Sealing structure of plasma cavity

Abstract

The utility model discloses a sealing structure of a plasma cavity, which comprises a plasma cavity body, the left end of the plasma cavity body is movably provided with a vacuum door, and the front side of the right end of the plasma cavity body is fixedly provided with a magnetic attraction device; the sealing plate is movably mounted on the outer side of the front end of the plasma cavity body, a mounting structure is fixedly arranged on the right side of the plasma cavity body, a mounting groove is formed in the sealing plate, and a first sealing ring is fixedly mounted on the middle side in the mounting groove; and the fixing plate is fixedly installed on the outer side of the middle of the sealing plate, the middle of the fixing plate is movably connected with a movable block, the inner side of the rear end of the movable block is movably connected with a connecting block, the connecting block is fixedly connected with the plasma cavity body, and a fixing rod is movably installed on the rear side of the middle of the connecting block. According to the sealing structure of the plasma cavity, the sealing structure can be conveniently installed and limited, so that the sealing structure is prevented from falling off, and the sealing effect on the plasma cavity is good.

Description

TECHNICAL FIELD

[0001] The utility model relates to plasma cavity technical field, concretely is a kind of sealing structure of plasma cavity. BACKGROUND

[0002] Sealing structure refers to the structure that fluid or solid particle is prevented from leaking from adjacent joint surface by physical means, and prevent the intrusion of impurities such as dust and moisture etc. from outside into the internal part of machine equipment, and plasma cavity refers to the important component of plasma cleaning machine, and its main function is to provide a closed environment for the generation and reaction of plasma, sealing structure is needed in the use process of plasma cavity to seal plasma cavity and vacuum door, and installation structure is needed in the use process of the sealing structure of plasma cavity, to improve the use effect of the sealing structure of plasma cavity.

[0003] However, most of the prior art solutions have the following defects:

[0004] 1. When installing the sealing structure, the sealing structure is clamped on the plasma cavity for installation. In actual use, the sealing structure is clamped on the plasma cavity, and the installation stability of the sealing structure is low.

[0005] 2. The sealing effect between the ordinary sealing structure and the vacuum door of the plasma cavity is poor, which affects the use effect of the plasma cavity.

[0006] 3. The limiting of the sealing structure is not convenient, therefore, the utility model provides a sealing structure of plasma cavity to solve the above problems. UTILITY MODEL CONTENTS

[0007] The utility model aims at providing a sealing structure of plasma cavity to solve the above problems in the background art, such as the installation of the sealing structure by clamping the sealing structure on the plasma cavity, the low installation stability of the sealing structure in actual use, the poor sealing effect between the ordinary sealing structure and the vacuum door of the plasma cavity, and the inconvenient limiting of the sealing structure.

[0008] To achieve the above purpose, the utility model provides the following technical scheme: a sealing structure of plasma cavity, comprising a plasma cavity body, a vacuum door movably installed at the left end of the plasma cavity body, and a magnetic attractor fixedly arranged at the right end of the front side of the plasma cavity body.

[0009] Further comprising:

[0010] The sealing plate is movably installed outside the front end of the plasma cavity body, and a mounting structure is fixedly arranged on the right side of the plasma cavity body, an installation slot is formed in the inside of the sealing plate, and a first sealing ring is fixedly installed in the inside of the middle side of the installation slot, and a second sealing ring is movably connected to the front end of the sealing plate;

[0011] A fixing plate is fixedly installed outside the middle part of the sealing plate, and a movable block is movably connected to the middle part of the fixing plate, the rear end inside of the movable block is movably connected with a connecting block, the connecting block is fixedly connected with the plasma cavity body, and a fixing rod is movably installed on the middle rear side of the connecting block.

[0012] Preferably, the plasma cavity body and the first sealing ring are connected in a fitting mode, and the plasma cavity body and the sealing plate are connected in a clamping mode.

[0013] Preferably, the sealing plate and the second sealing ring are connected in a clamping mode.

[0014] Preferably, the mounting structure comprises a mounting plate, the mounting plate is fixedly arranged on the right end of the plasma cavity body, a spring is fixedly arranged on the rear side of the mounting plate, a moving rod is connected through the middle part of the spring, and a moving block is movably connected to the front end left side of the moving rod.

[0015] Preferably, the mounting plate and the moving rod are connected in a sliding mode, and a slot structure is formed on the front end left side of the moving rod.

[0016] Preferably, the moving rod and the moving block are connected in a fitting mode, and the moving block and the sealing plate are connected in a sliding mode.

[0017] Preferably, the movable block and the fixing plate are connected in a rotating mode, and the vertical section shape of the movable block is an "L" shaped structure.

[0018] Preferably, the movable block and the fixing rod are connected in a threaded mode, and the movable block is symmetrically distributed above and below the center line of the plasma cavity body.

[0019] Compared with the prior art, the sealing structure of the plasma cavity has the advantages that the sealing structure is convenient to install and limit, so that the sealing structure is prevented from falling off, and the sealing effect of the plasma cavity is good.

[0020] 1. The utility model discloses a sealing plate is installed to the front side of plasma cavity body, makes plasma cavity body snap -mounts in the inside of installation groove, thereby with plasma cavity body of first sealing ring that installs in the inside of installation groove is connected, and then the sealing between sealing plate and plasma cavity body is carried out, and the vacuum door is rotated to the front side of plasma cavity body again, and the magnetic attraction ware of the right side of the front end of plasma cavity body is installed to the vacuum door magnetic attraction fixed, thereby the vacuum door is carried out with second sealing ring and is connected, and then the sealing between second sealing ring and vacuum door and sealing plate is carried out, guarantee the sealing effect between plasma cavity body and vacuum door is good.

[0021] 2. The utility model discloses a sealing plate is installed to the front side of plasma cavity body, makes plasma cavity body snap -mounts in the inside of installation groove, thereby with plasma cavity body of first sealing ring that installs in the inside of installation groove is connected, and then the sealing between sealing plate and plasma cavity body is carried out, and the vacuum door is rotated to the front side of plasma cavity body again, and the magnetic attraction ware of the right side of the front end of plasma cavity body is installed to the vacuum door magnetic attraction fixed, thereby the vacuum door is carried out with second sealing ring and is connected, and then the sealing between second sealing ring and vacuum door and sealing plate is carried out, guarantee the sealing effect between plasma cavity body and vacuum door is good.

[0022] 3. The utility model discloses a sealing plate is installed to the front side of plasma cavity body, makes plasma cavity body snap -mounts in the inside of installation groove, thereby with plasma cavity body of first sealing ring that installs in the inside of installation groove is connected, and then the sealing between sealing plate and plasma cavity body is carried out, and the vacuum door is rotated to the front side of plasma cavity body again, and the magnetic attraction ware of the right side of the front end of plasma cavity body is installed to the vacuum door magnetic attraction fixed, thereby the vacuum door is carried out with second sealing ring and is connected, and then the sealing between second sealing ring and vacuum door and sealing plate is carried out, guarantee the sealing effect between plasma cavity body and vacuum door is good. ACCURATE DRAWINGS

[0023] Figure 1 It is the whole section structure schematic diagram of the utility model plasma cavity body and vacuum door connection;

[0024] Figure 2 It is the utility model Figure 1 Amplification structure schematic diagram of place in the middle A;

[0025] Figure 3 It is the whole section structure schematic diagram of the utility model sealing plate and plasma cavity body connection;

[0026] Figure 4 It is the utility model Figure 3 Amplification structure schematic diagram of place in the middle B;

[0027] Figure 5 It is the whole section structure schematic diagram of the utility model sealing plate and mobile block connection;

[0028] Figure 6 It is the explosion structure schematic diagram of the utility model sealing plate and second sealing ring connection.

[0029] In the figure: 1, the plasma cavity body; 2, vacuum door; 3, sealing plate; 4, first sealing ring; 5, mounting plate; 6, spring; 7, moving rod; 8, moving block; 9, magnetic attractor; 10, second sealing ring; 11, movable block; 12, fixed plate; 13, connecting block; 14, fixed rod; 15, mounting groove. DETAILED DESCRIPTION

[0030] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0031] Please refer to Figures 1-6 The present application provides a technical solution: a sealing structure of a plasma cavity, comprising, the left end of the plasma cavity body 1 is movably mounted with a vacuum door 2, and the right end of the plasma cavity body 1 is fixedly provided with a magnetic attractor 9 on the front side, the sealing plate 3 is movably mounted on the outside of the front end of the plasma cavity body 1, and the right side of the plasma cavity body 1 is fixedly provided with a mounting structure, the inside of the sealing plate 3 is provided with a mounting groove 15, and the inside of the mounting groove 15 is fixedly mounted with a first sealing ring 4 on the middle side, the front end of the sealing plate 3 is movably connected with a second sealing ring 10, the first sealing ring 4 mounted in the inside of the mounting groove 15 is connected with the plasma cavity body 1, so that the sealing plate 3 and the plasma cavity body 1 are sealed, and then the vacuum door 2 is rotated to the front side of the plasma cavity body 1, so that the magnetic attractor 9 mounted on the right side of the front end of the plasma cavity body 1 magnetically attracts and fixes the vacuum door 2, so that the vacuum door 2 is attached to the second sealing ring 10, and then the second sealing ring 10 seals between the vacuum door 2 and the sealing plate 3, so as to ensure good sealing effect between the plasma cavity body 1 and the vacuum door 2, and the mounting structure is pushed to the left side, so that the mounting structure is connected on the right side of the plasma cavity body 1, facilitating further installation and limiting of the sealing plate 3 and the plasma cavity body 1.

[0032] The fixed plate 12 is fixedly installed on the outer side of the middle part of the sealing plate 3, and the middle part of the fixed plate 12 is movably connected with the movable block 11, the inner side of the rear end of the movable block 11 is movably connected with the connecting block 13, the connecting block 13 is fixedly connected with the plasma cavity body 1, and the middle part of the rear side of the connecting block 13 is movably installed with the fixed rod 14. The sealing plate 3 is installed on the front side of the plasma cavity body 1, and the plasma cavity body 1 is installed in the installation groove 15. The movable block 11 is rotated to slide to the rear side in the fixed plate 12, so that the movable block 11 is installed in the connecting block 13. The fixed rod 14 is rotated to be connected to the middle part of the rear side of the connecting block 13, so that the fixed rod 14 is connected to the inner side of the rear end of the movable block 11, and the sealing plate 3 and the plasma cavity body 1 are conveniently installed.

[0033] In the sealing structure of the plasma cavity, specifically as shown in Figure 3 , Figure 4 and Figure 5 , the sealing plate 3 is installed on the front side of the plasma cavity body 1, and the plasma cavity body 1 is clamped and installed in the installation groove 15. The movable block 11 and the fixed plate 12 are connected in a rotating manner, and the vertical cross-sectional shape of the movable block 11 is an "L" shaped structure. The movable block 11 is rotated to slide to the rear side in the fixed plate 12, so that the movable block 11 is clamped and installed in the connecting block 13. The movable block 11 and the fixed rod 14 are connected in a threaded manner, and the movable block 11 is symmetrically distributed above and below the center line of the plasma cavity body 1. The fixed rod 14 is rotated to be threadedly connected to the middle part of the rear side of the connecting block 13, so that the fixed rod 14 is threadedly connected to the inner side of the rear end of the movable block 11, and the sealing plate 3 and the plasma cavity body 1 are conveniently installed.

[0034] Specifically as shown in Figure 1 , Figure 2 , the moving block 8 is pushed to the left side to slide to the left side of the rear end of the sealing plate 3, so that the moving block 8 is clamped and connected to the right side of the plasma cavity body 1. The installation plate 5 and the moving rod 7 are connected in a sliding manner, and the front end left side of the moving rod 7 is provided with a groove structure. The moving rod 7 is loosened to slide to the front side of the middle part of the installation plate 5 under the action of the spring 6. The moving rod 7 and the moving block 8 are connected in a fitting manner, and the moving block 8 and the sealing plate 3 are connected in a sliding manner, so that the moving rod 7 is fitted and connected to the right side of the moving block 8, and the moving rod 7 further limits the moving block 8, and the sealing plate 3 and the plasma cavity body 1 are conveniently installed and limited.

[0035] Specifically as shown in Figure 2 , Figure 5 andFigure 6 By the way that the first sealing ring 4 is connected with the plasma cavity body 1 by fitting and the plasma cavity body 1 is connected with the sealing plate 3 by clamping, the first sealing ring 4 installed in the mounting groove 15 is connected with the plasma cavity body 1 by fitting, the sealing plate 3 is sealed with the plasma cavity body 1, the sealing plate 3 is connected with the second sealing ring 10 by clamping, the vacuum door 2 is rotated to the front side of the plasma cavity body 1, the magnetic attracter 9 installed at the right front end of the plasma cavity body 1 magnetically attracts and fixes the vacuum door 2, the vacuum door 2 is connected with the second sealing ring 10 by fitting, the second sealing ring 10 seals the vacuum door 2 and the sealing plate 3, and the sealing effect between the plasma cavity body 1 and the vacuum door 2 is good.

[0036] The standard parts used in the utility model can be purchased from the market, the special-shaped parts can be ordered according to the description and the drawings, the specific connection mode of each part adopts the conventional means such as bolts, rivets and welding in the prior art, the machinery, parts and equipment adopt the conventional type in the prior art, the circuit connection adopts the conventional connection mode in the prior art, and the contents not described in detail in the description belong to the prior art known by the person skilled in the art.

[0037] Although the utility model has been described in detail with reference to the foregoing embodiments, the technical solutions recorded in the foregoing embodiments can be modified or some technical features can be replaced by equivalents for the person skilled in the art, and any modification, equivalent replacement, improvement and the like within the spirit and principle of the utility model should be included in the protection scope of the utility model.

Claims

1. A sealing structure of a plasma cavity, comprising a plasma cavity body (1), a vacuum door (2) movably mounted at the left end of the plasma cavity body (1), and a magnetic attractor (9) fixedly arranged at the front right end of the plasma cavity body (1). characterized in that Further comprising: a sealing plate (3) movably mounted at the front end of the plasma cavity body (1), and a mounting structure fixedly arranged at the right side of the plasma cavity body (1), an installation groove (15) formed in the inside of the sealing plate (3), a first sealing ring (4) fixedly mounted at the inside middle side of the installation groove (15), and a second sealing ring (10) movably connected to the front end of the sealing plate (3); a fixed plate (12) fixedly mounted at the middle outside of the sealing plate (3), a movable block (11) movably connected to the middle of the fixed plate (12), a connecting block (13) movably connected to the rear end inside of the movable block (11), the connecting block (13) fixedly connected to the plasma cavity body (1), and a fixed rod (14) movably mounted at the middle rear side of the connecting block (13).

2. The sealed structure of a plasma chamber according to claim 1, wherein: The plasma cavity body (1) and the first sealing ring (4) are connected in a fitting manner, and the plasma cavity body (1) and the sealing plate (3) are connected in a clamping manner.

3. The sealed structure of a plasma chamber according to claim 2, wherein: The sealing plate (3) and the second sealing ring (10) are connected in a clamping manner.

4. The sealed structure of a plasma chamber according to claim 1, wherein: The mounting structure comprises a mounting plate (5) fixedly arranged at the right end of the plasma cavity body (1), a spring (6) fixedly arranged at the rear side of the mounting plate (5), a moving rod (7) penetratingly connected to the middle of the spring (6), and a moving block (8) movably connected to the front left side of the moving rod (7).

5. The sealed structure of a plasma chamber according to claim 4, wherein: The mounting plate (5) and the moving rod (7) are connected in a sliding manner, and the front left end of the moving rod (7) is provided with a groove structure.

6. The sealed structure of a plasma chamber according to claim 5, wherein: The moving rod (7) and the moving block (8) are connected in a fitting manner, and the moving block (8) and the sealing plate (3) are connected in a sliding manner.

7. The sealed structure of a plasma chamber as claimed in claim 1, wherein: The movable block (11) and the fixed plate (12) are connected in a rotating manner, and the vertical cross-section shape of the movable block (11) is in an "L" shape structure.

8. The sealed structure of a plasma chamber according to claim 7, wherein: The movable block (11) and the fixed rod (14) are connected in a threaded manner, and the movable block (11) is symmetrically distributed above and below the center line of the plasma cavity body (1).

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