Fixing suction cup convenient to install and used for wafer detection

Abstract

The utility model discloses a convenient-to-install fixed suction cup for wafer detection, which belongs to the technical field of wafer detection and comprises a box body, a worm is rotatably connected onto the box body, a worm gear is meshed on the worm, a rotating shaft is fixedly connected onto the worm gear, and a turntable is fixedly connected onto the rotating shaft. According to the convenient-to-install fixed suction cup for wafer detection, through the arrangement of the inclined groove, the straight groove, the worm gear, the worm and the rotating handle, when the distance between the four suction cup assemblies needs to be adjusted, the rotating handle is rotated to drive the worm, the worm gear, the rotating shaft and the rotating disc to rotate, when the rotating disc rotates, the inclined groove can rotate along with the rotating disc, and the movable column is driven by the inclined groove and the straight groove to move. According to the fixed suction cup, the four movable columns move synchronously, the four movable columns drive the four suction cup assemblies to move, so that the distance between the four suction cup assemblies is adjusted, the fixed suction cup can be adjusted according to wafers of different sizes by adjusting the distance between the four suction cup assemblies, the fixed suction cup can be suitable for the wafers of different sizes, and the universality is wider.

Description

TECHNICAL FIELD

[0001] The utility model belongs to wafer detection technical field, concretely is a kind of wafer detection fixed chuck convenient to install. BACKGROUND

[0002] Wafer detection equipment is a kind of high-precision semiconductor special process equipment that can detect defects on wafer surface, and through detection, product defects caused by process, equipment and environment during integrated circuit manufacturing process can be found in time, so as to improve product yield, and wafer detection equipment needs to use wafer detection fixed chuck when detecting wafer.

[0003] The existing wafer detection fixed chuck is generally designed in one piece, and wafer models are different, and sizes are also different, so the one-piece fixed chuck is difficult to adjust according to wafer of different sizes, which makes it difficult to be applicable to wafer of different sizes, and the versatility is narrow. UTILITY MODEL CONTENTS

[0004] In order to overcome the above defects, the utility model provides a wafer detection fixed chuck convenient to install, which solves the problem that the existing one-piece wafer detection fixed chuck is difficult to adjust according to wafer of different sizes, which makes it difficult to be applicable to wafer of different sizes, and the versatility is narrow.

[0005] In order to achieve the above purpose, the utility model provides the following technical scheme: a wafer detection fixed chuck convenient to install, comprising a box body, a worm is rotatably connected to the box body, a worm wheel is engaged with the worm, a rotating shaft is fixedly connected to the worm wheel, a rotating disc is fixedly connected to the rotating shaft, four inclined grooves are formed in the rotating disc, and four straight grooves are formed in the box body.

[0006] Four moving columns are slidably connected to the box body, the moving columns are arranged inside the straight grooves and the inclined grooves, a second limiting plate is fixedly connected to the moving column, a first limiting plate is fixedly connected to the moving column, a sleeve is sleeved on the moving column, and a chuck assembly is arranged on the sleeve.

[0007] As a further scheme of the utility model: one end of the worm is fixedly connected with a handle, and two screws are threadedly connected to the sleeve.

[0008] As a further scheme of the utility model: a limiting hole is formed in the moving column, and the limiting hole corresponds to the position of the screw.

[0009] As a further scheme of the utility model: a plurality of grooves are formed in the screw, and the screw is made of stainless steel.

[0010] As a further scheme of the utility model: the second limiting plate is located at the top of the rotating disc, and the first limiting plate is located at the bottom of the box body.

[0011] As a further scheme of the utility model: the rotating shafts are rotatably connected at both ends in the box body, and the rotating disc is located inside the box body.

[0012] Compared with the prior art, the utility model has the beneficial effects that:

[0013] 1、This fixed chuck for wafer detection convenient to install, through setting up inclined slot, straight slot, worm gear, worm and steering handle, when needing to adjust the interval of four suction disc assemblies, rotating steering handle drives worm gear, worm gear, shaft and rotating disc to rotate, when rotating disc rotates, inclined slot will rotate along with rotating disc, under the guidance of inclined slot and straight slot, four moving columns move synchronously, four moving columns drive four suction disc assemblies to move, thereby adjust the interval of four suction disc assemblies, this fixed chuck can adjust according to different size wafer, can be applicable to different size wafer, and the universality is wider.

[0014] 2、This fixed chuck for wafer detection convenient to install, through setting up sleeve, screw and limiting hole, when needing to replace suction disc assembly, rotating screw makes screw move outward, makes screw separate from inside limiting hole, removes the fixed state of suction disc assembly, can detach suction disc assembly, at this time, sleeve on new suction disc assembly is sleeved on moving column, rotating screw makes screw move inward, when screw is inserted into limiting hole, can install and fix suction disc assembly, thus complete the replacement work of suction disc assembly, this fixed chuck can quickly install and detach suction disc assembly, thereby being convenient for replacing damaged suction disc assembly. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 It is the structure schematic diagram of the utility model three-dimensional structure;

[0016] Figure 2 It is the structure schematic diagram of the box body section of the utility model;

[0017] Figure 3 It is the structure schematic diagram of the rotating disc and moving column separation of the utility model;

[0018] Figure 4 It is the structure schematic diagram of the moving column and sleeve separation of the utility model;

[0019] In the drawing: 1, box body;2, straight slot;3, suction disc assembly;4, steering handle;5, worm;6, worm gear;7, rotating disc;8, inclined slot;9, moving column;10, sleeve;11, screw;12, limiting hole;13, rotating shaft;14, first limiting plate;15, second limiting plate. DETAILED DESCRIPTION

[0020] The technical solutions of the patent will be further described in detail in combination with the specific embodiments.

[0021] As Figures 1-4 The utility model provides a kind of fixed chuck for wafer detection convenient to install, including box body 1, worm 5 is rotatably connected on box body 1, worm 5 is engaged with worm wheel 6, one end of worm 5 is fixedly connected with handlebar 4, because of being equipped with handlebar 4, four screw 11 is screwed on sleeve 10, four screw 11 is screwed on sleeve 10.

[0022] Worm wheel 6 is fixedly connected with shaft 13, shaft 13 is fixedly connected with turntable 7, four inclined grooves 8 are formed in turntable 7, four straight grooves 2 are formed in box body 1, both ends of shaft 13 are rotatably connected in box body 1, and turntable 7 is located inside box body 1.

[0023] Four moving columns 9 are slidably connected to box body 1, moving column 9 is arranged inside straight groove 2 and inclined groove 8, second limiting plate 15 is fixedly connected to moving column 9, second limiting plate 15 is located at the top of turntable 7, and first limiting plate 14 is located at the bottom of box body 1.

[0024] First limiting plate 14 is fixedly connected to moving column 9, first limiting plate 14 cooperates with second limiting plate 15 to support and limit moving column 9, thereby improving the stability of moving column 9, sleeve 10 is sleeved on moving column 9, suction cup assembly 3 is arranged on sleeve 10, limiting hole 12 is formed in moving column 9, limiting hole 12 corresponds to the position of screw 11, and a plurality of grooves are formed in screw 11.

[0025] The working principle of the utility model is as follows:

[0026] When it is necessary to adjust the distance between four suction cup assemblies 3, handlebar 4 is rotated to drive worm 5, worm wheel 6, shaft 13 and turntable 7 to rotate, when turntable 7 rotates, inclined groove 8 will rotate with turntable 7, moving column 9 moves synchronously under the guidance of inclined groove 8 and straight groove 2, four moving columns 9 drive four suction cup assemblies 3 to move, thereby adjusting the distance between four suction cup assemblies 3.

[0027] When the suction cup assembly 3 needs to be replaced, the screw 11 is rotated to move the screw 11 outward, so that the screw 11 is separated from the inside of the limiting hole 12, the fixing state of the suction cup assembly 3 is released, the suction cup assembly 3 can be disassembled, at this time, the sleeve 10 on the new suction cup assembly 3 is sleeved on the moving column 9, the screw 11 is rotated to move the screw 11 inward, when the screw 11 is inserted into the limiting hole 12, the suction cup assembly 3 can be installed and fixed, and the replacement work of the suction cup assembly 3 is completed.

[0028] In the description of the utility model, it is necessary to explain that, unless there is definite stipulation and limitation, the term "installation", "connection" should be broad sense understanding, for example, can be fixed connection, also can be detachable connection, or integrally connected, can be mechanical connection, also can be electrical connection, can be directly connected, also can be indirectly connected through intermediate medium, can be the communication of two elements inside, for the ordinary skilled in the art, the specific meaning of the above-mentioned term in the utility model can be understood according to specific circumstances.

[0029] The preferred embodiment of the patent is described above in detail, but the patent is not limited to the above-mentioned embodiment, within the knowledge range of the ordinary skilled in the art, various changes can be made without departing from the purpose of the patent.

Claims

1. A wafer inspection fixing chuck that is easy to install, comprising a housing (1), characterized in that: A worm gear (5) is rotatably connected to the box body (1), a worm wheel (6) is meshed on the worm gear (5), a rotating shaft (13) is fixedly connected to the worm wheel (6), a turntable (7) is fixedly connected to the rotating shaft (13), four inclined grooves (8) are opened on the turntable (7), and four straight grooves (2) are opened on the box body (1). Four movable columns (9) are slidably connected to the box body (1). The movable columns (9) are set inside the straight groove (2) and the inclined groove (8). A second limiting plate (15) is fixedly connected to the movable column (9). A first limiting plate (14) is fixedly connected to the movable column (9). A sleeve (10) is sleeved on the movable column (9). A suction cup assembly (3) is provided on the sleeve (10).

2. The wafer inspection fixing chuck as described in claim 1, characterized in that: One end of the worm (5) is fixedly connected to a throttle (4), and two screws (11) are threaded onto the sleeve (10).

3. A wafer inspection fixing chuck for easy installation according to claim 2, characterized in that: The movable column (9) has a limiting hole (12) which corresponds to the position of the screw (11).

4. A wafer inspection fixing chuck for easy installation according to claim 2, characterized in that: The screw (11) has several grooves and is made of stainless steel.

5. A wafer inspection fixing chuck for easy installation according to claim 1, characterized in that: The second limiting plate (15) is located at the top of the turntable (7), and the first limiting plate (14) is located at the bottom of the box (1).

6. A wafer inspection fixing chuck for easy installation according to claim 1, characterized in that: Both ends of the rotating shaft (13) are rotatably connected inside the box (1), and the turntable (7) is located inside the box (1).

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