Adsorption assembly and exposure device with same

Abstract

The utility model discloses an adsorption assembly and an exposure device with the same, the adsorption assembly comprises a bearing part, the bearing part is provided with an air hole, the bearing part is provided with a plurality of bearing areas, the plurality of bearing areas comprise a first bearing area and a second bearing area, and the first bearing area and the second bearing area are arranged at an interval; an air channel is arranged between the first bearing area and the second bearing area and used for selectively communicating the first bearing area with the second bearing area. The multiple bearing areas are formed on the bearing part, different bearing areas are selectively used in the bearing adsorption process of the bearing part, adsorption limitation of substrates of different sizes is achieved through use of the different bearing areas, and therefore the adsorption assembly can correspondingly provide the adsorption effect according to the different substrates in the use process. An air channel is arranged between the first bearing area and the second bearing area, so that the first bearing area and the second bearing area are selectively communicated through the air channel, and the adsorption range of the bearing part is suitable for being adjusted through the air channel.

Description

TECHNICAL FIELD

[0001] The utility model relates to adsorption subassembly technical field especially is adsorption subassembly and has its exposure device. BACKGROUND

[0002] In the prior art, in the exposure process of the substrate, the substrate is suitable for being adsorbed and limited by the adsorption subassembly and then transported to the subsequent process for exposure treatment, so that the automation treatment of the exposure device can be realized. In the related art, the exposure device often needs to be adsorbed and treated for substrates of multiple sizes during use, and the current common technical means is to set the adsorption subassembly to the size of the large substrate, and when adsorbing the small size substrate, the excess part is suitable for being shielded to ensure that the adsorption action can act completely on the corresponding small size substrate. The above-mentioned means not only needs manual operation, but also has low efficiency, and manual operation cannot completely ensure that the adsorption action of the adsorption part can be completely transmitted to the substrate according to the design. SUMMARY

[0003] The utility model aims at at least solving one of the technical problems existing in the prior art. Therefore, one purpose of the utility model is to provide an adsorption subassembly, which is provided with a first bearing area and a second bearing area, and a gas passage is arranged between the first bearing area and the second bearing area, so as to realize the adjustment of different adsorption ranges by the communication or not of the gas passage, so that the adsorption subassembly can realize the adaptive adjustment for substrates of different sizes during use, so that the adsorption subassembly can provide better adsorption action to meet the use requirement of the adsorption subassembly under the condition of good adaptability.

[0004] Another purpose of the utility model is to provide an exposure device, which is provided with the adsorption subassembly as shown above.

[0005] The adsorption subassembly according to the utility model embodiment comprises a bearing part, the bearing part is provided with a gas hole, the bearing part adsorbs a substrate through the gas hole, the bearing part is provided with a plurality of bearing areas, the plurality of bearing areas comprise a first bearing area and a second bearing area, the first bearing area and the second bearing area are arranged at intervals, and a gas passage is arranged between the first bearing area and the second bearing area, the gas passage is used for selectively connecting the first bearing area and the second bearing area, so as to adjust the adsorption range of the bearing part.

[0006] According to the adsorption assembly, the plurality of bearing areas are formed on the bearing part, and different bearing areas are selectively used in the bearing and adsorption process, so that the adsorption of different size substrates is limited by using different bearing areas, thereby enabling the adsorption assembly to provide corresponding adsorption effect according to different substrates in use, and the adsorption assembly has high use applicability.

[0007] In some embodiments, the flange box is arranged at the bottom of the bearing part, and the flange box is in communication with the first bearing area, and one end of the flange box is used for guiding the flow of air flow.

[0008] In some embodiments, the control valve is a vacuum electromagnetic valve.

[0009] In some embodiments, the gas control valve is arranged on the side of the flange box away from the bearing part.

[0010] In some embodiments, the gas control valve is arranged on the side of the flange box away from the bearing part.

[0011] In some embodiments, the gas pressure detection member is a pressure gauge.

[0012] In some embodiments, the alignment camera is arranged at the edge of the bearing part.

[0013] In some embodiments, the alignment camera is arranged at the edge of the bearing part.

[0014] In some embodiments, the first air pipe, the second air pipe and the third air pipe are connected to the end of the gas control valve away from the bearing part, between the gas control valve and the flange box, and between the flange box and the control valve.

[0015] According to the exposure device, the adsorption assembly is used.

[0016] According to the exposure device provided by the embodiment of the present application, the adsorption assembly is arranged in the exposure device, a plurality of bearing areas are formed on the bearing part, and different bearing areas are selectively used in the bearing and adsorption process of the bearing part, so that the adsorption of substrates with different sizes is limited by using different bearing areas, and the adsorption assembly can provide adsorption effect corresponding to different substrates in use, thereby improving the use applicability of the adsorption assembly.

[0017] Additional aspects and advantages of the present application will be described in the following description, become apparent from the following description, or be learned by practice of the present application. BRIEF DESCRIPTION OF DRAWINGS

[0018] The above and / or additional aspects and advantages of the present application will become apparent and be readily understood from the following description, taken in conjunction with the accompanying drawings, in which:

[0019] Figure 1 is a structural schematic view of the adsorption assembly according to the embodiment of the present application;

[0020] Figure 2 is a structural schematic view of the adsorption assembly according to the embodiment of the present application;

[0021] Figure 3 is a structural schematic view of the adsorption assembly according to the embodiment of the present application;

[0022] Figure 4 is a structural schematic view of the bearing part according to the embodiment of the present application;

[0023] Reference signs:

[0024] The adsorption assembly 10,

[0025] The bearing part 100, the air hole 110, the first bearing area 120, the second bearing area 130, the air channel 140,

[0026] The flange box 200,

[0027] The control valve 300,

[0028] The air control valve 400,

[0029] The air pressure detection piece 500,

[0030] Alignment camera 600,

[0031] Identification member 700,

[0032] First air pipe 810, second air pipe 820, third air pipe 830. DETAILED DESCRIPTION

[0033] The embodiments of the present application are described in detail below, and the embodiments described with reference to the accompanying drawings are exemplary, and the embodiments of the present application are described in detail below.

[0034] The following description refers to the accompanying drawings. Figures 1-4 The adsorption assembly 10 according to the embodiments of the present application is described below. Specifically, the adsorption assembly 10 comprises a carrying part 100, the carrying part 100 is provided with a gas hole 110, the carrying part 100 adsorbs a substrate through the gas hole 110, the carrying part 100 is provided with a plurality of carrying areas, the plurality of carrying areas comprise a first carrying area 120 and a second carrying area 130, the first carrying area 120 and the second carrying area 130 are arranged at intervals, and a gas passage 140 is arranged between the first carrying area 120 and the second carrying area 130, the gas passage 140 is used for selectively connecting the first carrying area 120 and the second carrying area 130, so as to adjust the adsorption range of the carrying part 100.

[0035] It should be noted that, in the use process of the adsorption assembly 10, the substrate is suitable to be carried on the adsorption assembly 10, and then the adsorption assembly 10 adsorbs the substrate, so that the adsorption assembly 10 can level the substrate during the adsorption process. The leveled substrate is convenient for transportation and exposure, so that the influence of the substrate during transportation is reduced, and the substrate leveled during transportation can better expose the substrate during subsequent exposure, so that the production of the subsequent substrate has higher use performance.

[0036] Furthermore, in the actual use process, the substrate often has different size production requirements. Therefore, the use of the adsorption assembly 10 also needs to be adjusted according to different sizes of the substrate. The present application provides an adsorption assembly 10, which comprises a carrying part 100, the carrying part 100 is suitable for carrying and adsorbing a substrate, the adsorption part is suitable for providing adsorption to adsorb and fix the substrate. In order to make the limitation of the substrate on the adsorption part more reliable, a pressing plate part is arranged to press the edge of the substrate to further limit the reliability of the substrate on the adsorption assembly 10, so as to reduce the influence on the substrate during transportation. At the same time, the exposure effect can be more reliably applied to the substrate during subsequent exposure, so as to improve the production effect of the substrate.

[0037] Specifically, the application provides an adsorption assembly 10, which is suitable for comprising a bearing part 100, wherein a gas hole 110 is arranged on the bearing part 100, and the bearing part 100 is suitable for bearing a substrate during use, and the substrate is adsorbed and limited on the bearing part 100 through the gas hole 110, so as to realize the adsorption and limitation of the adsorption assembly 10 on the substrate. Moreover, at least a first bearing area 120 and a second bearing area 130 are arranged on the bearing part 100, the first bearing area 120 and the second bearing area 130 are suitable for being arranged at intervals, and the first bearing area 120 and the second bearing area 130 can both adsorb the substrate, so that the bearing part 100 is suitable for realizing the adsorption on substrates with different sizes by controlling the connection and use of the first bearing area 120 or the second bearing area 130 during use, thereby realizing the adaptive adjustment of the adsorption assembly 10 on substrates with different sizes.

[0038] In some specific embodiments, a gas channel 140 is further arranged between the first bearing area 120 and the second bearing area 130, and the gas channel 140 is suitable for selectively controlling the communication of the first bearing area 120 and the second bearing area 130 during use of the bearing part 100, so that the bearing part 100 is suitable for adjusting the adsorption range of the bearing part 100 through the communication of the gas channel 140 during use, thereby realizing the adaptive adjustment of the adsorption assembly 10 on substrates with different sizes.

[0039] According to the adsorption assembly 10 provided in the application, a plurality of bearing areas are formed on the bearing part 100, and the different bearing areas are suitable for being selectively used during the bearing and adsorption of the bearing part 100, so that the adsorption and limitation of substrates with different sizes are realized through the use of different bearing areas, thereby enabling the adsorption assembly 10 to correspondingly provide the adsorption effect according to different substrates during use, so that the adsorption assembly 10 has higher use applicability. Moreover, the gas channel 140 is arranged between the first bearing area 120 and the second bearing area 130, so as to selectively communicate the first bearing area 120 and the second bearing area 130 through the gas channel 140, so that the adsorption range of the bearing part 100 is suitable for being adjusted through the gas channel 140, so that the adsorption assembly 10 can simply and conveniently realize the adjustment of the adsorption range, simplify the operation process, and enable the adsorption assembly 10 to more reliably adsorb the substrate.

[0040] In some embodiments, the adsorption assembly 10 further comprises a flange box 200 and a control valve 300, the flange box 200 is arranged at the bottom of the bearing part 100, the flange box 200 is in communication with the first bearing area 120, and one end of the flange box 200 is used for guiding the flow of air flow; one end of the control valve 300 is in communication with the flange box 200, and the other end of the control valve 300 is in communication with the second bearing area 130.

[0041] It can be understood that during the use of the adsorption assembly 10, the flange box 200 is arranged at the bottom of the bearing part 100, and during the use of the bearing part 100, the airflow is guided to flow through the flange box 200, so that the adsorption assembly 10 is adapted to control whether the flange box 200 is used to realize the adsorption use of the adsorption assembly 10. Moreover, since the flange box 200 is in communication with the first bearing area 120, and one end of the flange box 200 is connected with the second bearing area 130 through the control valve 300, so that during the use of the adsorption assembly 10, the control valve 300 is controlled to realize whether the second bearing area 130 is in communication and use, that is, when the second bearing area 130 needs to be in communication and use, the control valve 300 is opened, so that the adsorption effect of the flange box 200 can not only act on the first bearing area 120 directly, but also be transmitted to the second bearing area 130 through the control valve 300, so that the first bearing area 120 and the second bearing area 130 can be used for adsorption together, and when the second bearing area 130 does not need to be used, the control valve 300 is closed, so that the flange box 200 can act on the substrate through the first bearing area 120. In this way, during the use of the adsorption assembly 10, the adsorption effect is provided through the flange box 200, and the control valve 300 is controlled to adjust the adsorption effect of the flange box 200, so as to realize the adaptive adjustment of the adsorption range of the adsorption assembly 10.

[0042] In some specific embodiments, the control valve 300 is a vacuum electromagnetic valve. It can be understood that the control valve 300 is arranged as a vacuum electromagnetic valve, so that the control valve 300 can realize the communication and non-communication of the vacuum adsorption effect during use, so that the control valve 300 can realize the on-off state of the vacuum adsorption effect of the flange box 200, so as to realize the adaptive adjustment of the adsorption range of the adsorption assembly 10.

[0043] In some embodiments, the adsorption assembly 10 further comprises a gas control valve 400 arranged on the side of the flange box 200 away from the bearing part 100. It should be noted that the gas control valve 400 is arranged on the side of the flange box 200 away from the bearing part 100, and the gas control valve 400 is adapted to control the use of the flange box 200 to control whether the adsorption effect is transmitted to the flange box 200 through the opening and closing of the gas control valve 400 for subsequent use, so that the use control of the adsorption assembly 10 during subsequent use is adapted to be controlled through the gas control valve 400,

[0044] In some embodiments, further comprising: an air pressure detection member 500, the air pressure detection member 500 is connected with the flange box 200 to detect the air pressure in the flange box 200. That is, in order to realize real-time sensing feedback on the use of the flange box 200, the air pressure detection member 500 is adapted to be constructed on the flange box 200, which is adapted to detect the air pressure in the flange box 200 and feed back to a position convenient for sensing, so that the user can quickly sense the use when using the adsorption assembly 10, so that the user can adjust the adsorption performance according to the use of the flange box 200, so that the use of the adsorption assembly 10 is more simple and has higher use reliability.

[0045] In some embodiments, the air pressure detection member 500 is a pressure gauge. It can be understood that the air pressure detection member 500 is adapted to detect the air pressure in the flange box 200, so that the air pressure detection member 500 is set as a pressure gauge, so that the pressure gauge can realize the detection of the air pressure in the flange box 200, so that the use performance of the adsorption assembly 10 can be adjusted according to the detection of the pressure gauge, so that the use of the adsorption assembly 10 is more reliable.

[0046] In some embodiments, the adsorption assembly 10 further comprises: an alignment camera 600, the alignment camera 600 is arranged at the edge of the carrier 100. That is, in the use process of the adsorption assembly 10, the substrate adsorbed on the carrier 100 is also adapted to be detected by the alignment camera 600, so that the user can adjust the use position of the adsorption assembly 10 according to the detection result, so that the use of the adsorption assembly 10 is more simple and reliable. Moreover, in the use process of the alignment camera 600, the position of the substrate on the carrier 100 is determined by identifying and photographing the substrate, so that the use of the adsorption assembly 10 is more reliable.

[0047] In some embodiments, the adsorption assembly 10 further comprises: an identification member 700, the identification member 700 is arranged at the edge of the carrier 100 and the identification member 700 is arranged apart from the alignment camera 600. Moreover, by arranging the identification member 700 on the carrier 100, the identification member 700 is adapted to identify the substrate adsorbed on the carrier 100, so as to determine that the required substrate has been adsorbed on the adsorption assembly 10, so that the use of the adsorption assembly 10 can meet different use requirements. Similarly, the identification member 700 can also be adjusted according to different sizes of substrates, so that the adsorption assembly 10 can identify a variety of substrates, and the identified substrate can be conveniently detected by the alignment camera 600, so that the adsorption assembly 10 has higher use performance and use range.

[0048] In some embodiments, the adsorption assembly 10 further comprises: a first gas pipe 810 connected to the end of the bearing part 100 away from the gas control valve 400; a second gas pipe 820 connected between the gas control valve 400 and the flange box 200; and a third gas pipe 830 connected between the flange box 200 and the control valve 300. It should be noted that the first gas pipe 810 is adapted to guide the gas flow to provide suction effect for adsorbing the substrate through the first gas pipe 810, the second gas pipe 820 is adapted to transmit the adsorption effect to the flange box 200, and the third gas pipe 830 is adapted to transmit the adsorption effect through the flange box 200 to the control valve 300. In this way, during use of the adsorption assembly 10, the use reliability of the adsorption assembly 10 is improved, and the use applicability of the adsorption assembly 10 is improved by adjusting the adsorption range according to the control.

[0049] According to the exposure device, the adsorption assembly 10 is provided in the exposure device, and the bearing part 100 is provided with a plurality of bearing areas. During the bearing and adsorption process of the bearing part 100, different bearing areas can be selectively used to limit the adsorption of substrates of different sizes through the use of different bearing areas, so that the adsorption assembly 10 can provide adsorption effect corresponding to different substrates during use, thereby improving the use applicability of the adsorption assembly 10. Furthermore, the air passage 140 is arranged between the first bearing area 120 and the second bearing area 130 to selectively communicate the first bearing area 120 and the second bearing area 130 through the air passage 140, so that the adsorption range of the bearing part 100 can be adjusted through the air passage 140, the adsorption assembly 10 can simply and conveniently adjust the adsorption range, the operation process is simplified, and the adsorption assembly 10 can more reliably adsorb the substrate, thereby improving the use performance of the exposure device.

[0050] Other configurations and operations of the exposure device according to the embodiments of the present application are known to those skilled in the art, and will not be described in detail here.

[0051] In the description of the present specification, the description of the terms "one embodiment", "some embodiments", "exemplary embodiment", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the present specification, the exemplary description of the above terms does not necessarily mean the same embodiment or example.

[0052] Although the embodiments of the utility model have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, replacements and variations can be made to these embodiments without departing from the principles and purposes of the utility model, and the scope of the utility model is defined by the claims and their equivalents.

Claims

1. A sorption assembly, characterized by The application relates to an adsorption assembly. The adsorption assembly comprises a bearing part provided with air holes, the bearing part adsorbing a substrate through the air holes, a plurality of bearing areas being arranged on the bearing part, the plurality of bearing areas comprising a first bearing area and a second bearing area, the first bearing area and the second bearing area being arranged at intervals, and an air channel being arranged between the first bearing area and the second bearing area, the air channel being used for selectively connecting the first bearing area and the second bearing area to adjust the adsorption range of the bearing part.

2. The adsorption assembly of claim 1, wherein, The application further comprises: a flange box arranged at the bottom of the bearing part, the flange box being connected with the first bearing area, one end of the flange box being used for guiding the flow of air; a control valve, one end of the control valve being connected with the flange box, and the other end of the control valve being connected with the second bearing area.

3. The adsorption assembly of claim 2, wherein, The control valve is a vacuum electromagnetic valve.

4. The adsorption assembly of claim 2, wherein, The application further comprises: an air control valve arranged on the side of the flange box away from the bearing part.

5. The adsorption assembly of claim 2, wherein, The application further comprises: an air pressure detection member connected with the flange box to detect the air pressure in the flange box.

6. The adsorption assembly of claim 5, wherein, The air pressure detection member is a pressure gauge.

7. The adsorption assembly of claim 1, wherein, The application further comprises: an alignment camera arranged at the edge of the bearing part.

8. The adsorption assembly of claim 7, wherein, The application further comprises: an identification member arranged at the edge of the bearing part and arranged at intervals with the alignment camera.

9. The adsorption assembly of claim 4, wherein, The application further comprises: a first air pipe connected with one end of the air control valve away from the bearing part; a second air pipe connected between the air control valve and the flange box; a third air pipe connected between the flange box and the control valve.

10. An exposure apparatus characterized by comprising: The application further comprises: the adsorption assembly according to any one of claims 1-9.

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