Crucible and crucible assembly

Abstract

The utility model relates to the technical field of evaporation, and provides a crucible and a crucible assembly. The crucible comprises a crucible body, the crucible body is provided with an opening end and a bottom end which are opposite to each other, a containing cavity is formed in the crucible body, an opening of the containing cavity is located in the opening end, a plurality of first grooves are evenly formed in the bottom face of the containing cavity, a convex peak structure is formed between every two adjacent first grooves, and the first grooves are sunken in the direction away from the opening end. And a corresponding first bulge is formed at the bottom end of the crucible main body. The first grooves are evenly distributed in the bottom face of the containing cavity, the first protrusions are formed at the bottom end of the crucible body, and the bottom end of the crucible body makes contact with the heating piece, so that the heating area of the crucible body and the heating area of evaporation materials in the crucible body are increased, and the convection effect of a gas phase and a liquid phase is improved; and the gas phase generation rate is more stable, so that the evaporation effect is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of evaporation, in particular to a crucible and a crucible assembly. BACKGROUND

[0002] Evaporation refers to that a metal layer, inorganic oxide and inorganic salt needed are melted into liquid by high temperature, and a very small amount of metal gas, inorganic oxide gas and inorganic salt gas or mixture of inorganic salt are generated in different time periods, so as to form chemical bond by collision of the gas and a carrier plate, and a uniform thickness of the plating layer needed is formed according to the length of time. Evaporation is an important and key process in the manufacturing process of a solar panel.

[0003] In the evaporation process, a crucible is generally used to contain evaporation materials. In the related art, the bottom of the crucible used in the evaporation process is flat, which easily causes poor heating effect of the evaporation materials in the crucible, thereby affecting the evaporation effect. CONTENT OF THE INVENTION

[0004] The present application provides a crucible and a crucible assembly to solve the technical problem that the crucible in the related art easily causes poor heating effect of the evaporation materials in the crucible, thereby affecting the evaporation effect.

[0005] To solve the above problem, the present application provides a crucible, which comprises:

[0006] A crucible body having an opening end and a bottom end opposite to each other, and the crucible body is formed with a containing cavity, the opening of the containing cavity is located at the opening end, and the bottom surface of the containing cavity is formed with a plurality of uniformly distributed first grooves, the first grooves are recessed away from the opening end, and a convex peak structure is formed between adjacent first grooves in the containing cavity.

[0007] Further, the bottom end is formed with a first protrusion corresponding to the first groove.

[0008] In some embodiments, the crucible further comprises:

[0009] A connecting portion arranged at the bottom end and distributed between at least part of adjacent first protrusions, the connecting portion being used to connect the crucible body and a heating member.

[0010] In some embodiments, the connecting portion is at least one of a buckle, a pin shaft and a threaded column.

[0011] The present application also provides a crucible assembly, which comprises:

[0012] The crucible described in any one of the above;

[0013] A heating member having a heating surface, and the heating surface is formed with a second groove matched with the plurality of first protrusions.

[0014] In some embodiments, the radial dimension of the heating surface is greater than the radial dimension of the bottom end, and when the first protrusion is engaged with the second groove, the edges of the heating surface protrude beyond the bottom end.

[0015] In some embodiments, at least some of the second grooves are provided with connecting holes for a threaded member to pass through after the first protrusion is engaged with the second groove, so as to connect the crucible and the heating member.

[0016] In some embodiments, the crucible assembly further comprises:

[0017] An airflow adjusting member is arranged at the open end of the crucible body, and the airflow adjusting member comprises:

[0018] A first mesh plate has a plurality of first air holes;

[0019] A second mesh plate is arranged on the side of the first mesh plate away from the open end, has a plurality of second air holes, and the second air holes are arranged alternately with the first air holes, and the radial dimension of the second air holes is greater than the interval between two adjacent first air holes, so that the first air holes and the second air holes can pass through the second air holes and the first air holes after being arranged alternately.

[0020] In some embodiments, the first air holes and the second air holes are both square, and the interval between two adjacent first air holes accounts for 1 / 3 of the length of the side of the second air holes.

[0021] In some embodiments, the second mesh plate is arranged in multiple layers, and the second air holes of two adjacent second mesh plates are arranged alternately.

[0022] In some embodiments, the depth of the first air holes is greater than the depth of the second air holes.

[0023] The crucible provided by the present application has the following beneficial effects: the crucible provided by the present application forms a plurality of uniformly distributed first grooves on the bottom surface of the accommodating cavity formed in the crucible body, and the first grooves are recessed towards the direction away from the open end, and a first protrusion corresponding to the first grooves is formed at the bottom end. The first grooves increase the contact area between the crucible body and the evaporation material in the accommodating cavity, and when the bottom end of the crucible body is heated, the first protrusion increases the heating area of the crucible body, further increasing the heating effect of the crucible body on the evaporation material, thereby increasing the convection effect of the gas phase and the liquid phase during the evaporation process, making the generation rate of the gas phase more stable, and improving the evaporation effect.

[0024] The crucible assembly provided by the application, by setting the first protrusion matched with the second groove at the bottom end of the crucible main body on the heating surface of the heating member, when the crucible main body is heated, the first protrusion is embedded in the second groove, the second groove increases the heating area of the heating member, and the heating effect of the crucible assembly on the evaporation material in the crucible is improved.

[0025] When the crucible assembly provided by the application further comprises the airflow adjusting member, the first air holes of the first mesh plate and the second air holes of the second mesh plate are staggered, the rate of outward diffusion of the gas is reduced, the uniformity of gas diffusion is improved, and the evaporation effect is further improved. BRIEF DESCRIPTION OF DRAWINGS

[0026] In order to more clearly illustrate the technical solutions in the embodiments of the application, the drawings needed in the embodiment description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the application, and other drawings can be obtained by those skilled in the art without creative effort. Among them:

[0027] Figure 1 is a perspective structural schematic diagram of the crucible from a first perspective provided by an embodiment of the application;

[0028] Figure 2 is a perspective structural schematic diagram of the crucible from a second perspective provided by an embodiment of the application;

[0029] Figure 3 is a sectional view of the crucible provided by an embodiment of the application;

[0030] Figure 4 is a perspective structural schematic diagram of the crucible assembly provided by an embodiment of the application;

[0031] Figure 5 is a perspective structural schematic diagram of the heating member in the crucible assembly provided by an embodiment of the application;

[0032] Figure 6 is a structural schematic diagram of the airflow adjusting member in the crucible assembly provided by an embodiment of the application;

[0033] Figure 7 is a structural schematic diagram of the first mesh hole and the second mesh hole of the airflow adjusting member in the crucible assembly provided by an embodiment of the application.

[0034] In the figure: 10, crucible; 11, crucible main body; 11a, open end; 11b, bottom end; 111, accommodating cavity; 112, first groove; 113, convex peak structure; 114, first protrusion; 115, boss structure; 12, connecting part; 20, heating piece; 21, heating surface; 22, second groove; 23, connecting hole; 30, airflow adjusting piece; 31, first mesh plate; 311, first air hole; 32, second mesh plate; 321, second air hole. DETAILED DESCRIPTION

[0035] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. It can be understood that the specific embodiments described herein are only used to explain the present application, and not to limit the present application. In addition, it should be noted that, for the convenience of description, only the parts related to the present application are shown in the drawings, and not all the structures. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of the present application.

[0036] In the description of the present application, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features limited by "first", "second" can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "multiple" is two or more, unless otherwise explicitly specified and limited.

[0037] In the description of the present application, it should be noted that, unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connecting" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected or can communicate with each other; it can be directly connected, or indirectly connected through an intermediate medium, or it can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0038] In the present application, unless specifically stated and limited otherwise, a first feature "on" or "under" a second feature can include the first and second features being directly in contact, or the first and second features not being directly in contact but being in contact through another feature between them. Also, the first feature "on", "above" and "over" the second feature includes the first feature being directly above and obliquely above the second feature, or only indicating that the first feature is higher in horizontal height than the second feature. The first feature "under", "below" and "underneath" the second feature includes the first feature being directly below and obliquely below the second feature, or only indicating that the first feature is lower in horizontal height than the second feature.

[0039] Reference herein to "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of the application. The appearances of the phrase in various places in the specification are not necessarily all referring to the same embodiment, nor are they necessarily mutually exclusive of one another. As will be apparent to those of ordinary skill in the art, embodiments described herein can be combinable with other embodiments.

[0040] Reference is made to Figures 1 to 3 The present application provides a crucible 10, which is used in a vapor deposition process, for example, can be used in a vapor deposition process of a solar cell panel in the manufacture of a solar cell panel, but is not limited thereto. The crucible 10 provided by the present application comprises a crucible body 11. The crucible body 11 has opposite open ends 11a and bottom ends 11b. The crucible body 11 is formed with a receiving cavity 111, the opening of the receiving cavity 111 is located at the open end 11a of the crucible body 11, and the bottom surface of the receiving cavity 111 is formed with a plurality of uniformly distributed first grooves 112, and the adjacent first grooves 112 form a convex peak structure 113. And the first groove 112 is recessed away from the receiving cavity 111 by the bottom surface of the receiving cavity 111, and a corresponding first protrusion 114 is formed at the bottom end 11b of the crucible body 11.

[0041] The crucible body 11 is used to hold the vapor deposition material through the formed receiving cavity 111. The specific shape of the crucible body 11 and the receiving cavity 111 formed by the crucible body 11 is not limited in the present application. The shape of the crucible body 11 and the receiving cavity 111 can be the same or different, for example, the shape of the crucible body 11 and the receiving cavity 111 can be selected from cylindrical, rectangular columnar, polygonal columnar, multi-edge stepped, circular stepped or irregular stepped, but is not limited thereto. In the embodiments of the present application, the shape of the crucible body 11 and the receiving cavity 111 is cylindrical. It can be understood that the opposite open ends 11a and the bottom ends 11b of the crucible body 11 are the two end faces of the cylindrical shape.

[0042] The bottom surface of the accommodating cavity 111 is formed with a plurality of uniformly distributed first grooves 112. The evaporation material is placed in the accommodating cavity 111. The plurality of first grooves 112 increases the contact area between the evaporation material and the bottom surface of the accommodating cavity 111. The specific shape of the first grooves 112 is not limited in the embodiment of the present application. For example, the first grooves 112 can be spherical grooves, ellipsoidal grooves or polyhedral grooves, but are not limited thereto. Since the first grooves 112 are recessed from the bottom surface of the accommodating cavity 111 to a direction away from the accommodating cavity 111 and form corresponding first protrusions 114 at the bottom end 11b of the crucible body 11, it can be understood that the shape of the first protrusions 114 corresponds to the shape of the first grooves 112, that is, the shape of the first protrusions 114 can also be spherical protrusions, ellipsoidal grooves or polyhedral grooves, but is not limited thereto. By forming the first protrusions 114 corresponding to the first grooves 112 at the bottom end 11b of the crucible body 11, the heating area of the bottom end 11b of the crucible body 11 is increased, and the heating effect of the crucible body 11 on the evaporation material is further increased, so as to increase the convection effect of the gas phase and the liquid phase during the evaporation process, so that the generation rate of the gas phase is more stable, so as to improve the evaporation effect.

[0043] In addition, it should be noted that when the bottom surface of the accommodating cavity 111 is formed with a plurality of uniformly distributed first grooves 112, it can be understood that the corresponding convex peak structures 113 will be naturally formed between adjacent first grooves 112. Since the first grooves 112 are uniformly distributed, the convex peak structures 113 between adjacent first grooves 112 are also uniformly distributed. When the crucible body 11 heats the evaporation material in the accommodating cavity 111, due to the surface tension of the evaporation material, small gas with higher temperature tends to adhere to the concave structure. The convex peak structure 113 between adjacent first grooves 112 can provide an upward position for the liquid or gas with higher temperature. During the process that the evaporation material changes from liquid to gas, bubbles will appear at the bottom of the crucible body 11. The bubbles are generated around the first grooves 112, which increases the uniformity of bubble generation in the crucible body 11.

[0044] When the evaporation material in the crucible body 11 is heated, a heating element 20 is generally arranged at the bottom end 11b of the crucible body 11. As shown in FIG. 1, the heating element 20 is arranged at the bottom end 11b of the crucible body 11 and is in contact with the bottom end 11b of the crucible body 11. The heating element 20 is arranged at the bottom end 11b of the crucible body 11 and is in contact with the bottom end 11b of the crucible body 11. The heating element 20 is arranged at the bottom end 11b of the crucible body 11 and is in contact with the bottom end 11b of the crucible body 11. Figure 2 and Figure 3As shown in the drawings, in some embodiments, the crucible 10 further comprises a connecting part 12 arranged at the bottom end 1 lb of the crucible body 11 and distributed between the adjacent first protrusions 114, which can avoid the connecting part 12 affecting the contact between the first protrusions 114 and the heating member 20. The specific structure of the connecting part 12 is not limited in the present embodiment, for example, the connecting part 12 can be a buckle, a pin shaft or a threaded column. For example, in some embodiments, the connecting part 12 is a threaded column, and a connecting hole 23 can be arranged on the corresponding heating member 20, the threaded column passes through the connection and is tightened by the nut matched with the thread, and the tightness between the crucible body 11 and the heating member 20 can also be adjusted by adjusting the tightening degree of the nut. For example, the distance between the bottom end 1 lb of the crucible body 11 and the heating member 20 can be not more than 1 mm by adjusting the tightening degree of the nut. Of course, in order to ensure the uniformity of the distance between the bottom end 1 lb of the crucible body 11 and the heating member 20, the tightening degree of the nut should be equivalent when connecting the crucible body 11 and the heating member 20. By arranging the connecting part 12 at the bottom end 1 lb of the crucible body 11, the connection between the crucible body 11 and the heating member 20 is facilitated, and the stability of the cooperation between the two is ensured. When the connecting part 12 is a threaded column, the tightness of the cooperation between the crucible body 11 and the heating member 20 can be ensured by adjusting the nut matched with the threaded column, and the heating effect of the heating member 20 on the crucible body 11 is improved.

[0045] As shown in the drawings, Figures 4 to 7 As shown in the drawings, in some embodiments, the present application further provides a crucible assembly, which comprises the crucible 10 and the heating member 20 in any of the above embodiments. The heating member 20 has a heating surface 21, and the heating surface 21 is formed with a plurality of second grooves 22 matched with the first protrusions 114. When the heating member 20 heats the crucible 10, the bottom end 1 lb of the crucible body 11 is placed on the heating surface 21 of the heating member 20, and at the same time, the first protrusions 114 are embedded in the second grooves 22 of the heating surface 21. By forming a plurality of second grooves 22 matched with the first protrusions 114 of the crucible body 11 on the heating surface 21, the heating area of the heating surface 21 is increased, and at the same time, the first protrusions 114 can be embedded in the second grooves 22, thereby improving the heating effect of the heating member 20 on the crucible 10.

[0046] As shown in the drawings, Figure 4As shown, in some embodiments, the radial dimension of the heating surface 21 can be larger than the radial dimension of the bottom end 11b of the crucible body 11. When the first protrusion 114 of the crucible body 11 mates with the second groove 22 of the heating element 20, the edges of the heating surface 21 protrude beyond the bottom end 11b of the crucible body 11, preventing uneven heat conduction to the edge of the bottom end 11b of the crucible body 11 due to heat loss at the edge of the heating surface 21 during thermal radiation. For example, when the crucible body 11 is a cylindrical structure, the heating element 20 can also be a cylindrical structure. Correspondingly, both the heating surface 21 and the bottom end 11b of the crucible body 11 are circular. When the heating element 20 mates with the crucible 10, its central axis can be aligned, making the area of ​​the edge of the heating surface 21 protruding beyond the bottom end 11b uniform.

[0047] like Figure 5 As shown, in some embodiments, to facilitate the connection between the heating element 20 and the crucible body 11, a connecting hole 23 is provided between adjacent second grooves 22 in the heating element 20. The connecting hole 23 is used for the first protrusion 114 of the crucible body 11 to engage with the second groove 22 of the heating element 20, allowing a threaded part to pass through to connect the crucible 10 and the heating element 20. The connecting hole 23 can be a through hole or a threaded hole. In this embodiment, a through hole is used as an example. The threaded part can be located at the bottom end 11b of the crucible body 11. After passing through the connecting hole 23, the threaded part engages with a nut to connect the crucible 10 and the heating element 20. The crucible 10 also includes a connecting portion 12, which is a threaded post. Correspondingly, the threaded part passing through the connecting hole 23 can be the connecting portion 12.

[0048] like Figure 4 and Figure 6 As shown, in some embodiments, the crucible assembly further includes an airflow regulating member 30. The airflow regulating member 30 is disposed at the open end 11a of the crucible body 11, and includes a first mesh plate 31 and a second mesh plate 32. The first mesh plate 31 has a plurality of first vent holes 311, and the second mesh plate 32 is located on the side of the first mesh plate 31 away from the open end 11a. The second mesh plate 32 has a plurality of second vent holes 321, which are staggered with the first vent holes 311. The maximum radial dimension of the second vent hole 321 is greater than the minimum interval between two adjacent first vent holes 311, so that gas can pass through the second vent holes 321 and the first vent holes 311 after the staggered arrangement of the first vent holes 311 and the second vent holes 321. The staggered arrangement of the first vent holes 311 and the second vent holes 321 means that the center of the first vent hole 311 is aligned with the center of two adjacent second vent holes 321, such as... Figure 7As shown, in this way, the airflow adjusting piece 30 has a certain blocking effect on the gas in the accommodating cavity 111, reduces the rate of upward diffusion of the gas, and makes the gas disperse uniformly when the gas passes through the second air holes 321 and the first air holes 311 in turn, thereby improving the evaporation effect. The embodiments of the present application do not limit the specific shape of the first air holes 311 and the second air holes 321, which may, for example, be rectangular holes or circular holes. In the embodiments of the present application, the first air holes 311 and the second air holes 321 are both square, and the first air holes 311 and the second air holes 321 are arranged alternately, the center of the first air hole 311 is aligned with the center of the four second air holes 321, and the region between the second air holes 321 separates the first air hole 311 into four small square holes. In some embodiments, when the first air holes 311 and the second air holes 321 are both square, the spacing between two adjacent first air holes 311 can be 1 / 3 of the side length of the second air hole 321, so that the airflow adjusting piece 30 can play a certain blocking role in the diffusion of the gas, and can also ensure uniform passage of the gas.

[0049] In some embodiments, the shape, size, and distribution interval of the second air holes 321 can be the same as those of the first air holes 311, respectively. In the airflow adjusting piece 30, the first mesh plate 31 can be stacked with a plurality of second mesh plates 32 away from the opening of the accommodating cavity 111, and the second air holes 321 of the adjacent two second mesh plates 32 are arranged alternately. It can be understood that the second air holes 321 of the two second mesh plates 32 separated in the plurality of second mesh plates 32 are arranged in alignment. By stacking a plurality of second mesh plates 32, the time of the gas passing through the airflow adjusting piece 30 is increased, and the uniformity of the gas diffusion can be further improved. It should be noted that the first mesh plate 31 and the second mesh plate 32 and the plurality of second mesh plates 32 are stacked, so that the first mesh plate 31 and the second mesh plate 32 and the plurality of second mesh plates 32 are fixedly connected, and the specific mode of the fixed connection is not limited in the embodiments of the present application, which may, for example, be welding, bonding, or threaded fastener connection, but is not limited thereto.

[0050] As Figure 6As shown, in some embodiments, the size of the first mesh plate 31 can be greater than the size of the second mesh plate 32 along the axial direction of the airflow adjusting piece 30. The size of the first mesh plate 31 and the second mesh plate 32 along the axial direction of the airflow adjusting piece 30 is the thickness of the first mesh plate 31 and the second mesh plate 32, in other words, the hole depth of the first air hole 311 is greater than the hole depth of the second air hole 321. During the diffusion of the gas in the accommodating cavity 111 outwards through the airflow adjusting piece 30, the gas finally passes through the first air hole 311 on the first mesh plate 31. By arranging the thickest mesh plate in the airflow adjusting piece 30 at the uppermost end, the first air hole 311 can play a certain flow regulating role on the diffused gas.

[0051] The airflow adjusting piece 30 is arranged at the opening end 11a of the crucible body 11 in the crucible assembly, for the convenience of placing the evaporation material and cleaning the accommodating cavity 111, it can be understood that the airflow adjusting piece 30 is detachably arranged at the opening end 11a of the crucible body 11. As shown in Figure 1 and Figure 3 As shown, in some embodiments, the accommodating cavity 111 is provided with a boss structure 115 on the peripheral surface close to the opening end 11a, and the airflow adjusting piece 30 is supported on the opening end 11a of the crucible body 11 through the boss structure 115. The distance from the boss structure 115 to the opening end 11a can be the same as the thickness of the airflow adjusting piece 30, so that after the airflow adjusting piece 30 is placed on the boss structure 115, the upper surface of the airflow adjusting piece 30 can be flush with the opening end 11a.

[0052] In addition, it should be noted that the thickness of the first mesh plate 31 and the second mesh plate 32 and the specific size and interval distance of the first air hole 311 and the second air hole 321 in the airflow adjusting piece 30 in the embodiments of the present application are not limited, for example, they can be adaptively adjusted according to the evaporation material and the evaporation requirement.

[0053] The crucible assembly provided in the present application adopts all the technical solutions of all the embodiments of the above-mentioned crucible 10, and therefore at least has all the beneficial effects brought by the technical solutions of the embodiments of the above-mentioned crucible, which will not be repeated here.

[0054] The above-mentioned is only the implementation manner of the present application, and does not limit the patent scope of the present application, and any equivalent structure or equivalent process transformation by using the content of the specification and drawings of the present application, or direct or indirect application in other related technical fields, are also included in the patent protection scope of the present application.

Claims

1. A crucible, characterized by, The crucible comprises: a crucible body having an open end and a bottom end opposite to each other, and the crucible body is formed with a receiving cavity, an opening of the receiving cavity is located at the open end, and a bottom surface of the receiving cavity is formed with a plurality of uniformly distributed first grooves, the first grooves are recessed in a direction away from the open end, and a convex structure is formed between adjacent first grooves in the receiving cavity.

2. The crucible of claim 1, wherein The bottom end is formed with a first protrusion corresponding to the first grooves.

3. The crucible of claim 1, wherein The crucible further comprises: a connecting portion arranged at the bottom end and distributed between at least some adjacent first protrusions, the connecting portion being used to connect the crucible body and a heating member.

4. The crucible of claim 3, wherein The connecting portion is at least one of a buckle, a pin shaft, and a threaded column.

5. A crucible assembly characterized by, The crucible assembly comprises: the crucible according to any one of claims 1-4; a heating member having a heating surface, the heating surface being formed with a plurality of second grooves matched with the first protrusions.

6. The crucible assembly of claim 5, wherein, The radial dimension of the heating surface is greater than the radial dimension of the bottom end, and when the first protrusions are matched with the second grooves, the edges of the heating surface are all protruded from the bottom end.

7. The crucible assembly of claim 5, wherein Connecting holes are arranged between at least some adjacent second grooves, the connecting holes being used for a threaded member to pass through after the first protrusions are matched with the second grooves, so as to connect the crucible and the heating member.

8. The crucible assembly of claim 5, wherein, The crucible assembly further comprises: an airflow adjusting member arranged at the open end of the crucible body, the airflow adjusting member comprising: a first mesh plate having a plurality of first air holes; a second mesh plate located at a side of the first mesh plate away from the open end and having a plurality of second air holes, the second air holes being arranged alternately with the first air holes, and the radial dimension of the second air holes being greater than the interval between two adjacent first air holes, so that after the first air holes and the second air holes are arranged alternately, gas can pass through the second air holes and the first air holes.

9. The crucible assembly of claim 8, wherein, The first air holes and the second air holes are all square, and the interval between two adjacent first air holes accounts for 1 / 3 of the length of the side of the second air holes.

10. The crucible assembly of claim 8 or 9, wherein, A plurality of second mesh plates are arranged in layers, and the second air holes of two adjacent second mesh plates are arranged alternately.

11. The crucible assembly of claim 8, wherein The hole depth of the first air holes is greater than the hole depth of the second air holes.

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