Auxiliary mounting jig for positioning and mounting quartz injection tube

Abstract

The utility model provides an auxiliary mounting jig for positioning and mounting a quartz injection tube. The auxiliary mounting jig is used for controlling the mounting distance between the tubular reactor and the quartz injection tube. The auxiliary mounting jig comprises a first positioning plate, a second positioning plate, a distance adjusting device, a distance measuring device and a fixing device. The first positioning plate and the second positioning plate are arranged at an interval, the relative position of the first positioning plate and the second positioning plate is adjusted through the distance adjusting device, the distance measuring device measures the mounting distance, and the fixing device is connected with the tubular reactor and the first positioning plate. According to the auxiliary mounting jig, the mounting distance can be prevented from being adjusted by human experience, the mounting accuracy and reliability of the quartz injection tube can be ensured, meanwhile, the quartz injection tube and the tubular reactor can be relatively fixed, distance adjustment, distance measurement and auxiliary mounting of the quartz injection tube can be achieved through single-person operation, the mounting process is simplified, and the mounting efficiency is improved. Preventive maintenance time is shortened, and operation time of equipment is prolonged.

Description

TECHNICAL FIELD

[0001] The utility model relates to quartz injection pipe auxiliary installation tool technical field, concretely relates to a kind of auxiliary installation jigs for quartz injection pipe positioning installation. BACKGROUND

[0002] Tube reactor (Tube) is the key equipment for chemical vapor deposition (CVD) process, and a quartz boat is arranged in the reaction chamber of the tube reactor, which is used to carry a wafer. A quartz injection pipe (Inject) is installed in the gap between the tube reactor and the quartz boat. The reaction gas is introduced into the reaction chamber of the tube reactor through the quartz injection pipe, and a layer of solid film is deposited on the wafer under certain conditions. The spacing between the quartz injection pipe and the tube reactor affects the installation stability of the quartz injection pipe. If the spacing between the quartz injection pipe and the tube reactor is too small, the nozzle of the quartz injection pipe will be broken due to stress after the deposition material (Depo) accumulates. If the spacing between the quartz injection pipe and the tube reactor is too large, there is a risk of collision between the quartz injection pipe and the quartz boat. Currently, the installation spacing between the quartz injection pipe and the tube reactor is usually controlled by human experience, which has a large subjective nature and lacks accuracy and reliability. SUMMARY

[0003] In view of the problems existing in the prior art, the utility model provides an auxiliary installation jig for positioning and installing a quartz injection pipe to improve the technical problem that the installation spacing between the existing quartz injection pipe and tube reactor is controlled by human experience, which lacks accuracy and reliability.

[0004] To achieve the above-mentioned and other related purposes, the utility model provides an auxiliary installation jig for positioning and installing a quartz injection pipe, which is used to control the installation spacing between a tube reactor and a quartz injection pipe. The auxiliary installation jig comprises a first positioning plate, a second positioning plate, a distance adjusting device, a distance measuring device and a fixing device. The second positioning plate is arranged in a spaced manner with the first positioning plate, and the quartz injection pipe is detachably fixedly connected to the second positioning plate. The distance adjusting device is connected to the first positioning plate and the second positioning plate, and adjusts the relative position of the first positioning plate and the second positioning plate. The distance measuring device is arranged on the first positioning plate and / or the second positioning plate, and measures the installation spacing. The fixing device is connected to the tube reactor and the first positioning plate.

[0005] In an embodiment of the auxiliary installation jig of the utility model, the distance adjusting device comprises a lead screw and a guide rod. One end of the lead screw is rotatably connected to the first positioning plate, and the lead screw is threadedly connected to the second positioning plate. One end of the guide rod is fixedly connected to the first positioning plate, and the guide rod is guidingly connected to the second positioning plate.

[0006] In an embodiment of the auxiliary installation jig, the ranging device adopts a ranging sensor, and the ranging sensor is installed on the second positioning plate.

[0007] In an embodiment of the auxiliary installation jig, a first positioning hole is formed in the first positioning plate, the first positioning hole penetrates the first positioning plate, and the first positioning hole is located on a detection path of the ranging sensor.

[0008] In an embodiment of the auxiliary installation jig, the ranging device is in multiple groups, and the multiple groups of ranging devices are arranged on the second positioning plate in a second direction.

[0009] In an embodiment of the auxiliary installation jig, the auxiliary installation jig further comprises a clamping device, and the quartz injection pipe is detachably locked and connected to the second positioning plate through the clamping device.

[0010] In an embodiment of the auxiliary installation jig, the clamping device comprises a clamping arm and a locking piece, and the clamping arm is fixedly connected to the second positioning plate through the locking piece. The quartz injection pipe is clamped between the clamping arm and the second positioning plate.

[0011] In an embodiment of the auxiliary installation jig, the quartz injection pipe is connected to the surface of the second positioning plate away from the first positioning plate.

[0012] In an embodiment of the auxiliary installation jig, the fixing device comprises a clamp and a support, the clamp is fixedly connected to the tubular reactor, and the clamp is rigidly connected to the first positioning plate through the support.

[0013] In an embodiment of the auxiliary installation jig, the clamp comprises a first clamping plate, a second clamping plate, and a locking piece. The first clamping plate and the second clamping plate are clamped to the tubular reactor and are locked and fixed through the locking piece.

[0014] The auxiliary installation jig for positioning and installing the quartz injection pipe is arranged between the tubular reactor and the quartz injection pipe, the distance between the first positioning plate and the second positioning plate is adjusted through the distance adjusting device, so that the installation distance between the quartz injection pipe and the tubular reactor can be selectively adjusted according to needs. At the same time, the installation distance is measured through the ranging device, so that the installation distance is adjusted artificially and experiencedly, the accuracy and reliability of the quartz injection pipe installation are ensured, the auxiliary installation jig can realize the relative fixation between the quartz injection pipe and the tubular reactor, one person can realize the distance adjustment, distance measurement, and auxiliary installation of the quartz injection pipe, the installation process is simplified, the preventive maintenance time is shortened, and the operation time of the machine is improved. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other embodiments can be obtained based on these drawings without creative effort.

[0016] Figure 1 This is a side view of the fixture structure in one embodiment of the auxiliary installation fixture of this utility model. Figure 1 ;

[0017] Figure 2 This is a side view of the fixture structure in one embodiment of the auxiliary installation fixture of this utility model. Figure 2 ;

[0018] Figure 3 This is a schematic diagram of the fixture installation position in one embodiment of the auxiliary installation fixture of this utility model;

[0019] Figure 4 This is a side view of the working position of the fixture in one embodiment of the auxiliary installation fixture of this utility model.

[0020] Component designation explanation:

[0021] 100. First positioning plate; 110. First positioning hole; 200. Second positioning plate; 300. Adjustment device; 310. Lead screw; 320. Guide rod; 330. Knob; 400. Distance measuring device; 500. Fixing device; 510. Clamp; 511. First clamping plate; 512. Second clamping plate; 513. Locking element; 520. Bracket; 600. Clamping device; 610. Clamping arm; 620. Locking element; 700. Quartz injection tube; 800. Tubular reactor; 900. Quartz crystal boat. Detailed Implementation

[0022] The following embodiments and features together with advantages thereof will be best understood from the following detailed description of the embodiments given by way of example only, but not intended to be limiting; and from the claims. Other features, objects, and advantages of the application will be apparent from the description of the preferred embodiments and from the claims.

[0023] When embodiments give numerical ranges, it is understood that unless the embodiments expressly state otherwise, any and every number and range between the two endpoints will be considered as a possible number or range. Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which the embodiments belong. The materials, methods, and examples provided herein are illustrative only and not intended to be limiting.

[0024] It should be noted that the terms such as "upper", "lower", "left", "right", "middle", and "one" in the specification are only for the convenience of clear description, and are not intended to limit the scope of the embodiments, and the change or adjustment of the relative relationship without substantial change of the technical content is also regarded as the scope of the embodiments.

[0025] In order to solve the technical problem that the installation spacing of the existing quartz injection pipe and the tubular reactor is usually controlled by human experience, lacking accuracy and reliability, the application provides an auxiliary installation jig for positioning and installing a quartz injection pipe. The auxiliary installation jig realizes the distance adjustment, distance measurement and auxiliary installation of the quartz injection pipe relative to the tubular reactor, avoids the installation spacing controlled by human experience, and guarantees the installation reliability and spacing control accuracy of the quartz injection pipe.

[0026] Please refer to Figures 1 to 4The utility model provides a kind of for quartz injection pipe positioning installation's auxiliary installation jig, the auxiliary installation jig is arranged between tubular reactor 800 and quartz injection pipe 700, for controlling the installation spacing between tubular reactor 800 and quartz injection pipe 700.In prior art, quartz injection pipe 700 is usually L-shaped pipe, and the horizontal pipe portion of L-shaped pipe is locked and connected with tubular reactor 800 or corresponding connecting position of machine table by bolt connection form locking component matched with L-shaped pipe, and the horizontal pipe portion is communicated with gas source.The vertical pipe portion of L-shaped pipe is vertically arranged in the inner cavity of tubular reactor 800, and reaction gas is supplied into the inner cavity of tubular reactor 800 through the outlet end of vertical pipe.The installation spacing is the clearance between the vertical pipe portion of L-shaped pipe and the inner cavity side wall of tubular reactor 800, and by reasonably adjusting the clearance between the vertical pipe portion of L-shaped pipe and the inner cavity side wall of tubular reactor 800, the installation stability of quartz injection pipe 700 is guaranteed.

[0027] Please refer to Figures 1 to 4 The auxiliary installation jig includes first positioning plate 100, second positioning plate 200, distance adjusting device 300, distance measuring device 400 and fixing device 500.The first positioning plate 100 is used as a relatively fixed plate, and one side of the first positioning plate 100 is connected to the inner side wall of the tubular reactor 800.The second positioning plate 200 is used as a relatively movable plate, and is arranged at a distance from the first positioning plate 100.The second positioning plate 200 is detachably connected to the quartz injection pipe 700.When the second positioning plate 200 moves relative to the first positioning plate 100, the vertical pipe portion of the quartz injection pipe 700 moves with the second positioning plate 200, thereby adjusting the installation spacing of the vertical pipe relative to the inner side wall of the tubular reactor 800.The quartz injection pipe 700 can be connected to the second positioning plate 200 in any suitable manner, such as by a clamp, a clamp, a binding, or an adhesive connection, so that the quartz injection pipe 700 can move relative to the second positioning plate 200 during distance adjustment, and can be separated from the second positioning plate after distance adjustment.

[0028] The distance adjusting device 300 is used as a driving mechanism for adjusting the distance between the first positioning plate 100 and the second positioning plate 200.The distance adjusting device 300 is connected to the first positioning plate 100 and the second positioning plate 200 to adjust the relative position of the first positioning plate 100 and the second positioning plate 200.The distance adjusting device 300 can be any suitable structure, such as a cylinder mechanism, a gear and rack mechanism, a lead screw and nut mechanism, or a sliding rail and block mechanism.

[0029] The distance measuring device 400 is a distance measuring instrument, which can be installed on the first positioning plate 100 to measure the distance between the first positioning plate 100 and the second positioning plate 200 or the quartz injection tube 700. It can also be installed on the second positioning plate 200 to measure the distance between the second positioning plate 200 and the inner side wall of the tubular reactor 800. The distance measured by the distance measuring device 400 is added or subtracted from the fixed gap size value obtained by limited measurement experiments in advance, so as to obtain the installation gap between the quartz injection tube 700 and the inner wall of the tubular reactor 800. For example, when the distance measuring device 400 measures the distance between the first positioning plate 100 and the quartz injection tube 700, the horizontal gap size between the distance measuring point of the first positioning plate 100 and the inner wall of the tubular reactor 800 also needs to be calculated, so as to obtain the actual installation gap, so as to realize the precise gap control between the inner side wall of the tubular reactor 800 and the quartz injection tube 700. The type of distance measuring device 400 is not limited, which can be any suitable type of structure that can realize distance measurement. For example, the distance measuring device 400 can be a distance measuring sensor, a distance measuring instrument, a ruler, etc.

[0030] The fixing device 500 is a supporting mechanism of the auxiliary installation jig, which is connected with the tubular reactor 800 and the first positioning plate 100 respectively, so as to vertically adhere and fix the first positioning plate 100 to the inner side wall of the tubular reactor 800, avoid the deflection of the first positioning plate 100, and further avoid the deflection of the quartz injection tube 700 connected with the second positioning plate 200 relative to the inner side wall of the tubular reactor 800. It is ensured that the quartz injection tube 700 will not be damaged or the performance will not be reduced due to poor level. The structure of the fixing device 500 is not limited, which can be any suitable structure type that can realize the adhesion and support of the first positioning plate 100 to the inner side wall of the tubular reactor 800. For example, the fixing device 500 can be a clamping mechanism, a hook mechanism, a magnetic attraction mechanism, a sticking mechanism, etc.

[0031] The first positioning plate 100 is attached to the inner side wall of the tubular reactor 800 through the fixing device 500, the installation and fixation of the auxiliary installation jig relative to the tubular reactor 800 is realized, the second positioning plate 200 is driven to move horizontally by the distance adjusting device 300, so that the optimal installation distance between the quartz injection pipe 700 and the tubular reactor 800 can be selectively adjusted according to the needs. According to the distance value measured by the distance measuring device 400, the accurate installation distance can be calculated and obtained, and the installation of other quartz injection pipes 700 of the same machine does not need to be repeatedly tested and adjusted, so as to ensure the gap control and the installation reliability of the quartz injection pipe 700. Further, the influence of different gaps on wafer deposition is reduced, and the product quality is ensured. At the same time, the second positioning plate 200 assists in fixing during the installation process of the quartz injection pipe 700, and one person can realize the distance adjustment, distance measurement and auxiliary installation of the quartz injection pipe 700, thereby simplifying the installation process, shortening the preventive maintenance time, and improving the running time of the machine.

[0032] Please refer to Figure 1 and Figure 4 , in order to simplify the movement process of the second positioning plate 200 relative to the first positioning plate 100, in an embodiment of the auxiliary installation jig, the distance adjusting device 300 adopts a mechanical lead screw guide rail structure. The distance adjusting device 300 comprises a lead screw 310 and a guide rod 320, one end of the lead screw 310 is rotatably connected to the first positioning plate 100, the other end of the lead screw 310 extends away from the first positioning plate 100, and the shaft of the lead screw 310 is threadedly connected to the second positioning plate 200. The rotation of the lead screw 310 is operated, and under the guidance of the guide rod 320, the second positioning plate 200 moves along the horizontal direction, i.e. the axial direction of the guide rod 320. Thus, the distance between the first positioning plate 100 and the second positioning plate 200 is adjusted, and further the installation distance between the quartz injection pipe 700 and the tubular reactor 800 is adjusted. The distance adjusting device 300 of the mechanical lead screw guide rail structure does not need to be connected to external power equipment, and the operation process is simplified. The distance adjusting device 300 can realize the relative locking of the first positioning plate 100 and the second positioning plate 200 while realizing the precise distance adjustment, which facilitates the connection process of the quartz injection pipe 700 and the machine. Further, in this embodiment, a knob 330 is also installed at one end of the lead screw 310, the knob 330 is located away from the first positioning plate 100, and the rotation of the lead screw 310 is facilitated by rotating the knob 330.

[0033] Please refer to Figures 2 to 3In the auxiliary installation jig one embodiment of the utility model, distance measuring device 400 adopts distance measuring sensor, distance measuring sensor volume is relatively smaller, the space occupation is smaller on jig, convenient installation. Distance measuring sensor is installed on second positioning plate 200, and the distance measuring path of distance measuring sensor is towards first positioning plate 100. The type of distance measuring sensor is not limited, can be ultrasonic distance measuring sensor, laser distance measuring sensor, infrared distance measuring sensor, specifically, in this embodiment, distance measuring sensor adopts infrared distance measuring sensor. It needs to be explained that distance measuring sensor is also connected with display device for displaying distance measuring numerical value, and the type and working principle of display device and distance measuring sensor are familiar to the industry, can refer to existing equipment, and can be obtained through general commercial means.

[0034] Please refer to Figure 3 In the auxiliary installation jig one embodiment of the utility model, first positioning hole 110 is set up on first positioning plate 100, and first positioning hole 110 penetrates first positioning plate 100, and first positioning hole 110 is located on the detection path of distance measuring sensor. Specifically, in this embodiment, distance measuring sensor is infrared distance measuring sensor, and infrared distance measuring sensor is located on the plate surface of second positioning plate 200, and the emission end of infrared distance measuring sensor emits infrared light to the direction of first positioning plate 100, and the infrared light is reflected back to the receiving end of infrared distance measuring sensor after passing through first positioning hole 110, so that measurement data is obtained, the setting of first positioning hole 110 eliminates the influence of the small gap error between the plate thickness of first positioning plate 100 and the inner side wall of arc-shaped tubular reactor 800, guarantees the accuracy of measurement, and the distance between the distance measuring starting point of infrared distance measuring sensor and quartz injection tube 700 is obtained through limited measurement experiment, so that the installation spacing is calculated.

[0035] Please refer to Figure 3In order to detect whether the first positioning plate 100 reliably matches the inner side wall of the tubular reactor 800, prevents the vertical pipe of the quartz injection pipe 700 from tilting in the vertical direction, in the auxiliary installation jig one embodiment of the utility model, the number of distance measuring devices 400 is multiple groups, and the multiple groups of distance measuring devices 400 are arranged on the second positioning plate 200 in the second direction. The second direction is the vertical direction, that is, the Y-axis direction. Specifically, in the embodiment, the number of distance measuring devices 400 is three groups, and the three groups of distance measuring devices 400 are respectively installed on the side plate surface of the upper, middle and lower three positions of the second positioning plate 200 in the vertical direction. Thus, the distance values between the three groups of second positioning plates 200 and the inner side of the tubular reactor 800 are obtained. If the three distance values deviate greatly, it indicates that the fixing device 500 fails to achieve the close matching of the first positioning plate 100 and the inner side wall of the tubular reactor 800, the horizontal degree of the horizontal pipe part of the quartz injection pipe 700 is insufficient, the connection between the horizontal pipe part and the inner side wall of the tubular reactor may be interfered, or the connection of the horizontal pipe part of the quartz injection pipe 700 may have been broken. The connection of the fixing device 500 and the machine table or the tubular reactor 800 needs to be adjusted and fixed to ensure the perpendicularity of the first positioning plate 100, and then the perpendicularity of the vertical pipe part of the quartz injection pipe 700 is ensured.

[0036] Please refer to Figures 3 to 4 In the auxiliary installation jig one embodiment of the utility model, the auxiliary installation jig further comprises a clamping device 600, and the quartz injection pipe 700 is detachably locked and connected with the second positioning plate 200 through the clamping device 600. The structure of the clamping device 600 is not limited and can be any suitable structure type for clamping and fixing the quartz injection pipe 700 on the second positioning plate 200. For example, it can be a mechanical clamp, a pneumatic clamp jaw, etc. Specifically, in the embodiment, the clamping device 600 comprises a clamping arm 610 and a locking piece 620, the clamping arm 610 is a U-shaped structure, the two sides of the clamping arm 610 are clamped and connected with the second positioning plate 200, and the clamping arm 610 is fixedly connected with the second positioning plate 200 through the locking piece 620. Further, in the embodiment, the locking piece 620 adopts a bolt or a screw, and the two locking pieces 620 are respectively screwed with the two ends of the U-shaped clamping arm 610 and the two sides of the second positioning plate 200, and the quartz injection pipe 700 is clamped between the clamping arm 610 and the plate surface of the second positioning plate 200.

[0037] Please refer to Figure 4In the auxiliary installation jig one embodiment of the utility model, quartz injection pipe 700 is connected on the board surface of second positioning plate 200 far from first positioning plate 100. Specifically speaking, in this embodiment, quartz injection pipe 700 is located on the board surface of second positioning plate 200 close to quartz crystal boat 900 side, neither affects the installation position of distance measuring sensor on second positioning plate 200, improves the convenience of distance measuring sensor distance measuring path setting. Meanwhile, it is convenient for clamping device 600 to clamp and fix quartz injection pipe 700, after the installation connection of quartz injection pipe 700, it is convenient for the disassembly of quartz injection pipe 700 and auxiliary installation jig. Further, arc-shaped groove can be further provided on the clamping arm 610 at the clamping position of the clamping arm 610 and the quartz injection pipe 700, to further improve the clamping effect of the quartz injection pipe 700, avoid the clamping position deviation of the quartz injection pipe 700.

[0038] Please refer to Figure 2 And Figure 4 In the auxiliary installation jig one embodiment of the utility model, fixing device 500 includes clamp 510 and support 520, and clamp 510 is fixedly connected with tubular reactor 800. Clamp 510 is rigidly connected with first positioning plate 100 through support 520, so that the relative fixation of first positioning plate 100 on the inner side wall of tubular reactor 800 is realized. Specifically speaking, in this embodiment, during the preventive maintenance of tubular reactor 800, since quartz crystal boat 900 is removed from the reaction cavity of tubular reactor 800, the lower part of tubular reactor 800 is a hollow structure. Clamp 510 can be clamped on the annular boss connected with the outer side wall of tubular reactor 800, or can be clamped between the inner side wall and the outer side wall of tubular reactor 800. One end of clamp 510 is connected with support 520, and the other end of support 520 is connected with the bottom of first positioning plate 100. The support and fixation of first positioning plate 100 are realized through clamp 510 and support 520, and then the support and fixation of the whole jig are realized.

[0039] Please refer to Figure 2 In the auxiliary installation jig one embodiment of the utility model, clamp 510 includes first clamping plate 511, second clamping plate 512 and locking piece 513. First clamping plate 511 is provided with first connecting hole, and second clamping plate 512 is provided with second connecting hole. First clamping plate 511 and second clamping plate 512 clamp the side wall of tubular reactor 800, and first connecting hole and second connecting hole are locked and fixed through locking piece 513. Specifically speaking, in this embodiment, locking piece 513 is bolt and nut. In this embodiment, the two ends of support 520 are fixedly connected with first clamping plate 511 and first positioning plate 100, and in other embodiments, support 520 can be fixedly connected with second clamping plate 512 and first positioning plate 100.

[0040] The auxiliary installation jig can avoid the installation interval to be adjusted by human experience, ensure the accuracy and reliability of the quartz injection pipe installation, meanwhile, the auxiliary installation jig can realize the relative fixation between the quartz injection pipe and the tubular reactor, and one person can realize the distance adjustment, distance measurement and auxiliary installation of the quartz injection pipe, simplify the installation process, shorten the preventive maintenance time, and improve the operation time of the equipment. The installation interval between the existing quartz injection pipe and the tubular reactor is controlled by human experience, and the technical problems of lack of accuracy and reliability are improved. Therefore, the utility model effectively overcomes some practical problems in the prior art, thereby having high utilization value and use significance.

[0041] The above embodiment only exemplarily illustrates the principle and effect of the utility model, and is not used to limit the utility model. Any person skilled in the art can modify or change the above embodiment without departing from the spirit and category of the utility model. Therefore, all equivalent modifications or changes completed by those skilled in the art without departing from the spirit and technical thought disclosed by the utility model should be covered by the claims of the utility model.

Claims

1. An auxiliary mounting jig for positioning and mounting of a quartz injection tube, for controlling the mounting distance between a tube reactor and a quartz injection tube; characterized by, The auxiliary mounting jig comprises: a first positioning plate; a second positioning plate, which is arranged in a spaced manner with the first positioning plate and is detachably fixedly connected with the quartz injection pipe; a distance adjusting device, which is connected with the first positioning plate and the second positioning plate and adjusts the relative position of the first positioning plate and the second positioning plate; a distance measuring device, which is arranged on the first positioning plate and / or the second positioning plate and measures the mounting distance; a fixing device, which is connected with the tubular reactor and the first positioning plate.

2. The auxiliary mounting jig according to claim 1, characterized by The distance adjusting device comprises: a screw rod, one end of which is rotatably connected with the first positioning plate, and the screw rod is threadedly connected with the second positioning plate; a guide rod, one end of which is fixedly connected with the first positioning plate, and the guide rod is guideedly connected with the second positioning plate.

3. The auxiliary mounting jig according to claim 1, characterized by The distance measuring device adopts a distance measuring sensor, which is arranged on the second positioning plate.

4. The auxiliary mounting jig according to claim 3, characterized by A first positioning hole is formed on the first positioning plate, the first positioning hole penetrates through the first positioning plate, and the first positioning hole is located on the detection path of the distance measuring sensor.

5. The auxiliary mounting jig according to claim 4, wherein The distance measuring device is in multiple groups, and the multiple groups of distance measuring devices are arranged in a spaced manner along a second direction on the second positioning plate.

6. The auxiliary mounting jig according to claim 1, wherein Further comprising a clamping device, the quartz injection pipe is detachably locked with the second positioning plate through the clamping device.

7. The auxiliary mounting jig according to claim 6, wherein The clamping device comprises a clamping arm and a locking member, the clamping arm is fixedly connected with the second positioning plate through the locking member, and the quartz injection pipe is clamped between the clamping arm and the second positioning plate.

8. The auxiliary mounting jig according to claim 1 or 7, characterized by The quartz injection pipe is connected to the plate surface of the second positioning plate away from the first positioning plate.

9. The auxiliary mounting jig according to claim 1, wherein The fixing device comprises a clamp and a support, the clamp is fixedly connected with the tubular reactor, and the clamp is rigidly connected with the first positioning plate through the support.

10. The auxiliary mounting jig according to claim 9, wherein The clamp comprises a first clamping plate, a second clamping plate and a locking member, the first clamping plate and the second clamping plate are clamped with the tubular reactor, and the first clamping plate and the second clamping plate are locked and fixed through the locking member.

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