Industrial carbon tetrafluoride tail gas recovery treatment device

Abstract

The utility model provides an industrial carbon tetrafluoride tail gas recovery processing device which comprises a bottom plate, an absorption tank, a plasma processing part and a post-processing part are arranged on the bottom plate, an input pipe is arranged on the lower portion of the absorption tank, a first control valve and a flow meter are arranged on the input pipe, an adsorption box is arranged at the upper end of the input pipe, and a second control valve is arranged at the lower end of the adsorption box. A tail gas inlet pipe is arranged at the upper part of the adsorption box, a gas inlet pipe and a liquid discharge pipe are arranged on the side surface of the absorption tank, and a second control valve is arranged on the gas inlet pipe. According to the industrial carbon tetrafluoride tail gas recovery treatment device provided by the utility model, impurities in tail gas, carbon tetrafluoride gas, part of organic pollutants and the like are subjected to adsorption, plasma treatment reaction and other impurity removal through multiple times of impurity removal, so that the tail gas is better treated and absorbed; and meanwhile, the plasma treatment part and the post-treatment part are used for detecting and refluxing the discharged gas, so that the concentration of carbon tetrafluoride in the discharged gas does not exceed the qualified standard.

Description

TECHNICAL FIELD

[0001] The utility model relates to tail gas treatment equipment technical field especially relates to industrial carbon tetrafluoride tail gas recovery treatment device. BACKGROUND

[0002] Carbon tetrafluoride molecular formula CF4, normal temperature is colorless gas, carbon tetrafluoride can only slightly dissolve in water, is very stable to heat, and the chemical property is more inactivity than carbon tetrachloride, and molecule presents regular tetrahedron structure.

[0003] Carbon tetrafluoride is a kind of gas that can cause greenhouse effect, property is very stable, can stay in atmosphere for a long time, is a very powerful greenhouse gas, and the existing tail gas treatment device is not accurate enough to handle and recycle carbon tetrafluoride gas.

[0004] Therefore, it is necessary to provide industrial carbon tetrafluoride tail gas recovery treatment device to solve the above technical problems. UTILITY MODEL CONTENT

[0005] The utility model provides industrial carbon tetrafluoride tail gas recovery treatment device, solves the problem that the existing tail gas treatment device is not accurate enough to handle and recycle carbon tetrafluoride gas.

[0006] To solve the above technical problems, the industrial carbon tetrafluoride tail gas recovery treatment device provided by the utility model comprises: a bottom plate, an absorption tank, a plasma treatment part and a post-treatment part are arranged on the bottom plate, a lower part of the absorption tank is provided with an input pipe, a first control valve and a flowmeter are arranged on the input pipe, an upper end of the input pipe is provided with an adsorption box, an upper part of the adsorption box is provided with a tail gas inlet pipe, a side surface of the absorption tank is provided with a gas inlet pipe and a liquid discharge pipe, a second control valve is arranged on the gas inlet pipe, a third control valve is arranged on the liquid discharge pipe, an upper part of the absorption tank is provided with a top plate, and a stirring assembly and a spraying assembly are arranged on the top plate.

[0007] Preferably, the adsorption box comprises a box body, the tail gas inlet pipe is connected with the upper end of the box body, the input pipe is connected with the lower end of the box body, and a hole plate is fixedly connected to the upper part and the lower part of the internal space of the box body.

[0008] Preferably, the stirring assembly comprises a motor, an output end of the motor is provided with a rotating shaft, the rotating shaft is rotatably connected with the top plate, a fixing piece is fixedly connected to the rotating shaft, and stirring blades are fixedly connected to the two sides of the fixing piece.

[0009] Preferably, the spraying assembly comprises a water storage interval, the water storage interval is fixedly connected with the top plate, a water conveying pipe is arranged in the water storage interval and passes through the top plate, a fourth control valve is arranged on the water conveying pipe, and uniformly distributed adsorbent spray heads are arranged on the lower part of the water storage interval.

[0010] Preferably, the plasma processing part comprises a base, a plasma processing chamber and a controller are arranged on the base, the upper portion of the absorption tank is provided with a transfer pipe, one end of the transfer pipe is connected with the plasma processing chamber, the fifth control valve is arranged on the transfer pipe, the upper portion of the plasma processing chamber is provided with a first exhaust pipe and a detection box, two ends of the first exhaust pipe are connected with the plasma processing chamber and the detection box respectively, the upper portion of the detection box is provided with a three-way valve, the three-way valve is provided with a reflux pipe and a second exhaust pipe, and the second exhaust pipe is connected with the post-processing part.

[0011] Preferably, the post-processing part comprises a post-processing tank, the post-processing tank is connected with the second exhaust pipe, and the upper portion of the post-processing tank is provided with a third exhaust pipe and the sixth control valve.

[0012] Compared with the prior art, the industrial carbon tetrafluoride tail gas recovery treatment device has the following beneficial effects:

[0013] The industrial carbon tetrafluoride tail gas recovery treatment device provided by the utility model has the advantages that the impurities, carbon tetrafluoride gas and part of organic pollutants in the tail gas are adsorbed and subjected to plasma processing reaction and other impurity removal, so that the tail gas is well treated and absorbed, and the plasma processing part and the post-processing part detect and reflux treat the discharged gas, so that the concentration of carbon tetrafluoride in the discharged gas does not exceed the qualified standard. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 A preferred embodiment structure schematic view of the industrial carbon tetrafluoride tail gas recovery treatment device provided by the utility model is shown in the figure.

[0015] Figure 2 A structure schematic view of the absorption tank in the utility model is shown in the figure.

[0016] Figure 3 A structure schematic view of the stirring assembly and the spraying assembly in the utility model is shown in the figure.

[0017] The figure mark: 1, bottom plate, 2, absorption tank, 3, input pipe, 4, first control valve, 5, flow meter, 6, adsorption box, 61, box body, 62, hole plate, 63, adsorbent placement room, 7, tail gas inlet pipe, 8, gas inlet pipe, 9, second control valve, 10, liquid discharge pipe, 11, third control valve, 12, top plate, 13, stirring assembly, 131, motor, 132, rotating shaft, 133, fixing piece, 134, stirring fan blade, 14, spraying assembly, 141, water storage interval, 142, water delivery pipe, 143, fourth control valve, 144, absorbent nozzle, 15, transfer pipe, 16, fifth control valve, 17, base, 18, plasma processing chamber, 19, controller, 20, first exhaust pipe, 21, detection box, 22, three-way valve, 23, return pipe, 24, second exhaust pipe, 25, post-treatment tank, 26, third exhaust pipe, 27, sixth control valve. DETAILED DESCRIPTION

[0018] The utility model will be further described below in combination with the drawings and embodiments.

[0019] Please refer to Figure 1 、 Figure 2 And Figure 3 Among them, Figure 1 It is a preferred embodiment structure schematic drawing of industrial carbon tetrafluoride tail gas recovery treatment device provided by the utility model;

[0020] Figure 2 It is the structure schematic drawing of adsorption box in the utility model;

[0021] Figure 3 It is the structure schematic drawing of stirring assembly and spraying assembly in the utility model.

[0022] Industrial carbon tetrafluoride tail gas recovery treatment device includes: bottom plate 1, be provided with absorption tank 2, plasma processing part and post-treatment part on the bottom plate 1, the lower part of absorption tank 2 is provided with input pipe 3, the input pipe 3 is provided with first control valve 4 and flow meter 5, the upper end of input pipe 3 is provided with adsorption box 6, the upper part of adsorption box 6 is provided with tail gas inlet pipe 7, the side of absorption tank 2 is provided with gas inlet pipe 8 and liquid discharge pipe 10, the gas inlet pipe 8 is provided with second control valve 9, the liquid discharge pipe 10 is provided with third control valve 11, the upper part of absorption tank 2 is provided with top plate 12, the top plate 12 is provided with stirring assembly 13 and spraying assembly 14.

[0023] The carbon tetrafluoride tail gas is introduced into the adsorption box 6 from the tail gas inlet pipe 7 for the first time to remove impurities, and then introduced into the absorption tank 2 through the input pipe 3, while nitrogen, hydrogen and oxygen and the like for subsequent plasma treatment are introduced from the gas inlet pipe 8, and at the same time, the introduction of these gases helps to stir the absorbent accumulated at the bottom of the absorption tank 2, thereby enhancing the absorption effect of the absorbent on the tail gas, and the ethanol, tetrahydrofuran and the like organic solvents are added to the absorption tank 2 as absorbents to absorb the carbon tetrafluoride gas; the mixed gas is then introduced into the plasma treatment part for plasma treatment, and finally introduced into the post-treatment part for treatment and discharge.

[0024] The adsorption box 6 comprises a box body 61, the tail gas inlet pipe 7 is connected with the upper end of the box body 61, the input pipe 3 is connected with the lower end of the box body 61, and the upper and lower parts of the internal space of the box body 61 are fixedly connected with a hole plate 62, and the hole plate 62 is a adsorbent placement room 63.

[0025] The adsorbent placement room 63 is used to place absorbents such as activated carbon, activated alumina and silica gel, to absorb larger particle impurities and part of organic pollutants.

[0026] The stirring assembly 13 comprises a motor 131, the output end of the motor 131 is provided with a rotating shaft 132, the rotating shaft 132 is rotationally connected with the top plate 12, the rotating shaft 132 is fixedly connected with a fixing piece 133, and the fixing piece 133 is fixedly connected with stirring blades 134 on both sides.

[0027] The motor 131 drives the stirring blades 134 to rotate, constantly stirring the absorbent at the bottom of the absorption tank 2 and the tail gas mixed gas in the tank body, thereby enhancing the absorption effect.

[0028] The spraying assembly 14 comprises a water storage interval 141, the water storage interval 141 is fixedly connected with the top plate 12, the water storage interval 141 is provided with a water conveying pipe 142 penetrating through the top plate 12, the water conveying pipe 142 is provided with a fourth control valve 143, and the lower part of the water storage interval 141 is provided with uniformly distributed absorbent sprayers 144.

[0029] The absorbent is added to the absorption tank 2 through the water conveying pipe 142 and the absorbent sprayers 144, a certain amount of absorbent is first added and accumulated at the bottom of the tank, and then a small amount of absorbent is sprayed after the tail gas is introduced, so as to increase the contact area of the absorbent and the tail gas and enhance the absorption effect.

[0030] The plasma processing part comprises a base 17, a plasma processing chamber 18 and a controller 19 arranged on the base 17, the upper portion of the absorption tank 2 is provided with a transfer pipe 15, one end of the transfer pipe 15 is connected with the plasma processing chamber 18, the fifth control valve 16 is arranged on the transfer pipe 15, the upper portion of the plasma processing chamber 18 is provided with a first exhaust pipe 20 and a detection box 21, the two ends of the first exhaust pipe 20 are connected with the plasma processing chamber 18 and the detection box 21 respectively, the upper portion of the detection box 21 is provided with a three-way valve 22, the three-way valve 22 is provided with a backflow pipe 23 and a second exhaust pipe 24, and the second exhaust pipe 24 is connected with the post-processing part.

[0031] The mixed gas is introduced into the plasma processing chamber 18 through the transfer pipe 15, is processed by using the plasma technology, high-energy electrons and free radicals are generated, the carbon tetrafluoride molecules are decomposed, and then are oxidized into harmless or low-harm substances, the gas enters the detection box 21 through the first exhaust pipe 20 to detect the carbon tetrafluoride gas concentration, if the concentration is still high, the three-way valve 22 and the backflow pipe 23 are used to flow back to the plasma processing chamber 18 to wait for the next plasma processing, if the concentration reaches the qualified standard, the three-way valve 22 and the second exhaust pipe 24 are used to enter the post-processing part to be processed.

[0032] The post-processing part comprises a post-processing tank 25, the post-processing tank 25 is connected with the second exhaust pipe 24, the upper portion of the post-processing tank 25 is provided with a third exhaust pipe 26, and the sixth control valve 26 is arranged on the third exhaust pipe 26.

[0033] The post-processing tank 25 also contains an absorbent, after the tail gas is processed by the plasma, the remaining gas, including carbon dioxide, water, fluorine gas and other gases that can be absorbed or utilized, enters the post-processing tank 25 through the second exhaust pipe 24 to be further absorbed, and finally is discharged to the atmosphere or is recycled.

[0034] The working principle of the industrial carbon tetrafluoride tail gas recycling and processing device is as follows:

[0035] The carbon tetrafluoride tail gas is introduced into the adsorption box 6 through the tail gas inlet pipe 7 to be removed for the first time, then enters the absorption tank 2 through the input pipe 3, and nitrogen, hydrogen and oxygen and the like are introduced into the absorption tank 2 through the gas inlet pipe 8 for subsequent plasma processing, and meanwhile, the introduction of the gases helps to stir the absorbent accumulated at the bottom of the absorption tank 2, and the absorption effect of the absorbent on the tail gas is enhanced, and the ethanol, tetrahydrofuran and other organic solvents are added into the absorption tank 2 as absorbents to absorb the carbon tetrafluoride gas, the mixed gas then enters the plasma processing part to be processed by plasma, and finally enters the post-processing part to be processed and discharged.

[0036] Compared with the related art, the industrial carbon tetrafluoride tail gas recovery treatment device has the following beneficial effects:

[0037] Through the impurity removal for many times, the impurities, carbon tetrafluoride gas and part of organic pollutants in the tail gas are adsorbed, plasma treatment reaction and other impurity removal, so that the tail gas is well treated and absorbed, and the plasma treatment part and the post-treatment part detect and reflux treat the discharged gas, so that the concentration of carbon tetrafluoride in the discharged gas does not exceed the qualified standard.

[0038] The above is only an embodiment of the utility model, and does not limit the patent range of the utility model, and any equivalent structure or equivalent process conversion using the utility model specification and the attached drawing contents, or direct or indirect application in other related technical fields, are also included in the patent protection range of the utility model.

Claims

1. A carbon tetrafluoride tail gas recovery treatment device for industrial use, characterized by comprising: The utility model relates to a bottom plate is provided with absorption jar, plasma processing unit and postprocessing unit, the lower part of absorption jar is provided with input pipe, the first control valve and flowmeter are provided on the input pipe, the upper end of input pipe is provided with adsorption box, the upper part of adsorption box is provided with tail gas inlet pipe, the side of absorption jar is provided with gas inlet pipe and liquid discharge pipe, the second control valve is provided on the gas inlet pipe, the third control valve is provided on the liquid discharge pipe, the upper part of absorption jar is provided with top plate, and the top plate is provided with stirring assembly and spraying assembly. The utility model relates to a bottom plate is provided with absorption jar, plasma processing unit and postprocessing unit, the lower part of absorption jar is provided with input pipe, the first control valve and flowmeter are provided on the input pipe, the upper end of input pipe is provided with adsorption box, the upper part of adsorption box is provided with tail gas inlet pipe, the side of absorption jar is provided with gas inlet pipe and liquid discharge pipe, the second control valve is provided on the gas inlet pipe, the third control valve is provided on the liquid discharge pipe, the upper part of absorption jar is provided with top plate, and the top plate is provided with stirring assembly and spraying assembly.

2. The industrial carbon tetrafluoride tail gas recovery treatment apparatus according to claim 1, characterized by The utility model relates to a bottom plate is provided with absorption jar, plasma processing unit and postprocessing unit, the lower part of absorption jar is provided with input pipe, the first control valve and flowmeter are provided on the input pipe, the upper end of input pipe is provided with adsorption box, the upper part of adsorption box is provided with tail gas inlet pipe, the side of absorption jar is provided with gas inlet pipe and liquid discharge pipe, the second control valve is provided on the gas inlet pipe, the third control valve is provided on the liquid discharge pipe, the upper part of absorption jar is provided with top plate, and the top plate is provided with stirring assembly and spraying assembly.

3. The industrial carbon tetrafluoride tail gas recovery treatment apparatus according to claim 1, characterized by The utility model relates to a bottom plate is provided with absorption jar, plasma processing unit and postprocessing unit, the lower part of absorption jar is provided with input pipe, the first control valve and flowmeter are provided on the input pipe, the upper end of input pipe is provided with adsorption box, the upper part of adsorption box is provided with tail gas inlet pipe, the side of absorption jar is provided with gas inlet pipe and liquid discharge pipe, the second control valve is provided on the gas inlet pipe, the third control valve is provided on the liquid discharge pipe, the upper part of absorption jar is provided with top plate, and the top plate is provided with stirring assembly and spraying assembly.

4. The industrial carbon tetrafluoride tail gas recovery treatment apparatus according to claim 1, characterized by The utility model relates to a bottom plate is provided with absorption jar, plasma processing unit and postprocessing unit, the lower part of absorption jar is provided with input pipe, the first control valve and flowmeter are provided on the input pipe, the upper end of input pipe is provided with adsorption box, the upper part of adsorption box is provided with tail gas inlet pipe, the side of absorption jar is provided with gas inlet pipe and liquid discharge pipe, the second control valve is provided on the gas inlet pipe, the third control valve is provided on the liquid discharge pipe, the upper part of absorption jar is provided with top plate, and the top plate is provided with stirring assembly and spraying assembly.

5. The industrial carbon tetrafluoride tail gas recovery treatment apparatus according to claim 1, characterized by ​ 6. The industrial carbon tetrafluoride tail gas recovery treatment apparatus according to claim 5, characterized by ​

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