Air inlet pipe mounting tool

Abstract

The utility model relates to an air inlet pipe mounting tool which comprises a tool pipe, the tool pipe comprises a connector, a sleeve and an extension rod, one end of the sleeve is detachably connected with one end of the extension rod through the connector, the sleeve is used for allowing part of an air inlet pipe to be inserted, and the extension rod is detachably connected with the connector. The connector is used for being connected with the end, stretching into the sleeve, of the air inlet pipe in an abutting mode. The gas inlet pipe can push the tool pipe to retreat out of the furnace tube through the connector, and the furnace tube can guide the gas inlet pipe in the retreating process, so that the gas inlet pipe can sequentially penetrate through the hanging rings, and meanwhile, the gas inlet pipe can be prevented from poking the hanging rings or damaging quartz pieces such as the furnace tube and a thermocouple sleeve.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of solar cell manufacturing equipment, in particular to an air inlet pipe installation tool. BACKGROUND

[0002] LPCVD (Low Pressure Chemical Vapor Deposition) is a technology of forming stable solid thin film by heating gaseous compounds to react and deposit on the surface of silicon wafer under low pressure condition. The quartz furnace tube is used in the LPCVD equipment of solar cell, and multiple hangers are arranged on the inner wall of the furnace tube at intervals, and the air inlet pipe and the thermocouple sleeve are suspended on the hangers. Due to the situations such as powder falling, air inlet hole blocking and sleeve fracture, the new air inlet pipe and thermocouple sleeve need to be frequently replaced.

[0003] However, since the air inlet pipe is generally an elongated stainless steel air inlet pipe with a diameter of 10 mm and a length greater than 3 m, when the air inlet pipe is installed, the air inlet pipe is easy to be bent and deformed under the action of gravity, and it is difficult to pass through multiple hangers in sequence, and it is easy to knock off the hangers or damage the quartz pieces such as furnace tube and thermocouple sleeve. CONTENT OF THE INVENTION

[0004] Therefore, it is necessary to provide an air inlet pipe installation tool aiming at the problems of difficult installation and easy damage of furnace tube and other quartz pieces.

[0005] An air inlet pipe installation tool for installing an air inlet pipe into a furnace tube, the air inlet pipe installation tool comprising a tool pipe, the tool pipe comprising a joint, a sleeve and an elongated rod, one end of the sleeve and one end of the elongated rod being detachably connected through the joint, the sleeve being used for partially inserting the air inlet pipe, and the joint being used for abutting with one end of the air inlet pipe.

[0006] In one of the embodiments, the joint comprises an intermediate section and connecting sections arranged at both ends of the intermediate section respectively, and the two connecting sections respectively extend into the sleeve and the elongated rod.

[0007] In one of the embodiments, the connecting section comprises:

[0008] a first connecting section, a screw hole being formed on the first connecting section along the radial direction of the sleeve;

[0009] a second connecting section, the second connecting section being arranged at an interval along the radial direction of the sleeve from the first connecting section; and

[0010] a screw passing through the screw hole and used for pushing the second connecting section, so that the second connecting section moves to the side away from the first connecting section.

[0011] In one of the embodiments, the second connecting section is an elastic plate, and the first connecting section and the second connecting section are both connected with the intermediate section.

[0012] In one of the embodiments, the sleeve and the elongated rod are respectively provided with a clearance hole, and the screw is used to extend into the screw hole of the first connecting section from the clearance hole.

[0013] In one of the embodiments, the sleeve and the elongated rod are mutually butted outside the middle section, and the outer diameter of the sleeve is the same as that of the elongated rod.

[0014] In one of the embodiments, the elongated rod comprises a plurality of rod sections connected in sequence, and adjacent two rod sections are detachably connected.

[0015] In one of the embodiments, the air inlet pipe installation tool further comprises a support seat, and the support seat is provided with a support rail, the tool pipe is arranged on the support rail, and the support rail is used to support the tool pipe, so that the tool pipe has the same installation height as the air inlet pipe of the furnace pipe.

[0016] In one of the embodiments, the air inlet pipe installation tool further comprises a height adjusting mechanism, and the support seat is arranged on the height adjusting mechanism.

[0017] In one of the embodiments, the ratio of the length of the sleeve to the length of the elongated rod is 1:4-1:6.

[0018] In actual use, the air inlet pipe installation tool is used in the following manner. First, the sleeve and the elongated rod are connected through the joint, then the sleeve end of the tool pipe is aligned with the furnace opening position of the furnace pipe, and then the tool pipe is sequentially passed through a plurality of lifting rings along the length direction of the furnace pipe until the sleeve of the tool pipe extends out of the tail end cover of the furnace pipe. Then, one end of the air inlet pipe is extended into the sleeve, and the air inlet pipe is slowly pushed forward until the air inlet pipe abuts against the joint. The air inlet pipe is continuously pushed forward to push the elongated rod through the joint, so that the elongated rod gradually exits from the furnace opening until the entire air inlet pipe enters the furnace pipe. At this time, the tool pipe can be pulled out. BRIEF DESCRIPTION OF DRAWINGS

[0019] Fig. 1 It is a structural schematic view of the tool pipe in one of the embodiments.

[0020] Fig. 2 It is a structural schematic view of the joint in one of the embodiments.

[0021] Fig. 3 It is a structural schematic view of the support seat and the furnace pipe in one of the embodiments.

[0022] 100, sleeve; 110, escape hole;

[0023] 200, joint; 210, intermediate section; 220, connecting section; 221, first connecting section; 222, second connecting section; 223, screw hole;

[0024] 300, elongated rod; 310, rod section;

[0025] 400, support seat; 500, height adjustment mechanism;

[0026] 600, furnace tube. DETAILED DESCRIPTION

[0027] In order to make the above objectives, features and advantages of the present application more apparent, specific embodiments of the present application will be described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application. However, the present application can be practiced in a number of different ways beyond the specific embodiments described and it is therefore contemplated to cover all such modifications as fall within the scope of the application. It is to be understood that other embodiments can be utilized, and structural or logical changes can be made without departing from the scope of the present application.

[0028] In the description of the present application, it needs to be understood that if these terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like appear, these terms indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the purpose of facilitating the description of the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0029] In addition, if these terms "first", "second" appear, these terms are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features referred to. Therefore, the features limited by "first", "second" can explicitly or implicitly include at least one of the features. In the description of the present application, if the term "a plurality of" appears, the meaning of "a plurality of" is at least two, for example, two, three, etc., unless otherwise specifically limited.

[0030] In the present application, unless specifically defined otherwise, if there is an appearance of the terms "installation", "connection", "connection", "fixation" and the like, these terms should be broadly understood. For example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements or the interaction relationship between two elements, unless otherwise specifically defined. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0031] In the present application, unless specifically defined otherwise, if there is a description of the first feature "on" or "below" the second feature and the like, it can mean that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature "above", "above" and "above" the second feature can be directly above or obliquely above the second feature, or only indicates that the first feature is higher than the second feature in horizontal height. The first feature "below", "below" and "below" the second feature can be directly below or obliquely below the second feature, or only indicates that the first feature is lower than the second feature in horizontal height.

[0032] It should be noted that if an element is referred to as "fixed to" or "disposed on" another element, it can be directly on another element or there can be a middle element. If an element is considered to be "connected" to another element, it can be directly connected to another element or there can be a middle element. If present, the terms "vertical", "horizontal", "up", "down", "left", "right" and similar expressions used in the present application are for illustrative purposes only and do not represent the only implementation.

[0033] Referring to Figs. 1-3 An embodiment of the present application provides a gas inlet pipe installation tool for installing a gas inlet pipe into a furnace pipe. The gas inlet pipe installation tool includes a tool pipe, which includes a joint 200, a sleeve 100, and an elongated rod 300. One end of the sleeve 100 and one end of the elongated rod 300 are detachably connected through the joint 200. The sleeve 100 is used for inserting part of the gas inlet pipe, and the joint 200 is configured to abut the end of the gas inlet pipe inserted into the sleeve 100.

[0034] In actual use, first, the sleeve 100 and the elongated rod 300 are connected through the joint 200, then the sleeve 100 end of the tooling pipe is aligned with the furnace mouth position of the furnace pipe, then the tooling pipe is sequentially passed through the plurality of hangers along the length direction of the furnace pipe until the sleeve 100 of the tooling pipe extends out of the tail end cover of the furnace pipe; then one end of the air inlet pipe is extended into the sleeve 100, the air inlet pipe is slowly pushed in, so that the air inlet pipe abuts against the joint 200, the air inlet pipe is continuously pushed, the air inlet pipe can push the elongated rod 300 through the joint 200, drive the whole tooling pipe to move as a whole, so that the elongated rod 300 gradually exits from the furnace mouth until the whole air inlet pipe enters the furnace pipe, at this time, the tooling pipe can be pulled out.

[0035] In the embodiment, the air inlet pipe can push the tooling pipe out of the furnace pipe through the joint 200, and the furnace pipe can guide the air inlet pipe during the exiting process, so that the air inlet pipe can sequentially pass through the hangers, and the air inlet pipe can also prevent the hangers from being poked off or the quartz pieces such as the furnace pipe and the thermocouple sleeve from being damaged.

[0036] It should be noted that when the air inlet pipe pushes the tooling pipe, the tooling pipe can also be pulled outwards to reduce the pushing force of the air inlet pipe and prevent the air inlet pipe from being damaged. The air inlet pipe can be a silane air inlet pipe.

[0037] In some embodiments, the joint 200 includes an intermediate section 210 and two connecting sections 220 respectively arranged at both ends of the intermediate section 210, and the two connecting sections 220 respectively extend into the sleeve 100 and the elongated rod 300.

[0038] In the embodiment, compared with the mode that the connecting sections 220 are sleeved outside the sleeve 100, the two connecting sections 220 respectively extend into the sleeve 100 and the elongated rod 300, which can avoid that the connecting sections 220 are directly sleeved outside the sleeve 100, the connecting sections 220 form a step with the sleeve 100, and the step on the tooling pipe is clamped with the hangers during the process of pushing the tooling pipe by the air inlet pipe, which causes the problem that the air inlet pipe is difficult to push.

[0039] At the same time, the two connecting sections 220 respectively extend into the sleeve 100 and the elongated rod 300, that is, the pipe diameter of the whole tooling pipe does not need to be increased, and the tooling pipe is convenient to pass through the hangers.

[0040] Further, the connecting section 220 includes a first connecting section 221, a second connecting section 222 and a screw. The screw hole 223 is formed on the first connecting section 221 along the radial direction of the sleeve 100; the second connecting section 222 is arranged at a position spaced apart from the first connecting section 221 along the radial direction of the sleeve 100; and the screw passes through the screw hole 223 to push the second connecting section 222, so that the second connecting section 222 moves away from the side of the first connecting section 221.

[0041] In use, first, the part of the connecting segment 220 is extended into the sleeve 100, and then the screw on the connecting segment 220 is rotated to push the second connecting segment 222 on the connecting segment 220 by the screw, so that the second connecting segment 222 moves away from the corresponding first connecting segment 221, until the second connecting segment 222 abuts against the inner wall of the sleeve 100, that is, the connection of the connecting segment 220 and the sleeve 100 is completed. The extension rod 300 is connected in the same way.

[0042] In some embodiments, the second connecting segment 222 is an elastic plate, and the first connecting segment 221 and the second connecting segment 222 are connected with the middle segment 210.

[0043] In this embodiment, the second connecting segment 222 is an elastic plate, and when the second connecting segment 222 is pushed by the screw, the second connecting segment 222 is bent and deformed, so as to be inclined away from the first connecting segment 221.

[0044] In some other embodiments, the second connecting segment 222 cannot be deformed, so that the second connecting segment 222 is connected with the middle segment 210 in the radial direction of the sleeve 100, and when the second connecting segment 222 is pushed by the screw, the second connecting segment 222 slides away from the first connecting segment 221.

[0045] In some embodiments, the sleeve 100 and the extension rod 300 are respectively provided with a relief hole 110, and the screw is used to extend into the screw hole 223 of the first connecting segment 221 from the relief hole 110.

[0046] In this embodiment, when the tooling pipe is installed, the two connecting segments 220 are respectively extended into the sleeve 100 and the extension rod 300, until the screw hole 223 is aligned with the corresponding relief hole 110, and then the screw is installed to connect the connecting segment 220 with the sleeve 100 and the extension rod 300, respectively.

[0047] In some embodiments, the sleeve 100 and the extension rod 300 are mutually butted outside the middle segment 210, and the outer diameter of the sleeve 100 is the same as the outer diameter of the extension rod 300.

[0048] In this embodiment, the two connecting segments 220 are respectively extended into the sleeve 100 and the extension rod 300, so that the sleeve 100 and the extension rod 300 are mutually butted outside the joint 200, that is, the sleeve 100 and the extension rod 300 are connected as a whole from the outer surface of the entire tooling pipe, so as to avoid that when the gap between the sleeve 100 and the extension rod 300 is too large, the lifting ring is clamped in the gap, causing the tooling pipe to be difficult to push through the air inlet pipe.

[0049] It should be noted that as long as the distance between the sleeve 100 and the extension rod 300 is less than or equal to the diameter of the lifting ring, that is, the sleeve 100 and the extension rod 300 are connected outside the middle section 210.

[0050] Specifically, the outer diameter of the air inlet pipe is 10mm, and the outer diameter of the sleeve 100 and the extension rod 300 is 14mm-20mm. The extension rod 300 is made of aluminum alloy material with high hardness, which is used to prevent the extension rod 300 from deforming.

[0051] In other embodiments, the outer diameter of the sleeve 100 can also be smaller than the outer diameter of the extension rod 300, so that the sleeve 100 can be exposed from the hole on the tail end cover, and the outer diameter of the extension rod 300 is relatively large, which is used to prevent the extension rod 300 from deforming when it is extended into the furnace pipe. Specifically, the outer diameter of the sleeve 100 is 14mm, and the outer diameter of the extension rod 300 is 16mm-20mm.

[0052] In some embodiments, in combination with Fig. 1 , the extension rod 300 includes a plurality of rod sections 310 connected in sequence, and adjacent two rod sections 310 are detachably connected.

[0053] In this embodiment, when the tool pipe is pushed out of the furnace pipe through the air inlet pipe, one rod section 310 is pushed out, that is, one rod section 310 is detached, so as to avoid that when the entire extension rod 300 is pushed out of the furnace pipe, the length of the extension rod 300 is too long, which is easy to collide with the equipment outside the furnace pipe. Similarly, when the entire extension rod 300 is pushed out of the furnace pipe, the extension rod 300 can also be detached through the joint 200.

[0054] In some embodiments, in combination with Fig. 3 , the air inlet pipe installation tool further includes a support seat 400, and the support seat 400 is provided with a support rail, and the tool pipe is arranged on the support rail, and the support rail is used to support the tool pipe, so that the tool pipe has the same installation height as the air inlet pipe of the furnace pipe.

[0055] In this embodiment, the support seat 400 is made of high-temperature material. The support seat 400 is arranged at one end of the furnace pipe, and after the tool pipe is installed, the tool pipe is arranged on the support rail, and the tool pipe is pushed along the support rail, so that the tool pipe passes through the lifting ring in sequence. The support seat 400 is provided with a support rail on both sides, which is convenient for the installation of the air inlet pipe on both sides of the furnace pipe.

[0056] Further, the air inlet pipe installation tool further includes a height adjusting mechanism 500, and the support seat 400 is arranged on the height adjusting mechanism 500.

[0057] In this embodiment, the support seat 400 is arranged on the height adjusting mechanism 500, which is used to adjust the height of the support rail through the support seat 400, so as to make the height of the support rail the same as the height of the air inlet pipe at different positions.

[0058] The bottom of the support base 400 is provided with a plurality of screw holes, and a screw rod is installed in each screw hole. The height of the support base 400 can be adjusted by rotating the screw rod, and the level of the support base 400 can also be adjusted. The length of the screw rod is 50-200 mm.

[0059] In some other embodiments, the height of the support base 400 is constant, and the support rail is arranged on the height adjusting mechanism 500, and the height of the support rail can be adjusted by the height adjusting mechanism 500.

[0060] In some embodiments, the ratio of the length of the sleeve 100 to the length of the extension rod 300 is 1:4-1:6.

[0061] Specifically, the total length of the tool pipe is greater than or equal to the total length of the furnace pipe. For example, the total length of the furnace pipe is 3550 mm, and the total length of the tool pipe can be 3600 mm. The length of the sleeve 100 is 600 mm, and the length of the extension rod 300 is 3000 mm. The extension rod 300 includes three detachably connected rods, and the length of each rod is 1000 mm. The ratio of the length of the sleeve 100 to the length of the extension rod 300 is 1:4-1:6, which can avoid the deformation of the air inlet pipe when the air inlet pipe is pushed out of the sleeve 100, or the tool pipe is difficult to push through the air inlet pipe.

[0062] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description simple, all possible combinations of the technical features in the above-mentioned embodiments are not described, but as long as the combination of the technical features does not exist contradictory, it should be considered as the scope of the present application.

[0063] The above-mentioned embodiments only express several embodiments of the present application, and the description is more specific and detailed, but it should not be understood as a limitation on the scope of the patent application. It should be pointed out that for ordinary skilled in the art, without departing from the concept of the present application, a number of modifications and improvements can be made, which are within the scope of the present application. Therefore, the scope of the patent of the present application should be subject to the appended claims.

Claims

1. An air intake pipe mounting tool characterized by comprising: The application relates to a tool for installing an air inlet pipe into a furnace pipe, which comprises a tool pipe, the tool pipe comprising a joint, a sleeve and an elongated rod, one end of the sleeve and one end of the elongated rod being detachably connected through the joint, the sleeve being used for inserting the air inlet pipe, and the joint being used for abutting with one end of the air inlet pipe.

2. The air intake pipe mounting tool according to claim 1, characterized by The joint comprises a middle section and connecting sections arranged at both ends of the middle section respectively, and the two connecting sections respectively extend into the sleeve and the elongated rod.

3. The air intake pipe mounting tool according to claim 2, characterized by The connecting sections comprise: a first connecting section, a screw hole being formed on the first connecting section along the radial direction of the sleeve; a second connecting section, which is arranged at a position radially spaced apart from the first connecting section along the sleeve; and a screw, which is used for pushing the second connecting section so as to move the second connecting section away from the first connecting section.

4. The air intake pipe mounting tool according to claim 3, characterized by The second connecting section is an elastic plate, and the first connecting section and the second connecting section are both connected with the middle section.

5. The air intake pipe mounting tool according to claim 3, characterized by The sleeve and the elongated rod are respectively provided with avoiding holes, and the screw is used for extending into the screw hole of the first connecting section from the avoiding hole.

6. The air intake pipe mounting tool according to claim 2, wherein The sleeve and the elongated rod are mutually abutted outside the middle section, and the outer diameter of the sleeve is the same as that of the elongated rod.

7. The air intake pipe mounting tool according to claim 1, wherein The elongated rod comprises a plurality of rod sections connected in sequence, and two adjacent rod sections are detachably connected.

8. The air intake pipe mounting tool according to claim 1, wherein The tool for installing the air inlet pipe further comprises a supporting seat, the supporting seat is provided with a supporting guide rail, the tool pipe is arranged on the supporting guide rail, and the supporting guide rail is used for supporting the tool pipe so that the tool pipe has the same installation height as the air inlet pipe of the furnace pipe.

9. The air intake pipe mounting tool according to claim 8, characterized by The tool for installing the air inlet pipe further comprises a height adjusting mechanism, and the supporting seat is arranged on the height adjusting mechanism.

10. The air intake pipe mounting tool according to claim 1, wherein The ratio of the length of the sleeve to the length of the elongated rod is 1:4-1:6.

Images