Small-space double-stroke movable material taking mechanism

Abstract

The utility model belongs to the technical field of ceramic plate transfer tools, and particularly relates to a small-space double-stroke movable material taking mechanism. The device comprises a fixed table; the movable platform is located on the top face of the fixed table, and the movable platform is connected with the fixed table through a first sliding rail; the material carrying table is located on the top face of the moving platform, and the material carrying table is connected with the moving platform through a second sliding rail; the moving platform is driven by a first driving assembly; the material carrying table is driven by a second driving assembly. The automatic transfer tool is used for solving the technical problem that an existing automatic transfer tool such as a mechanical arm cannot enter a narrow space to complete ceramic plate extraction and transfer.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the technical field of ceramic tray transfer tool, specifically relates to a small space double stroke mobile material taking mechanism. BACKGROUND

[0002] In the processing and manufacturing process of semiconductor wafers, ceramic trays are used as important carriers for wafer cutting, wafer grinding, wafer polishing and other processes to carry wafers at different processing stages. During the above-mentioned processes, ceramic trays not only need to carry wafers and circulate in the equipment corresponding to the above-mentioned processes, but also need to go through cleaning, transportation and storage processes when they are not carrying wafers.

[0003] Therefore, ceramic trays will go through various semiconductor equipment during the circulation process in multiple processes. In some semiconductor equipment, the environment where the ceramic tray is located is relatively narrow, and traditional mechanical arms and other automatic transfer tooling cannot enter it, so it is impossible to complete the turnover of the ceramic tray. UTILITY MODEL CONTENTS

[0004] The technical problem to be solved by the utility model is to overcome the shortcomings of the prior art, and provide a small space double stroke mobile material taking mechanism to solve the technical problem that existing mechanical arms and other automatic transfer tooling cannot enter narrow spaces to extract ceramic trays and transfer them.

[0005] The technical solution of the utility model to solve the above technical problem is as follows: a small space double stroke mobile material taking mechanism, comprising:

[0006] A fixed table;

[0007] A moving platform, located on the top surface of the fixed table, and connected with the fixed table through a first sliding rail;

[0008] A material loading table, located on the top surface of the moving platform, and connected with the moving platform through a second sliding rail;

[0009] The moving platform is driven by a first driving assembly;

[0010] The material loading table is driven by a second driving assembly.

[0011] The utility model comprises a moving platform and a material loading table, which can be extended up and down. When the moving platform and the material loading table are fully retracted, the length is only half of the length when they are fully extended. Compared with a single-layer structure with the same extension length, the volume of the utility model is greatly reduced before use, and the utility model can be moved into the small space of the semiconductor equipment to perform the action of extracting the ceramic tray.

[0012] Further, the first driving assembly comprises:

[0013] A first motor is arranged above the fixed table.

[0014] A first driving wheel is arranged on the output shaft of the first motor.

[0015] A first driven wheel is arranged on the fixed table.

[0016] A first transmission belt is arranged around the first driving wheel and the first driven wheel.

[0017] A first connecting block is connected to the first transmission belt at one end and connected to the moving platform at the other end.

[0018] The beneficial effects of the present step are achieved by the first driving assembly to drive the moving platform.

[0019] Further, the second driving assembly comprises:

[0020] A second motor is arranged below the fixed table, and a second driving wheel is arranged on the output shaft of the second motor.

[0021] A second transmission shaft is arranged above the fixed table, and a second driving wheel and a second driven wheel are arranged on the second transmission shaft.

[0022] A second transmission belt is arranged around the second driving wheel and the second driving wheel.

[0023] A third reversing wheel and a fourth reversing wheel are arranged on the fixed table, the third reversing wheel is above the second driven wheel, and the fourth reversing wheel is in front of the second driven wheel.

[0024] A fifth reversing wheel and a sixth reversing wheel are arranged on the material loading table, the fifth reversing wheel is above the fourth reversing wheel, and the sixth reversing wheel is behind the fifth reversing wheel and between the second driven wheel and the third reversing wheel.

[0025] A third transmission belt is arranged between the second driven wheel, the third reversing wheel, the fourth reversing wheel, the fifth reversing wheel, and the sixth reversing wheel.

[0026] A second connecting block is connected to the third transmission belt at one end and connected to the material loading table at the other end.

[0027] The beneficial effects of the present step are achieved by the second driving assembly to drive the material loading table.

[0028] Further, the top of the loading table is provided with at least one ceramic plate embedding slot.

[0029] When the loading table is provided with two or more ceramic plate embedding slots, the plurality of ceramic plate embedding slots are concentrically arranged, and the plurality of ceramic plate embedding slots are not in the same plane.

[0030] The same loading table can be applied to ceramic plates with different diameters.

[0031] Further, the second driven wheel, the third reversing wheel, the fourth reversing wheel, the fifth reversing wheel and the sixth reversing wheel in the second driving assembly are each provided with a corresponding mirror wheel.

[0032] The fourth transmission belt is wound around the plurality of mirror wheels.

[0033] The fourth transmission belt is wound around the plurality of mirror wheels.

[0034] The same loading table can be applied to ceramic plates with different diameters.

[0035] Further, the moving platform is further provided with a plurality of ceramic plate positioning sensors.

[0036] The ceramic plate positioning sensor contacts the edge of the ceramic plate, which can determine the position of the ceramic plate and judge whether the ceramic plate is accurately dropped into the ceramic plate embedding slot.

[0037] Further, the fixed table and the moving platform are each provided with a plurality of position sensors.

[0038] The position sensor is used to control the movement precision of the moving platform and the loading table.

[0039] The beneficial effects of the present application are:

[0040] The present application can reduce the volume of the non-extended state through the stacked upper and lower structures, so that the mechanism can be moved or placed into a small space of a semiconductor device to complete the extraction of the ceramic plate. BRIEF DESCRIPTION OF DRAWINGS

[0041] In order to more clearly illustrate the specific embodiments of the present application or the technical solutions in the prior art, the following will briefly introduce the drawings needed to be used in the specific embodiments or prior art description. Obviously, the drawings described below are some embodiments of the present application, and those skilled in the art can obtain other drawings according to these drawings without creative labor.

[0042] Figure 1 A small space double-stroke mobile material taking mechanism and a ceramic plate three-dimensional structure are provided in the utility model Figure 1 ;

[0043] Figure 2 A small space double-stroke mobile material taking mechanism and a ceramic plate three-dimensional structure are provided in the utility model Figure 2 ;

[0044] Figure 3 A small space double-stroke mobile material taking mechanism and a ceramic plate three-dimensional structure are provided in the utility model

[0045] Figure 4 A small space double-stroke mobile material taking mechanism and a ceramic plate three-dimensional structure are provided in the utility model Figure 3 A small space double-stroke mobile material taking mechanism and a ceramic plate three-dimensional structure are provided in the utility model

[0046] Figure 5 A small space double-stroke mobile material taking mechanism and a ceramic plate three-dimensional structure are provided in the utility model Figure 3 A small space double-stroke mobile material taking mechanism and a ceramic plate three-dimensional structure are provided in the utility model

[0047] Figure 6 A small space double-stroke mobile material taking mechanism and a ceramic plate three-dimensional structure are provided in the utility model Figure 1 A small space double-stroke mobile material taking mechanism and a ceramic plate three-dimensional structure are provided in the utility model A small space double-stroke mobile material taking mechanism and a ceramic plate three-dimensional structure are provided in the utility model

[0048] A small space double-stroke mobile material taking mechanism and a ceramic plate three-dimensional structure are provided in the utility model Figure 7 A small space double-stroke mobile material taking mechanism and a ceramic plate three-dimensional structure are provided in the utility model Figure 2 A small space double-stroke mobile material taking mechanism and a ceramic plate three-dimensional structure are provided in the utility model A small space double-stroke mobile material taking mechanism and a ceramic plate three-dimensional structure are provided in the utility model

[0049] 1-fixed table;2-moving platform;3-charge table;4-ceramic plate;7-ceramic plate positioning sensor;8-position sensor;9-mirror wheel;10-fourth transmission belt;

[0050] 1-fixed table;2-moving platform;3-charge table;4-ceramic plate;7-ceramic plate positioning sensor;8-position sensor;9-mirror wheel;10-fourth transmission belt;

[0051] 11-first slide rail;21-second slide rail;31-ceramic plate slot;51-first motor;52-first transmission wheel;53-first driven wheel;54-first transmission belt;61-second motor;62-second driving wheel;63-second transmission wheel;64-second transmission wheel;65-third reversing wheel;66-fourth reversing wheel;67-fifth reversing wheel;68-sixth reversing wheel;69-third transmission belt;

[0052] 541-first connecting block;621-second transmission belt;691-second connecting block. DETAILED DESCRIPTION

[0053] The embodiments of the utility model technical scheme will be described in detail below with reference to the drawings. The following embodiments are only used to more clearly illustrate the technical scheme of the utility model, therefore only as an example, and cannot limit the protection scope of the utility model.

[0054] It should be noted that the technical terms or scientific terms used in the present application should be understood as the general meaning understood by the skilled in the art to which the present application belongs, unless otherwise specified.

[0055] In the description of the present application, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like are based on the orientation or positional relationship shown in the drawings, and are only for the purpose of facilitating the description of the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0056] In addition, the terms "first", "second", and the like are only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. In the description of the present application, the meaning of "a plurality of" is two or more, unless otherwise explicitly specified and limited.

[0057] In the present application, unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connection", "fixing" and the like should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0058] In the present application, unless otherwise explicitly specified and limited, the first feature is "on" or "under" the second feature. The first and second features can be in direct contact, or the first and second features can be in indirect contact through an intermediate medium. Moreover, the first feature "above", "above" and "above" the second feature can be directly above or obliquely above the first feature, or only indicate that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "below" and "below" the second feature can be directly below or obliquely below the first feature, or only indicate that the horizontal height of the first feature is less than that of the second feature.

[0059] Embodiments

[0060] As Figures 1-7 shown, the small-space double-stroke mobile material taking mechanism provided by the present application comprises:

[0061] The fixed table 1 is generally selected according to the position of the on-site semiconductor equipment arrangement, and is installed on a fixed device or a mobile device;

[0062] The mobile platform 2 is located on the top surface of the fixed table 1, and the mobile platform 2 is connected with the fixed table 1 through the first sliding rail 11;

[0063] The load table 3 is located on the top surface of the mobile platform 2, and the load table 3 is connected with the mobile platform 3 through the second sliding rail 21;

[0064] The mobile platform 2 is driven by the first driving assembly;

[0065] The load table 3 is driven by the second driving assembly.

[0066] The mobile platform 2 and the load table 3 form a structure that can be stretched up and down, and the length of the mobile platform 2 and the load table 3 when fully retracted is only half the length when fully extended, so that the utility model is compared with the single-layer structure of the same extension length, the volume is greatly reduced before use, and the ceramic disc 4 extraction action can be moved to the small space of the semiconductor equipment.

[0067] On the basis of the above technical scheme, the first driving assembly comprises:

[0068] The first motor 51 is arranged above the fixed table 1;

[0069] The first driving wheel 52 is arranged on the output shaft of the first motor 51;

[0070] The first driven wheel 53 is arranged on the fixed table 1;

[0071] The first transmission belt 54 is arranged around the first driving wheel 52 and the first driven wheel 53;

[0072] The first connecting block 541 is connected with the first transmission belt 54 at one end and connected with the mobile platform 2 at the other end.

[0073] The first driving assembly drives the mobile platform 2.

[0074] On the basis of the above technical scheme, the second driving assembly comprises:

[0075] The second motor 61 is arranged below the fixed table 1, and the second driving wheel 62 is arranged on the output shaft of the second motor 61;

[0076] A second transmission shaft is arranged above the fixed table 1, and a second transmission wheel 63 and a second driven wheel 64 are arranged on the second transmission shaft;

[0077] A second transmission belt 621 is arranged around the second driving wheel 62 and the second transmission wheel 63, so as to drive the second transmission shaft to rotate, i.e. drive the second driven wheel 64 to rotate;

[0078] A third reversing wheel 65 and a fourth reversing wheel 66 are arranged on the fixed table 1, the third reversing wheel 65 is above the second driven wheel 64, and the fourth reversing wheel 66 is in front of the second driven wheel 64;

[0079] A fifth reversing wheel 67 and a sixth reversing wheel 68 are arranged on the material loading table 3, the fifth reversing wheel 67 is above the fourth reversing wheel 66, and the sixth reversing wheel 68 is behind the fifth reversing wheel 67 and between the second driven wheel 64 and the third reversing wheel 65;

[0080] A third transmission belt 69 is arranged around the second driven wheel 64, the third reversing wheel 65, the fourth reversing wheel 66, the fifth reversing wheel 67 and the sixth reversing wheel 68;

[0081] A second connecting block 691 is connected with the third transmission belt 69 at one end and connected with the material loading table 3 at the other end.

[0082] The second driving assembly is used to drive the material loading table.

[0083] On the basis of the above technical scheme, at least one ceramic disc embedding groove 31 is arranged on the top of the material loading table 3.

[0084] When two or more ceramic disc embedding grooves 31 are arranged on the material loading table 3, the plurality of ceramic disc embedding grooves 31 are arranged concentrically, and the plurality of ceramic disc embedding grooves 31 are not in the same plane.

[0085] The same material loading table 3 can be applied to ceramic discs 4 with different diameters.

[0086] On the basis of the above technical scheme, the second driven wheel 64, the third reversing wheel 65, the fourth reversing wheel 66, the fifth reversing wheel 67 and the sixth reversing wheel 68 in the second driving assembly are each provided with a corresponding mirror wheel 9;

[0087] A fourth transmission belt 10 is arranged around the plurality of mirror wheels 9;

[0088] The fourth transmission belt 10 is provided with a third connecting block, one end of the third connecting block is connected with the fourth transmission belt 10, and the other end is connected with the material loading table 3. The mirror image wheels 9 corresponding to the second driven wheels 64 need to share an axle, and the rest of the mirror image wheels 9 can be coaxially arranged with the corresponding rotating wheels or not.

[0089] The material loading table 3 is provided with driving structures on both sides, so that the material loading table 3 can be more stable under force, and the movement precision and stability of the material loading table 3 are improved.

[0090] In order to improve the transmission effect and prevent the transmission belt from slipping, the surfaces of the transmission belts and the rotating wheels are provided with transmission teeth.

[0091] On the basis of the above technical scheme, the mobile platform 2 is further provided with a plurality of ceramic disc positioning sensors 7.

[0092] The ceramic disc positioning sensor 7 is in contact with the edge of the ceramic disc 4, so that the position of the ceramic disc 4 can be determined, and it can be judged whether the ceramic disc 4 is accurately dropped into the ceramic disc embedding groove 31.

[0093] On the basis of the above technical scheme, the fixed table 1 and the mobile platform 2 are both provided with a plurality of position sensors 8.

[0094] The position sensor 8 is used to control the movement precision of the mobile platform 2 and the material loading table 3.

[0095] Finally, it should be pointed out that: the above embodiments are only used to illustrate the technical scheme of the utility model, and not to limit it; although the utility model has been described in detail with reference to the above embodiments, those skilled in the art should understand that: it can still modify the technical scheme recorded in the above embodiments, or make equivalent replacement for part or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical scheme deviate from the scope of the technical scheme of the embodiments of the utility model.

Claims

1. A small-space, dual-stroke moving material handling mechanism, characterized in that, include: Fixed platform; A mobile platform is located on the top surface of the fixed platform, and the mobile platform is connected to the fixed platform via a first slide rail; A loading platform is located on the top surface of the mobile platform and is connected to the mobile platform via a second slide rail. The mobile platform is driven by a first driving component; The loading platform is driven by a second drive component.

2. The small-space dual-stroke moving material handling mechanism according to claim 1, characterized in that, The first driving component includes: The first motor is located above the fixed platform; The first driving wheel is mounted on the output shaft of the first motor; The first driven wheel is mounted on the fixed platform; A first transmission belt is wound around the first driving pulley and the first driven pulley; A first connecting block, one end of which is connected to the first transmission belt, and the other end of which is connected to the mobile platform.

3. The small-space dual-stroke moving material handling mechanism according to claim 1, characterized in that, The second driving component includes: The second motor is located below the fixed platform, and a second drive wheel is provided on the output shaft of the second motor; The second drive shaft is located above the fixed platform, and a second drive wheel and a second driven wheel are provided on the second drive shaft; A second transmission belt is wound around the second drive pulley and the second transmission pulley; The third and fourth reversing wheels are both mounted on the fixed platform. The third reversing wheel is above the second driven wheel, and the fourth reversing wheel is in front of the second driven wheel. The fifth and sixth reversing wheels are both located on the material loading platform. The fifth reversing wheel is above the fourth reversing wheel, and the sixth reversing wheel is behind the fifth reversing wheel and between the second driven wheel and the third reversing wheel. The third transmission belt is wound between the second driven pulley, the third reversing pulley, the fourth reversing pulley, the fifth reversing pulley and the sixth reversing pulley; The second connecting block has one end connected to the third transmission belt and the other end connected to the material carrier platform.

4. The small-space dual-stroke moving material handling mechanism according to claim 1, characterized in that, The top of the loading platform is provided with at least one ceramic disc slot; When the loading platform is provided with two or more ceramic disc slots, the multiple ceramic disc slots are arranged concentrically and are not on the same plane.

5. The small-space dual-stroke moving material handling mechanism according to claim 3, characterized in that, The second driven wheel, the third reversing wheel, the fourth reversing wheel, the fifth reversing wheel and the sixth reversing wheel in the second drive assembly are each provided with their own corresponding mirror wheels; A fourth transmission belt is wound around several of the aforementioned mirror wheels; The fourth transmission belt is provided with a third connecting block, one end of which is connected to the fourth transmission belt and the other end of which is connected to the material carrier platform.

6. The small-space dual-stroke moving material handling mechanism according to claim 1, characterized in that, The mobile platform is also equipped with multiple ceramic disc positioning sensors.

7. The small-space dual-stroke moving material handling mechanism according to claim 1, characterized in that, Both the fixed platform and the mobile platform are equipped with several position sensors.

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