Distribution suction sucker device

Abstract

The utility model belongs to the technical field of wafer thermal debonding technologies, and provides a suction force distribution suction cup device, an adsorption assembly and a fixing assembly, the adsorption assembly comprises an air pipe connector, a suction cup ventilation pipe and a suction cup, and the fixing assembly comprises a linear bearing, a fixing block and a buffer elastic piece; the lower end of the air pipe connector is fixedly connected with the upper end of the suction cup ventilation pipe, the suction cup ventilation pipe penetrates through the linear bearing, the lower end of the suction cup ventilation pipe is fixedly connected with the suction cup, the linear bearing is arranged in a through hole in the fixing block, and the fixing block is connected with the suction cup through the buffering elastic piece. The fixing assembly is provided with at least two adsorption assemblies. The concentrated stress is uniformly distributed on the slide glass, so that the slide glass is prevented from being broken, the slide glass can be prevented from being broken, and a remarkable effect is achieved.

Description

TECHNICAL FIELD

[0001] The application relates to the technical field of wafer thermal decomposition bonding processes, and particularly relates to a distributed suction chuck device. BACKGROUND

[0002] In the modern wafer thermal decomposition bonding process field, a wafer needs to be separated from a carrier wafer through a thermal decomposition bonding process, and the thermal decomposition bonding process is a common conventional technology for separating the wafer.

[0003] The carrier wafer and the wafer are generally separated by the following method: a lower suction chuck holds the wafer, an upper suction chuck holds the carrier wafer, and the carrier wafer is separated from the wafer by moving the upper suction chuck. The diameter of the suction chuck is smaller than that of the carrier wafer, so that when the carrier wafer is pulled up by the suction chuck, the carrier wafer is subjected to uneven pulling force, and the carrier wafer is often broken during the separation process. In addition, the diameter of the suction chuck is also increased to reduce stress concentration, but due to the unique structure of the suction chuck, the carrier wafer in the suction chuck is bent and deformed due to the action of the suction force, which also causes the risk of breakage. CONTENT OF THE INVENTION

[0004] The application discloses a distributed suction chuck device. In an embodiment of the application, the device comprises an adsorption assembly and a fixing assembly. The adsorption assembly comprises a gas pipe joint, a suction chuck air pipe and a suction chuck. The fixing assembly comprises a linear bearing, a fixing block and a buffer elastic member. The lower end of the gas pipe joint is fixedly connected with the upper end of the suction chuck air pipe. The suction chuck air pipe passes through the linear bearing and is fixedly connected with the suction chuck at the lower end. The linear bearing is arranged in a through hole in the fixing block and can rotate relative to the fixing block. The linear bearing can ensure that the rotation of the gas pipe joint causes the rotation of the suction chuck air pipe, thereby preventing the pipeline from being twisted and disconnected. The fixing block is connected with the suction chuck through the buffer elastic member. When the suction chuck contacts the carrier wafer, the buffer elastic member can buffer and provide a pressure to the suction chuck, thereby making the suction chuck more stable. At least two adsorption assemblies are arranged on the fixing assembly. Multiple adsorption assemblies are arranged to uniformly distribute the stress generated during the adsorption of the suction chuck on the carrier wafer, thereby preventing the carrier wafer from being broken.

[0005] In another embodiment of the application, the suction chuck comprises an elastic member joint, a suction chuck base and a sealing member. The upper end of the elastic member joint is fixedly connected with the buffer elastic member, and the lower end is fixedly connected with the suction chuck base. The sealing member is fixed below the suction chuck base. The lower end of the suction chuck air pipe is connected by penetrating the elastic member joint, the suction chuck base and the sealing member which forms a sealed cavity.

[0006] In another embodiment of the application, the buffer elastic member is a spring or an elastic telescopic rod, which can buffer and stabilize the suction chuck.

[0007] In another embodiment of the application, the air pipe joint is fixedly connected to the upper end of the linear bearing and the fixing assembly by a snap spring, so that the adsorption assembly can rotate relative to the fixing assembly by a certain angle.

[0008] In another embodiment of the application, the lower end of the fixing block is provided with a guide pipe for limiting the direction of the buffer elastic member, which guides the elastic force to be in the up-down direction and prevents the elastic force from being inclined, thereby preventing the slide from being broken due to uneven force.

[0009] In another embodiment of the application, the upper end of the air pipe joint is connected to an air pump for controlling the adsorption and repulsion of the adsorption plate.

[0010] The distribution adsorption plate device disclosed in the application can uniformly distribute the adsorption force on the slide, thereby avoiding the slide from being broken due to uneven distribution of the adsorption force. BRIEF DESCRIPTION OF DRAWINGS

[0011] Figure 1 FIG. 1 is a perspective view of a distribution adsorption plate device according to an embodiment of the application.

[0012] Figure 2 FIG. 2 is a top view of the distribution adsorption plate device according to the embodiment of the application.

[0013] Figure 3 FIG. 3 is a sectional view of the distribution adsorption plate device according to the embodiment of the application in A-A direction. Figure 2

[0014] Figure 4 FIG. 4 is an exploded view of the distribution adsorption plate device according to the embodiment of the application.

[0015] In the figure, the fixing assembly 100, the snap spring 110, the linear bearing 120, the fixing block 130, the through hole 131, the guide pipe 132, the buffer elastic member 140, the adsorption assembly 200, the air pipe joint 210, the adsorption plate air pipe 220, the adsorption plate 230, the elastic member joint 231, the adsorption plate base 232, the sealing member 233, and the slide 300. DETAILED DESCRIPTION

[0016] The application will be described in detail below with reference to the embodiments shown in the drawings, but it should be noted that these embodiments are not limiting to the application, and equivalent changes or substitutions in function, method, or structure made by those skilled in the art based on these embodiments are within the protection scope of the application.

[0017] ​It should be understood that, in the present application, the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the technical solutions and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the technical solutions.

[0018] Referring to Figures 1 to 4 As shown in the drawings, one embodiment of the distributed suction chuck device disclosed in the present application comprises an adsorption assembly 200 and a fixing assembly 100, the adsorption assembly 200 comprises a gas pipe joint 210, a chuck ventilation pipe 220 and a chuck 230, the fixing assembly 100 comprises a linear bearing 120, a fixing block 130 and a buffer elastic member 140; the lower end of the gas pipe joint 210 is fixedly connected with the upper end of the chuck ventilation pipe 220, the chuck ventilation pipe 220 passes through the linear bearing 120, and the lower end is fixedly connected with the chuck 230; the linear bearing 120 is arranged in a through hole 131 in the fixing block 130 and can rotate relative to the fixing block 130, so that the rotation of the gas pipe joint 210 can also make the chuck ventilation pipe 220 rotate, thereby preventing the pipeline from being twisted and broken; the fixing block 130 is connected with the chuck 230 through the buffer elastic member 140, so as to play a buffering role when the chuck 230 contacts with a slide, and also provide a pressure for the chuck 230, so that the chuck 230 is more firm; at least two adsorption assemblies 200 are arranged on the fixing assembly 100, and a plurality of adsorption assemblies 200 are arranged to uniformly distribute the stress generated in the adsorption process of the chuck 230 on the slide 300, so as to prevent the slide 300 from being broken.

[0019] As shown in the drawings, Figure 3 and 4 As shown in the drawings, the chuck comprises an elastic member joint 231, a chuck base 232 and a sealing member 233, the upper end of the elastic member joint 231 is fixedly connected with the buffer elastic member 140, and the lower end is fixedly connected with the chuck base 232; the sealing member 233 is fixed below the chuck base 232, and the lower end of the chuck ventilation pipe 220 passes through the elastic member joint 231, the chuck base 232 and the sealing member 233 to form a sealed cavity.

[0020] As shown in the drawings, Figure 3 As shown in the drawings, the buffer elastic member is a spring or an elastic telescopic rod, which plays a buffering and stabilizing role.

[0021] In one example of the utility model, referring to Figure 2 As shown in the figure, the tracheal joint 210 is fixedly connected with the snap spring 110 on the fixing assembly 100 and the upper end of the linear bearing 120, so that the adsorption assembly 200 can rotate a certain angle relative to the fixing assembly 100.

[0022] In one example of the utility model, referring to Figure 4 As shown in the figure, the lower end of the fixing block 130 is provided with a guide pipe 132 for limiting the direction of the buffer elastic member, the guide pipe 132 guides the elastic force to be in the up-down direction, preventing the elastic force from being inclined, so as to prevent the slide 300 from being broken due to uneven force.

[0023] In another embodiment of the application, the tracheal joint 210 is connected with a gas pump at the upper end, for controlling the adsorption and repulsion of the suction cup 230.

[0024] The above series of detailed descriptions are only specific descriptions of the feasible embodiments of the application, and are not used to limit the protection scope of the application, and equivalent embodiments or changes made without departing from the spirit of the application should be included in the protection scope of the application.

[0025] It is obvious for those skilled in the art that the application is not limited to the details of the above exemplary embodiments, and the application can be realized in other specific forms without departing from the spirit or essential characteristics of the application. Therefore, the embodiments should be regarded as exemplary and non-limiting, and the scope of the application is defined by the appended claims rather than the above description, and all changes falling within the meaning and scope of the equivalent elements of the claims should be included in the application. Any reference signs in the claims should not be regarded as limiting the claims.

[0026] In addition, it should be understood that although the present specification is described in terms of embodiments, not every embodiment contains only one independent technical solution, and the description manner of the specification is only for the sake of clarity, and those skilled in the art should regard the specification as a whole, and the technical solutions in each embodiment can be properly combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A distributed suction chuck device, characterized by, The application relates to a vacuum adsorption device, which comprises: an adsorption assembly and a fixing assembly, wherein the adsorption assembly comprises a tracheal joint, a suction disc air pipe and a suction disc, and the fixing assembly comprises a linear bearing, a fixing block and a buffer elastic piece; a lower end of the tracheal joint is fixedly connected with an upper end of the suction disc air pipe, the suction disc air pipe penetrates through the linear bearing, a lower end of the suction disc air pipe is fixedly connected with the suction disc, the linear bearing is arranged in a through hole of the fixing block, and the fixing block is connected with the suction disc through the buffer elastic piece; at least two adsorption assemblies are arranged on the fixing assembly.

2. Distributed suction chuck device according to claim 1, characterized in that the suction disc comprises an elastic piece joint, a suction disc base and a sealing piece, an upper end of the elastic piece joint is fixedly connected with the buffer elastic piece, a lower end of the elastic piece joint is fixedly connected with the suction disc base, the sealing piece is fixed below the suction disc base, and a lower end of the suction disc air pipe is connected by penetrating through the elastic piece joint, the suction disc base and the sealing piece which forms a sealed cavity.

3. The distributed suction chuck apparatus of claim 1, wherein, the buffer elastic piece is a spring or an elastic telescopic rod.

4. The distributed suction chuck apparatus of claim 1, wherein, the tracheal joint is fixedly connected with the upper end of the linear bearing through a snap spring on the fixing assembly.

5. The distributed suction chuck apparatus of claim 1, wherein, a guide pipe for limiting the direction of the buffer elastic piece is arranged at a lower end of the fixing block.

6. The distributed suction chuck apparatus of claim 1, wherein, an upper end of the tracheal joint is connected with a gas pump.

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