Laser device and scribing equipment

Abstract

The utility model discloses a laser device which comprises a laser, a light splitting assembly, a plurality of attenuation modules, a plurality of focusing assemblies and a light emitting reflector. The light splitting assembly is arranged at the downstream of the laser and is used for splitting a light beam generated by the laser into multiple light beams; the plurality of attenuation modules are in one-to-one correspondence with the plurality of light beams, and the attenuation modules are used for attenuating the light beams; the multiple focusing assemblies are in one-to-one correspondence with the multiple attenuation modules. The light-emitting reflector is arranged on the downstream of the focusing assemblies, and the multiple sets of focusing assemblies are all used for focusing the light beams on the light-emitting reflector so that the light-emitting reflector can reflect multiple parallel scribing laser beams. Laser beams generated by the laser device form multiple light beams through the light splitting assembly, the light beams are reflected and output through the light emitting reflector after being attenuated and focused, the multiple scribing laser beams reflected and output by the light emitting reflector are parallel to one another, and the multiple scribing laser beams can scribe a film at the same time. Therefore, the scribing efficiency is effectively improved. The utility model further discloses scribing equipment.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of thin-film solar cells, and particularly relates to a laser device and a scribing equipment. BACKGROUND

[0002] In the preparation process of a thin-film solar cell, laser scribing is needed after thin-film preparation to divide sub-cells. Laser scribing is to focus a laser beam with a specific energy pulse frequency on a thin film to be scribed, and to use the heat effect and thermal effect generated by the interaction between the laser beam and the thin film to cut the thin film. The efficiency of the traditional scribing equipment is low. CONTENT OF THE INVENTION

[0003] The technical problem to be solved by the application is that the efficiency of the traditional scribing equipment is low. In order to solve the technical problem, the application provides a laser device and a scribing equipment with high scribing efficiency.

[0004] The technical scheme provided by the application is as follows:

[0005] A laser device comprises:

[0006] a laser;

[0007] a light splitting assembly arranged downstream of the laser and used for splitting a light beam generated by the laser into multiple light beams;

[0008] a plurality of attenuation modules arranged downstream of the light splitting assembly and corresponding to the multiple light beams one by one, the attenuation modules being used for attenuating the light beams;

[0009] a plurality of focusing assemblies arranged downstream of the attenuation modules and corresponding to the attenuation modules one by one;

[0010] an output mirror arranged downstream of the focusing assemblies, and the focusing assemblies are used for focusing the light beams on the output mirror so that the output mirror reflects multiple parallel scribing laser beams.

[0011] The laser device has the following advantages. The laser beam generated by the laser is split into multiple light beams by the light splitting assembly. After attenuation and focusing, the light beams are reflected and output by the output mirror, and the multiple scribing laser beams reflected and output by the output mirror are parallel to each other. The multiple scribing laser beams can simultaneously scribe the thin film. In this way, the scribing efficiency is effectively improved. Meanwhile, after attenuation by the attenuation modules, the light beams are prevented from penetrating the thin film to cause a gap in the thin film due to excessively high energy.

[0012] Further, the focusing assembly comprises a movable mirror and a focusing mirror, the movable mirror is arranged downstream of the attenuation module to reflect the attenuated light beam to the center of the focusing mirror, and the focusing mirror is arranged between the movable mirror and the light-out mirror to focus the light beam on the light-out mirror.

[0013] Further, the focusing mirror is arranged to be reciprocally movable along the transmission direction of the light beam passing through the focusing mirror.

[0014] Further, the laser device further comprises a focusing driving member connected with the focusing mirror to drive the focusing mirror to reciprocally move along the transmission direction of the light beam passing through the focusing mirror.

[0015] Further, the focusing mirror is arranged to be reciprocally movable along a direction perpendicular to the scribe laser beam, and the movable mirror is arranged to be rotatable to reflect the attenuated light beam to the center of the focusing mirror.

[0016] Further, the laser device further comprises a translation driving member connected with the focusing mirror to drive the focusing mirror to reciprocally move along a direction perpendicular to the scribe laser beam.

[0017] Further, the laser device further comprises a rotation driving member connected with the movable mirror to drive the movable mirror to rotate.

[0018] Further, the light splitting assembly comprises a first light splitting mirror and a second light splitting mirror, the first light splitting mirror is arranged downstream of the laser, and the second light splitting mirror is arranged downstream of the first light splitting mirror.

[0019] Further, the laser device further comprises a plurality of guide mirrors to adjust the direction of the light beam.

[0020] A scribe device comprises the laser device as described above. BRIEF DESCRIPTION OF DRAWINGS

[0021] The accompanying drawings are included to provide a further understanding of the present application, and constitute a part of the specification, illustrate the embodiments of the present application, and explain the present application together with the embodiments of the present application, but do not limit the present application.

[0022] Figure 1 The structural schematic diagram of the laser device provided by an embodiment of the present application.

[0023] Explanation of reference numerals:

[0024] 110. Laser; 120. Beam splitter assembly; 121. First-stage beam splitter; 122. Second-stage beam splitter; 130. Attenuation module; 140. Focusing assembly; 141. Movable mirror; 142. Focusing lens; 143. Rotation drive; 150. Light-emitting mirror; 160. Guide mirror. Detailed Implementation

[0025] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0026] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the equipment or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0027] To facilitate understanding of the technical solution of this application, the shortcomings of traditional scribing equipment are explained here: Traditional scribing equipment generates scribing laser beams through laser devices, but can only scribing one line at a time, resulting in low efficiency.

[0028] On the one hand, this application provides a laser device that can be applied to scribing operations on thin films, and the laser device can improve scribing efficiency.

[0029] like Figure 1 As shown, the laser device includes a laser 110, a beam splitter 120, multiple attenuation modules 130, multiple focusing components 140, and a light-emitting reflector 150.

[0030] A beam splitter 120 is disposed downstream of the laser 110 to split the laser beam generated by the laser 110 into multiple beams. Multiple attenuation modules 130 are disposed downstream of the beam splitter 120 and correspond one-to-one with the multiple beams to attenuate the beams. Multiple focusing components 140 are disposed downstream of the attenuation modules 130 and correspond one-to-one with the multiple attenuation modules 130. A beam-emitting mirror 150 is disposed downstream of the focusing components 140, and all the focusing components 140 are used to focus the beam onto the beam-emitting mirror 150 so that the beam-emitting mirror 150 reflects multiple parallel scribe laser beams.

[0031] With the laser device, the laser beam generated by the laser 110 is split into multiple beams by the beam splitter assembly 120, and the beams are attenuated and focused by the attenuation module 130 and then reflected by the output mirror 150. The multiple beams reflected by the output mirror 150 are parallel to each other, and the multiple beams can simultaneously perform scribing on the film. In this way, the scribing efficiency is effectively improved. Meanwhile, the beams are attenuated by the attenuation module 130, so that the beams do not penetrate the film and cause a gap in the film.

[0032] In one embodiment, the beam splitter assembly 120 includes a first beam splitter 121 and a second beam splitter 122. The first beam splitter 121 is arranged downstream of the laser 110 and is configured to split the beam generated by the laser 110 into two beams. The second beam splitter 122 is arranged downstream of the first beam splitter 121 and is configured to further increase the number of beams. Specifically, in the embodiment shown in Figure 1 In the embodiment shown, the second beam splitter 122 includes two second beam splitters, which further split the two beams from the first beam splitter 121 into four beams. It should be understood that, if it is necessary to further increase the number of beams, a third beam splitter and a fourth beam splitter can be further arranged under the premise that the beam energy meets the requirements, which is not limited herein.

[0033] It should be noted that the laser device further includes a guide mirror 160, which is configured to adjust the direction of the beams so that the beams are transmitted in a predetermined direction. For example Figure 1 In the embodiment shown, the guide mirror 160 is arranged between the first beam splitter 121 and one of the second beam splitters 122, between the second beam splitter 122 and part of the attenuation module 130, and between the focusing assembly 140 and the output mirror 150.

[0034] In one embodiment, the focusing assembly 140 includes a movable mirror 141 and a focusing lens 142. The movable mirror 141 is arranged downstream of the attenuation module 130 and is configured to reflect the attenuated beams to the center of the focusing lens 142. The focusing lens 142 is arranged between the movable mirror 141 and the output mirror 150 and is configured to focus the beams on the output mirror 150. It should be noted that the center of the focusing lens 142 refers to the optical axis of the beams.

[0035] In one embodiment, the focusing lens 142 is arranged to be reciprocally movable along the transmission direction of the beams passing through the focusing lens 142, i.e., in the direction of the arrow A shown in Figure 1In the shown embodiment, the focusing mirror 142 is reciprocally movable along the up-down direction between the movable mirror 141 and the light-out mirror 150, so as to ensure that the light beam can be focused on the light-out mirror 150. Further, the laser device further comprises a focusing driving member connected with the focusing mirror 142, so as to drive the focusing mirror 142 to reciprocally move along the transmission direction of the light beam passing through itself.

[0036] In an embodiment, the focusing mirror 142 is reciprocally movable along the direction perpendicular to the scribing laser beam, i.e. reciprocally movable along the left-right direction in the Figure 1 , so as to adjust the interval between the multiple scribing laser beams, and ensure that the interval of the scribing meets the requirements. Further, the movable mirror 141 is rotatably arranged, i.e. rotatable clockwise and counterclockwise in the Figure 1 , so as to ensure that the movable mirror 141 reflects the light beam to the center of the focusing mirror 142. In other words, as shown in the Figure 1 , after the focusing mirror 142 adjusts the position along the left-right direction, the movable mirror 141 needs to correspondingly rotate, for example, the focusing mirror 142 moves a distance to the left, and the movable mirror 141 needs to rotate counterclockwise by a certain angle, so as to ensure that the movable mirror 141 reflects the light beam to the center of the focusing mirror 142.

[0037] It should be noted that the rotation range of the movable mirror 141 is generally small.

[0038] In an embodiment, the laser device further comprises a translation driving member connected with the focusing mirror 142, so as to drive the focusing mirror 142 to reciprocally move along the direction perpendicular to the scribing laser beam. In combination with the above-mentioned embodiment, it should be noted that, in the Figure 1 , when the focusing mirror 142 needs to move along the left-right direction and the up-down direction at the same time, the focusing driving member can be connected with the translation driving member, the translation driving member can be connected with the focusing mirror 142, or the translation driving member can be connected with the focusing driving member, the focusing driving member can be connected with the focusing mirror 142, which is not limited herein. In addition, optionally, the focusing driving member and the translation driving member can be a linear module, a cylinder or the like structure, which is not limited herein.

[0039] In an embodiment, the laser device further comprises a rotation driving member 143 connected with the movable mirror 141, so as to drive the movable mirror 141 to rotate. Optionally, the rotation driving member 143 is a motor or a rotary cylinder.

[0040] In order to facilitate the understanding of the technical solutions of the present application, the adjustment process of the laser device in the above-mentioned embodiment will be described herein. Figure 1

[0041] ​Before scribing, the position of the focusing mirror 142 is adjusted according to the scribing requirement, i.e. moving the focusing mirror 142 in the left-right direction, and after the position adjustment, the movable mirror 141 is rotated to ensure that the light beam is reflected to the center of the focusing mirror 142. Next, the focusing mirror 142 is moved in the up-down direction to ensure that the focusing mirror 142 focuses the light beam to the light-emitting mirror 150. After the adjustment is completed, the scribing operation can be started.

[0042] In another aspect, the application also provides a scribing device, which comprises the laser device in the above embodiments.

[0043] Although the embodiments of the application have been shown and described, it is to be understood that the application is not limited to the details of the foregoing embodiment, since many variations, modifications, substitutions and alterations will become apparent to those skilled in the art without departing from the spirit and scope of the application. The scope of the application is defined by the appended claims and their equivalents.

Claims

1. A laser device, characterized by comprising: The laser device comprises: a laser; a light splitting assembly arranged downstream of the laser and configured to split a light beam generated by the laser into a plurality of light beams; a plurality of attenuation modules arranged downstream of the light splitting assembly and corresponding to the plurality of light beams, the attenuation modules being configured to attenuate the light beams; a plurality of focusing assemblies arranged downstream of the attenuation modules and corresponding to the plurality of attenuation modules; an output mirror arranged downstream of the focusing assemblies, the focusing assemblies being configured to focus the light beams on the output mirror, so that the output mirror reflects a plurality of parallel line laser beams.

2. The laser device of claim 1, wherein The focusing assembly comprises a movable mirror arranged downstream of the attenuation modules and configured to reflect the attenuated light beams to the center of a focusing lens, and the focusing lens is arranged between the movable mirror and the output mirror and configured to focus the light beams on the output mirror.

3. The laser device of claim 2, wherein, The focusing lens is arranged to be reciprocally movable along the transmission direction of the light beams.

4. The laser device of claim 3, wherein, The laser device further comprises a focusing driving member connected to the focusing lens and configured to drive the focusing lens to reciprocally move along the transmission direction of the light beams.

5. The laser device of claim 2, wherein, The focusing lens is arranged to be reciprocally movable along a direction perpendicular to the line laser beams, and the movable mirror is arranged to be rotatable to reflect the attenuated light beams to the center of the focusing lens.

6. The laser device of claim 5, wherein, The laser device further comprises a translation driving member connected to the focusing lens and configured to drive the focusing lens to reciprocally move along a direction perpendicular to the line laser beams.

7. The laser device of claim 5, wherein, The laser device further comprises a rotation driving member connected to the movable mirror and configured to drive the movable mirror to rotate.

8. The laser device of claim 1, wherein, The light splitting assembly comprises a first light splitting mirror arranged downstream of the laser and a second light splitting mirror arranged downstream of the first light splitting mirror.

9. The laser device of claim 1, wherein, The laser device further comprises a plurality of guide mirrors configured to adjust the directions of the light beams.

10. A scribing apparatus characterized by comprising: The laser device according to any one of claims 1-9.

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