Workpiece transfer assembly of vacuum magnetron sputtering coating machine

Abstract

The utility model discloses a workpiece transfer assembly of a vacuum magnetron sputtering coating machine, which relates to the field of magnetron coating and comprises a device main body, the device main body comprises a protection box, a C-shaped frame is slidably connected in the protection box, a clamping mechanism is arranged at the front end of the C-shaped frame, a workpiece clamping mechanism is arranged at the front end of the C-shaped frame, and a first motor is fixed on the rear side of the top of the protection box. A screw is fixed to the output end of the first motor and is in threaded connection with the top of the C-shaped frame, connecting rods are rotationally connected to the two sides of the top of the C-shaped frame, symmetrically-arranged side sliding doors are slidably connected to the front side of the protection box, and the other ends of the connecting rods are rotationally connected with the rear sides of the side sliding doors. The coating device has the beneficial effects that when the workpiece clamping mechanism is taken out of the coating bin, the workpiece clamping mechanism can be stably taken out and stored in the protection box through cooperation of the clamping mechanism and the C-shaped frame, and it can be guaranteed that coating scratches on the surfaces of workpieces cannot be caused in the taking-out or feeding-in process of the workpiece clamping mechanism through the arrangement of the C-shaped frame and the clamping mechanism.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of magnetron coating, in particular to a workpiece transfer assembly of vacuum magnetron sputtering coating machine. BACKGROUND

[0002] Magnetron sputtering coating is usually carried out in a vacuum coating chamber, the existing vacuum coating chamber of magnetron sputtering coating machine is provided with a revolution frame in the middle, a plurality of self-rotation frames for driving the product to rotate are arranged on the revolution frame, the plurality of self-rotation frames are arranged around the center of the revolution frame and rotate with the revolution frame, a sputtering source is arranged at the top of the vacuum coating chamber and above the self-rotation frames, a product inlet is arranged on the side wall of the vacuum coating chamber, and a sealing closure door is arranged at the product inlet and can move to the side to open.

[0003] Now the workpieces in the coating chamber are mainly collected and placed by workers, and then the workers transfer the workpieces to the next station for processing. Since the workpiece surface forms a dense coating, the workpiece may be scratched during the transfer process, resulting in quality decline, and the workpiece may accumulate dust on the surface without protection, resulting in the need to clean the workpiece surface before the next process, increasing the labor intensity, so a workpiece transfer assembly of vacuum magnetron sputtering coating machine is needed.

[0004] For example, the patent document with publication number CN113881924A discloses a workpiece transfer device for a vacuum magnetron sputtering coating machine, which includes a mounting frame with a placement cavity inside, at least one mounting roller is arranged in the placement cavity, the mounting roller is hollow, the outer surface and the inner surface of the mounting roller are used to fix the workpiece, and the workpiece transfer device for the vacuum magnetron sputtering coating machine further includes a plurality of universal wheels, and the universal wheels are arranged at the bottom of the mounting frame. The workpiece transfer device for the vacuum magnetron sputtering coating machine can conveniently transfer the workpiece, thereby improving the efficiency. In the prior art, there is a risk of scratching the coating on the surface of the workpiece during movement or when placing the workpiece in the protection box, so a workpiece transfer assembly that can smoothly collect or deliver the workpiece is needed. UTILITY MODEL CONTENTS

[0005] The purpose of the utility model is to provide a workpiece transfer assembly of vacuum magnetron sputtering coating machine to solve the above problems.

[0006] The utility model realizes the above-mentioned purpose through the following technical scheme:

[0007] The utility model provides a workpiece transfer assembly of vacuum magnetron sputtering coating machine, including device main part, device main part includes protection box, the C type frame is slidably connected in protection box, the symmetrically setting of clamping mechanism is arranged to the C type frame front end, the workpiece clamping mechanism is provided at the C type frame front end, the first motor is fixedly connected with the screw rod of first motor output, the screw rod is rotatably connected with the top of protection box, the screw rod is screwly connected with the top of C type frame, the link of symmetry setting is rotatably connected with the both sides of C type frame top, the symmetrically setting side pull door is slidably connected with the front side of protection box, the link other end is rotatably connected with the rear side of side pull door, be provided with glass window on the side pull door.

[0008] Preferably, the bottom of the protection box is fixedly connected with a movable frame, the bottom of the movable frame is provided with a plurality of uniformly arranged universal wheels, and the rear side of the movable frame is fixedly connected with a handle.

[0009] Preferably, the workpiece clamping mechanism comprises a prismatic column, the upper end of the prismatic column is fixedly connected with an upper support, the lower end of the prismatic column is fixedly connected with a lower support, the upper support and the lower support are symmetrically arranged, a plurality of circumferentially uniformly arranged workpiece mounting cylinders are rotatably connected to the upper support, the other end of the workpiece mounting cylinder is rotatably connected to the lower support, the upper and lower ends of the prismatic column are fixedly connected with symmetrically arranged clamping shafts, and the lower end of the prismatic column is rotatably connected with a base.

[0010] Preferably, the base is fixedly connected with a gear ring, the lower end of the workpiece mounting cylinder is fixedly connected with a planetary gear, the planetary gear is meshed with the gear ring, the bottom of the base is fixedly connected with a second motor, the top of the base is rotatably connected with a drive gear set, the output end of the second motor is fixedly connected with a gear of the drive gear set, and the other gear of the drive gear set is fixedly connected with the clamping shaft.

[0011] Preferably, the clamping mechanism comprises a clamping support fixedly connected with the C-shaped frame, the clamping support is slidably connected with symmetrically arranged clamping hands at the front end, the clamping hands are used for clamping the clamping shafts, a forced push rod is arranged between the two clamping hands, the front end of the forced push rod can be in contact with the clamping shafts, the forced push rod is slidably connected with the clamping support, the other end of the forced push rod is fixedly connected with symmetrically arranged traction ropes, the other end of the traction rope is fixedly connected with the clamping hand, the clamping support is rotatably connected with symmetrically arranged direction-changing wheels, the direction-changing wheels are in contact with the traction ropes, the clamping support is fixedly connected with symmetrically arranged second springs, the axial direction of the second spring is parallel to the forced push rod, and the other end of the second spring is fixedly connected with the bottom of the forced push rod.

[0012] Preferably, the rear side of the forced push rod is fixedly connected with a limiting hook, one side of the limiting hook is provided with a control rod, the control rod can form a limit with the limiting hook, the control rod is slidably connected with the clamping support, the other end of the control rod extends out of the clamping support, and the side, away from the limiting hook, of the control rod is fixedly connected with a first spring, and the other end of the first spring is fixedly connected with the inner wall of the clamping support.

[0013] The beneficial effect is that when the workpiece clamping mechanism is taken out from the coating bin, the workpiece clamping mechanism can be smoothly taken out from the coating bin and put into the protection box by cooperation of the clamping mechanism and the C-shaped frame, and the arrangement of the C-shaped frame and the clamping mechanism can ensure that the workpiece surface is not scratched during the taking-out or feeding-in process, in addition, the side sliding door is opened and closed with the movement of the C-shaped frame, and the C-shaped frame is closed to form a relatively closed space, so as to protect the workpiece, and the arrangement of the universal wheel can ensure that the workpiece transfer assembly moves quickly.

[0014] The additional technical features and advantages of the present application will be more apparent in the following description, or can be understood through the specific practice of the present application. BRIEF DESCRIPTION OF DRAWINGS

[0015] The accompanying drawings are used to provide a further understanding of the present application, and constitute a part of the specification, and are used together with the following specific embodiments to explain the present application, but do not constitute a limitation on the present application. In the drawings:

[0016] Figure 1 is a perspective view of a workpiece transfer assembly of a vacuum magnetron sputtering coating machine according to the present application;

[0017] Figure 2 is a schematic view of the relative position of the device main body and the workpiece clamping mechanism of the workpiece transfer assembly of the vacuum magnetron sputtering coating machine according to the present application;

[0018] Figure 3 is a device main body of the workpiece transfer assembly of the vacuum magnetron sputtering coating machine according to the present application;

[0019] Figure 4 is a schematic view of the structure of the workpiece clamping mechanism of the workpiece transfer assembly of the vacuum magnetron sputtering coating machine according to the present application;

[0020] Figure 5 is a schematic view of the relative position of the second motor and the base of the workpiece transfer assembly of the vacuum magnetron sputtering coating machine according to the present application;

[0021] Figure 6 is a schematic view of the relative position of the clamping mechanism of the workpiece transfer assembly of the vacuum magnetron sputtering coating machine according to the present application;

[0022] Figure 7 is a schematic view of the relative position of the clamping mechanism of the workpiece transfer assembly of the vacuum magnetron sputtering coating machine according to the present application;

[0023] The reference signs are explained as follows:

[0024] 101, moving frame; 102, universal wheel; 103, handle; 104, protection box; 105, side sliding door; 106, first motor; 107, screw rod; 108, connecting rod; 109, C-shaped frame; 201, prismatic column; 202, upper support; 203, lower support; 204, workpiece mounting cylinder; 205, clamping shaft; 206, gear ring; 207, planetary gear; 208, base; 209, second motor; 210, driving gear set; 301, clamping support; 302, clamping hand; 303, forced push rod; 304, traction rope; 305, direction-changing wheel; 306, limiting hook; 307, control rod; 308, first spring; 309, second spring. DETAILED DESCRIPTION

[0025] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all the embodiments.

[0026] In the description of the present application, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application.

[0027] The present application will be further described below with reference to the drawings:

[0028] As Figures 1-7As shown, a workpiece transfer assembly of a vacuum magnetron sputtering coating machine includes a device body, the device body includes a protection box 104, a C-shaped frame 109 is slidably connected in the protection box 104, a clamping mechanism is symmetrically arranged on the front end of the C-shaped frame 109, a workpiece clamping mechanism is arranged on the front end of the C-shaped frame 109, a first motor 106 is fixedly connected to the top rear side of the protection box 104, a screw rod 107 is fixedly connected to the output end of the first motor 106, the screw rod 107 is rotatably connected to the top of the protection box 104, the screw rod 107 is threadedly connected to the top of the C-shaped frame 109, symmetrical connecting rods 108 are rotatably connected to the top of the C-shaped frame 109, symmetrical side sliding doors 105 are slidably connected to the front side of the protection box 104, the other end of the connecting rod 108 is rotatably connected to the rear side of the side sliding door 105, a glass window is arranged on the side sliding door 105, a movable frame 101 is fixedly connected to the bottom of the protection box 104, a plurality of uniformly arranged universal wheels 102 are installed on the bottom of the movable frame 101, a handle 103 is fixedly connected to the rear side of the movable frame 101, the worker pushes the movable frame 101 to the vicinity of the material taking opening of the coating warehouse by holding the handle 103, the first motor 106 drives the screw rod 107 to rotate, the screw rod 107 drives the C-shaped frame 109 to move, the C-shaped frame 109 drives the clamping mechanism to approach the workpiece clamping mechanism in the coating warehouse, at the same time, the C-shaped frame 109 drives the connecting rod 108 to move, the connecting rod 108 drives the side sliding door 105 to separate to both sides, so that the workpiece clamping mechanism can smoothly enter the protection box 104, the worker pushes the movable frame 101 to make the clamping mechanism cooperate with the workpiece clamping mechanism, then pulls the movable frame 101 to make the workpiece clamping mechanism push out of the coating warehouse, the first motor 106 reverses the C-shaped frame 109 to reset, the C-shaped frame 109 drives the workpiece clamping mechanism to enter the protection box 104, at this time the side sliding door 105 is closed, the protection box 104 forms a relatively closed space, and the workpiece is not damaged and the surface does not accumulate dust during movement and transportation.

[0029] The workpiece clamping mechanism comprises a prismatic column 201, an upper support 202 fixedly connected to the upper end of the prismatic column 201, a lower support 203 fixedly connected to the lower end of the prismatic column 201, the upper support 202 and the lower support 203 being symmetrically arranged, a plurality of workpiece mounting cylinders 204 uniformly arranged in a circle and rotatably connected to the upper support 202, the other end of the workpiece mounting cylinder 204 being rotatably connected to the lower support 203, a pair of clamping shafts 205 symmetrically arranged and fixedly connected to the upper and lower ends of the prismatic column 201, a base 208 rotatably connected to the lower end of the prismatic column 201, a gear ring 206 fixedly connected to the base 208, a planetary gear 207 fixedly connected to the lower end of the workpiece mounting cylinder 204, the planetary gear 207 being engaged with the gear ring 206, a second motor 209 fixedly connected to the bottom of the base 208, a drive gear set 210 rotatably connected to the top of the base 208, the output end of the second motor 209 being fixedly connected to one gear of the drive gear set 210, the other gear of the drive gear set 210 being fixedly connected to the clamping shaft 205, the workpiece clamping mechanism being placed in the coating chamber, the second motor 209 driving the drive gear set 210 at the top of the base 208 to rotate, the drive gear set 210 driving the prismatic column 201 to rotate, the prismatic column 201 driving the upper support 202 and the lower support 203 to rotate, the upper support 202 driving the workpiece mounting cylinder 204 to rotate, the lower support 203 driving the planetary gear 207 to rotate, the planetary gear 207 cooperating with the gear ring 206 to drive the planetary gear 207 to rotate around its own axis during the revolution of the planetary gear 207, the planetary gear 207 driving the workpiece mounting cylinder 204 to rotate around its own axis, so that the surface coating of the workpiece can be uniform, and the clamping mechanism cooperating with the clamping shaft 205 can clamp the workpiece clamping mechanism and carry it out of the coating chamber.

[0030] The clamping mechanism comprises a clamping support 301 fixedly connected with the C-shaped frame 109, symmetrically arranged clamping hands 302 slidingly connected at the front end of the clamping support 301, the clamping hands 302 being used for clamping the clamping shaft 205, a forced push rod 303 arranged in the middle of the two clamping hands 302, the forced push rod 303 being capable of contacting the clamping shaft 205 at the front end, the forced push rod 303 being slidingly connected with the clamping support 301, symmetrically arranged traction ropes 304 fixedly connected at the other end of the forced push rod 303, the traction ropes 304 being fixedly connected with the clamping hands 302 at the other end, symmetrically arranged direction-changing wheels 305 rotatingly connected in the clamping support 301, the direction-changing wheels 305 being in contact with the traction ropes 304, symmetrically arranged second springs 309 fixedly connected in the clamping support 301, the second springs 309 being parallel to the forced push rod 303 in the axial direction, the other end of the second springs 309 being fixedly connected with the bottom of the forced push rod 303, a limiting hook 306 fixedly connected at the rear side of the forced push rod 303, a control rod 307 being arranged at one side of the limiting hook 306, the control rod 307 being capable of forming a limit with the limiting hook 306, the control rod 307 being slidingly connected with the clamping support 301, the other end of the control rod 307 extending out of the clamping support 301, a first spring 308 being fixedly connected at the side of the control rod 307 away from the limiting hook 306, the other end of the first spring 308 being fixedly connected with the inner wall of the clamping support 301, the C-shaped frame 109 drives the clamping mechanism to approach the clamping shaft 205, the forced push rod 303 contacts the clamping shaft 205, the forced push rod 303 is forced to move, the forced push rod 303 drives the traction ropes 304 to move, the traction ropes 304 drive the clamping hands 302 to clamp the clamping shaft 205 in the center, at this time, the second spring 309 is stretched, the forced push rod 303 drives the limiting hook 306 to move, the limiting hook 306 presses the control rod 307 to move, and then the limiting hook 306 and the control rod 307 complete the limit matching, so as to ensure that the clamping of the clamping hands 302 and the forced push rod 303 on the clamping shaft 205 will not be loosened, when the staff needs to contact the clamping shaft 205, the control rod 307 is pushed to release the limiting of the limiting hook 306, at this time, the first spring 308 is compressed, and the second spring 309 resets to drive the forced push rod 303 and the clamping hands 302 to reset, so that the limiting of the clamping mechanism on the clamping shaft 205 can be cancelled, and the staff releases the control rod 307, and the first spring 308 drives the control rod 307 to reset.

[0031] Working principle: the worker pushes the moving frame 101 to the vicinity of the material taking opening of the coating warehouse by holding the handle 103, the first motor 106 drives the screw rod 107 to rotate, the screw rod 107 drives the C-shaped frame 109 to move, the C-shaped frame 109 drives the clamping mechanism to approach the clamping shaft 205, the forced push rod 303 is in contact with the clamping shaft 205, the forced push rod 303 is forced to move, the forced push rod 303 drives the traction rope 304 to move, the traction rope 304 drives the clamping hand 302 to center and clamp the clamping shaft 205, at this time the second spring 309 is stretched, the forced push rod 303 drives the limiting hook 306 to move, the limiting hook 306 presses the control rod 307 to move, and then the limiting hook 306 and the control rod 307 complete the limiting cooperation, so that the clamping of the clamping hand 302 and the forced push rod 303 on the clamping shaft 205 cannot be loosened, when the worker needs to contact the clamping shaft 205, the control rod 307 is pushed to release the limiting of the limiting hook 306, at this time the first spring 308 is compressed, the second spring 309 is reset to drive the forced push rod 303 and the clamping hand 302 to reset, so that the limiting of the clamping mechanism on the clamping shaft 205 can be cancelled, the worker releases the control rod 307, the first spring 308 drives the control rod 307 to reset, at the same time, the C-shaped frame 109 drives the connecting rod 108 to move, the connecting rod 108 drives the side pull door 105 to be separated to both sides, so that the workpiece clamping mechanism can smoothly enter the protection box 104, the worker pushes the moving frame 101 to make the clamping mechanism cooperate with the workpiece clamping mechanism, then pulls the moving frame 101 to make the workpiece clamping mechanism push out of the coating warehouse, the first motor 106 reverses the C-shaped frame 109 to reset, the C-shaped frame 109 drives the workpiece clamping mechanism to enter the protection box 104, at this time the side pull door 105 is closed, and the protection box 104 forms a relatively closed space, so that the workpiece is not damaged in the moving and transporting process and dust is not accumulated on the surface.

[0032] The basic principle, main features and advantages of the present application are shown and described above. Those skilled in the art should understand that the present application is not limited by the above examples, and the above examples and descriptions in the specification are only to illustrate the principles of the present application. Without departing from the spirit and scope of the present application, various changes and improvements can be made to the present application, and these changes and improvements all fall within the scope of the claimed present application.

Claims

1. A workpiece transfer assembly for a vacuum magnetron sputter coater comprising a device body, characterised in that: The device body includes a protection box (104), the C-shaped frame (109) is slidably connected in the protection box (104), the clamping mechanism is symmetrically arranged on the front end of the C-shaped frame (109), the workpiece clamping mechanism is arranged on the front end of the C-shaped frame (109), the first motor (106) is fixedly connected to the top rear side of the protection box (104), the screw rod (107) is fixedly connected to the output end of the first motor (106), the screw rod (107) is rotatably connected to the top of the protection box (104), the screw rod (107) is screwedly connected to the top of the C-shaped frame (109), the connecting rods (108) are rotatably connected to the top of the C-shaped frame (109), the side sliding doors (105) are slidably connected to the front side of the protection box (104), the other ends of the connecting rods (108) are rotatably connected to the rear side of the side sliding doors (105), and the glass windows are arranged on the side sliding doors (105).

2. A workpiece transfer assembly for a vacuum magnetron sputter coater as defined in claim 1, wherein: The protection box (104) is fixedly connected to the moving frame (101), and the moving frame (101) is provided with a plurality of universal wheels (102) which are evenly arranged on the bottom.

3. A workpiece transfer assembly for a vacuum magnetron sputter coater as defined in claim 1, wherein: The workpiece clamping mechanism comprises a prismatic column (201), the upper end of the prismatic column (201) is fixedly connected with an upper support (202), the lower end of the prismatic column (201) is fixedly connected with a lower support (203), the upper support (202) and the lower support (203) are symmetrically arranged, a plurality of workpiece mounting cylinders (204) are rotatably connected to the upper support (202), the other ends of the workpiece mounting cylinders (204) are rotatably connected to the lower support (203), the prismatic column (201) is fixedly connected with symmetrically arranged clamping shafts (205) at the upper end and the lower end, and the prismatic column (201) is rotatably connected with a base (208) at the lower end.

4. A workpiece transfer assembly for a vacuum magnetron sputter coater as claimed in claim 3, wherein: The base (208) is fixedly connected with a gear ring (206), the workpiece mounting cylinders (204) are fixedly connected with planetary gears (207) at the lower end, the planetary gears (207) are meshed with the gear ring (206), the base (208) is fixedly connected with a second motor (209) at the bottom, the base (208) is rotatably connected with a driving gear set (210) at the top, the output end of the second motor (209) is fixedly connected with one gear of the driving gear set (210), and the other gear of the driving gear set (210) is fixedly connected with the clamping shaft (205).

5. A workpiece transfer assembly for a vacuum magnetron sputter coater as defined in claim 3, wherein: The clamping mechanism includes a clamping support (301) fixedly connected with the C-shaped frame (109), the clamping support (301) is slidably connected with a clamping hand (302) symmetrically arranged at the front end, the clamping hand (302) is used for clamping the clamping shaft (205), a forced push rod (303) is arranged between the two clamping hands (302), the forced push rod (303) is in contact with the clamping shaft (205) at the front end, the forced push rod (303) is slidably connected with the clamping support (301), the forced push rod (303) is fixedly connected with a traction rope (304) symmetrically arranged at the other end, the traction rope (304) is fixedly connected with the clamping hand (302) at the other end, the clamping support (301) is rotatably connected with a deflection wheel (305) symmetrically arranged inside, the deflection wheel (305) is in contact with the traction rope (304), the clamping support (301) is fixedly connected with a second spring (309) symmetrically arranged inside, the second spring (309) is parallel to the forced push rod (303) in the axial direction, and the second spring (309) is fixedly connected with the bottom of the forced push rod (303) at the other end.

6. A workpiece transfer assembly for a vacuum magnetron sputter coater as defined in claim 5, wherein: The forced push rod (303) is fixedly connected with a limiting hook (306) at the rear side, the limiting hook (306) is provided with a control rod (307) at one side, the control rod (307) can form a limit with the limiting hook (306), the control rod (307) is slidably connected with the clamping support (301), the control rod (307) extends out of the clamping support (301) at the other end, the control rod (307) is fixedly connected with a first spring (308) away from the limiting hook (306) at one side, and the first spring (308) is fixedly connected with the inner wall of the clamping support (301) at the other end.

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