Source bottle device

Abstract

The utility model relates to a source bottle device which comprises a bottle body with a containing cavity. One end of the guide pipe is located outside the containing cavity, and the other end of the guide pipe extends into the containing cavity; the liquid injection pipeline and the liquid discharge pipeline are connected to the end, located outside the containing cavity, of the guide pipe in parallel through pipelines, the liquid injection pipeline is used for injecting a chemical source into the containing cavity, and the liquid discharge pipeline is used for discharging the chemical source in the containing cavity. According to the source bottle device, the injection of the chemical source is realized through the liquid injection pipeline and the guide pipe, and the emptying of the chemical source is realized through the liquid discharge pipeline and the guide pipe, so that the automatic emptying of the chemical source is realized, the bottle body does not need to be manually disassembled, the chemical source in the bottle body does not need to be manually poured out, and the use convenience of the source bottle device is improved. In addition, the liquid injection pipeline and the liquid discharge pipeline are arranged at one end of the conduit in parallel, so that liquid in the liquid injection pipeline and the liquid discharge pipeline cannot interfere with each other and pollute each other.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of mechanical manufacturing, in particular to a source bottle device. BACKGROUND

[0002] In order to provide an ideal environment for the storage of chemical sources and facilitate the delivery of chemical sources, in the fields of semiconductors, photovoltaics, etc., chemical sources are usually stored in source bottles. A source bottle usually includes a bottle body, a pipeline, and a valve provided on the pipeline. The valve can control the opening and closing of the pipeline, thereby realizing the input and output of chemical sources.

[0003] However, when it is necessary to clean the chemical sources inside the source bottle, the operator needs to completely detach the bottle body from the pipeline, and then pour out all the chemical sources in the bottle body. It can be seen that the cleaning process of the source bottle is relatively cumbersome, which reduces the production efficiency. CONTENT OF THE UTILITY MODEL

[0004] Therefore, it is necessary to provide a source bottle device which is easy to clean in view of the problem that the source bottle is not easy to clean.

[0005] The present application provides a source bottle device, which comprises:

[0006] a bottle body having a containing cavity;

[0007] a conduit, one end of which is located outside the containing cavity and the other end of which extends into the containing cavity; and

[0008] a liquid injection pipeline and a liquid discharge pipeline, which are connected in parallel to one end of the conduit located outside the containing cavity, the liquid injection pipeline being used for injecting chemical sources into the containing cavity, and the liquid discharge pipeline being used for discharging chemical sources in the containing cavity.

[0009] In one of the embodiments, the source bottle device further comprises a gas inlet pipeline, which is connected to the containing cavity and is used for introducing gas into the containing cavity.

[0010] In one of the embodiments, the liquid injection pipeline is provided with a first on-off control unit, which can be controlled to switch between a conduction state and a closed state, and is used for controlling the opening and closing of the liquid injection pipeline.

[0011] In one of the embodiments, the liquid discharge pipeline is provided with a second on-off control unit, which can be controlled to switch between a conduction state and a closed state, and is used for controlling the opening and closing of the liquid discharge pipeline.

[0012] In one of the embodiments, the containing cavity comprises a cavity bottom wall and a cavity side wall extending from the edge of the cavity bottom wall in a direction opposite to the direction of gravity, the cavity side wall circumferentially surrounds the cavity bottom wall to define the containing cavity;

[0013] The end of the conduit extending into the accommodating cavity extends towards the cavity bottom wall.

[0014] In one of the embodiments, the cavity bottom wall has a part area with a height in the direction of gravity lower than the rest of the cavity bottom wall, and the end of the conduit extends to the lowest part of the cavity bottom wall.

[0015] In one of the embodiments, the cavity bottom wall extends downwardly in the direction of gravity from the edge connected to the cavity side wall and away from the cavity side wall.

[0016] In one of the embodiments, the cavity bottom wall is a spherical cap surface or a conical surface concaved downwardly in the direction of gravity.

[0017] In one of the embodiments, the lowest part of the cavity bottom wall is provided with a converging groove, and the end of the conduit extends into the converging groove.

[0018] In one of the embodiments, the end of the conduit near the converging groove is bent.

[0019] The source bottle device realizes injection of the chemical source through the liquid injection pipeline and the conduit, and realizes emptying of the chemical source through the liquid discharge pipeline and the conduit, so as to realize automatic emptying of the chemical source without relying on manual disassembly of the bottle body and manual pouring of the chemical source in the bottle body, and the use convenience of the source bottle device is improved. Moreover, since the liquid injection pipeline and the liquid discharge pipeline are arranged in parallel at one end of the conduit, the liquids in the two pipelines will not interfere with and contaminate each other. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 FIG. 1 is a structural schematic diagram of a source bottle device according to an embodiment of the present application.

[0021] Figure 2 FIG. 2 is a schematic diagram of a source bottle device according to another embodiment of the present application.

[0022] Figure 3 FIG. 3 is a schematic diagram of a source bottle device according to another embodiment of the present application.

[0023] Figure 4 FIG. 4 is a schematic diagram of a source bottle device according to another embodiment of the present application.

[0024] Figure 5 FIG. 5 is a schematic diagram of a source bottle device according to an embodiment of the present application.

[0025] Figure 6 FIG. 6 is a schematic diagram of a source bottle device according to another embodiment of the present application.

[0026] BRIEF DESCRIPTION OF DRAWINGS

[0027] 100, source bottle device; 120, bottle body; 121, accommodating cavity; 1212, cavity bottom wall; 1212a, flow collection groove; 1214, cavity top wall; 1216, cavity side wall; 140, conduit; 141, third valve; 160, liquid injection pipeline; 161, first valve; 180, liquid discharge pipeline; 181, second valve; 190, air inlet pipeline. DETAILED DESCRIPTION

[0028] In order to make the above objectives, features and advantages of the present application more apparent, specific embodiments of the present application will be described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application. However, the present application can be practiced in a variety of ways beyond the specific embodiments described herein, and it is understood that similar modifications of the present application can be constructed by those skilled in the art without departing from the scope of the present application, and therefore the present application is not limited to the specific embodiments disclosed below.

[0029] In the description of the present application, it should be understood that if these terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like appear, these terms indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the purpose of facilitating the description of the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0030] In addition, if these terms "first", "second" appear, these terms are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features limited by "first", "second" can explicitly or implicitly include at least one of the features. In the description of the present application, if the term "a plurality of" appears, the meaning of "a plurality of" is at least two, for example, two, three, etc., unless otherwise explicitly specified.

[0031] In the present application, unless otherwise explicitly specified and limited, if the terms "mounting", "connecting", "connecting", "fixing" and the like appear, these terms should be understood in a broad sense. For example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements, unless otherwise explicitly limited. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0032] In this application, unless otherwise explicitly specified and limited, if there is a description of a first feature "on" or "under" a second feature, etc., it can mean that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature "on", "above" and "over" the second feature can be that the first feature is directly above or obliquely above the second feature, or only means that the first feature is higher in horizontal height than the second feature. The first feature "under", "below" and "under" the second feature can be that the first feature is directly below or obliquely below the second feature, or only means that the first feature is lower in horizontal height than the second feature.

[0033] It should be noted that if an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or there can be an intermediate element. If an element is considered to be "connected" to another element, it can be directly connected to the other element or there can be an intermediate element. If present, the terms "vertical", "horizontal", "upper", "lower", "left", "right", and similar expressions used herein are for illustrative purposes only and do not indicate the only implementation.

[0034] Referring to Figure 1 , Figure 1 Fig. 1 shows a schematic view of a source bottle device according to an embodiment of the present application, Figure 2 Fig. 1 shows a schematic view of a source bottle device according to an embodiment of the present application,

[0035] Specifically, the bottle body 120 forms a receiving cavity 121 therein for receiving the chemical source. The conduit 140 is a hollow tubular structure with both ends open, one end of the conduit 140 is located outside the receiving cavity 121, and the other end of the conduit 140 extends into the receiving cavity 121. One end of the liquid injection pipeline 160 is connected to the end of the conduit 140 located outside the receiving cavity 121, and the other end of the liquid injection pipeline 160 is connected to a liquid injection system (not shown in the figure) for injecting the chemical source into the receiving cavity 121.

[0036] As described in the background, when the chemical source needs to be injected, the liquid injection pipeline 160 is turned on to achieve the injection of the chemical source, but when the chemical source needs to be emptied, the entire bottle body 120 needs to be removed and the chemical source in the receiving cavity 121 needs to be poured out. If the liquid injection pipeline 160 is used to empty the chemical source, it may cause the chemical source to return to the liquid injection system through the liquid injection pipeline 160 and pollute other chemical sources. To put it another way, even if the chemical source returns to the waste liquid bottle of the liquid injection system, it will also waste the chemical source in the common pipeline.

[0037] Based on the above technical problems, as shown in Figure 1 and Figure 2 The source bottle device 100 of the present application further comprises a liquid discharge pipeline 180, the liquid injection pipeline 160 and the liquid discharge pipeline 180 are connected in parallel to one end of the conduit 140 outside the accommodating cavity 121 through a pipeline, and the liquid discharge pipeline 180 is used to discharge the chemical source in the accommodating cavity 121.

[0038] In this way, the source bottle device 100 of the present application realizes the injection of the chemical source through the liquid injection pipeline 160 and the conduit 140, and realizes the emptying of the chemical source through the liquid discharge pipeline 180 and the conduit 140, thereby realizing the automatic emptying of the chemical source without relying on manual disassembly of the bottle body 120 and manual pouring of the chemical source in the bottle body 120, thereby improving the use convenience of the source bottle device 100. Moreover, since the liquid injection pipeline 160 and the liquid discharge pipeline 180 are arranged in parallel at one end of the conduit 140, the liquids in the two pipelines will not interfere with and contaminate each other.

[0039] Further in some embodiments, the source bottle device further comprises a gas inlet pipeline 190, which is selectively in communication with the accommodating cavity 121, and when the chemical source in the source bottle device 100 is discharged, the gas inlet pipeline 190 is used to introduce gas into the accommodating cavity 121 to increase the gas pressure in the accommodating cavity 121, so that the chemical source in the bottle body 120 is discharged through the liquid discharge pipeline 180 and the conduit 140.

[0040] Specifically in some embodiments, the liquid injection pipeline 160 is provided with a first on-off control unit 161, which is a valve, and the first on-off control unit 161 is controllably switched between the on state and the off state to control the on-off of the liquid injection pipeline 160. The liquid discharge pipeline 180 is provided with a second on-off control unit 181, which is a valve, and the second on-off control unit 181 is controllably switched between the on state and the off state to control the on-off of the liquid injection pipeline 160. One end of the conduit 140 connected to the liquid injection pipeline 160 and the liquid discharge pipeline 180 is further provided with a third on-off control unit 141, which is a valve, and the third on-off control unit 141 is controllably switched between the on state and the off state to control the on-off of the conduit 140.

[0041] Thus, by controlling the working states of the first on-off control unit 161, the second on-off control unit 181 and the third on-off control unit 141, the communication states of different pipelines can be controlled, and the injection and emptying of the chemical source can be automatically realized. Specifically, when it is needed to inject the chemical source into the accommodating cavity 121 of the bottle body 120, the first on-off control unit 161 and the third on-off control unit 141 are both in the open state, and the second on-off control unit 181 is in the closed state, so that the injection system injects the chemical source into the bottle body 120 through the injection pipeline 160 and the guide pipe 140. When it is needed to empty the chemical source in the accommodating cavity 121 of the bottle body 120, the second on-off control unit 181 and the third on-off control unit 141 are both in the open state, and the first on-off control unit 161 is in the closed state, so that the chemical source in the bottle body 120 is discharged through the guide pipe 140 and the drainage pipeline 180.

[0042] Specifically, in some embodiments, the bottle body 120 comprises a bottle body bottom wall, a bottle body side wall extending from the edge of the bottle body bottom wall in the same direction, and a bottle body top wall arranged at the end of the bottle body side wall away from the bottom wall. The bottle body bottom wall, the bottle body side wall and the bottle body top wall jointly enclose a containing cavity 121. The inner surface of the bottle body bottom wall forms a cavity bottom wall 1212 of the containing cavity 121, the inner surface of the bottle body side wall forms a cavity side wall 1216 of the containing cavity 121, and the inner surface of the bottle body top wall forms a cavity top wall 1214 of the containing cavity 121. In the following embodiments, when the source bottle device 100 is in the normal working state, the cavity bottom wall 1212 is located below the cavity top wall 1214 in the direction of gravity. The bottom of the containing cavity 121 refers to the end of the containing cavity 121 provided with the cavity bottom wall 1212, and the top of the containing cavity 121 refers to the end of the containing cavity 121 provided with the cavity top wall 1214.

[0043] As shown in FIG. 1, Figure 2 in some embodiments, the cavity bottom wall 1212 is a horizontally extending plane. One end of the guide pipe 140 extends into the containing cavity 121 through the cavity top wall 1214 and extends towards the cavity bottom wall 1212 until the bottom of the containing cavity 121, so that the guide pipe 140 sucks the chemical source from the bottom of the containing cavity 121, thereby effectively reducing the residual amount of the chemical source in the containing cavity 121.

[0044] In combination with FIGS. 1, Figure 1 , Figure 3 and Figure 4 , FIG. 2 shows a schematic diagram of a source bottle device in an embodiment of the present application, Figure 3 FIG. 3 shows a schematic diagram of a source bottle device in an embodiment of the present application. Figure 4 FIG. 3 shows a schematic diagram of a source bottle device in an embodiment of the present application.

[0045] In other embodiments, a portion of the bottom wall 1212 is lower in the direction of gravity than the rest of the bottom wall 1212, causing the chemical source at the bottom of the cavity 121 to converge towards the lower part of the bottom wall 1212. One end of the catheter 140 extends into the cavity 121 through the top wall 1214 and extends towards the lowest point of the bottom wall 1212, thereby facilitating the removal of residual chemical sources.

[0046] Specifically, in some embodiments, the bottom wall 1212 extends downwards along the direction of gravity from the edge connecting to the side wall 1216, away from the side wall 1216. Therefore, residual chemical sources at the edge of the bottom wall 1212 converge towards the lowest point of the bottom wall 1212 under the influence of gravity, and one end of the catheter 140 corresponds to the lowest point of the bottom wall 1212 to extract the chemical source. In a preferred embodiment, the bottom wall 1212 extends downwards along the direction of gravity from the edge connecting to the side wall 1216 towards the center of the bottom wall 1212, thus the lowest point of the bottom wall 1212 is located at the center of the bottom wall 1212. It is understood that the lowest point of the bottom wall 1212 can also be located at other positions on the bottom wall 1212, which is not limited here.

[0047] like Figure 3 As shown, more specifically in one embodiment, the cavity bottom wall 1212 has a spherical cap surface that is concave downwards along the direction of gravity. Figure 4 As shown, in another embodiment, the cavity bottom wall 1212 is a conical surface that is concave downwards under the influence of gravity. It is understood that the shape of the cavity bottom wall 1212 is not limited to this, and can be set to different shapes as needed, as long as it can guide the chemical source to gather at a certain point on the cavity bottom wall 1212.

[0048] Combination Figure 1 , Figure 5 as well as Figure 6 As shown, Figure 5 A schematic diagram of the source bottle device in one embodiment of this application is shown. Figure 6 A schematic diagram of a source bottle device according to an embodiment of this application is shown.

[0049] In some embodiments, a portion of the cavity bottom wall 1212 has a lower height in the direction of gravity than the rest of the cavity bottom wall 1212. A manifold 1212a is formed at the lowest point of the cavity bottom wall 1212 in the direction of gravity, and one end of the conduit 140 extends into the manifold 1212a. In this way, the remaining chemical source in the receiving cavity 121 converges into the manifold 1212a under the action of gravity, and the conduit 140 can extract the chemical source in the manifold 1212a, thereby significantly reducing the residual chemical source in the receiving cavity 121.

[0050] Furthermore, the shape of the cross-section of the manifold 1212a perpendicular to the extension direction of the conduit 140 matches the cross-section of the conduit 140, and the inner diameter of the manifold 1212a is larger than the outer diameter of the conduit 140, so one end of the conduit 140 can extend into the manifold 1212a. It can be understood that the inner diameter of the manifold 1212a can be as small as possible while meeting the requirements for conduit 140 insertion and chemical source collection, thereby minimizing the amount of residual chemical source in the manifold 1212a.

[0051] Specifically, in some embodiments, the bottom wall 1212 extends downward in the direction of gravity from the edge connecting to the side wall 1216 away from the side wall 1216, so the manifold 1212a is formed at the lowest point of the bottom wall 1212. One end of the conduit 140 passing through the top wall 1214 is located at the edge of the top wall 1214, and the end of the conduit 140 near the manifold 1212a is bent and extended to be inserted into the manifold 1212a located at the lowest point of the bottom wall 1212.

[0052] like Figure 5 As shown, in one embodiment, the bottom wall 1212 is a spherical cap surface that is concave downwards along the direction of gravity. The highest point of the bottom wall 1212 in the direction of gravity is located at the edge where the bottom wall 1212 connects to the side wall 1216, and the lowest point of the bottom wall 1212 is located at the center of the bottom wall 1212. A manifold 1212a is formed at the center of the bottom wall 1212, that is, at the lowest point in the direction of gravity, and one end of the conduit 140 extends into the manifold 1212a. In this way, residual chemical sources on the bottom wall 1212 can be collected along the bottom wall 1212 into the manifold 1212a under the action of gravity, thereby reducing the amount of residual chemical sources in the accommodating cavity 121 to a minimum.

[0053] like Figure 6 As shown, in another embodiment, the bottom wall 1212 is a conical surface that is concave downwards under gravity. The highest point of the bottom wall 1212 in the direction of gravity is located at the edge where the bottom wall 1212 connects to the side wall 1216, and the lowest point of the bottom wall 1212 is located at the center of the bottom wall 1212. A manifold 1212a is formed at the center of the bottom wall 1212, that is, at the lowest point in the direction of gravity, and one end of the conduit 140 extends into the manifold 1212a. In this way, residual chemical sources on the bottom wall 1212 can be collected along the bottom wall 1212 under the action of gravity and flow into the manifold 1212a, thereby reducing the amount of residual chemical sources in the accommodating cavity 121 to a minimum.

[0054] It is understood that in some other embodiments, since the lowest point of the cavity bottom wall 1212 is not located at the center of the cavity bottom wall 1212, the location of the manifold 1212a is not limited to the center of the cavity bottom wall 1212, and can be set as needed to meet different requirements.

[0055] In some embodiments, the conduit 140 is sealed and fixedly connected to the bottle body 120 by welding or the like. In a specific embodiment, the conduit 140 is fixedly connected to the bottle top wall of the bottle body 120 by welding or the like. In other embodiments, the conduit 140 is fixedly connected to the bottle side wall of the bottle body 120 by welding or the like. It can be understood that the fixed connection of the conduit 140 to the bottle body 120 is not limited to the above, and can be set as needed to meet different connection requirements.

[0056] Further in some embodiments, the end of the conduit 140 extending into the bottom of the accommodating cavity 121 is fixed relative to the bottle body 120 by a buckle or the like limiting structure, so as to prevent the conduit 140 from moving and weakening the extraction effect.

[0057] The above source bottle device 100 realizes the automatic liquid injection and automatic liquid discharge functions by the parallelly arranged liquid injection pipeline 160 and liquid discharge pipeline 180, without the need to disassemble the bottle body 120 to pour out the chemical source. Moreover, due to the height difference of the different regions of the cavity bottom wall 1212 of the accommodating cavity 121, the residual chemical source can be gathered to facilitate the extraction by the conduit 140, so as to reduce the chemical source in the accommodating cavity 121 to the minimum amount.

[0058] The technical features of the above embodiments can be combined arbitrarily. In order to make the description concise, all possible combinations of the technical features in the above embodiments are not described, however, as long as the combinations of the technical features do not exist contradictory, they should be considered as the scope of the present application.

[0059] The above embodiments only express several implementation manners of the present application, and the description is relatively specific and detailed, but it should not be understood as a limitation on the patent scope of the application. It should be pointed out that for ordinary skilled in the art, without departing from the concept of the present application, a number of modifications and improvements can be made, which are all within the protection scope of the present application. Therefore, the patent protection scope of the present application should be subject to the appended claims.

Claims

1. A source bottle apparatus, characterized by, The source bottle device comprises: a bottle body having a receiving cavity; a conduit having one end outside the receiving cavity and the other end extending into the receiving cavity; and a liquid injection line and a liquid discharge line connected in parallel to the conduit outside the receiving cavity, the liquid injection line being used for injecting a chemical source into the receiving cavity, and the liquid discharge line being used for discharging the chemical source in the receiving cavity.

2. The source bottle apparatus of claim 1, wherein, The source bottle device further comprises a gas inlet line connected to the receiving cavity for introducing gas into the receiving cavity.

3. The source bottle apparatus of claim 1, wherein, The liquid injection line is provided with a first on-off control unit capable of being controlled to switch between an on state and an off state for controlling the on-off of the liquid injection line.

4. The source bottle arrangement according to claim 2 or 3, characterized in that The liquid discharge line is provided with a second on-off control unit capable of being controlled to switch between an on state and an off state for controlling the on-off of the liquid discharge line.

5. The source bottle apparatus of claim 1, wherein, The receiving cavity comprises a cavity bottom wall and a cavity side wall extending from the edge of the cavity bottom wall in a direction away from the gravity direction, the cavity side wall circumferentially surrounds the cavity bottom wall to define the receiving cavity. The end of the conduit extending into the receiving cavity extends towards the cavity bottom wall.

6. The source bottle apparatus of claim 5, wherein, The height of a part of the cavity bottom wall in the gravity direction is lower than the height of the remaining part of the cavity bottom wall in the gravity direction, and the end of the conduit extends to the lowest part of the cavity bottom wall.

7. The source bottle apparatus of claim 6, wherein, The cavity bottom wall extends downward in the gravity direction away from the cavity side wall from the edge connected to the cavity side wall.

8. The source bottle apparatus of claim 7, wherein, The cavity bottom wall is a spherical cap surface or a conical surface concave downward in the gravity direction.

9. The source bottle arrangement of any one of claims 7 or 8, wherein, The lowest part of the cavity bottom wall is provided with a flow collection groove, and the end of the conduit extends into the flow collection groove.

10. The source bottle apparatus of claim 9, wherein, The end of the conduit near the flow collection groove is bent and extends.

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