Ventilation rotor, heat dissipation air duct using same and molecular pump

Abstract

The utility model relates to a ventilation rotor, a heat dissipation air duct using the same and a molecular pump, which comprise a shell, a rotor, a ventilation flange, a rotating shaft, a motor, a motor supporting part, a first air duct supporting part, an air inlet, an air outlet, a second air duct supporting part and a base, the motor drives the rotating shaft to rotate, the ventilation flange is provided with a through hole, the motor is detachably installed in the hollow part of the motor supporting part, a certain gap is reserved between the motor and the motor supporting part, and the air inlet is fixedly installed on the second air duct supporting part. And the air inlet, a gap between the motor and the motor supporting part and the through hole in the ventilation flange are communicated with one another. The ventilation flange is arranged between the rotor and the motor rotating shaft to cool the rotor, the motor and other equipment in the molecular pump, cooling air is in direct contact with parts needing to be cooled in the molecular pump, the contact area is large, and the cooling efficiency is higher.

Description

TECHNICAL FIELD

[0001] The utility model relates to a molecular pump especially a ventilation rotor, heat dissipation air duct using the rotor and molecular pump. BACKGROUND

[0002] Molecular pump is the indispensable important equipment in modern vacuum technology with its high efficiency, oil-free pollution and high vacuum degree advantages. It is widely used in various fields requiring high vacuum and ultra-high vacuum, such as semiconductor manufacturing, vacuum coating, accelerator and particle physics experiment, aerospace, etc.

[0003] The working principle of molecular pump is based on momentum transfer of gas molecules. After colliding with high-speed rotating rotor, gas molecules are compressed and driven to the exhaust port to achieve the purpose of vacuum pumping. High-speed rotation of molecular pump causes internal temperature to rise. The wear of internal parts (such as bearings, blades, etc.) of molecular pump in high temperature environment will be intensified, thereby shortening the service life of the equipment. Excessive internal temperature of molecular pump will also cause gas molecules to bounce back to the vacuum chamber, reducing the pumping efficiency. Therefore, a reasonable cooling circuit is needed to cool the molecular pump. SUMMARY

[0004] To solve the above technical problems, the utility model discloses a ventilation rotor, the rotor is detachably installed with a fan blade, the rotor is a hollow structure, other devices can be installed inside, the hollow part of the rotor is fixedly installed with a ventilation flange, and there is an axial through hole on the ventilation flange. This ventilation flange effectively ensures that the rotor can still maintain the strength and stability of the overall structure when it is running at high speed or bearing external complex stress, so that it will not easily deform, damage and other adverse conditions. At the same time, the rotor can also be cooled from the inside. Compared with the traditional external cooling means, this internal cooling method can more directly and quickly reduce the temperature inside the rotor, effectively avoiding a series of problems such as performance degradation, component aging and damage of the rotor caused by excessive heat accumulation.

[0005] Preferably, the diameter ratio of the through hole to the ventilation flange is 1:6.

[0006] Preferably, the number of through holes is 8.

[0007] The number and size of the above through holes are set after many actual operation comparisons, which have the best cooling effect and can ensure the overall strength of the rotor.

[0008] Preferably, a dust screen is detachably installed on the ventilation flange to prevent dust from entering the inside of the rotor and causing unnecessary damage to the device.

[0009] Further, based on the above-mentioned ventilation rotor, a rotor internal heat dissipation air duct is designed, which comprises a motor support part, the motor support part is sleeved in the hollow part of the rotor, and the two are not in contact with each other to prevent additional heat generation caused by contact friction; the motor support part is also a hollow structure, which is used for installing a motor and other equipment for providing rotating force for the rotor; the motor support part is inserted on the second air duct support part, the second air duct support part is detachably installed on the base, and the motor support part, the rotor, the second air duct support part and the base jointly enclose the internal heat dissipation air duct; the internal heat dissipation air duct is connected with the outside through the through hole on the ventilation flange and the air inlet; cold air enters from the air inlet, flows through the motor support part and the rotor, and finally flows out from the through hole, so that the rotor can be cooled from the inside.

[0010] Further, based on the above-mentioned heat dissipation air duct, a molecular pump is designed, the ventilation flange is connected with the rotating shaft in an interference fit, the rotating shaft and the rotor are driven by a motor, the motor is installed in the hollow part of the motor support part, and a gap is left between the motor and the motor support part to prevent the flow of cold air and affect the heat dissipation effect. The first air duct support part is installed on the inner wall of the shell and cooperates with the rotor to form a wedge-shaped air duct; the shape of the wedge-shaped air duct enables the airflow to gradually change direction and speed inside the air duct. The gradual change structure from the wider inlet to the narrower outlet can guide the airflow to be more uniformly distributed. Compared with the traditional air duct with equal cross section, the wedge-shaped air duct can effectively reduce the vortex and dead zone caused by the sudden change of the shape of the air duct.

[0011] The shell is a hollow structure, and the upper part has an upper air inlet for sucking air into the air duct; the shell is connected with the second air duct support part in an interference fit. The air outlet and the air inlet are arranged on the second air duct support part, the air outlet is connected with the wedge-shaped air duct and the upper air inlet, air sucked into the air duct from the upper air inlet is rectified by the wedge-shaped air duct, and then discharged from the air outlet. The air inlet is used for sending cold air to the rotor, the motor and other equipment.

[0012] Preferably, the gap between the motor and the motor support part can also be a recessed ventilation groove on the motor support part. The motor fixing area can be increased while meeting the ventilation requirements.

[0013] Preferably, the wall of the wedge-shaped air duct is also provided with threads, which divides the wedge-shaped air duct into a spiral wedge-shaped air duct. The spiral shape can further guide the airflow to flow more smoothly through the air duct, reduce the possibility of airflow forming dead corners or vortexes in the air duct, and make the airflow flow more smoothly due to the spiral structure, reduce the turbulence and impact of the airflow, and thus reduce the noise caused by unstable airflow. Compared with the ordinary wedge-shaped air duct, the spiral wedge-shaped air duct produces lower noise during operation.

[0014] The utility model has the following advantages:

[0015] Compared with the existing cooling method, the utility model discloses a ventilation flange is installed between the rotor and the motor rotating shaft to cool the rotor and motor equipment in the molecular pump, and the axial through hole of the ventilation flan can realize heat dissipation from the inside of the rotor, which is more direct and faster than the traditional external heat dissipation, can reduce the internal temperature, and avoids the problems of performance reduction of the rotor, aging damage of components and the like caused by heat accumulation. BRIEF DESCRIPTION OF DRAWINGS

[0016] Fig. 1 It is a schematic view of the molecular pump with the ventilation flange.

[0017] Fig. 2 It is a sectional view of the molecular pump with the ventilation flange.

[0018] Fig. 3 It is Fig. 2 the sectional view along A-A. DETAILED DESCRIPTION

[0019] The utility model will be further explained in connection with the drawings.

[0020] As Figs. 1 to 3 shown, a ventilation rotor and a molecular pump using the rotor, including rotor 3, rotor 3 and ventilation flange 5 fixed connection, ventilation flange 5 and rotating shaft 4 interference fit connection, rotating shaft 4 is driven by motor 6, ventilation flange 5 has through hole, the diameter ratio of the through hole on ventilation flange 5 and the diameter of ventilation flange 5 is preferably 1:6, the number is preferably 8, the number and size of through hole are set after multiple actual operation comparison, and the best heat dissipation effect can guarantee the overall strength of rotor.

[0021] Motor 6 can be detachably installed in the hollow portion of motor support part 9, and a certain gap is left between motor support part 9, and the gap can also be changed into a recessed ventilation groove on motor support part 9.

[0022] First air duct support part 2 is installed on the inner wall of shell 1 and forms a wedge-shaped air duct with rotor 3, and there is a thread on the wedge-shaped air duct wall of first air duct support part 2, which divides the wedge-shaped air duct into spiral air ducts,

[0023] Shell 1 is connected with second air duct support part 12 in interference fit, second air duct support part 12 is detachably connected with base 11, shell 1 is a hollow structure, and there is an upper air inlet on shell 1,

[0024] Air outlet 7 and air inlet 10 are fixedly installed on second air duct support part 12, air outlet 7 is connected with spiral air duct and upper air inlet, and air inlet 10 is connected with the outside through the gap between motor 6 and motor support part 9 and the through hole on ventilation flange 5.

[0025] Preferably, the ventilation flange 5 is provided with a dust screen 13 on its surface to prevent dust from entering the pump body and causing unnecessary damage to the device.

[0026] The air duct support part 2 is provided with ventilation holes connecting the wedge-shaped air duct and the heat conduction cavity between the air duct support part 2 and the shell 1.

[0027] Working principle:

[0028] The cooling gas is introduced into the cavity below the motor 6 through the air inlet 10, and the cooling gas will flow along the gap between the motor 6 and the motor support body after filling the cavity, and finally be discharged through the through hole of the ventilation flange 5. The cooling gas flows directly to the passing motor and rotor, the cooling method is more direct, the contact area is large, and the cooling efficiency is higher. Since the diameter of the through hole of the flange 5 is much smaller than the diameter of the upper air inlet, the cooling process will not affect the pumping efficiency and pumping effect.

[0029] The above only describes the preferred embodiments of the present application and is not intended to limit the present application. For those skilled in the art, the present application can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. within the spirit and principles of the present application shall be included in the protection scope of the present application.

[0030] Although the specific embodiments of the present application have been described above, they are not intended to limit the scope of protection of the present application. Those skilled in the art should understand that various modifications or changes can be made to the technical solutions of the present application without creative labor, and such modifications or changes are still within the scope of protection of the present application.

Claims

1. A ventilated rotor, characterized in that, It includes a rotor (3), fan blades and a ventilation flange (5). The rotor (3) has a hollow structure. The ventilation flange (5) has an axial through hole. The ventilation flange is fixedly installed in the hollow part of the rotor (3). The fan blades are detachably installed on the periphery of the rotor (3). The fan blades have a multi-layer structure.

2. A ventilated rotor as described in claim 1, characterized in that, The ratio of the diameter of the through hole on the ventilation flange (5) to the diameter of the ventilation flange (5) is 1:

6.

3. A ventilated rotor as described in claim 2, characterized in that, The ventilation flange (5) has eight through holes.

4. A ventilated rotor as described in claim 1, characterized in that, It also includes a dustproof net (13), which is detachably installed on the surface of the ventilation flange (5).

5. A heat dissipation duct, characterized in that, The system includes the ventilation rotor as described in any one of claims 1 to 4, and further includes a motor support (9), which is fitted onto the hollow portion of the rotor (3) without contacting each other. The motor support (9) is a hollow structure and is inserted into a second air duct support (12), which is detachably mounted on a base (11). It also includes an air inlet (10), from which cold air enters the heat dissipation duct.

6. A molecular pump, characterized in that, Including the heat dissipation duct as described in claim 5, the ventilation flange (5) and the rotating shaft (4) are interference-fitted together, and the rotating shaft (4) is driven to rotate by the motor (6). The motor (6) is detachably installed in the hollow part of the motor support (9), and a certain gap is left between the motor (6) and the motor support (9). It also includes a first air duct support (2), which is installed on the inner wall of the outer shell (1) and forms a wedge-shaped air duct with the rotor (3). The outer shell (1) is interference-fitted with the second air duct support (12). The outer shell (1) has a hollow structure and an upper air inlet. An air outlet (7) and an air inlet (10) are fixedly installed on the second air duct support (12). The air outlet (7) is connected to the spiral air duct and the air inlet. The air inlet (10) is connected to the outside through the gap between the motor (6) and the motor support (9) and the through hole on the ventilation flange (5).

7. A molecular pump as described in claim 6, characterized in that, The gap between the hollow part of the motor support (9) and the motor (6) can be a recessed ventilation groove.

8. A molecular pump as described in claim 6, characterized in that, There are also threads on the wedge-shaped air duct wall of the first air duct support (2), which divides the wedge-shaped air duct into a spiral air duct.

Images