Testing device

Abstract

The utility model discloses a testing device, and the device comprises a supporting frame which is used for fixing a housing of a main shaft unit. The force application assembly is used for applying detection force to the air main shaft, and the detection force comprises radial force in the radial direction of the air main shaft and / or axial force in the axial direction of the air main shaft; the force transmission assembly is used for being fixed relative to the air main shaft; the elastic assembly is arranged between the force application assembly and the force transmission assembly, and the elastic assembly can generate elastic deformation in the direction of the detection force, so that the detection force applied by the force application assembly is transmitted to the force transmission assembly through the elastic assembly; the force measurement assembly is connected with the force transmission assembly, and the force measurement assembly is used for measuring the detection force; the displacement measuring piece is arranged on the supporting frame, the displacement measuring piece is used for measuring the displacement amount of the air spindle in the direction of the detection force, instant impact force can be effectively buffered, the detection force can be applied more stably and continuously, and the safety and stability of the testing process are ensured.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of testing, in particular to a testing device. BACKGROUND

[0002] As a key equipment for removing and thinning the material on the wafer surface in the field of semiconductor manufacturing and precision material processing, the wafer thinning machine has a pivotal position. Among them, the air spindle as the core functional component of the wafer thinning machine, the rotation accuracy, static stiffness, vibration and other performance indicators of the air spindle need to reach the predetermined standard.

[0003] In the related art, for the detection of the static stiffness of the air spindle, the testing device directly applies force to the air spindle for testing by driving the driving motor to drive the force applying member. When the motor starts, stops or the force is adjusted, instantaneous impact force may be generated, which may damage the internal structure of the air spindle and affect the accuracy of the test and the service life of the air spindle. Practical new type content

[0004] The present application discloses a testing device which can effectively buffer the instantaneous impact force, protect the air spindle from possible damage, and also make the application of detection force more stable and continuous, ensuring the safety and stability of the testing process.

[0005] In order to achieve the above purpose, the present application discloses a testing device for testing the static stiffness of an air spindle in a spindle unit, the spindle unit comprising a housing and an air spindle rotatingly arranged in the housing, the testing device comprising:

[0006] A support frame for fixing the housing of the spindle unit;

[0007] A force applying assembly for applying a detection force to the air spindle, the detection force comprising a radial force along the radial direction of the air spindle and / or an axial force along the axial direction of the air spindle;

[0008] A force transmission assembly for being fixed relative to the air spindle;

[0009] An elastic assembly arranged between the force applying assembly and the force transmission assembly, the elastic assembly being capable of elastically deforming along the direction of the detection force, so that the detection force applied by the force applying assembly is transmitted to the force transmission assembly through the elastic assembly;

[0010] A force measuring assembly connected with the force transmission assembly, the force measuring assembly being used for measuring the detection force;

[0011] A displacement measuring member is arranged on the support frame and is used to measure the displacement of the air spindle along the direction of the detection force.

[0012] In a possible implementation, the force applying assembly includes a force applying member movably arranged on the support frame along the direction of the detection force, and the force applying member is used to apply the detection force to the air spindle.

[0013] The force transmitting assembly includes a force transmitting member, and the force transmitting member is used to be fixed relative to the air spindle.

[0014] The elastic assembly includes an elastic member arranged between the force applying member and the force transmitting member, and when the force applying member moves along the direction of the detection force away from the air spindle, the elastic member can be elastically deformed along the direction of the detection force, so that the detection force applied by the force applying member is sequentially transmitted to the air spindle through the elastic member and the force transmitting member.

[0015] The force measuring assembly includes a force measuring member connected with the force transmitting member, and the force measuring member is used to measure the detection force.

[0016] In a possible implementation, the force applying member includes a cavity with an opening facing the force transmitting member and an end cover arranged at the opening of the cavity, a middle portion of the end cover is provided with a clearance hole, the force transmitting member partially extends into the cavity through the clearance hole and is in sliding fit with the cavity along the direction of the detection force, a portion of the force transmitting member located in the cavity is provided with a stop portion, and the elastic member is arranged between the end cover and the stop portion. When the force applying member moves away from the air spindle, the elastic member is compressed along the direction of the detection force, so that the detection force applied by the force applying member is sequentially transmitted to the air spindle through the elastic member and the force transmitting member.

[0017] In a possible implementation, the force transmitting member includes:

[0018] A first connecting member is used to be fixed relative to the air spindle;

[0019] A second connecting member is connected with the first connecting member through the force measuring member at one end, and the other end of the second connecting member extends into the cavity, and the stop portion is arranged on the second connecting member.

[0020] In a possible implementation, the elastic member includes a spring, the spring is sleeved on the second connecting member, one end of the spring is in abutment with an inner wall of the end cover, and the other end of the spring is in abutment with the stop portion.

[0021] In a possible implementation, the force applying member comprises:

[0022] a sleeve fixed to the support frame, the sleeve having an internal thread;

[0023] a first movable shaft arranged along the detection force direction, the first movable shaft having an external thread, the first movable shaft being threadedly connected with the sleeve, and the first movable shaft being capable of driving the first movable shaft to move along the detection force direction away from the air spindle when the first movable shaft is screwed in the sleeve, so as to apply the detection force to the air spindle.

[0024] In a possible implementation, the support frame comprises a first side plate, and the first side plate is provided with a support hole penetrating through along the detection force direction;

[0025] the force applying member comprises:

[0026] a second movable shaft arranged along the detection force direction, the second movable shaft being arranged in the support hole, the second movable shaft having an external thread, and the second movable shaft being further provided with a rotation stopping structure for preventing the second movable shaft from rotating relative to the support hole;

[0027] a drive nut threadedly connected with the second movable shaft, the drive nut abutting against a side of the first side plate away from the air spindle, and the drive nut being capable of driving the second movable shaft to move along the detection force direction away from the air spindle when the drive nut is screwed against the first side plate, so as to apply the detection force to the air spindle.

[0028] In a possible implementation, the support hole is a square hole, and the rotation stopping structure comprises a rotation stopping plane provided on the second movable shaft, the rotation stopping plane cooperating with a hole wall of the square hole to prevent the second movable shaft from rotating relative to the support hole.

[0029] In a possible implementation, the testing device further comprises a loading member, the loading member being used for being connected to a lower end surface of the air spindle, and the force transmission assembly is fixed relative to the air spindle through the loading member.

[0030] In a possible implementation, the support frame further comprises a second side plate, and the displacement measuring member comprises an ohmmeter provided on the second side plate, and a measuring rod of the ohmmeter is used for abutting against the air spindle.

[0031] Compared with the prior art, the application has the beneficial effects that:

[0032] The support frame provides a stable and reliable fixing platform for the shell of the spindle unit, the force applying assembly applies a radial force and / or an axial force to the air spindle, the force transmitting assembly transmits the detection force applied by the force applying assembly to the air spindle by being fixed opposite to the air spindle, the elastic assembly is arranged between the force applying assembly and the force transmitting assembly, and when the force applying assembly applies the detection force, the elastic assembly can be elastically deformed along the direction of the detection force.

[0033] The displacement measured by the displacement measuring element and the detection force measured by the force measuring assembly can be used to accurately calculate the static stiffness value of the air spindle in the radial direction and / or the axial direction according to the definition of static stiffness (force divided by displacement). The entire test device integrates the support frame, the force applying assembly, the force transmitting assembly, the elastic assembly, the force measuring assembly and the displacement measuring element, and forms a complete and convenient test system. The elastic deformation of the elastic assembly not only effectively buffers the instantaneous impact force and protects the air spindle from possible damage, but also makes the application of the detection force more stable and continuous, reduces the test cost and product research and development risk, and ensures the safety and stability of the test process. BRIEF DESCRIPTION OF DRAWINGS

[0034] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed in the embodiments will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.

[0035] Figure 1 A shaft view of the test device provided by the embodiments of the present application;

[0036] Figure 2 A structural schematic view of the test device provided by the embodiments of the present application;

[0037] Figure 3 A structural schematic view of the axial force applying element of the test device provided by the embodiments of the present application;

[0038] Figure 4 A structural schematic view of the axial force applying element and the axial force transmitting element of the test device provided by the embodiments of the present application;

[0039] Figure 5 A structural schematic view of the axial elastic element of the test device provided by the embodiments of the present application;

[0040] Figure 6 A structure schematic view of a display radial force applying piece provided by the test device of the embodiment of the utility model;

[0041] Figure 7 A structure schematic view of a display frame and a jet head of the test device of the embodiment of the utility model;

[0042] Figure 8 A structure schematic view of a radial force applying piece and a radial force transmitting piece of the test device of the embodiment of the utility model;

[0043] Figure 9 A structure schematic view of a display radial elastic piece of the test device of the embodiment of the utility model.

[0044] Mark explanation:

[0045] 10-support frame;11-first side plate;111-support hole;12-support plate;121-adjustable fastener;13-second side plate;

[0046] 20-force applying assembly;21-axial force applying piece;211-sleeve;212-first movable shaft;2121-first cavity;2122-first end cover;22-radial force applying piece;221-second movable shaft;2211-second cavity;2212-second end cover;2213-rotation stopping structure;222-driving nut;

[0047] 30-force transmitting assembly;31-axial force transmitting piece;311-first axial connecting piece;312-second axial connecting piece;313-first stop;32-radial force transmitting piece;321-first radial connecting piece;322-second radial connecting piece;323-second stop;

[0048] 40-elastic assembly;41-axial elastic piece;42-radial elastic piece;

[0049] 50-force measuring assembly;51-axial force measuring piece;52-radial force measuring piece;

[0050] 60-displacement measuring piece;61-loading piece;

[0051] 70-support base;71-support leg;72-supporting leg;73-supporting beam;

[0052] 80-main shaft unit;81-housing;82-air main shaft;821-water inlet;822-water outlet;823-air inlet. Specific implementation

[0053] With reference to the drawings of the embodiments of the present application, the technical solutions in the embodiments of the present application will be clearly and completely described. Obviously, the described embodiments are only a part of the embodiments of the present application, but not all the embodiments of the present application. Based on the embodiments of the present application, all the other embodiments obtained by a person of ordinary skill in the art without creative effort should fall within the protection scope of the present application.

[0054] In the present application, the terms “mount”, “set”, “provided with”, “connected”, “linked” should be interpreted broadly. For example, it can be fixed connection, detachable connection, or integral structure; it can be mechanical connection, or electrical connection; it can be direct connection, or indirect connection through intermediate medium, or internal communication between two devices, elements or components. For a person of ordinary skill in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0055] In addition, the terms “first”, “second”, etc. are mainly used to distinguish different devices, elements or components (the specific types and structures may be the same or different), and are not used to indicate or imply the relative importance and quantity of the indicated devices, elements or components. Unless otherwise stated, the meaning of “multiple” is two or more.

[0056] As a key equipment for realizing wafer surface material removal and thinning in the field of semiconductor manufacturing and precision material processing, the wafer thinning machine has a pivotal position. Among them, the air spindle as the core functional component of the wafer thinning machine, the rotation accuracy, static stiffness, vibration and other performance indicators of the air spindle need to reach the predetermined standard.

[0057] In the related art, for the detection of the static stiffness of the air spindle, the test device directly applies force to the air spindle for testing by driving the motor to drive the force applying member. When the motor starts, stops or the force is adjusted, instantaneous impact force may be generated, which may damage the internal structure of the air spindle and affect the accuracy of the test and the service life of the air spindle.

[0058] In view of this point, some embodiments of the present application provide a test device which can effectively buffer the instantaneous impact force, protect the air spindle from possible damage, and also make the application of detection force more stable and continuous, ensuring the safety and stability of the test process.

[0059] The present application will be described in detail below through specific embodiments:

[0060] The test device of the embodiments of the present application, such as Figures 1-9As shown, a testing device for testing the static stiffness of an air spindle 82 in a spindle unit 80, the spindle unit 80 comprising a housing 81 and the air spindle 82 rotatably arranged in the housing 81, the testing device comprising:

[0061] a support frame 10 for fixing the housing 81 of the spindle unit 80;

[0062] a force applying assembly 20 for applying a detection force to the air spindle 82, the detection force comprising a radial force along a radial direction of the air spindle 82 and / or an axial force along an axial direction of the air spindle 82;

[0063] a force transmitting assembly 30 for being fixed opposite to the air spindle 82;

[0064] a resilient assembly 40 arranged between the force applying assembly 20 and the force transmitting assembly 30, the resilient assembly 40 being capable of elastically deforming along a direction of the detection force so as to transmit the detection force applied by the force applying assembly 20 to the force transmitting assembly 30;

[0065] a force measuring assembly 50 connected with the force transmitting assembly 30, the force measuring assembly 50 being configured to measure the detection force;

[0066] a displacement measuring member 60 arranged on the support frame 10, the displacement measuring member 60 being configured to measure a displacement of the air spindle 82 along the direction of the detection force.

[0067] The testing device provided by the embodiments of the present application provides a stable and reliable fixing platform for the housing 81 of the spindle unit 80, the force applying assembly 20 applies a radial force and / or an axial force to the air spindle 82, the force transmitting assembly 30 transmits the detection force applied by the force applying assembly 20 to the air spindle 82 by being fixed opposite to the air spindle 82, the resilient assembly 40 is arranged between the force applying assembly 20 and the force transmitting assembly 30, when the force applying assembly 20 applies the detection force, the resilient assembly 40 is capable of elastically deforming along the direction of the detection force, the force measuring assembly 50 is connected with the force transmitting assembly 30 to measure the detection force transmitted to the air spindle 82, and the displacement measuring member 60 is arranged on the support frame 10 to measure the displacement of the air spindle 82 along the corresponding direction under the action of the detection force.

[0068] The displacement measured by the displacement measuring member 60 and the detection force measured by the force measuring assembly 50 can accurately calculate the static stiffness value of the air spindle 82 in the radial and / or axial direction according to the definition of static stiffness (force divided by displacement). The entire test device integrates the support frame 10, the force applying assembly 20, the force transmitting assembly 30, the elastic assembly 40, the force measuring assembly 50, and the displacement measuring member 60, etc. into a complete and convenient test system. The elastic deformation of the elastic assembly 40 not only effectively buffers the instantaneous impact force and protects the air spindle 82 from possible damage, but also makes the application of the detection force more stable and continuous, reduces the test cost and product research and development risk, and ensures the safety and stability of the test process.

[0069] It should be explained that in the embodiment, the spindle unit 80 can be connected to a water cooling circulation system through the water inlet 821. The water cooling circulation system provides constant temperature cooling water with a flow rate not less than the required flow rate of the air spindle 82, which carries away the heat generated by the motor and bearing through the cooling flow channel inside the spindle unit 80. The cooling water then flows back to the water cooling circulation system from the water outlet 822. The spindle unit 80 can also be connected to an air drying and filtering system through the air inlet 823 to continuously provide compressed air with a pressure and flow rate not less than the rated pressure and flow rate, so that the air spindle 82 floats in the spindle unit 80.

[0070] The force applying assembly 20 can apply detection forces in different directions to the air spindle 82. The force applying assembly 20 includes a force applying member movably arranged on the support frame 10, which is used to apply detection forces to the air spindle 82.

[0071] The force transmitting assembly 30 includes a force transmitting member which is fixed relative to the air spindle.

[0072] The elastic assembly 40 includes an elastic member arranged between the force applying member and the force transmitting member. When the force applying member moves in the direction of the detection force of the air spindle 82 away from the air spindle 82, the elastic member can produce elastic deformation in the direction of the detection force of the air spindle 82, so that the detection force applied by the axial force applying member 21 is transmitted to the air spindle 82 through the elastic member and the force transmitting member in turn.

[0073] The force measuring assembly 50 includes a force measuring member connected to the force transmitting member, which is used to measure the detection force.

[0074] As shown in the drawings, Figures 3-5 The force applying member includes an axial force applying member 21 movably arranged on the support frame 10 in the axial direction of the air spindle 82, which is used to apply axial detection forces to the air spindle 82.

[0075] The force transmitting member includes an axial force transmitting member 31 which is fixed relative to the air spindle 82.

[0076] The elastic member includes an axial elastic member 41, which is arranged between the axial force applying member 21 and the axial force transmitting member 31 and can be elastically deformed in the axial direction of the air main shaft 82 when the axial force applying member 21 moves in the axial direction of the air main shaft 82 away from the air main shaft 82, so that the axial detection force applied by the axial force applying member 21 is transmitted to the air main shaft 82 through the axial elastic member 41 and the axial force transmitting member 31 in sequence.

[0077] The force measuring member includes an axial force measuring member 51, which is connected with the axial force transmitting member 31 and is used for measuring the axial detection force.

[0078] The axial force applying member 21 is used for applying the axial detection force and is arranged on the support frame 10 in the axial direction of the air main shaft 82, so that the force applying member can accurately apply force to the air main shaft 82 in the axial direction, simulating the axial force condition of the air main shaft 82 in actual work. The axial force measuring member 51 is connected with the axial force transmitting member 31 and can accurately measure the axial detection force received by the air main shaft 82, so that the force parameter acquisition is more accurate when the axial static stiffness of the air main shaft 82 is tested. The axial elastic member 41 is elastically deformed when the axial force applying member 21 moves away from the air main shaft 82, and the axial elastic member 41 can absorb the impact generated during the force applying process, avoiding sudden force changes that may damage the air main shaft 82 and protect the internal precise structure and components. At the same time, through the buffering of the axial elastic member 41, the axial force transmitted to the air main shaft 82 is more stable and continuous, further improving the accuracy and stability of the test, ensuring that the real displacement response of the air main shaft 82 under the stable axial force can be obtained, so that the axial static stiffness thereof can be more accurately calculated.

[0079] Exemplarily, as shown in Figures 6-9 The force applying member includes a radial force applying member 22, which is arranged on the support frame 10 in the radial direction of the air main shaft 82 and is used for applying a radial detection force to the air main shaft 82.

[0080] The force transmitting member includes a radial force transmitting member 32, which is used for being fixed relative to the air main shaft 82.

[0081] The elastic member includes a radial elastic member 42, which is arranged between the radial force applying member 22 and the radial force transmitting member 32 and can be elastically deformed in the radial direction of the air main shaft 82 when the radial force applying member 22 moves in the radial direction of the air main shaft 82 away from the air main shaft 82, so that the radial detection force applied by the radial force applying member 22 is transmitted to the air main shaft 82 through the radial elastic member 42 and the radial force transmitting member 32 in sequence.

[0082] The force measuring device includes a radial force measuring device 52, which is connected to the radial force transmission device 32. The radial force measuring device 52 is used to measure the radial detection force.

[0083] The radial force-applying component 22 is movably mounted on the support frame 10 along the radial direction of the air spindle 82, allowing it to precisely apply radial force to the air spindle 82, simulating the radial force it experiences during actual operation. The radial force-measuring component 52, connected to the radial force-transmitting component 32, accurately measures the radial force acting on the air spindle 82, facilitating a more precise analysis of its radial static stiffness characteristics. The radial elastic component 42 undergoes elastic deformation when the radial force-applying component 22 moves away from the air spindle 82. This elastic component 42 absorbs the impact generated during the force application process, preventing sudden force changes from damaging the air spindle 82. This results in a more uniform and continuous radial force applied to the air spindle 82, aiding in the accurate measurement of the air spindle 82's displacement response under stable radial force, and thus enabling a more precise calculation of its radial static stiffness.

[0084] Furthermore, the force-applying component includes a cavity with its opening facing the force-transmitting component and an end cap located at the opening of the cavity. The end cap has a clearance hole in the middle. The force-transmitting component extends into the cavity through the clearance hole and slides with the cavity in the direction of the detected force. The portion of the force-transmitting component located in the cavity has a stop portion. An elastic element is located between the end cap and the stop portion. When the force-applying component moves in a direction away from the air spindle, the elastic element is compressed in the direction of the detected force, so that the detected force applied by the force-applying component is transmitted to the air spindle in sequence through the elastic element and the force-transmitting component.

[0085] For example, such as Figure 5 As shown, the axial force application member 21 includes a first cavity 2121 with its opening facing the axial force transmission member 31 and a first end cap 2122 disposed at the opening of the first cavity 2121. The first end cap 2122 has a first clearance hole in the middle. The axial force transmission member 31 extends into the first cavity 2121 through the first clearance hole and slides with the first cavity 2121 along the axial direction of the air main shaft 82. The portion of the axial force transmission member 31 located in the first cavity 2121 has a first stop portion 313. An axial elastic member 41 is disposed between the first end cap 2122 and the first stop portion 313. When the axial force application member 21 moves in a direction away from the air main shaft 82, the axial elastic member 41 is compressed along the axial direction of the air main shaft 82, so that the axial detection force applied by the axial force application member 21 is transmitted to the air main shaft 82 in sequence through the axial elastic member 41 and the axial force transmission member 31.

[0086] Thus, the axial elastic member 41 is arranged between the first end cover 2122 and the first stop portion 313, when the axial force applying member 21 moves towards the direction away from the air spindle 82, the axial elastic member 41 is compressed by the movement of the axial force applying member 21, the elastic force generated by the elastic member acts on the axial force transmitting member 31, and then the force is smoothly transmitted to the air spindle 82, the sliding fit between the axial force transmitting member 31 and the first cavity 2121 ensures that the force can be stably transmitted along the axial direction of the air spindle 82, and the partial structure of the axial force transmitting member 31 extends into the first cavity 2121 of the axial force applying member 21, so that the structure of the whole force applying assembly 20 is more compact, and this fit reduces the deviation and dispersion of the force in the transmission process, so that the axial detection force applied by the axial force applying member 21 can be efficiently and accurately transmitted to the air spindle 82, and the stability and reliability of the whole testing device are improved.

[0087] In other embodiments, the axial force applying member 21 and the axial force transmitting member 31 can also be directly connected through the axial elastic member 41, so that when the axial force applying member 21 moves towards the direction away from the air spindle 82, the axial elastic member 41 is stretched along the axial direction of the air spindle 82, so that the axial detection force applied by the axial force applying member 21 is transmitted to the air spindle 82 through the axial elastic member 41 and the axial force transmitting member 31 in turn.

[0088] Exemplarily, as shown in Figure 9 The radial force applying member 22 includes a second cavity 2211 with an opening facing the radial force transmitting member 32 and a second end cover 2212 arranged at the opening of the second cavity 2211, the middle part of the second end cover 2212 is provided with a second avoiding hole, the radial force transmitting member 32 partially extends into the second cavity 2211 through the second avoiding hole and is in sliding fit with the second cavity 2211 along the radial direction of the air spindle 82, the part of the radial force transmitting member 32 located in the second cavity 2211 is provided with a second stop portion 323, and the radial elastic member 42 is arranged between the second end cover 2212 and the second stop portion 323, when the radial force applying member 22 moves towards the direction away from the air spindle 82, the radial elastic member 42 is compressed along the radial direction of the air spindle 82, so that the radial detection force applied by the radial force applying member 22 is transmitted to the air spindle 82 through the radial elastic member 42 and the radial force transmitting member 32 in turn.

[0089] Thus, the radial elastic member 42 is arranged between the second end cover 2212 and the second stop portion 323. When the radial force applying member 22 moves towards the direction away from the air spindle 82, the radial elastic member 42 is compressed, and the elastic force generated by the radial elastic member 42 acts on the radial force transmitting member 32, and then the force is smoothly transmitted to the air spindle 82. The sliding fit between the radial force transmitting member 32 and the second cavity 2211 ensures that the force can be stably transmitted along the radial direction of the air spindle 82. The structure of the radial force transmitting member 32 is partially arranged in the second cavity 2211 of the radial force applying member 22, so that the structure of the entire force applying assembly 20 is more compact. This fit reduces the deviation and dispersion of the force during transmission, so that the radial detection force applied by the radial force applying member 22 can be efficiently and accurately transmitted to the air spindle 82, and the stability and reliability of the entire test device are improved.

[0090] Further, the force transmitting member comprises a first connecting member and a second connecting member. The first connecting member is arranged to be fixed relative to the air spindle. One end of the second connecting member is connected to the first connecting member through the force measuring member, and the other end of the second connecting member extends into the cavity. The stop portion is arranged on the second connecting member.

[0091] For example, as shown in Figure 4 and Figure 5 , the axial force transmitting member 31 comprises a first axial connecting member 311 and a second axial connecting member 312. The first axial connecting member 311 is arranged to be fixed relative to the air spindle 82. One end of the second axial connecting member 312 is connected to the first axial connecting member 311 through the axial force measuring member 51, and the other end of the second axial connecting member 312 extends into the first cavity 2121. The first stop portion 313 is arranged on the second axial connecting member 312.

[0092] Since the value measured by the axial force measuring member 51 can truly reflect the actual axial detection force acting on the air spindle 82, the first axial connecting member 311 is arranged to be fixed relative to the air spindle 82, and one end of the second axial connecting member 312 is connected to the first axial connecting member 311 through the axial force measuring member 51. Thus, the axial force measuring member 51 can accurately measure the size of the force that reaches the first axial connecting member 311 through the second axial connecting member 312 during force transmission, and the accuracy of the axial force applied to the air spindle 82 during testing is ensured.

[0093] For example, as shown in Figure 9 , the radial force transmitting member 32 comprises a first radial connecting member 321 and a second radial connecting member 322. The first radial connecting member 321 is arranged to be fixed relative to the air spindle 82. One end of the second radial connecting member 322 is connected to the first radial connecting member 321 through the radial force measuring member 52, and the other end of the second radial connecting member 322 extends into the second cavity 2211. The second stop portion 323 is arranged on the second radial connecting member 322.

[0094] Since the value measured by the radial force measuring element 52 can truly reflect the actual radial force acting on the air main shaft 82, the first radial connecting element 321 is fixed relative to the air main shaft 82, and one end of the second radial connecting element 322 is connected to the first radial connecting element 321 through the radial force measuring element 52, so that the radial force measuring element 52 can accurately measure the size of the force passing through the second radial connecting element 322 to the first radial connecting element 321 in the force transmission process, thereby ensuring the accuracy of the radial force applied to the air main shaft 82 in the test.

[0095] Further, the elastic element includes a spring, the spring is sleeved on the second connecting element, one end of the spring abuts against the inner wall of the end cover, and the other end of the spring abuts against the stop portion.

[0096] Exemplarily, as shown in Figure 5 The axial elastic element 41 includes a first spring, the first spring is sleeved on the second axial connecting element 312, one end of the first spring abuts against the inner wall of the first end cover 2122, and the other end of the first spring abuts against the first stop portion 313.

[0097] The first spring is sleeved on the second axial connecting element 312, when the first movable shaft 212 moves away from the air main shaft 82, the first spring can be compressed in the axial direction of the air main shaft 82, effectively buffering the force transmitted from the axial force applying element 21 to the air main shaft 82, and the spring can uniformly convert the force applied by the axial force applying element 21 into a continuous and stable pulling force on the axial force transmitting element 31, so that the force transmitted to the air main shaft 82 is more stable and continuous, and the spring as the axial elastic element 41 has the advantages of simple structure, easy implementation and relatively low cost.

[0098] Of course, in other embodiments, the axial elastic element 41 can also adopt other elastic elements such as a rubber column, a rubber pad or a metal spring.

[0099] Exemplarily, as shown in Figure 9 The radial elastic element 42 includes a second spring, the second spring is sleeved on the second radial connecting element 322, one end of the second spring abuts against the inner wall of the second end cover 2212, and the other end of the second spring abuts against the second stop portion 323.

[0100] The second spring is sleeved on the second radial connecting element 322, when the second movable shaft 221 moves away from the air main shaft 82, the second spring can be compressed in the radial direction of the air main shaft 82, effectively buffering the force transmitted from the radial force applying element 22 to the air main shaft 82, and the spring can uniformly convert the force applied by the radial force applying element 22 into a continuous and stable pulling force on the radial force transmitting element 32, so that the force transmitted to the air main shaft 82 is more stable and continuous.

[0101] The force applying manner of the force applying member can have various implementations, such as motor driving, electromagnetic loading or manual driving, etc. In one possible implementation, the axial force applying member 21 is taken as an example, as shown in Figure 4 and Figure 5 The axial force applying member 21 includes a sleeve 211 and a first movable shaft 212. The sleeve 211 is fixed to the support frame 10 and has an internal thread. The first movable shaft 212 is arranged along the axial direction of the air main shaft 82 and has an external thread. The first movable shaft 212 is threadedly connected with the sleeve 211. When the first movable shaft 212 is screwed in the sleeve 211, the first movable shaft 212 can be driven to move along the axial direction of the air main shaft 82 in a direction away from the air main shaft 82, so as to apply an axial detection force to the air main shaft 82.

[0102] The sleeve 211 and the first movable shaft 212 are connected through the thread. The screwing of the first movable shaft 212 in the sleeve 211 can accurately drive the first movable shaft 212 to move along the axial direction. This thread transmission manner makes the axial force applying process relatively stable and continuous. Meanwhile, the axial detection force applied to the air main shaft 82 can be controlled during the screwing process, so as to realize the accurate adjustment of the small force. For the test of accurately measuring the static stiffness of the air main shaft 82 under the action of different axial forces, the axial force loading requirement can be met, and the accurate static stiffness data can be obtained.

[0103] In another possible implementation, the radial force applying member 22 is taken as an example, as shown in Figures 7-9 The support frame 10 includes a first side plate 11. The first side plate 11 is provided with a support hole 111 penetrating along the radial direction of the air main shaft 82.

[0104] The radial force applying member 22 includes a second movable shaft 221 and a driving nut 222. The second movable shaft 221 is arranged along the radial direction of the air main shaft 82 and is arranged in the support hole. The second movable shaft 221 is provided with an external thread. The second movable shaft 221 is provided with a rotation stopping structure 2213 for preventing the second movable shaft 221 from rotating relative to the support hole 111. The driving nut 222 is threadedly connected with the second movable shaft 221. The driving nut 222 abuts against the side of the first side plate 11 away from the air main shaft 82. When the driving nut 222 is screwed on the first side plate 11, the driving nut 222 can drive the second movable shaft 221 to move along the radial direction of the air main shaft 82 in a direction away from the air main shaft 82, so as to apply a radial detection force to the air main shaft 82.

[0105] The second movable shaft 221 is sleeved in the support hole 111 and is provided with a rotation-stopping structure 2213, which ensures that the second movable shaft 221 can only move linearly along the radial direction of the air main shaft 82 without rotation. After being screwed with the driving nut 222, the radial detection force can be accurately controlled by rotating the driving nut 222. The support hole 111 on the first side plate 11 provides stable support and guidance for the second movable shaft 221, ensuring that the radial force can be accurately transmitted to the air main shaft 82 along the predetermined radial direction. At the same time, the driving nut 222 abuts against the side of the first side plate 11 away from the air main shaft 82, so that the force can be stably applied to the air main shaft 82 through the nut, the second movable shaft 221 and the subsequent force transmission assembly 30 during the force application process, improving the reliability of force transmission.

[0106] The rotation-stopping structure 2213 can have various implementations, such as Figure 7 and Figure 8 As shown, the support hole 111 is a square hole, and the rotation-stopping structure 2213 includes a rotation-stopping flat surface provided on the second movable shaft 221, which cooperates with the hole wall of the square hole to prevent the second movable shaft 221 from rotating relative to the support hole 111.

[0107] The support hole 111 is designed as a square hole, which cooperates with the rotation-stopping flat surface on the second movable shaft 221 to effectively limit the rotational freedom of the second movable shaft 221, ensuring that it can only move linearly along the axial direction of the square hole (i.e., the radial direction of the air main shaft 82). The close cooperation between the rotation-stopping flat surface and the hole wall of the square hole makes the position of the second movable shaft 221 in the support hole 111 more stable, reducing the possibility of shaking or deviation during the force application process.

[0108] In other embodiments, a rotation-stopping long groove can also be provided on the second movable shaft 221, and a rotation-stopping pin is provided on the corresponding first side plate 11, which is arranged in the rotation-stopping long groove to realize the rotation-stopping function of the second movable shaft 221.

[0109] In some embodiments, as shown in Figure 3 and Figure 6 The test device further includes a loading piece 61, which is used to be connected to the lower end surface of the air main shaft 82, and the force transmission assembly 30 is relatively fixed with the air main shaft 82 through the loading piece 61.

[0110] The loading piece 61 is connected to the lower end surface of the air main shaft 82, and the force transmission assembly 30 is relatively fixed with the air main shaft 82 through the loading piece 61, which can make the applied axial and radial detection forces more evenly distributed on the air main shaft 82. The loading piece 61 plays a buffering and transitional role, reducing the risk of damage such as friction and collision that may be caused by the direct connection of the force transmission assembly 30 and the air main shaft 82, further protecting the precision surface and internal structure of the air main shaft 82.

[0111] In this embodiment, the force measuring assembly 50 includes a force sensor for measuring the detection force. The force sensor can accurately measure the size of the detection force and can provide real-time feedback on the size of the detection force. In the process of testing the static stiffness of the air spindle 82, whether it is an axial detection force or a radial detection force, high-precision measurement is required to obtain accurate data.

[0112] In this embodiment, as shown in Figure 6 The support frame 10 further includes a second side plate 13, and the displacement measuring element 60 includes an ohmmeter disposed on the second side plate 13. The measuring rod of the ohmmeter is used to abut against the air spindle 82.

[0113] The ohmmeter is a high-precision measuring instrument that can accurately measure small displacement changes. In the static stiffness test of the air spindle 82, the displacement of the air spindle 82 is usually very small when subjected to an axial or radial detection force. The ohmmeter can measure displacement at the micron level or even smaller, which is crucial for accurately obtaining displacement data of the air spindle 82.

[0114] In some embodiments, as shown in Figure 1 The support frame 10 includes a support plate 12 having an assembly hole for the housing 81 of the spindle unit 80 to pass through. A plurality of adjustable fasteners 121 are arranged along the circumference of the assembly hole on the support plate 12. The plurality of adjustable fasteners 121 are used to fix the housing 81 of the spindle unit 80 to stabilize the position of the spindle unit 80 in the horizontal direction.

[0115] The assembly hole provides a mounting channel for the housing 81 of the spindle unit 80 to ensure stable positioning in the vertical direction. The plurality of adjustable fasteners 121 arranged along the circumference of the assembly hole can fine-tune and fix the housing 81 of the spindle unit 80 from multiple angles to ensure stable positioning of the spindle unit 80 in the horizontal direction.

[0116] In this embodiment, as shown in Figure 1 The test device further includes a support base 70 disposed below the support frame 10. The support base 70 includes a plurality of legs 71, each of which has a support leg 72 disposed below for supporting the ground. A support beam 73 is also disposed between the legs 71.

[0117] The plurality of legs 71 and support legs 72 provide a stable support structure for the entire test device, which can evenly distribute the weight of the test device on the ground, effectively preventing the device from tilting or shaking due to unstable center of gravity. During the static stiffness test of the air spindle 82, any slight shaking can affect the accuracy of the test results. The stable support base 70 can ensure that the device is in a stable state during the test, which is beneficial to improve the test efficiency and test quality.

[0118] In the embodiment, as shown in Figure 2 The radial runout or axial runout of the air main shaft 82 can be measured by abutting the measuring rod of the ohmmeter on the lower end surface and the side wall of the air main shaft 82, and the rotation accuracy of the air main shaft 82 can be determined. The rotation speed of the air main shaft 82 can be controlled by adjusting the frequency converter of the main shaft unit 80. The vibration instrument is connected to the air main shaft 82, and the vibration value at different rotation speeds can be collected by using the vibration detector to determine whether the vibration frequency of the air main shaft 82 is normal.

[0119] It should be explained that the specific scheme of the radial force measuring assembly for measuring the radial static stiffness of the air main shaft 82 in the example can also be used for axial use of the air main shaft 82, and the specific scheme of the axial force measuring assembly for measuring the axial static stiffness of the air main shaft 82 can also be used for radial use of the air main shaft 82, and the embodiment is not limited.

[0120] Finally, it should be pointed out that: the above embodiments are only used to illustrate the technical solutions of the utility model, and not to limit them; although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement for part or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the utility model.

Claims

1. A testing device for testing an air spindle in a spindle unit, the spindle unit comprising a housing and an air spindle rotatably arranged in the housing, characterized in that, The testing device comprises: a support frame for fixing a housing of the spindle unit; a force applying assembly for applying a detection force to the air spindle, the detection force comprising a radial force along a radial direction of the air spindle and / or an axial force along an axial direction of the air spindle; a force transmitting assembly for being fixed opposite to the air spindle; an elastic assembly arranged between the force applying assembly and the force transmitting assembly, the elastic assembly being capable of being elastically deformed along a direction of the detection force so as to transmit the detection force applied by the force applying assembly to the force transmitting assembly; a force measuring assembly connected with the force transmitting assembly, the force measuring assembly being configured to measure the detection force; a displacement measuring member arranged on the support frame, the displacement measuring member being configured to measure a displacement of the air spindle along the direction of the detection force.

2. The testing device according to claim 1, wherein: the force applying assembly comprises a force applying member movably arranged on the support frame along the direction of the detection force, the force applying member being configured to apply the detection force to the air spindle; the force transmitting assembly comprises a force transmitting member configured to be fixed opposite to the air spindle; the elastic assembly comprises an elastic member arranged between the force applying member and the force transmitting member, the elastic member being capable of being elastically deformed along the direction of the detection force when the force applying member moves away from the air spindle along the direction of the detection force, so as to transmit the detection force applied by the force applying member to the air spindle through the elastic member and the force transmitting member in sequence; the force measuring assembly comprises a force measuring member connected with the force transmitting member, the force measuring member being configured to measure the detection force.

3. The test device of claim 2, wherein, the force applying member comprises a cavity with an opening facing the force transmitting member and an end cap arranged at the opening of the cavity, a middle portion of the end cap is provided with a clearance hole, the force transmitting member partially extends into the cavity through the clearance hole and is in sliding fit with the cavity along the direction of the detection force, a portion of the force transmitting member located in the cavity is provided with a stop portion, the elastic member is arranged between the end cap and the stop portion, when the force applying member moves away from the air spindle, the elastic member is compressed along the direction of the detection force, so as to transmit the detection force applied by the force applying member to the air spindle through the elastic member and the force transmitting member in sequence.

4. The test device of claim 3, wherein, the force transmitting member comprises: a first connecting member configured to be fixed opposite to the air spindle; a second connecting member, one end of the second connecting member is connected with the first connecting member through the force measuring member, the other end of the second connecting member extends into the cavity, and the stop portion is arranged on the second connecting member.

5. The test device of claim 4, wherein, the elastic member comprises a spring, the spring is sleeved on the second connecting member, one end of the spring abuts against an inner wall of the end cap, and the other end of the spring abuts against the stop portion.

6. The test device of claim 2, wherein, the force applying member comprises: a sleeve fixed on the support frame, the sleeve has an internal thread. A first movable shaft is arranged along the direction of the detection force, and an external thread is arranged on the first movable shaft. The first movable shaft is threadedly connected with the sleeve. When the first movable shaft is screwed in the sleeve, the first movable shaft is driven to move along the direction of the detection force away from the air spindle, so as to apply the detection force to the air spindle.

7. The test device of claim 2, wherein, The support frame comprises a first side plate, and a support hole is arranged on the first side plate and penetrates through along the direction of the detection force. The force applying member comprises: A second movable shaft is arranged along the direction of the detection force, and the second movable shaft is arranged in the support hole. An external thread is arranged on the second movable shaft, and a rotation stopping structure is arranged on the second movable shaft. The rotation stopping structure is used to prevent the second movable shaft from rotating relative to the support hole. A driving nut is threadedly connected with the second movable shaft, and the driving nut is abutted against one side of the first side plate away from the air spindle. When the driving nut is abutted against and screwed on the first side plate, the driving nut can drive the second movable shaft to move along the direction of the detection force away from the air spindle, so as to apply the detection force to the air spindle.

8. The test device of claim 7, wherein, The support hole is a square hole, and the rotation stopping structure comprises a rotation stopping plane arranged on the second movable shaft. The rotation stopping plane cooperates with the hole wall of the square hole to prevent the second movable shaft from rotating relative to the support hole.

9. The test device of claim 1, wherein, The test device further comprises a loading member, and the loading member is used to be connected with the lower end surface of the air spindle. The force transmission assembly is fixed relative to the air spindle through the loading member.

10. The test device of claim 1, wherein, The support frame further comprises a second side plate, and the displacement measuring member comprises an ohmmeter arranged on the second side plate. A measuring rod of the ohmmeter is used to be abutted against the air spindle.

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