Frame structure of parallel light exposure machine

Abstract

The utility model discloses a rack structure of a parallel light exposure machine, which belongs to the technical field of parallel light exposure machines and comprises a bottom frame, a bottom plate is fixedly sleeved on the inner side of the bottom frame, four high upright posts are fixedly connected to the top of the bottom frame, and a host top frame is fixedly connected to the top ends of the four high upright posts. Four short stand columns are fixedly connected to the top of the bottom frame, a working top frame is fixedly connected to the top ends of the four short stand columns, and gradienters are fixedly connected to the outer sides of the four high stand columns respectively. According to the utility model, the plurality of electric push rods are fixedly mounted on the bottom plate, and the moving wheels are mounted at the bottom ends of the plurality of electric push rods, so that the rack can be driven to move by the electric push rods and the moving wheels, and the rack can be adjusted to a horizontal state by the electric push rods and the moving wheels; and the gradienter is used for detecting the horizontal state of the rack, so that the practicability of the rack structure of the parallel light exposure machine is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to parallel light exposure machine technical field more specifically, it relates to a parallel light exposure machine's rack structure. BACKGROUND

[0002] Parallel light exposure machine is a kind of exposure equipment using parallel light source, mainly for the production of semiconductor manufacturing and printed circuit board, and the core principle of parallel light exposure machine is to realize the uniform exposure of sample surface by light refraction and reflection.

[0003] Through the retrieval, the utility model discloses parallel light exposure machine's rack structure with publication No.CN203573082U discloses parallel light exposure machine's rack structure, including the base of rectangle, the base includes bottom frame and the bottom plate of fixed connection on bottom frame, bottom frame is equipped with the mainframe and the working rack of interconnection, the inner side quarter height of two long columns near baffle is respectively connected with the first lower spherical mirror support ear, the inner side three quarter height of two long columns near baffle is respectively connected with the first upper spherical mirror support ear;The inner side of the bottom end of long column on the short edge of base is equipped with the second lower spherical mirror support ear with the first lower spherical mirror support ear, and the inner side of the top end of long column on the short edge of base is equipped with the second upper spherical mirror support ear with the first upper spherical mirror support ear;The rack structure of the parallel light exposure machine, structural strength is higher, and stability is higher, and layout is reasonable, meets the demand of parallel light exposure machine.But the above-mentioned patent still has the following insufficient: it is inconvenient to move, and the convenience is poor;It is not convenient to level the rack, and the rack is not conveniently and stably placed when the ground is uneven, and the exposure quality of exposure machine is affected.Therefore, a kind of parallel light exposure machine's rack structure is presented. UTILITY MODEL CONTENTS

[0004] In view of the problems in the prior art, the utility model aims at providing a rack structure of parallel light exposure machine.

[0005] To solve the above problems, the utility model adopts the following technical scheme:

[0006] A kind of parallel light exposure machine's rack structure, including bottom frame, the inner side of bottom frame is fixedly sleeved with bottom plate, the top of bottom frame is fixedly connected with four high columns, the top of four high columns is fixedly connected with mainframe top frame, the top of four short columns fixedly connected with working top frame is fixedly connected with four short columns in the top of bottom frame, the outer side of four high columns is respectively fixedly connected with level, the bottom plate is provided with multiple support mechanisms, the top surface of bottom plate is fixedly installed with multiple electric push rods, and the output end of multiple electric push rods is extended to the bottom of bottom plate and is fixedly connected with moving wheel.

[0007] As a preferred scheme of the utility model, the support mechanism includes a through hole arranged on the bottom plate and a welded nut fixedly connected to the top surface of the bottom plate, the welded nut and the through hole are concentrically arranged, a screw rod is threadedly sleeved on the welded nut, and the bottom end of the screw rod extends to the bottom of the bottom plate through the through hole and is fixedly connected with a support leg.

[0008] As a preferred scheme of the utility model, the bottom surface of the bottom plate is fixedly connected with a plurality of reinforcing blocks, and the ends of the plurality of reinforcing blocks are respectively connected with the inner walls of the bottom frame.

[0009] As a preferred scheme of the utility model, the side surfaces of the bottom ends of the short columns and the high columns are respectively fixedly connected with triangular blocks, and the bottom ends of the triangular blocks are connected with the top surface of the bottom frame.

[0010] As a preferred scheme of the utility model, the top surface of the working top frame is provided with two mounting racks, and one end of each of the two mounting racks is connected with the inner side surface of the high column.

[0011] As a preferred scheme of the utility model, the two short columns are fixedly connected with a partition plate, and a plurality of line holes are arranged on the partition plate.

[0012] Compared with the prior art, the utility model has the advantages that:

[0013] (1) In the utility model, a plurality of electric push rods are fixedly installed on the bottom plate, and moving wheels are installed on the bottom ends of the electric push rods, so that the rack can be moved by the electric push rods and the moving wheels, and the rack can be adjusted to a horizontal state by the electric push rods and the moving wheels, and the horizontal state of the rack is detected by using a level.

[0014] (2) In the utility model, when the rack is adjusted to be horizontal, the support leg is rotated to drive the screw rod to rotate, the support leg is moved downward by the thread cooperation between the screw rod and the welded nut, the bottom surface of the support leg is in contact with the ground, the rack is assisted and supported by the welded nut, the screw rod and the support leg, the stability of the rack is ensured, and the practicability of the rack structure of the parallel light exposure machine is improved. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 It is a schematic view of the overall structure of the utility model;

[0016] Figure 2 It is a schematic view of the structure of the bottom frame of the utility model;

[0017] Figure 3 It is a schematic view of the structure of the bottom plate of the utility model;

[0018] Figure 4 It is a schematic view of the structure of the support leg of the utility model.

[0019] Explanation of reference numerals in the drawings: 1, bottom frame; 2, bottom plate; 3, high stand column; 4, main machine top frame; 5, low stand column; 6, working top frame; 7, electric push rod; 8, moving wheel; 9, supporting mechanism; 10, level meter; 11, welding nut; 12, through hole; 13, screw rod; 14, supporting foot; 15, triangular block; 16, reinforcing block; 17, mounting rack; 18, partition plate; 19, circuit hole. DETAILED DESCRIPTION

[0020] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0021] In the description of the present application, it should be noted that the terms "upper", "lower", "inner", "outer", "top / bottom end" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0022] In the description of the present application, it should be noted that unless otherwise explicitly specified and limited, the terms "mounting", "provided with", "sleeved / connected", "connected" and the like should be broadly understood, for example, "connected" can be fixedly connected, or can be detachably connected, or integrally connected; can be mechanically connected, or can be electrically connected; can be directly connected, or can be indirectly connected through an intermediate medium; can be internal communication of two elements. For those skilled in the art, the specific meanings of the above terms in the present application can be understood according to the specific circumstances.

[0023] Embodiment:

[0024] Please refer to Figures 1-4The utility model relates to a frame structure of parallel light exposure machine, including bottom frame 1, the inside fixed sleeve of bottom frame 1 is provided with bottom plate 2, the top of bottom frame 1 is fixedly connected with four high columns 3, the top of four high columns 3 is fixedly connected with main machine top frame 4, the top of bottom frame 1 is fixedly connected with four short columns 5, the top of four short columns 5 is fixedly connected with working top frame 6, the outside of four high columns 3 is fixedly connected with level 10 respectively, bottom plate 2 is provided with a plurality of support mechanisms 9, the top of bottom plate 2 is fixedly installed with a plurality of electric push rods 7, and the output of a plurality of electric push rods 7 all extends to the bottom of bottom plate 2 and is fixedly connected with moving wheel 8.

[0025] In the embodiment, the electric push rod 7 drives the moving wheel 8 to move down, and the electric push rod 7 and the moving wheel 8 support the frame, and the moving wheel 8 drives the frame to move.

[0026] Specifically, refer to Figures 1 to 4 The support mechanism 9 includes a through hole 12 formed in the bottom plate 2 and a welded nut 11 fixedly connected to the top surface of the bottom plate 2, the welded nut 11 and the through hole 12 are concentrically arranged, a threaded rod 13 is threadedly connected to the welded nut 11, and the bottom end of the threaded rod 13 extends through the through hole 12 to the bottom of the bottom plate 2 and is fixedly connected with a supporting leg 14.

[0027] In the embodiment, the threaded rod 13 and the welded nut 11 drive the supporting leg 14 to move up and down, and the supporting leg 14, the threaded rod 13 and the welded nut 11 support the frame.

[0028] Specifically, refer to Figure 3 The bottom surface of the bottom plate 2 is fixedly connected with a plurality of reinforcing blocks 16, and the ends of the plurality of reinforcing blocks 16 are respectively connected with the inner walls of the bottom frame 1.

[0029] In the embodiment, the reinforcing blocks 16 increase the connection strength between the bottom frame 1 and the bottom plate 2, and ensure the supporting strength of the bottom plate 2.

[0030] Specifically, refer to Figure 1 The sides of the bottom ends of the short columns 5 and the high columns 3 are respectively fixedly connected with triangular blocks 15, and the bottom ends of the triangular blocks 15 are connected with the top surface of the bottom frame 1.

[0031] In the embodiment, the triangular blocks 15 increase the connection strength between the bottom frame 1, the high columns 3 and the short columns 5.

[0032] Specifically, refer to Figure 1 The top surface of the working top frame 6 is provided with two mounting racks 17, and one end of each of the two mounting racks 17 is connected with the inner side surface of the high column 3.

[0033] In the embodiment, the mounting racks 17 mount the exposure machine equipment.

[0034] In particular, please refer to Figure 2 Two short columns 5 are fixedly connected with a partition plate 18, and a plurality of line holes 19 are arranged on the partition plate 18.

[0035] Working principle: in use, firstly, four electric push rods 7 are started by using the control panel on the exposure machine, four moving wheels 8 are driven to move downward by the four electric push rods 7, the frame is supported by the moving wheels 8 and the electric push rods 7, so as to move the frame by the moving wheels 8, then when the frame moves to the predetermined position, the height of the frame is adjusted by the plurality of electric push rods 7, and the frame is adjusted to be horizontal by the level 10, finally, the support foot 14 is rotated to drive the screw rod 13 to rotate, the support foot 14 is driven to move downward by the thread cooperation between the screw rod 13 and the welded nut 11, so that the bottom surface of the support foot 14 is in contact with the ground, so as to assist the frame by the welded nut 11, the screw rod 13 and the support foot 14.

[0036] The above is only the preferred specific implementation of the present application, but the protection scope of the present application is not limited to this, any skilled person in the art can make equivalent replacement or change according to the technical scheme and the improvement concept of the present application within the technical range disclosed by the present application, which should be covered in the protection scope of the present application.

Claims

1. A gantry structure of a parallel light exposure machine comprising a base frame (1), characterized in that: The inner side of the bottom frame (1) is sleeved with a bottom plate (2), the top of the bottom frame (1) is fixedly connected with four high columns (3), the top end of the four high columns (3) is fixedly connected with a main machine top frame (4), the top of the bottom frame (1) is fixedly connected with four low columns (5), the top end of the four low columns (5) is fixedly connected with a working top frame (6), the outer side of the four high columns (3) is respectively fixedly connected with a level (10), a plurality of supporting mechanisms (9) are arranged on the bottom plate (2), a plurality of electric push rods (7) are fixedly installed on the top surface of the bottom plate (2), the output ends of the plurality of electric push rods (7) extend to the bottom of the bottom plate (2) and are fixedly connected with moving wheels (8).

2. The gantry structure of a parallel light exposure machine according to claim 1, characterized in that: The supporting mechanism (9) comprises a threaded hole (12) formed in the bottom plate (2) and a welded nut (11) fixedly connected to the top surface of the bottom plate (2), the welded nut (11) and the threaded hole (12) are concentrically arranged, a screw rod (13) is threadedly sleeved on the welded nut (11), the bottom end of the screw rod (13) extends to the bottom of the bottom plate (2) through the threaded hole (12) and is fixedly connected with a supporting leg (14).

3. The gantry structure of a parallel light exposure machine according to claim 1, characterized in that: The bottom surface of the bottom plate (2) is fixedly connected with a plurality of reinforcing blocks (16), the ends of the plurality of reinforcing blocks (16) are respectively connected with the inner walls of the bottom frame (1).

4. The gantry structure of a parallel light exposure machine according to claim 1, wherein: The side surfaces of the bottom ends of the low columns (5) and the high columns (3) are respectively fixedly connected with triangular blocks (15), the bottom ends of the triangular blocks (15) are connected with the top surface of the bottom frame (1).

5. The gantry structure of a parallel light exposure machine according to claim 1, wherein: The top surface of the working top frame (6) is provided with two mounting frames (17), one end of the two mounting frames (17) is respectively connected with the inner side surface of the high column (3).

6. The gantry structure of a parallel light exposure machine according to claim 1, wherein: Two of the low columns (5) are fixedly connected with a partition plate (18) therebetween, a plurality of wire holes (19) are arranged on the partition plate (18).

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