Limiting assembly for magnetic field lifting mechanism of single crystal furnace

Abstract

The utility model discloses a single crystal furnace magnetic field lifting mechanism limiting assembly which comprises two installation structure bodies and a control piece, the control piece is of a concentric-square-shaped structure, a first travel switch and a second travel switch are further arranged on the motion trail of the concentric-square-shaped structure, and the first travel switch and the second travel switch are made to make contact with the concentric-square-shaped structure. The lifting device is reasonable in design structure, is installed on the magnet extension seat through the concentric-square-shaped structure and is used for moving along with lifting of the magnet, then the first travel switch and the second travel switch are arranged at the limit position of the lifting movement track, the concentric-square-shaped structure firstly touches the first travel switch, the elevator motor begins to decelerate, and then the lifting movement is completed. And then the concentric-square-shaped structure makes contact with the second travel switch, the magnet stops ascending and descending, and the problems that according to an existing limiting assembly, due to the fact that the weight of a magnetic field is too heavy, inertia buffering is very likely to happen when the magnet moves to the limiting position, stability is poor when the magnet stops moving, and the limiting position is inaccurate are solved.

Description

Technical Field

[0001] This utility model relates to the field of magnetic field lifting technology for single crystal furnaces, specifically a limiting component for a magnetic field lifting mechanism of a single crystal furnace. Background Technology

[0002] With the rapid development of the semiconductor industry, the demand for large-diameter silicon single crystals with high purity, high integrity, and high uniformity has greatly increased. This requires reducing defects and impurities in single crystal materials and improving the uniformity of impurities such as oxygen and carbon during the growth of silicon single crystals. Currently, introducing a magnetic field into the melt space is a relatively effective method in the growth of large-diameter silicon single crystals. This effectively controls various convection currents in the melt, reduces crystal impurities, and improves the uniformity of impurity distribution.

[0003] In existing technologies, the lifting and lowering of magnetic fields typically employs three sets of T-shaped screw jacks, cylindrical guide shafts, servo motors, and other magnetic field control devices. During lifting, electronic limit switches are used to detect when the magnet reaches its limit position. When the electronic limit switch detects that the magnetic field has reached the preset limit position, it sends a signal to stop the lifting mechanism. However, the magnetic field itself is too heavy, and when the magnet reaches its limit position, it is very easy for the inertia to cause poor stability when the magnet stops moving and inaccurate limit position due to excessive speed. Utility Model Content

[0004] The purpose of this invention is to overcome the shortcomings of the existing technology and provide a limiting component for a magnetic field lifting mechanism of a single crystal furnace.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] A limiting component for a magnetic field lifting mechanism of a single crystal furnace includes two sets of mounting structure bodies and a control component. The two sets of mounting structure bodies are respectively set at two extreme positions close to the lifting trajectory of the magnet, and the two mounting structure bodies are arranged symmetrically up and down. A first limit switch and a second limit switch are connected to the side of the two mounting structure bodies close to the magnet.

[0007] The control unit is installed on the magnet extension base of the single crystal furnace and is used to trigger the first limit switch and the second limit switch during the lifting and lowering movement of the magnet.

[0008] The control component has a loop-shaped structure. A deceleration control surface is provided on the side of the loop-shaped structure near the first limit switch. The control component has an upper limit control surface and a lower limit control surface above and below the deceleration control surface, respectively.

[0009] In the lifting movement, the control surface contacts the detection end of the first travel switch to control the start of the speed reduction before the magnet moves to the limit position, and then the upper limit control surface or the lower limit control surface contacts the corresponding second travel switch to control the stop of the magnet.

[0010] Further, the lower limit control surface extends upward at the edge close to the side of the magnet, and after the back-shaped structure contacts the second travel switch, it plays a supporting role.

[0011] Further, the first travel switch and the second travel switch are both mechanical touch type limit switches.

[0012] Further, the top of the back-shaped structure is provided with a first positioning hole and a second positioning hole, so that the back-shaped structure is installed on the magnet extension seat through the first positioning hole and the second positioning hole.

[0013] The first positioning hole is circular in shape; the second positioning hole is circular arc type, and the center of the circular arc type of the second positioning hole is located on the axis of the first positioning hole, so that the fixed angle of the back-shaped structure is adjusted during installation.

[0014] Further, a third positioning hole is also provided on the installation structure body, which is long strip type, so that the installation structure body is installed with the single crystal furnace base through the third positioning hole.

[0015] Further, the two installation structure bodies are respectively a first installation plate and a second installation plate, and the first travel switch and the second travel switch are respectively arranged on the first installation plate and the second installation plate, so that the first travel switch and the second travel switch are installed at the limit position of the magnet movement track through the first installation plate and the second installation plate.

[0016] The first installation plate and the second installation plate are provided with a telescopic structure for adjusting the distance between the first installation plate and the second installation plate.

[0017] The telescopic structure is provided with a locking structure for fixing the distance between the first installation plate and the second installation plate.

[0018] Further, the telescopic structure includes two limiting boxes, which are symmetrically fixedly connected to the second installation plate, and a support column is slidably connected in each limiting box, and the end of the support column away from the limiting box is fixedly connected with the first installation plate.

[0019] The limiting box and the support column are vertically distributed, so that the first installation plate and the second installation plate are vertically adjusted.

[0020] Further, the locking structure includes a plurality of insertion holes and a two-way threaded rod, the plurality of insertion holes are located on the side of the two support columns close to each other, and the plurality of insertion holes are distributed downward along a straight line at equal distances.

[0021] The two limiting frames are provided with protrusions away from the sides of the supporting columns, both ends of the bidirectional threaded rod are penetrated through the two protrusions, and the two sides of the bidirectional threaded rod are rotationally connected with the two protrusions, and both threaded portions of the bidirectional threaded rod are threadedly connected with control plates, the sides of the two control plates away from each other are fixedly connected with inserting rods, and the two inserting rods are respectively penetrated through the limiting frames and are inserted into the corresponding insertion holes, thereby achieving the effect of locking the supporting columns.

[0022] The sides of the two protrusions close to each other are provided with limiting rods, and the ends of the limiting rods away from the protrusions are penetrated through the control plates, thereby achieving the effect of limiting the rotation of the control plates.

[0023] Compared with the prior art, the single crystal furnace magnetic field lifting mechanism limiting assembly has the following beneficial effects:

[0024] Firstly, the back-shaped structure is installed on the magnet extension seat and moves along with the lifting of the magnet, then the first travel switch and the second travel switch are arranged at the limit of the lifting track, the back-shaped structure first touches the first travel switch, the elevator motor starts to slow down, then the back-shaped structure contacts the second travel switch, and the magnet stops lifting, thereby solving the problem that the existing limiting assembly is not accurate due to the inertia buffer caused by the excessive speed when the magnet moves to the limit position due to the excessive weight of the magnetic field itself.

[0025] Secondly, the installation structure body is composed of a first installation plate and a second installation plate, then the first travel switch and the second travel switch are arranged on the first installation plate and the second installation plate respectively, and the first installation plate and the second installation plate are connected through the telescopic structure, so as to adjust the distance between the first travel switch and the second travel switch, and to adapt to the deceleration and stop of magnets of different specifications. BRIEF DESCRIPTION OF DRAWINGS

[0026] Figure 1 It is a schematic view of the three-dimensional structure of the utility model;

[0027] Figure 2 It is a schematic view of the three-dimensional structure of the utility model in the installation structure body integral type;

[0028] Figure 3 It is a schematic view of the three-dimensional structure of the utility model in the installation structure assembly type;

[0029] Figure 4 It is a schematic view of the utility model in the local partial structure;

[0030] Figure 5 It is an enlarged schematic view of the structure at A in the utility model. Figure 4

[0031] ​In the figure: 1, the main body of the mounting structure; 101, the first mounting plate; 102, the second mounting plate; 2, the control piece; 3, the first travel switch; 4, the second travel switch; 5, the deceleration control surface; 6, the first positioning hole control block; 7, the second positioning hole; 8, the limiting rod; 9, the control plate; 10, the two-way threaded rod; 11, the limiting frame; 12, the supporting column. DETAILED DESCRIPTION

[0032] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application.

[0033] As Figures 1-5 shown, the utility model provides a technical scheme: a single crystal furnace magnetic field lifting mechanism limiting assembly, including two groups of mounting structure main body 1 and a control piece 2, two groups of mounting structure main body 1 are arranged at two limit positions close to magnet lifting track respectively, and two mounting structure main bodies 1 are symmetrically arranged up and down, the side close to magnet of two mounting structure main bodies 1 is connected with first travel switch 3 and second travel switch 4,

[0034] The control piece 2 is installed on the magnet extension seat of the single crystal furnace, and is used to trigger the first travel switch 3 and the second travel switch 4 in the lifting movement of the magnet; the control piece 2 is a back-shaped structure, the side close to the first travel switch 3 of the back-shaped structure is provided with a deceleration control surface 5, the control piece 2 is provided with an upper limit control surface and a lower limit control surface above and below the deceleration control surface 5, in the lifting movement, the deceleration control surface 5 is in contact with the detection end of the first travel switch 3, the speed is controlled to start to reduce before the magnet moves to the limit position, then the upper limit control surface or the lower limit control surface is in contact with the corresponding second travel switch 4, so that the magnet stops moving.

[0035] In use, the two installation structure bodies 1 are respectively installed on the base of the single crystal furnace, and then the back-shaped structure is installed on the magnet extension seat. Through the magnet in the lifting movement, the magnet extension seat is driven to move, and then the back-shaped structure is driven to move. After rising / descending to the appropriate height, the deceleration control surface 5 of the back-shaped structure first contacts the detection end of the first travel switch 3 on the upper installation structure body 1, so that the first travel switch 3 transmits a signal. Then, through the control component on the equipment, the elevator motor driving the magnet to rise and fall starts to execute deceleration, and then the back-shaped structure starts to decelerate. Then, the upper limit control surface / limit control surface of the back-shaped structure contacts the corresponding second travel switch 4, so that the second travel switch 4 outputs a signal. Through the control device on the equipment, the elevator motor stops running, so that the magnet stops moving. In order to make the magnet move between the two first travel switches 3 at a normal speed, then start to decelerate after triggering the first travel switch 3, it ensures the moving speed of the magnetic field, reduces the waiting time of the operator, and ensures the stability and position accuracy when the magnetic field stops moving. Compared with the traditional method of setting an electronic limiter at the limit position, the speed of the device near the limit position is slowed down by respectively decelerating and limiting before the upper and lower limit positions, so as to avoid too fast speed and unstable device stop running. At the same time, compared with the method of not increasing the deceleration limit and only realizing stop through the servo motor and frequency converter, the program instruction is simpler, which is conducive to reducing the cost.

[0036] The lower limit control surface extends upwardly at the edge close to the magnet side, and a supporting surface is provided at the edge of the lower limit control surface, which supports the return-shaped structure after the return-shaped structure contacts the second travel switch 4; in use, the upper part of the return-shaped structure is mounted on the upper surface of the magnet extension base, and the supporting surface extending upwardly at the edge of the lower limit control surface at the lower part of the return-shaped structure contacts the bottom surface of the magnet extension base to support and improve the stability of the return-shaped structure; the first travel switch 3 and the second travel switch 4 are both mechanical touch type limit switches with adjustable angle and distance of the detection end, such as self-resetting micro-roller rocker arm type limiters; in use, the return-shaped structure contacts the detection end of the mechanical touch type limit switch to control the magnet to slow down or stop, thereby reducing the interference to the magnetic field and ensuring the normal operation of the magnetic field; the top of the return-shaped structure is provided with a first positioning hole 6 and a second positioning hole 7 to mount the return-shaped structure on the magnet extension base through the first positioning hole and the second positioning hole; the first positioning hole 6 is circular; the second positioning hole 7 is arc-shaped, and the center of the arc-shaped second positioning hole 7 is located on the axis of the first positioning hole 6 to adjust the fixed angle of the return-shaped structure during installation; in use, the installation angle of the return-shaped structure is adjusted by rotating the return-shaped structure around the first positioning hole 6, and then the screws on the first positioning hole 6 and the second positioning hole 7 are tightened to fix the installation angle of the return-shaped structure, and then the angle and distance of the detection end of the mechanical touch type limit switch are adjusted to accurately locate the detection end of the limit switch on the up-down movement track of the return-shaped structure to contact the return-shaped structure and eliminate the machining error between the mechanical touch type limit switch and the return-shaped structure.

[0037] A third positioning hole is also provided on the mounting structure body 1, which is long strip-shaped to mount the mounting structure body 1 and the single crystal furnace base through the third positioning hole; in use, the long strip-shaped third positioning hole is used to adjust the position of the mounting structure body 1 up and down when the mounting structure body 1 is fixed by screws to improve the installation accuracy.

[0038] The installation structure body 1 has two types, an integrated design and a split type. The two installation structure bodies 1 of the split type are a first installation plate 101 and a second installation plate 102. The first stroke switch 3 and the second stroke switch 4 are arranged on the first installation plate 101 and the second installation plate 102, respectively, so that the first stroke switch 3 and the second stroke switch 4 are installed at the limit position of the movement track of the magnet through the first installation plate 101 and the second installation plate 102. A telescopic structure is arranged between the first installation plate 101 and the second installation plate 102, which is used to adjust the distance between the first installation plate 101 and the second installation plate 102. A locking structure is arranged on the telescopic structure, which is used to fix the distance between the first installation plate 101 and the second installation plate 102. In use, first, the distance between the first installation plate 101 and the second installation plate 102 is adjusted to an appropriate distance through the telescopic structure, and then the distance is fixed through the locking assembly. Then, at least one of the first installation plate 101 or the second installation plate 102 is fixed on the base beside the movement track, so as to fix the distance between the first stroke switch 3 and the second stroke switch 4. Preferably, the first installation plate 101 at the limit position is fixed through the corresponding mounting hole, and then the locking assembly is opened when the distance of the magnet needs to be adjusted, and then the bolt of the second installation plate 102 is removed, and then the second installation plate 102 is pulled and locked through the locking assembly after being adjusted to an appropriate position, so as to adjust the distance between the first stroke switch 3 and the second stroke switch 4 according to the distance required by the magnet.

[0039] The telescopic structure includes two limiting boxes 11, which are fixedly connected to the second installation plate 102 in a symmetrical manner. The supporting columns 12 are slidably connected to the limiting boxes 11. The ends of the supporting columns 12 away from the limiting boxes 11 are fixedly connected to the first installation plate 101. The limiting boxes 11 and the supporting columns 12 are vertically distributed, so as to vertically adjust the first installation plate 101 and the second installation plate 102. In use, the cross section of the supporting column 12 is rectangular and is adapted to the limiting box 11. The supporting column 12 and the limiting box 11 span the first installation plate 101 and the second installation plate 102, so as to increase the distance between the first installation plate 101 and the second installation plate 102. The limiting boxes 11 and the supporting columns 12 are vertically distributed and are parallel to the upward and downward movement track, so as to prevent the first stroke switch 3 or the second stroke switch 4 from deviating from the upward and downward movement track of the magnet during adjustment.

[0040] The locking structure comprises a plurality of insertion holes and a bidirectional threaded rod 10, the plurality of insertion holes are located on the side of the support column 12 close to each other, and the plurality of insertion holes are distributed along a straight line downward at equal distances; the two limiting frames 11 are provided with protrusions on the side away from the support column 12, the two ends of the bidirectional threaded rod 10 penetrate through the two protrusions, and the two sides of the bidirectional threaded rod 10 are rotationally connected with the two protrusions, the two threaded portions of the bidirectional threaded rod 10 are threadedly connected with control plates 9, the two control plates 9 are fixedly connected with insertion rods on the side away from each other, the two insertion rods penetrate through the limiting frame 11 and the corresponding insertion hole for insertion, and the two insertion rods play a role of locking the support column 12; the two protrusions are provided with limiting rods 8 on the side close to each other, the ends of the limiting rods 8 away from the protrusions penetrate through the control plates 9, and the limiting rods 8 play a role of limiting the rotation of the control plates 9; in use, the two threads on the bidirectional threaded rod 10 have the same pitch and opposite directions, the bidirectional threaded rod 10 is rotated to drive the two control plates 9 to move close to or away from each other, the control plates 9 further drive the insertion rods to move, the insertion rods are separated from the insertion holes or inserted into the insertion holes, and the locking or release of the support column 12 is realized.

Claims

1. A limiting component for a magnetic field lifting mechanism of a single crystal furnace, characterized in that: It includes two sets of installation structure body (1) and a control piece (2), two sets of the installation structure body (1) are respectively arranged at the two limit positions close to the lifting track of the magnet, and two installation structure bodies (1) are symmetrically arranged, and the side close to the magnet of two installation structure bodies (1) is connected with a first travel switch (3) and a second travel switch (4); The control piece (2) is installed on the magnet extension seat of the single crystal furnace, and is used for triggering the first travel switch (3) and the second travel switch (4) in the lifting movement of the magnet; The control piece (2) is a back type structure, the side close to the first travel switch (3) of the back type structure is provided with a deceleration control surface (5), and the upper limit control surface and the lower limit control surface are respectively arranged above and below the deceleration control surface (5) of the control piece (2); In the lifting movement, the deceleration control surface (5) is contacted with the detection end of the first travel switch (3), the speed is controlled to start to reduce before the magnet moves to the limit position, and then the upper limit control surface or the lower limit control surface is contacted with the corresponding second travel switch (4), so that the magnet stops moving.

2. The magnetic field lifting mechanism limiting assembly of the single crystal furnace according to claim 1, wherein: The edge of the lower limit control surface close to the magnet side extends upwardly to have a supporting surface, which plays a supporting role after the back type structure contacts the second travel switch (4).

3. The magnetic field lifting mechanism limiting assembly of the single crystal furnace according to claim 1, wherein: The first travel switch (3) and the second travel switch (4) are both mechanical touch type limit switches.

4. The magnetic field lifting mechanism limiting assembly of the single crystal furnace according to claim 1, wherein: The top of the back type structure is provided with a first positioning hole (6) and a second positioning hole (7), so that the back type structure is installed on the magnet extension seat through the first positioning hole and the second positioning hole. The first positioning hole (6) is circular, and the second positioning hole (7) is circular arc type, and the center of the circular arc type of the second positioning hole (7) is located on the axis of the first positioning hole (6), so that the fixed angle of the back type structure is adjusted during installation.

5. The magnetic field lifting mechanism position limiting assembly of the single crystal furnace according to claim 1, wherein: A third positioning hole is also formed in the installation structure body (1), which is long strip type, so that the installation structure body (1) is installed with the single crystal furnace base through the third positioning hole.

6. The magnetic field lifting mechanism position limiting assembly of the single crystal furnace according to claim 1, wherein: The two installation structure bodies (1) are respectively a first mounting plate (101) and a second mounting plate (102), the first travel switch (3) and the second travel switch (4) are respectively arranged on the first mounting plate (101) and the second mounting plate (102), so that the first travel switch (3) and the second travel switch (4) are installed at the limit position of the magnet movement track through the first mounting plate (101) and the second mounting plate (102); The first mounting plate (101) and the second mounting plate (102) are provided with a telescopic structure for adjusting the distance between the first mounting plate (101) and the second mounting plate (102); The telescopic structure is provided with a locking structure for fixing the distance between the first mounting plate (101) and the second mounting plate (102).

7. The magnetic field lifting mechanism position limiting assembly of the single crystal furnace according to claim 6, characterized in that: The telescopic structure comprises two limiting frames (11) which are symmetrically fixedly connected on the second mounting plate (102), and each of the two limiting frames (11) is slidably connected with a supporting column (12), and the end of the supporting column (12) away from the limiting frame (11) is fixedly connected with the first mounting plate (101). The limiting frame (11) and the supporting column (12) are vertically distributed, so that the first mounting plate (101) and the second mounting plate (102) are vertically adjusted.

8. The magnetic field lifting mechanism position limiting assembly of the single crystal furnace according to claim 7, characterized in that: The locking structure comprises a plurality of insertion holes and a bidirectional threaded rod (10) which are arranged on the supporting column (12), the plurality of insertion holes are located on the side of the two supporting columns (12) close to each other, and the plurality of insertion holes are equidistantly distributed along a straight line downward; The side of each of the two limiting frames (11) away from the supporting column (12) is provided with a protrusion, the two ends of the bidirectional threaded rod (10) penetrate through the two protrusions respectively, and the two sides of the bidirectional threaded rod (10) are rotatably connected with the two protrusions, the two threaded parts of the bidirectional threaded rod (10) are threadedly connected with control plates (9), the side of each of the two control plates (9) away from each other is fixedly connected with an insertion rod, and the two insertion rods penetrate through the limiting frame (11) and are inserted into the corresponding insertion hole, so as to lock the supporting column (12); The side of each of the two protrusions close to each other is provided with a limiting rod (8), and the end of the limiting rod (8) away from the protrusion penetrates through the control plate (9), so as to limit the rotation of the control plate (9).

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