position of the driving motor 22, so that the driving motor 22 can pass through the square groove 33, the protective position is convenient to move smoothly, the protection effect is improved, an installation box 34 is installed on the protective frame 32, an installation rack 35 is installed in the installation box 34, a fan 36 is installed on the installation rack 35, an air cylinder 37 is installed on the installation box 34, a refrigerating device 38 is installed on the installation box 34, a cold pipe 39 penetrating through the installation box 34 is connected to the refrigerating device 38, and a dustproof plate 310 is slidably connected to the installation box 34. By pulling the position of the protective frame 32, the protection range is adjusted within a certain range, the protection efficiency is improved, by the operation of the fan 36, the airflow generated by the fan 36 flows to the detection position through the air cylinder 37, the dust blowing effect is achieved, the dust is prevented from being attached to the probe card, and by the operation of the refrigerating device 38, the cold air generated by the refrigerating device 38 circulates in the cold pipe 39, so that the cooling effect is achieved, thereby improving the operation comfort of the worker.

[0031] Embodiment two

[0032] On the basis of embodiment one, as Figures 1-6 shown, based on the existing prior art in the detection probe card, the dust around the probe card is easy to adhere to the surface of the probe card and affect the accuracy of the detection result, but in the prior art, the probe card is usually placed one by one by artificial detection, which can easily affect the detection rate of the probe card, so the device also sets a structure to improve the detection rate of the probe card.

[0033] In the process of detecting the probe card, in order to detect the probe card conveniently and repeatedly, improve the detection rate, the placing detection mechanism 2 includes a fixed column 21 installed on the detection table 1, a driving motor 22 is installed on the fixed column 21, a bevel gear one 23 is connected to the output end of the driving motor 22, a rotating rod 24 is rotatably connected inside the fixed column 21, a bevel gear two 25 is installed on the rotating rod 24 and engaged with the bevel gear one 23, a fixed disc 26 is installed on the rotating rod 24, the fixed disc 26 and the connecting disc 29 are in the same horizontal plane, so that the rotating shaft 28 rotates stably, the connecting belt 27 is connected to the fixed disc 26, the rotating shaft 28 is rotatably connected to the detection table 1, the connecting disc 29 is connected to the connecting belt 27, the driving part 210 is installed at the top of the rotating shaft 28, the linkage part 211 is rotatably connected inside the detection table 1 and matched with the driving part 210, the placing disc 212 is installed on the linkage part 211, a plurality of placing grooves 213 are formed on the placing disc 212, the positions of the placing grooves 213 correspond to the positions of the linkage part 211, so that the placed probe card can be indirectly and circularly detected, the detection rate is improved, the supporting part 214 is installed inside the placing groove 213, and the detection assembly 201 for continuously detecting the probe card is arranged on the fixed column 21. Through the operation of the driving motor 22, the bevel gear one 23 is driven to rotate, under the connection of the bevel gear two 25, the rotating rod 24 rotates, and the fixed disc 26 also rotates, under the connection of the connecting belt 27 and the connecting disc 29, the rotating shaft 28 rotates, and then the driving part 210 rotates, and then the linkage part 211 rotates, under the support of the linkage part 211, the placing disc 212 rotates circularly, and then the probe card can be automatically and quickly detected, and the detection rate is improved.

[0034] In the process of detecting the probe card, in order to improve the detection effect of the probe card, enhance the accuracy of the detection result, the detection assembly 201 includes a support 2011 installed on the fixed column 21, the output end of the driving motor 22 is connected with the connecting rod 2012 rotatably connected with the support 2011, the connecting rod 2012 is rotatably installed with the connecting piece 2013, the fixed column 21 is installed with the limiting square cylinder 2014, the connecting piece 2013 is rotatably connected with the mounting rod 2015 penetrating through the inside of the limiting square cylinder 2014, the mounting rod 2015 is installed with the detector 2016 at the bottom end, the detector 2016 is distributed above the placing disc 212, so that the probe card can be accurately detected, the mounting column 2017 is installed on the limiting square cylinder 2014, the illuminating lamp 2018 is rotatably installed in the mounting column 2017, the illuminating lamp 2018 is distributed on the side of the detector 2016, the brightness of the detection is enhanced, and the detection precision is improved. Through the operation of the driving motor 22, the connecting rod 2012 is driven to rotate under the support of the support 2011, and then under the limiting support of the limiting square cylinder 2014 and under the connection of the mounting rod 2015, the height of the detector 2016 can be adjusted circularly, the detection effect of the probe card is improved, the illuminating lamp 2018 plays an incremental role, and the accuracy of the detection result is improved.

[0035] It should be noted that in this document, the terms "comprise", "comprise", or any other variant thereof are intended to cover non-exclusive inclusion, so that processes, methods, articles or equipment including a series of elements not only include those elements, but also include other elements not explicitly listed, or include elements inherent to such processes, methods, articles or equipment.

[0036] Although the embodiments of the utility model have been shown and described, it can be understood by those skilled in the art that various changes, modifications, replacements and variations can be made to these embodiments without departing from the principles and spirits of the utility model, the scope of the utility model is defined by the appended claims and their equivalents.

Claims

1. A detection device for probe card production and processing, comprising a detection table (1), characterized in that: The detection platform (1) is provided with a placement detection mechanism (2) for rapid detection of the probe card, and the detection platform (1) is provided with a protective dust removal mechanism (3) for removing dust on the surface of the probe card. The protective dust removal mechanism (3) comprises two groups of bases (31) fixedly installed on the detection platform (1), the bases (31) are slidably connected with protective frames (32), the protective frames (32) are provided with square grooves (33), the protective frames (32) are installed with installation boxes (34), the installation boxes (34) are installed with mounting racks (35), the mounting racks (35) are installed with fans (36), the installation boxes (34) are installed with air ducts (37), the installation boxes (34) are installed with refrigerators (38), the refrigerators (38) are connected with cold pipes (39) penetrating through the installation boxes (34), and the installation boxes (34) are slidably connected with dustproof plates (310).

2. The probe card production processing detection device according to claim 1, wherein: The placement detection mechanism (2) comprises a fixed column (21) installed on the detection platform (1), a driving motor (22) installed on the fixed column (21), a bevel gear I (23) connected with the output end of the driving motor (22), a rotating rod (24) rotatably connected in the fixed column (21), a bevel gear II (25) installed on the rotating rod (24) and engaged with the bevel gear I (23), a fixed disc (26) installed on the rotating rod (24), a connecting belt (27) connected with the fixed disc (26), a rotating shaft (28) rotatably connected with the detection platform (1), a connecting disc (29) installed on the rotating shaft (28) and connected with the connecting belt (27), a driving part (210) installed at the top end of the rotating shaft (28), a linkage part (211) rotatably connected with the driving part (210) in the detection platform (1), a placement disc (212) installed on the linkage part (211), a plurality of groups of placement grooves (213) formed in the placement disc (212), and a supporting part (214) installed in the placement groove (213).

3. The probe card production processing detection device according to claim 2, wherein: The detection assembly (201) comprises a support (2011) installed on the fixed column (21), a connecting rod (2012) rotatably connected with the support (2011) and connected with the output end of the driving motor (22), a connecting part (2013) rotatably installed on the connecting rod (2012), a limiting square cylinder (2014) installed on the fixed column (21), an installation rod (2015) rotatably connected with the connecting part (2013) and penetrating through the inside of the limiting square cylinder (2014), a detector (2016) installed at the bottom end of the installation rod (2015), and an installation column (2017) installed on the limiting square cylinder (2014) and rotatably installed with a lighting lamp (2018) in the inside of the installation column (2017).

4. The probe card production processing detection device according to claim 1, wherein: The detection platform (1) is provided with an installation rail connected with a collection box, and the position of the square groove (33) corresponds to the position of the driving motor (22).

5. The probe card production processing detection device according to claim 2, wherein: The fixing disc (26) is in the same horizontal plane with the connecting disc (29), and the position of the placing groove (213) corresponds to the position of the linkage (211) clamping groove.

6. The probe card production processing detection device according to claim 3, wherein: The detector (2016) is distributed directly above the placing disc (212), and the illuminating lamp (2018) is distributed at the side of the detector (2016).

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