Carrying equipment

Abstract

The utility model belongs to the technical field of semiconductor process equipment, and discloses carrying equipment. The carrying equipment comprises a wafer bearing device, a mechanical arm mechanism, a transverse moving mechanism and a lifting mechanism, the wafer bearing device is installed on the mechanical arm mechanism, the transverse moving mechanism can move the mechanical arm mechanism in the horizontal direction, and the lifting mechanism can move the mechanical arm mechanism in the vertical direction. The transverse moving mechanism comprises a first lead screw, a first lead screw nut and a first motor, the mechanical arm mechanism is connected to the first lead screw nut, the first lead screw nut is in transmission connection with the first lead screw, and the first motor can drive the first lead screw to rotate so as to change the horizontal position of the mechanical arm mechanism. Compared with the mode that a flexible belt is adopted to drive the mechanical arm mechanism to move, the first lead screw and the first lead screw nut can reduce shaking of the mechanical arm mechanism in the moving process, the problem that a traditional flexible belt linear module droops and shakes due to the fact that the stroke is too long is effectively solved, and therefore the stability of the wafer in the carrying process is ensured.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor process equipment, especially relates to a carrying equipment. BACKGROUND

[0002] In a wafer processing production line, wafer carrying is a crucial link. Wafer carrying devices carry wafers and transmit between different stations of the production line to realize wafer processing. At present, the wafer carrying equipment on the market mostly uses a flexible belt linear module for transmission in the X-axis direction. However, this transmission mode has a significant problem: because the stroke of the flexible belt linear module is too long, the flexible belt itself is also too long, and thus easily appears to sag and sway.

[0003] The robot, as a key component for directly grabbing and carrying wafer carrying devices, is usually fixedly connected with the flexible belt. Therefore, when the flexible belt sways, the robot also sways. This sway not only affects the stability in the carrying process, but also causes the wafer carrying device carrying the wafer to easily sway with the robot. The wafer in the wafer carrying device not only may slide out of the carrying device, but also may be damaged due to impact on the inner wall of the carrying device. More seriously, the particulate matter generated by the impact may contaminate the wafer surface, affecting its cleanliness, and thus unable to meet the strict requirements for stability and precision in the wafer processing production line.

[0004] Therefore, there is an urgent need for a carrying equipment to solve the above technical problems. UTILITY MODEL CONTENTS

[0005] The utility model aims at providing a carrying equipment with high carrying stability.

[0006] To achieve this purpose, the utility model adopts the following technical solutions:

[0007] The carrying equipment comprises a wafer carrying device, a robot mechanism, a horizontal moving mechanism and a lifting mechanism. The wafer carrying device is installed on the robot mechanism. The robot mechanism is drivingly connected to the horizontal moving mechanism and the lifting mechanism. The horizontal moving mechanism can move the robot mechanism in the horizontal direction. The lifting mechanism can move the robot mechanism and the horizontal moving mechanism in the vertical direction. The horizontal moving mechanism comprises a first screw rod, a first screw rod nut and a first motor. The robot mechanism is connected to the first screw rod nut. The first screw rod nut is drivingly connected to the first screw rod. The first motor is drivingly connected to the first screw rod. The first motor drives the first screw rod to rotate, so as to change the horizontal position of the robot mechanism along the length direction of the first screw rod.

[0008] The carrying equipment has the advantages that compared with the mode that a flexible belt drives a mechanical hand mechanism to move in the prior art, the first lead screw and the first lead screw nut can reduce the shaking of the mechanical hand mechanism during movement, effectively avoid the problems of belt sagging and shaking caused by too long stroke of a traditional flexible belt linear module, and thus ensure the stability of the wafer during the carrying process.

[0009] In some embodiments, the horizontal movement mechanism further comprises a first support base, a third fixing member, a first slide rail pair and a second slide rail pair, a first slide rail of the first slide rail pair and a second slide rail of the second slide rail pair are fixedly arranged on the first support base, the first lead screw is rotatably connected to the first support base, the first support base is drivingly connected to the lifting mechanism and can move in the vertical direction, the third fixing member is connected to the first lead screw nut and the mechanical hand mechanism, a first sliding block of the first slide rail pair and a second sliding block of the second slide rail pair are fixedly connected to the third fixing member, so as to slidingly connect the third fixing member to the first slide rail and the second slide rail. Through the first slide rail pair and the second slide rail pair, the stability of the mechanical hand mechanism can be further improved, and the swinging phenomenon can be reduced.

[0010] In some embodiments, an end of the first lead screw is provided with a first synchronous wheel, the first motor is arranged on the first support base, an output shaft of the first motor is connected with a second synchronous wheel, the horizontal movement mechanism further comprises a first synchronous belt, the first synchronous belt is drivingly connected to the first synchronous wheel and the second synchronous wheel, and in the vertical direction, the projection of the first motor and the first lead screw on the first support base at least partially overlaps. Such arrangement reduces the length of the horizontal movement mechanism, reduces the possibility of collision, and facilitates the movement of the horizontal movement mechanism and the operation of the carrying equipment.

[0011] In some embodiments, the first support base is connected with a motor fixing member, the motor fixing member is provided with a first waist-shaped hole in the vertical direction, the carrying equipment further comprises a threaded fastener, the threaded fastener is adjustably arranged in the first waist-shaped hole in the vertical direction and connected to the first motor, so as to fixedly connect the first motor and the motor fixing member. In this way, the distance between the first synchronous wheel and the second synchronous wheel can be adjusted, so as to meet the installation requirements of the first synchronous belt.

[0012] In some embodiments, the carrying equipment further comprises a first cover plate, an avoiding gap is formed between the mechanical hand mechanism and the third fixing member, the first cover plate is fixedly connected to the first support base and arranged in the avoiding gap, and in the vertical direction, the mechanical hand mechanism is located above the first cover plate, and the horizontal movement mechanism is located below the first cover plate. The first cover plate can block dust from polluting the wafer, so as to ensure the processing quality of the wafer.

[0013] In some embodiments, the carrying device further comprises a first cover, and a containing space is enclosed between the first cover and the first cover plate, and the first screw rod, the first screw rod nut, the first slide rail pair and the second slide rail pair are arranged in the containing space. The first cover plate and the first cover are matched to further avoid the pollution of the generated particulate matter to the micro environment and the wafer.

[0014] In some embodiments, the bottom of the first cover is connected with a movable element, the movable element is arranged in a variable distance along a vertical direction and the first cover, and the first cover or the movable element is connected with a detection sensor configured to generate a signal when the distance between the movable element and the first cover is reduced to a preset interval. When the signal is received by the manipulator body or the control assembly, the lifting action of the lifting mechanism can be stopped to avoid damage to the horizontal moving mechanism.

[0015] In some embodiments, the horizontal moving mechanism further comprises at least one first position sensor, and the third fixing element is connected with a first sensing element, and the first position sensor is configured to generate a signal when the first sensing element passes through the first position sensor, so that the manipulator body or the control assembly recognizes the current position of the third fixing element.

[0016] In some embodiments, the first support seat is provided with a first limiting element and a second limiting element, and the third fixing element is located between the first limiting element and the second limiting element, and the first limiting element and the second limiting element are used to abut against the third fixing element to limit the movement range of the third fixing element, which can play a role of stop and anti-collision.

[0017] In some embodiments, the lifting mechanism comprises a second support seat, a third slide rail pair and a second motor, the second support seat is connected to the rack of the carrying device, the third slide rail pair is arranged in the second support seat, the horizontal moving mechanism is slidably connected to the second support seat through the third slide rail pair, and the third slide rail of the third slide rail pair is arranged in a vertical direction. The second motor is used to drive the horizontal moving mechanism to slide in the vertical direction. Such a connection mode makes it possible to meet the lifting action requirement only by the third slide rail, avoiding the cost and space requirement of setting more slide rails, which is conducive to reducing the structural cost and operation difficulty of the carrying device.

[0018] In some embodiments, the lifting mechanism further comprises a second screw rod and a second screw rod nut, the first support base is connected with a fourth fixing member, the fourth fixing member is connected to the second screw rod nut and a third sliding block of a third sliding rail pair, the third sliding rail of the third sliding rail pair is arranged in a vertical direction and is installed on the second support base, the third sliding block is slidingly connected to the third sliding rail, the second screw rod is rotatably connected to the second support base, the second screw rod nut is drivingly connected to the second screw rod, and the second motor is used to drive the second screw rod to rotate so as to change the vertical position of the horizontal moving mechanism and the mechanical hand mechanism in the vertical direction. In this way, the second motor and the fourth fixing member can be drivingly connected, so as to drive the fourth fixing member to lift and change the vertical position of the horizontal moving mechanism and the mechanical hand mechanism.

[0019] In some embodiments, the second support base is connected with a horizontal adjusting member, the horizontal adjusting member is provided with a second waist-shaped hole, the length direction of the second waist-shaped hole is arranged in a horizontal direction, and the handling equipment further comprises a threaded fastener, the threaded fastener is arranged in the second waist-shaped hole in a position-adjustable manner in the horizontal direction and is connected to the rack, so as to fixedly connect the second support base and the rack. When adjusting, the threaded fastener is loosened, so that the lifting mechanism can be conveniently moved in the horizontal direction. After being moved to a position, the threaded fastener is tightened, so that the lifting mechanism can be fixed.

[0020] In some embodiments, a plurality of mounting holes are arranged on the rack in a vertical direction, and the threaded fastener is selectively inserted and mounted in the mounting hole, so as to fixedly connect the second support base and the rack in a position-adjustable manner in the vertical direction. When adjusting, the threaded fastener is removed, so that the lifting mechanism can be moved in the vertical direction. After being moved to a position, the threaded fastener is screwed into the mounting hole of a corresponding height, so that the lifting mechanism can be adjusted to an appropriate height.

[0021] In some embodiments, the second support base is connected with a vertical adjusting member, the vertical adjusting member is provided with a threaded hole, a screw rod is arranged in the threaded hole, and the screw rod can abut against the rack in a vertical direction, so as to limit the position of the second support base and the rack in the vertical direction. When adjusting the lifting mechanism in the vertical direction, the threaded fastener is removed and the screw rod is rotated, so that the lifting mechanism can be lifted or lowered under the support of the screw rod, which is more convenient and safe than hand adjustment.

[0022] In some embodiments, the lifting mechanism further comprises at least one second position sensor, the first support base is connected with a second sensing member, and the second position sensor is configured to send a signal when the second sensing member passes through the second position sensor, so that the current position of the fifth fixing member is recognized by the mechanical hand body or the control assembly.

[0023] In some embodiments, the lifting mechanism further comprises an eighth fixing member, a bearing, a locking nut and a shaft coupling, the eighth fixing member is fixedly connected to the second support base and fixedly connected with an outer ring of the bearing, one end of the second lead screw is fixedly connected to an inner ring of the bearing through the locking nut, the inner ring is rotatably connected to the outer ring, the second lead screw nut is drivingly connected to the second lead screw, and the second motor can drive the second lead screw to rotate through the shaft coupling, so as to change the vertical position of the mechanical hand mechanism along the length direction of the second lead screw. Through the bearing, the locking nut and the shaft coupling, the second lead screw and the second motor can be stably connected, and the stability of the second lead screw when rotating is improved.

[0024] In some embodiments, the lifting mechanism comprises a second synchronous belt, a third synchronous wheel, a fourth synchronous wheel and a fixed block, the first support base is connected with a fourth fixing member, the fourth fixing member is connected to the fixed block and a third sliding block of a third sliding rail pair, the third sliding rail of the third sliding rail pair is arranged in a vertical direction and is installed on the second support base, the third sliding block is slidingly connected to the third sliding rail, the fixed block is fixedly connected to the second synchronous belt, the second synchronous belt is drivingly connected to the third synchronous wheel and the fourth synchronous wheel, the third synchronous wheel and the fourth synchronous wheel are rotatably installed on the second support base, and the second motor is drivingly connected to the third synchronous wheel or the fourth synchronous wheel. The second motor is used for driving the second synchronous belt to rotate, so as to change the vertical position of the horizontal moving mechanism and the mechanical hand mechanism in the vertical direction. In this way, the second motor and the fourth fixing member can be drivingly connected, so as to drive the fourth fixing member to lift and change the vertical position of the horizontal moving mechanism and the mechanical hand mechanism. BRIEF DESCRIPTION OF DRAWINGS

[0025] Figure 1 is the first perspective view of the carrying equipment provided by the utility model;

[0026] Figure 2 is the explosion view of the carrying equipment provided by the utility model;

[0027] Figure 3 is the partial structure perspective view of the horizontal moving mechanism in the utility model;

[0028] Figure 4 is the partial structure explosion view of the horizontal moving mechanism in the utility model;

[0029] Figure 5 is the assembly schematic view of the first cover plate, the first cover and the movable part in the utility model;

[0030] Figure 6 is the second perspective view of the carrying equipment provided by the utility model;

[0031] Figure 7 is the perspective view of the lifting mechanism in the utility model;

[0032] Figure 8is the explosion map of the lifting mechanism in the utility model;

[0033] Figure 9 is the assembly schematic view of the second lead screw and the second motor in the utility model;

[0034] Figure 10 Partial structure front view of the lifting mechanism in the utility model.

[0035] In the figure,

[0036] 1, mechanical hand mechanism;101, mechanical hand body;102, bearing plate;1021, detector;

[0037] 2, horizontal moving mechanism;201, first support seat;2011, horizontal support part;2012, upper support part;2013, lower support part;202, first lead screw;203, first lead screw nut;204, first fixed part;205, second fixed part;206, third fixed part;2061, recess;207, first sliding rail;208, first sliding block;209, second sliding rail;210, second sliding block;211, first synchronous wheel;212, second synchronous wheel;213, first synchronous belt;214, motor fixed part;2141, first waist-shaped hole;215, fixed plate;216, first position sensor;217, first limiting part;2171, horizontal part;2172, vertical part;218, second limiting part;219, fourth fixed part;220, first cover plate;221, first cover;2211, plug-in part;2212, accommodating groove;222, movable part;2221, third waist-shaped hole;223, micro switch;2231, main body part;2232, driving part;224, first drag chain;225, first drag chain fixed part;226, second drag chain fixed part;227, first motor;228, first inductive part;229, terminal block;

[0038] 3, lifting mechanism;301, second support seat;302, third sliding rail;303, third sliding block;304, second motor;305, second lead screw;306, second lead screw nut;307, seventh fixed part;308, eighth fixed part;309, locking nut;310, shaft coupling;311, bearing;312, protective cover;313, sixth fixed part;3131, protruding part;314, fifth fixed part;3141, recessed part;315, fourth limiting part;316, third limiting part;317, second position sensor;318, second inductive part;319, second cover plate;320, second drag chain;321, third drag chain fixed part;322, third cover plate;323, horizontal adjusting part;3231, second waist-shaped hole;324, vertical adjusting part;

[0039] 4, wafer bearing device. DETAILED DESCRIPTION

[0040] The utility model will be described in further detail below in combination with the drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the utility model, and not limit the utility model. In addition, it should be noted that, in order to facilitate the description, only the part related to the utility model is shown in the drawings, not all structures.

[0041] In the description of the utility model, unless otherwise explicitly specified and limited, the terms 'connected', 'connected', 'fixed' should be understood broadly, for example, it can be fixed connection, or detachable connection, or integral; it can be mechanical connection, or electrical connection; it can be directly connected, or indirectly connected through intermediate medium, it can be the communication inside two elements or the interaction relationship of two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0042] In the utility model, unless otherwise explicitly specified and limited, the first feature is 'on' or 'under' the second feature, which can include that the first and second features are in direct contact, or the first and second features are not in direct contact but are in contact through another feature between them. Moreover, the first feature 'on', 'above' and 'on' the second feature includes that the first feature is directly above and obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature 'under', 'below' and 'under' the second feature includes that the first feature is directly below and obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0043] In the description of the embodiment, the terms 'up', 'down', 'right', 'left' and other orientation or position relationship are based on the orientation or position relationship shown in the drawings, only for the convenience of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, therefore cannot be understood as a limitation on the utility model. In addition, the terms 'first','second' are only used to distinguish in description, and have no special meaning.

[0044] Below, according to the drawings Figure 1 to the drawings Figure 10 The utility model provides a carrying equipment.

[0045] As Figure 1 , Figure 2As shown in the embodiment, the conveying device comprises wafer carrying device 4, mechanical hand mechanism 1, horizontal moving mechanism 2 and lifting mechanism 3. The wafer carrying device 4 has a containing cavity in which a plurality of wafers can be arranged. The mechanical hand mechanism 1 comprises mechanical hand body 101 and supporting plate 102, the supporting plate 102 is installed at the execution end of the mechanical hand body 101 and can move within a certain range under the action of the mechanical hand body 101. The supporting plate 102 is used for detachably connecting the wafer carrying device 4, and the supporting plate 102 is provided with detector 1021. When the wafer carrying device 4 is installed on the supporting plate 102, the detector 1021 can send a signal to the mechanical hand body 101 or the control assembly of the conveying device, indicating that the wafer carrying device 4 has been installed on the supporting plate 102, or further indicating that a wafer carrying device 4 of a specific model or specific number has been installed on the supporting plate 102.

[0046] As shown in the embodiment, Figures 1 to 3 The mechanical hand mechanism 1 is connected to the horizontal moving mechanism 2 and the lifting mechanism 3. The horizontal moving mechanism 2 can move the wafer carrying device 4 and the mechanical hand mechanism 1 in the horizontal direction (as shown by the X-axis in the figure), and the lifting mechanism 3 can move the wafer carrying device 4, the mechanical hand mechanism 1 and the horizontal moving mechanism 2 in the vertical direction (as shown by the Z-axis in the figure), so that the mechanical hand mechanism 1 and the wafer carrying device 4 can move in a larger range and transfer wafers.

[0047] As shown in the embodiment, Figure 3 , Figure 4 The horizontal moving mechanism 2 comprises first screw rod pair and first motor 227. The first screw rod pair comprises first screw rod 202 and first screw nut 203. The mechanical hand mechanism 1 is drivingly connected to the first screw nut 203, the first screw nut 203 is drivingly connected to the first screw rod 202, and the first motor 227 is drivingly connected to one end of the first screw rod 202. The first motor 227 can drive the first screw rod 202 to rotate, so as to change the horizontal position of the first screw nut 203 and the mechanical hand mechanism 1 (and the wafer carrying device 4) along the length direction of the first screw rod 202 (i.e. the horizontal direction), thereby realizing large-range movement of the wafer carrying device 4 in the horizontal direction.

[0048] Compared with the prior art that uses a flexible belt to drive the movement of the mechanical hand mechanism 1, the first screw rod pair composed of the first screw rod 202 and the first screw nut 203 can reduce the shaking of the mechanical hand mechanism 1 during movement, effectively avoiding the problems of belt sagging and shaking caused by too long stroke of the traditional flexible belt linear module, thereby ensuring the stability of the wafer during conveying.

[0049] Continuing to refer to Figure 3 , Figure 4As shown, in the present embodiment, the horizontal moving mechanism 2 further comprises a first support base 201, a first fixing member 204, a second fixing member 205, a third fixing member 206 and a first slide rail pair. The first fixing member 204 and the second fixing member 205 are fixedly installed on the first support base 201, and both of them are provided with a screw rod installation hole, and the first screw rod 202 is rotatably arranged in the screw rod installation hole, so as to connect the first screw rod 202 to the first support base 201. The first slide rail pair comprises a first slide rail 207 and a first slide block 208, the first slide rail 207 is fixedly installed on the first support base 201 and arranged along the horizontal direction. The third fixing member 206 is fixedly connected to the first screw rod nut 203 and the mechanical hand mechanism 1, so that the mechanical hand mechanism 1 can move along the length direction of the first screw rod 202 following the first screw rod nut 203. The first slide rail 207 is arranged on the first support base 201, and the edge part of the third fixing member 206 is connected to the first slide block 208, the first slide block 208 is slidably connected with the first slide rail 207, so as to improve the stability of the third fixing member 206 and the mechanical hand mechanism 1 during carrying.

[0050] Preferably, in the present embodiment, the horizontal moving mechanism 2 further comprises a second slide rail pair, the second slide rail pair comprises a second slide rail 209 and a second slide block 210, and the second slide rail 209 is also arranged on the first support base 201. One side edge part of the third fixing member 206 is slidably connected with the first slide rail 207, and the other side edge part is slidably connected with the second slide rail 209 through the second slide block 210. In this way, the first slide rail 207 of the first slide rail pair and the second slide rail 209 of the second slide rail pair are fixedly arranged on the first support base, and the first slide block 208 of the first slide rail pair and the second slide block 210 of the second slide rail pair are fixedly connected to the third fixing member, so as to further improve the stability of the mechanical hand mechanism 1 and reduce the swing of the mechanical hand mechanism 1 around the X-axis direction.

[0051] Further, in the present embodiment, the first support base 201 comprises a horizontal support portion 2011 and two upper support portions 2012. The horizontal support portion 2011 is arranged along the horizontal direction. The two upper support portions 2012 are arranged on the top surface of the horizontal support portion 2011 and are respectively arranged at opposite edges of the horizontal support portion 2011. A first installation space is formed between the two upper support portions 2012. The first lead screw 202, the first lead screw nut 203, the first fixing member 204 and the second fixing member 205 are arranged in the first installation space. The top surface of one of the upper support portions 2012 is provided with a first sliding rail 207. The top surface of the other upper support portion 2012 is provided with a second sliding rail 209. In this way, the third fixing member 206 can be simultaneously connected to the first sliding rail 207 and the second sliding rail 209, and the installation and relative sliding of the first lead screw 202 and the first lead screw nut 203 are not interfered, the load borne by the first lead screw 202 is reduced, and the first lead screw 202 is protected from being deformed by the weight of the mechanical hand 1 and the wafer carrying device 4.

[0052] Continuing to refer to FIGS. 1, 2 and 3, Figure 3 、 Figure 4 As shown in FIGS. 1, 2 and 3, the end of the first lead screw 202 is provided with a first synchronous wheel 211. A first motor 227 is arranged on the first support base 201. The output shaft of the first motor 227 is connected with a second synchronous wheel 212. The horizontal moving mechanism 2 further comprises a first synchronous belt 213 which is in transmission connection with the first synchronous wheel 211 and the second synchronous wheel 212. The end of the first support base 201 is connected with a motor fixing member 214 which is used to fixedly connect the first motor 227 and the first support base 201 and can overlap or partially overlap the first motor 227 and the first lead screw 202 along the vertical direction. Exemplarily, in the present embodiment, the projections of the first motor 227 and the first lead screw 202 on the horizontal support portion 2011 overlap or partially overlap along the vertical direction, thereby reducing the length of the horizontal moving mechanism 2 along the X-axis direction, reducing the possibility of collision, facilitating the movement of the horizontal moving mechanism 2 and the operation of the carrying equipment.

[0053] Optionally, the first support base 201 further comprises two lower support portions 2013 arranged on the bottom surface of the horizontal support portion 2011 and respectively arranged at opposite edges of the horizontal support portion 2011. The two lower support portions 2013 form a second mounting space therebetween, and the first motor 227 is fixedly arranged in the second mounting space, thereby playing a protection effect through the two lower support portions 2013. Meanwhile, the upper support portion 2012 and the lower support portion 2013 are arranged in extension along the length direction parallel to the first lead screw 202, which can play an effect of strengthening the structural strength and load capacity of the first support base 201. Preferably, the upper support portion 2012 or the lower support portion 2013 is provided with a weight-reducing hole or a weight-reducing groove, thereby reducing the weight of the entire transverse moving mechanism 2.

[0054] With reference back to Figure 3 As shown, the motor fixing member 214 is provided with a first waist-shaped hole 2141 in the vertical direction, and the handling equipment further comprises a threaded fastener which is adjustably threaded in the first waist-shaped hole 2141 in the vertical direction and connected to the first motor 227, so as to fixedly connect the first motor 227 and the motor fixing member 214. During installation, by adjusting the position of the threaded fastener threaded in the first waist-shaped hole 2141 in the vertical direction, the distance between the first synchronous wheel 211 and the second synchronous wheel 212 can be adjusted, thereby meeting the installation requirements of the first synchronous belt 213.

[0055] Further, as Figure 4 shown, the first support base 201 is further connected with a fixed plate 215, and the fixed plate 215 is provided with three first position sensors 216. The first sensing member 228 is connected to one side of the fixed plate 215 close to the third fixing member 206. The first sensing member 228 can move through the sensing groove of the first position sensor 216, and can send a signal when the first sensing member 228 passes through the first position sensor 216, so that the manipulator body 101 or the control assembly recognizes the current position of the third fixing member 206. Specifically, in this embodiment, the first first position sensor 216 is arranged at one end of the first sliding rail 207, and the second first position sensor 216 is arranged at the other end of the first sliding rail 207, and the two first position sensors 216 are used to identify whether the third fixing member 206 reaches the limit of the moving range. The third first position sensor 216 is arranged at a preset position outside the above two first position sensors 216, which is defined as a zero point position, thereby facilitating the calibration of zero point regression.

[0056] Of course, in some other embodiments, other numbers of first position sensors 216 can also be adopted, as long as they can be used to identify the position of the third fixing member 206, which shall fall within the scope of protection of the present application. Preferably, in the present embodiment, the first position sensor 216 adopts a slot type photoelectric sensor, which can quickly and accurately identify whether the first sensing member 228 passes through, and will not affect the movement of the first sensing member 228.

[0057] Optionally, the first support base 201 is provided with a first limiting member 217 and a second limiting member 218, the third fixing member 206 is located between the first limiting member 217 and the second limiting member 218, and the first limiting member 217 and the second limiting member 218 are used to abut against the third fixing member 206 to limit the movement range of the third fixing member 206. Specifically, in the present embodiment, the first limiting member 217 is arranged at one end of the first support base 201, and the second limiting member 218 is arranged at the other end of the first support base 201. The first limiting member 217 comprises a horizontal part 2171 and a vertical part 2172, wherein the vertical part 2172 is connected with the horizontal support part 2011 and the two upper support parts 2012, and the horizontal part 2171 is arranged opposite to one side surface of the third fixing member 206, and when the third fixing member 206 moves towards the first limiting member 217, the horizontal part 2171 can abut against the side surface of the third fixing member 206 to limit the movement of the third fixing member 206. The other end of the first support base 201 is connected with a fourth fixing member 219, the fourth fixing member 219 is used to connect the first support base 201 with the lifting mechanism 3, and the second limiting member 218 is mounted on the side of the fourth fixing member 219 facing the third fixing member 206. The second limiting member 218 can also comprise a horizontal part 2171 and a vertical part 2172, wherein the side surface of the vertical part 2172 is attached to the fourth fixing member 219, and the bottom surface of the vertical part 2172 abuts against the top surface of the upper support part 2012, and the horizontal part 2171 is used to stop the third fixing member 206.

[0058] Of course, in some other embodiments, other structures of the first limiting member 217 or the second limiting member 218 can also be adopted, and the specific structure of the first limiting member 217 and the second limiting member 218 is not limited in the present application, as long as they can have the effects of limiting, stopping and preventing collision.

[0059] Further, as shown in Figure 2 and Figure 5 in the present embodiment, the conveying equipment further comprises a first cover plate 220, and an avoiding gap is formed between the mechanical hand mechanism 1 and the third fixing member 206, and the first cover plate 220 is fixedly connected to the first support base 201 and arranged in the avoiding gap. And in the vertical direction, the mechanical hand mechanism 1 is located above the first cover plate 220, and the transverse moving mechanism 2 is located below the first cover plate 220, which can have the effect of blocking dust pollution wafers.

[0060] Specifically, the first cover plate 220 is connected to the first limiting member 217 and the second limiting member 218, and the third fixing member 206 is provided with a groove 2061 through which the first cover plate 220 passes, so that the third fixing member 206 is not obstructed by the first cover plate 220 during movement, and the part located outside the groove 2061 can be exposed outside the first cover plate 220, thereby facilitating connection with the robot arm mechanism 1. For example, along the Z-axis direction, the top surface height of the side of the groove 2061 away from the first lead screw nut 203 is greater than the top surface height of the first limiting member 217 and the second limiting member 218, thereby preventing the robot arm mechanism 1 from interfering with the first cover plate 220. The top surface height of the first limiting member 217 and the second limiting member 218 is greater than the height of the other side of the groove 2061 near the first lead screw nut 203, thereby preventing the first cover plate 220 from interfering with the third fixing member 206. In other words, a height difference is formed between the top surface heights of the two sides of the groove 2061 and the top surface heights of the first limiting member 217 and the second limiting member 218, thus avoiding interference between the robotic arm mechanism 1, the first cover plate 220, and the third fixing member 206. The first cover plate 220 can also cover particles generated by the movement of the first lead screw nut 203 on the first lead screw 202 or by the movement of the first slider 208, the second slider 210, and the first slide rail 207 and the second slide rail 209, preventing any impact on the cleanliness of the wafer carrier device 4.

[0061] Furthermore, the handling equipment also includes a first cover 221, and a receiving space is formed between the first cover plate 220 and the first cover 221. The first lead screw 202, the first lead screw nut 203, the first slider 208, the first slide rail 207, the second slider 210 and the second slide rail 209 are disposed in the receiving space, thereby further preventing the generated particulate matter from contaminating the microenvironment (i.e., the loading room environment) and the wafer.

[0062] Preferably, such as Figures 5 to 7 As shown, a movable part 222 is connected to the bottom of the first cover 221. The distance between the movable part 222 and the first cover 221 in the vertical direction is variably set. A detection sensor is connected to the first cover 221 or the movable part 222. When the vertical distance between the movable part 222 and the first cover 221 is reduced to a preset distance, a signal is generated. When the robot body 101 or the control component receives the signal, it can stop the lifting mechanism 3 from lifting and lowering to avoid collision damage to the transverse mechanism 2.

[0063] Specifically, in the embodiment, the movable piece 222 is provided with a third waist-shaped hole 2221, and the length direction of the third waist-shaped hole 2221 is arranged along the vertical direction. The side surface of the first cover 221 is detachably provided with a plurality of plug-in parts 2211, which can be inserted into the third waist-shaped hole 2221 one by one, so that the movable piece 222 can be connected to the first cover 221 and arranged vertically and movably. The detection sensor adopts a micro switch 223, the bottom of the first cover 221 is provided with at least one accommodating groove 2212, and the inner side of the first cover 221 is provided with at least one micro switch 223, the main body part 2231 of the micro switch 223 is arranged at the edge of the accommodating groove 2212, and the driving part 2232 is arranged outside the first cover 221 through the accommodating groove 2212. When the movable piece 222 is pressed to move, so that the distance between the movable piece 222 and the first cover 221 is reduced to a preset distance, the driving part 2232 will abut against the movable piece 222 and be pressed, thereby generating a signal.

[0064] Optionally, as shown in Figure 4 , the horizontal moving mechanism 2 is further provided with a first drag chain 224, the bottom of the third fixed piece 206 is connected with a first drag chain fixed piece 225, and the lower support part 2013 away from the fixed plate 215 is connected with a second drag chain fixed piece 226. The first drag chain fixed piece 225 is connected to one end of the first drag chain 224, and the second drag chain fixed piece 226 is connected to the other end of the first drag chain 224. Through the first drag chain 224, the signal line, the power line and other connecting lines can be connected with the manipulator body 101, so as to realize the transmission of signals.

[0065] As shown in Figures 7 to 9 , in the embodiment, the lifting mechanism 3 includes a second support base 301, a third slide rail pair and a second motor 304. The second support base 301 is connected to the rack of the conveying equipment (not shown in the figure). The third slide rail pair includes a third slide rail 302 and a third slide block 303. The third slide rail 302 is arranged on the second support base 301. The horizontal moving mechanism 2 is slidably connected to the third slide rail 302 through the third slide block 303. The third slide rail 302 is arranged along the vertical direction. The second motor 304 is used to drive the horizontal moving mechanism 2 to slide along the vertical direction.

[0066] Specifically, as shown in Figure 8 , Figure 9As shown, the lifting mechanism 3 comprises a second screw pair, which comprises a second screw rod 305 and a second screw nut 306. The first support base 201 is connected with a fourth fixing member 219, which is connected to the second screw nut 306 and a third sliding block 303 of a third sliding rail pair. The third sliding block 303 is slidingly connected to a third sliding rail 302 of the third sliding rail pair, which is arranged in a vertical direction and is installed on a second support base 301. The second screw rod 305 is arranged in a vertical direction and is rotatably connected to the second support base 301. The second screw nut 306 is drivingly connected to the second screw rod 305. The second motor 304 is drivingly connected to the second screw rod 305, and can drive the second screw rod 305 to rotate, so as to move the second screw nut 306, and further change the vertical position of the horizontal moving mechanism 2 and the mechanical hand mechanism 1 (and the wafer supporting device 4) in the vertical direction.

[0067] Alternatively, in some other embodiments, the lifting mechanism 3 comprises a second synchronous belt, a third synchronous wheel, a fourth synchronous wheel and a fixing block. The first support base 201 is also connected with a fourth fixing member 219, which is connected to the fixing block and the third sliding block 303 of the third sliding rail pair. The third sliding block 303 is slidingly connected to the third sliding rail 302 of the third sliding rail pair, which is arranged in a vertical direction and is installed on the second support base 301. The fixing block is fixedly connected to the second synchronous belt, which is drivingly connected to the fourth synchronous wheel and the third synchronous wheel. The fourth synchronous wheel and the third synchronous wheel are rotatably installed on the second support base 301. The second motor 304 is drivingly connected to the third synchronous wheel or the fourth synchronous wheel, and can drive the third synchronous wheel and the fourth synchronous wheel to rotate, so as to drive the second synchronous belt to rotate, and make the fixing block move in a vertical direction, and further change the vertical position of the horizontal moving mechanism 2 and the mechanical hand mechanism 1 (and the wafer supporting device 4) in the vertical direction.

[0068] Continuing to refer to Figure 9As shown, the second support base 301 is provided with a seventh fixing member 307 and an eighth fixing member 308, and the two ends of the second lead screw 305 are rotatably connected to the seventh fixing member 307 and the eighth fixing member 308 respectively, so as to rotatably connect the second lead screw 305 and the second support base 301. The eighth fixing member 308 has two fixing portions, one of which is rotatably connected to the second lead screw 305 through a bearing 311, and the other is used for connecting and mounting the second motor 304. The output shaft of the second motor 304 penetrates one of the fixing portions and is drivingly connected to the second lead screw 305 through a locking nut 309 and a coupling 310. Among them, the outer ring of the bearing 311 is fixedly connected with the eighth fixing member 308, the inner ring of the bearing 311 is fixedly connected with the second lead screw 305 through the locking nut 309, and the inner ring is rotatably connected with the outer ring. The second motor 304 drives the coupling 310 to rotate, the coupling 310 drives the second lead screw 305 to rotate, and at the same time, the inner ring of the bearing 311 and the locking nut 309 are also driven to rotate. Through the bearing 311, the locking nut 309 and the coupling 310, the second lead screw 305 and the second motor 304 can be stably connected, and the stability of the second lead screw during rotation is improved.

[0069] Preferably, the lifting mechanism 3 further comprises a protective cover 312, which can be arranged between the two fixing portions of the eighth fixing member 308, so as to avoid the coupling 310 and other structures from being damaged by mistake.

[0070] The second lead screw nut 306 is sleeved on the second lead screw 305, and the second motor 304 can drive the second lead screw 305 to rotate, so as to drive the second lead screw nut 306 to move in the vertical direction, and further change the vertical position of the mechanical hand mechanism 1 and the horizontal moving mechanism 2 (and the wafer carrying device 4) along the length direction of the second lead screw 305 (i.e. the vertical direction). The second lead screw nut 306 is connected with a sixth fixing member 313, two third sliding blocks 303 are slidingly connected on the third sliding rail 302, and the two third sliding blocks 303 are connected to a fifth fixing member 314 at the same time. The fifth fixing member 314 is connected with the fourth fixing member 219 described above, so as to mount the horizontal moving mechanism 2 on the lifting mechanism 3. The sixth fixing member 313 is provided with a protruding portion 3131, the fifth fixing member 314 is provided with a recessed portion 3141, and the protruding portion 3131 can be limitingly inserted into the recessed portion 3141, so that the fifth fixing member 314 can follow the sixth fixing member 313 and the second lead screw nut 306 to move up and down. Such a connection mode can meet the requirement of lifting action only through the third sliding rail 302, avoiding the cost and space requirement of setting more sliding rails, and being conducive to reducing the structural cost and operation difficulty of the carrying equipment.

[0071] Preferably, the sixth fixing member 313 is further connected to a fourth limiting member 315 on the side facing the eighth fixing member 308, and the seventh fixing member 307 is connected to a third limiting member 316 on the side facing the sixth fixing member 313. The fourth limiting member 315 and the third limiting member 316 can limit the movement range of the sixth fixing member 313, thereby achieving the effect of collision prevention.

[0072] Optionally, the second support 301 is provided with three second position sensors 317, and the fifth fixing member 314 is connected to a second sensing element 318 on the side away from the second lead screw 305. The second sensing element 318 can move through the sensing groove of the second position sensor 317, and can emit a signal when the second sensing element 318 passes through the second position sensor 317, so that the robot body 101 or the control component can identify the current position of the fifth fixing member 314. Specifically, in this embodiment, the first second position sensor 317 is disposed at one end of the third slide rail 302, and the second second position sensor 317 is disposed at the other end of the third slide rail 302. These two second position sensors 317 are used to identify whether the fifth fixing member 314 has reached the limit of its movement range. The third second position sensor 317 is disposed at a preset position outside the above two second position sensors 317. This preset position is defined as the zero point position, so as to facilitate zero point return calibration.

[0073] Of course, in some other embodiments, other numbers of second position sensors 317 can also be used, as long as they can be used to identify the position of the fifth fixing member 314, they are within the scope of protection of this utility model. Preferably, in this embodiment, the second position sensor 317 is also a slotted photoelectric sensor, which can quickly and accurately identify whether the second sensing member 318 has passed by, and will not affect the movement of the second sensing member 318.

[0074] like Figure 8 As shown, in this embodiment, the second support base 301 is also connected to a second cover plate 319, which is used to cover the second lead screw 305 and the second lead screw nut 306, thereby preventing particulate matter generated between the second lead screw 305 and the second lead screw nut 306 from polluting the environment and the wafer.

[0075] Similar to the traversing mechanism 2, the lifting mechanism 3 includes a second cable chain 320, through which signal lines, power lines, and other connecting lines pass. Specifically, the fifth fixing member 314 is connected to the third cable chain fixing member 321. One end of the second cable chain 320 is fixedly connected to the third cable chain fixing member 321, and the other end of the second cable chain 320 is connected to the second support base 301. Signal lines, power lines, and other connecting lines pass through the first cable chain 224 and the second cable chain 320, and are connected to the terminal block 229 mounted on the first support base 201. The terminal block 229 is electrically connected to an external power supply and control components, thereby transmitting and receiving signals and supplying energy to the corresponding structures through the signal lines, power lines, and other connecting lines. Exemplarily, in this embodiment, a bolt passes through the other end of the second cable chain 320 and is threaded to the second support base 301, thereby connecting the second cable chain 320 between the second support base 301 and the third cable chain fixing member 321.

[0076] Optionally, the second support 301 is also connected to a third cover plate 322. The third cover plate 322 is disposed between the second drag chain 320 and the transverse mechanism 2, and can also block particulate matter, thereby protecting the environment and the wafer from contamination.

[0077] like Figure 10 As shown, in this embodiment, the second support base 301 is connected to a horizontal adjustment member 323. The horizontal adjustment member 323 is provided with a second oblong hole 3231. The length direction of the second oblong hole 3231 is arranged in a horizontal direction perpendicular to the X-axis. The conveying device also includes a threaded fastener. The threaded fastener is adjusted horizontally by passing through the second oblong hole 3231 and connecting to the frame to fix the second support base 301 and the frame. During adjustment, the lifting mechanism 3 can be easily moved horizontally by loosening the threaded fastener. After moving it into position, the threaded fastener is tightened to fix the lifting mechanism 3.

[0078] Preferably, the frame has multiple mounting holes along the vertical direction, and threaded fasteners are selectively inserted into these holes to adjust the vertical position of the second support 301 and fix it to the frame. During adjustment, the lifting mechanism 3 can be moved vertically by unscrewing the threaded fasteners. After moving it into position, the threaded fasteners are screwed into the corresponding height mounting holes to adjust the lifting mechanism 3 to a suitable height.

[0079] Further, the second support base 301 is connected with a vertical adjusting member 324, the vertical adjusting member 324 is provided with a threaded hole, a screw rod is arranged in the threaded hole, the screw rod can abut against the rack in the vertical direction, so as to limit the second support base 301 and the rack in the vertical direction. When adjusting the lifting mechanism 3 in the vertical direction, the lifting mechanism 3 can be lifted or lowered under the support of the screw rod by first disassembling the threaded fastener and then rotating the screw rod, which can be more convenient and safe compared with hand adjustment.

[0080] In the description of the present specification, the description referring to the terms "some embodiments", "other embodiments", and the like means that the specific features, structures, materials or characteristics described in connection with the embodiments or examples are included in at least one embodiment or example of the present application. In the present specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0081] Obviously, the above embodiments of the present application are only examples for clearly illustrating the present application, and are not intended to limit the implementation modes of the present application. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the protection scope of the present application. Here, it is not necessary and impossible to enumerate all the implementation modes. Any modification, equivalent substitution and improvement made within the spirit and principle of the present application shall be included in the protection scope of the claims of the present application.

Claims

1. Handling apparatus, characterized in that The wafer carrying device, the mechanical hand mechanism, the horizontal moving mechanism and the lifting mechanism, the wafer carrying device is installed on the mechanical hand mechanism, the mechanical hand mechanism is drivingly connected with the horizontal moving mechanism and the lifting mechanism, the horizontal moving mechanism can move the mechanical hand mechanism along the horizontal direction, the lifting mechanism can move the mechanical hand mechanism and the horizontal moving mechanism along the vertical direction, wherein: The horizontal moving mechanism comprises a first screw rod, a first screw rod nut and a first motor, the mechanical hand mechanism is connected with the first screw rod nut, the first screw rod nut is drivingly connected with the first screw rod, the first motor is drivingly connected with the first screw rod, the first motor drives the first screw rod to rotate, so as to change the horizontal position of the mechanical hand mechanism along the length direction of the first screw rod.

2. The carrying equipment according to claim 1, wherein The horizontal moving mechanism further comprises a first support seat, a third fixing member, a first sliding rail pair and a second sliding rail pair, the first sliding rail of the first sliding rail pair and the second sliding rail of the second sliding rail pair are fixedly arranged on the first support seat, the first screw rod is rotatably connected with the first support seat, the first support seat is drivingly connected with the lifting mechanism and can move along the vertical direction, the third fixing member is connected with the first screw rod nut and the mechanical hand mechanism, the first sliding block of the first sliding rail pair and the second sliding block of the second sliding rail pair are fixedly connected with the third fixing member, so as to slidingly connect the third fixing member with the first sliding rail and the second sliding rail.

3. The carrying equipment according to claim 2, wherein The end of the first screw rod is provided with a first synchronous wheel, the first motor is arranged on the first support seat, the output shaft of the first motor is connected with a second synchronous wheel, the horizontal moving mechanism further comprises a first synchronous belt, the first synchronous belt is drivingly connected with the first synchronous wheel and the second synchronous wheel, and The projection of the first motor and the first screw rod on the first support seat along the vertical direction at least partially overlaps.

4. The carrying equipment according to claim 3, wherein The first support seat is connected with a motor fixing member, the motor fixing member is provided with a first waist-shaped hole along the vertical direction, the carrying equipment further comprises a threaded fastener, the threaded fastener is adjustably arranged in the first waist-shaped hole along the vertical direction and is connected with the first motor, so as to fixedly connect the first motor with the motor fixing member.

5. The carrying equipment according to claim 2, wherein The carrying equipment further comprises a first cover plate, the mechanical hand mechanism and the third fixing member form an avoiding gap therebetween, the first cover plate is fixedly connected with the first support seat and is arranged in the avoiding gap, and along the vertical direction, the mechanical hand mechanism is located above the first cover plate, and the horizontal moving mechanism is located below the first cover plate.

6. The carrying equipment according to claim 5, wherein The carrying device further comprises a first cover, and a containing space is formed between the first cover plate and the first cover, and the first screw rod, the first screw rod nut, the first slide rail pair and the second slide rail pair are arranged in the containing space.

7. The carrying device according to claim 6, characterized in that, a movable element is connected to the bottom of the first cover, the movable element is arranged to be variable in distance between the vertical direction and the first cover, the first cover or the movable element is connected with a detection sensor, and the detection sensor is configured to generate a signal when the distance between the movable element and the first cover is reduced to a preset interval.

8. The carrying device according to claim 2, characterized in that, the transverse movement mechanism further comprises at least one first position sensor, the third fixing element is connected with a first sensing element, and the first position sensor is configured to send a signal when the first sensing element passes through the first position sensor.

9. The carrying device according to claim 2, characterized in that, the first support base is provided with a first limiting element and a second limiting element, the third fixing element is located between the first limiting element and the second limiting element, and the first limiting element and the second limiting element are used to abut against the third fixing element to limit the movement range of the third fixing element.

10. The carrying device according to claim 2, characterized in that, the lifting mechanism comprises a second support base, a third slide rail pair and a second motor, the second support base is connected to the frame of the carrying device, the third slide rail pair is arranged in the second support base, the transverse movement mechanism is slidably connected to the second support base through the third slide rail pair, and the third slide rail of the third slide rail pair is arranged to extend in the vertical direction, and the second motor is used to drive the transverse movement mechanism to slide in the vertical direction.

11. The carrying device according to claim 10, characterized in that, the lifting mechanism further comprises a second screw rod and a second screw rod nut, the first support base is connected with a fourth fixing element, the fourth fixing element is connected to the second screw rod nut and a third sliding block of the third slide rail pair, the third slide rail of the third slide rail pair is arranged to extend in the vertical direction and is installed in the second support base, the third sliding block is slidably connected to the third slide rail, the second screw rod is rotatably connected to the second support base, and the second screw rod nut is drivingly connected to the second screw rod, and the second motor is used to drive the second screw rod to rotate, so as to change the vertical position of the transverse movement mechanism and the mechanical hand mechanism in the vertical direction.

12. The carrying device according to claim 10, characterized in that, the second support base is connected with a horizontal adjusting element, the horizontal adjusting element is provided with a second waist-shaped hole, the length direction of the second waist-shaped hole is arranged in the horizontal direction, the carrying device further comprises a threaded fastener, the threaded fastener is adjustably arranged in the second waist-shaped hole in the horizontal direction and is connected to the frame, so as to fixedly connect the second support base and the frame.

13. The carrying device according to claim 12, characterized in that, The rack is provided with a plurality of mounting holes in the vertical direction, and the threaded fasteners are selectively inserted into the mounting holes to adjustably fix the second support seat to the rack in the vertical direction.

14. The handling apparatus according to claim 13, characterized in that, The second support seat is connected with a vertical adjusting member provided with a threaded hole, a screw rod is inserted into the threaded hole, and the screw rod can abut against the rack in the vertical direction to limit the vertical position between the second support seat and the rack.

15. The handling apparatus according to claim 10, characterized in that, The lifting mechanism further comprises at least one second position sensor, the first support seat is connected with a second sensing member, and the second position sensor is configured to send a signal when the second sensing member passes through the second position sensor.

16. The handling apparatus according to claim 11, characterized in that, The lifting mechanism further comprises an eighth fixing member, a bearing, a locking nut and a coupling, the eighth fixing member is fixedly connected to the second support seat and fixedly connected with an outer ring of the bearing, one end of the second screw rod is fixedly connected to an inner ring of the bearing through the locking nut, the inner ring is rotationally connected to the outer ring, the second screw rod nut is drivingly connected to the second screw rod, and the second motor can drive the second screw rod to rotate through the coupling to change the vertical position of the mechanical hand mechanism along the length direction of the second screw rod.

17. The handling apparatus according to claim 10, characterized in that, The lifting mechanism further comprises a second synchronous belt, a third synchronous wheel, a fourth synchronous wheel and a fixed block, the first support seat is connected with a fourth fixing member, the fourth fixing member is connected to the fixed block and a third sliding block of a third sliding rail pair, a third sliding rail of the third sliding rail pair is vertically arranged and fixed to the second support seat, the third sliding block is slidingly connected to the third sliding rail, the fixed block is fixedly connected to the second synchronous belt, the second synchronous belt is drivingly connected to the third synchronous wheel and the fourth synchronous wheel, the third synchronous wheel and the fourth synchronous wheel are rotationally installed to the second support seat, and the second motor is drivingly connected to the third synchronous wheel or the fourth synchronous wheel, The second motor is used to drive the second synchronous belt to rotate to change the vertical position of the mechanical hand mechanism and the horizontal moving mechanism in the vertical direction.

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