Evaporation device for preparing OLED (Organic Light Emitting Diode) material

Abstract

The utility model discloses an evaporation device for preparing an OLED (Organic Light Emitting Diode) material, which relates to the technical field of evaporation equipment and comprises a device shell and a substrate, a crucible is arranged on the inner wall of the device shell, a moving platform for moving the crucible is arranged at the bottom of the crucible, a mask is arranged at the top of the crucible, the substrate is arranged at one end of the mask, and the substrate is arranged at the other end of the mask. A discharging port is formed in the top of the crucible, and a positioning assembly for changing the shape of the discharging port is arranged at the top of the discharging port. According to the utility model, the crucible and the mobile platform are arranged to regularly cover the film on the substrate, so that not only is the working efficiency of the equipment improved, but also the film covering uniformity of the substrate is improved, and through the arrangement of the positioning assembly, the baffle is additionally arranged at the top of the crucible, so that the shape of the crucible discharge port can be changed according to the shape of the mask plate through hole; therefore, the film thickness of the whole substrate is uniform, the waste of materials is reduced, and the performance of the device is effectively improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of evaporation equipment, specifically to an OLED material preparation evaporation device. BACKGROUND

[0002] Organic thin-film electroluminescent display device is short for OLED, which is a display technology using organic thin-film material to emit light under the action of electric field. It is a new technology of organic semiconductor material emitting light under the action of electric field, which has been rapidly developed in recent years. The low energy consumption, environmental protection, ultra-thin, high color saturation, surface light source and other advantages of OLED lighting products make it one of the mainstream trends of future lighting product development.

[0003] The evaporation equipment used in OLED material preparation is used to evaporate the material in the crucible group under vacuum environment, so that the material is sublimated into gas molecules, and then deposited on the substrate to form a thin film. It can be used to prepare various thin film materials such as metal thin film, semiconductor thin film and organic thin film, and has wide application in electronic devices and optical devices.

[0004] The existing vacuum evaporation equipment for OLED material preparation uses the material in the crucible to be heated into gas molecules and evaporated and deposited on the substrate. The material will be in the form of smoke and gas. The thickness of the organic film is best when the film thickness is optimal. With the change of thickness, the performance of the device will also change. In this case, if the crucible remains in place, it will be easy to affect the preparation of very uniform thin film. SUMMARY

[0005] Therefore, the utility model aims at providing an OLED material preparation evaporation device to solve the technical problems mentioned in the background.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical scheme: an OLED material preparation evaporation device, comprising a device shell, a substrate, an inner wall of the device shell is provided with a crucible, and the bottom of the crucible is provided with a moving platform for displacing the crucible, the top of the crucible is provided with a mask, and one end of the mask is provided with a substrate, the top of the crucible is provided with a discharge port, and the top of the discharge port is provided with a positioning assembly for changing the shape of the discharge port, the positioning assembly comprises a baffle, a connecting rod and a supporting plate.

[0007] By adopting the above technical scheme, through the setting of the crucible and the moving platform, the crucible is in a strip shape, and the moving platform drives the crucible to move, regular film coating is performed on the substrate, the working efficiency of the equipment is improved, the uniformity of the film coating of the substrate is improved, and the quality of the substrate evaporation is improved, through the setting of the positioning assembly, the baffle is arranged on the top of the crucible, the shape of the discharge port of the crucible can be changed according to the shape of the through hole of the mask plate, the film thickness uniformity of the whole substrate is achieved, the waste of materials is reduced, and the performance of the OLED device is effectively improved.

[0008] The utility model further sets up, the crucible is in strip shape, and the top of crucible is equipped with multiple groups of discharge port, and the discharge port is rectangular.

[0009] Through the above technical scheme, most of the film shapes of the substrate are rectangular, the crucible is close to the substrate and performs film coating on the substrate, and the waste of materials is effectively reduced.

[0010] The utility model further sets up, one end of baffle is installed with connecting rod, and the other end of connecting rod is installed with pneumatic cylinder, the connecting rod, pneumatic cylinder middle is provided with support plate, and support plate bottom is connected with crucible outer wall.

[0011] Through the above technical scheme, through the setting of the support plate, the stability of the positioning assembly in motion is effectively improved, the covering of the discharge port by the baffle is facilitated, and the material of the baffle is the same as that of the crucible.

[0012] The utility model further sets up, the number of positioning assembly is two groups, and two groups of positioning assembly are located at both ends of crucible.

[0013] Through the above technical scheme, through the setting of two groups of positioning assembly, the working efficiency of the positioning assembly is effectively improved, the stability of the baffle in movement is also improved, and the sealing property of the surface of the baffle is improved by the clamping of the two groups of baffles.

[0014] The utility model further sets up, the inner wall of baffle is equipped with multiple groups of round holes, and the round hole is opposite to the discharge port.

[0015] Through the above technical scheme, the round hole is located on the upper end of the discharge port, the shape of the discharge port is changed, when the evaporation pattern of the substrate is circular, the film thickness uniformity of the substrate is effectively improved, and the waste of materials is avoided.

[0016] The utility model further sets up, the top of moving platform is installed with crucible, and the bottom of moving platform is connected with the inner wall of device shell.

[0017] By adopting the technical scheme, the mobile platform is a device or structure capable of freely moving in a specific environment, can move in different planes or spaces, and can carry a certain weight or load, so that the uniformity of the crucible in operation is effectively improved, the crucible can regularly move at the lower end of the mask plate to coat the substrate, and the work efficiency is improved.

[0018] To sum up, the utility model mainly has the following beneficial effects:

[0019] 1、The utility model discloses a crucible, the setting of mobile platform, the crucible is long strip, and mobile platform drives the crucible to move, and the substrate is regularly coated, not only improve the work efficiency of equipment, also improve the uniformity of substrate coating, and then improve the quality of substrate evaporation.

[0020] 2、The utility model discloses the setting of positioning assembly, the top of crucible is added baffle, so that the shape of the discharge port of the crucible can be changed according to the shape of the through hole of the mask plate, so as to achieve the uniformity of the film thickness of the substrate as a whole, reduce the waste of materials, and effectively improve the performance of the OLED device. DRAWINGS

[0021] Figure 1 It is a side view of the utility model;

[0022] Figure 2 It is a positioning assembly position diagram of the utility model;

[0023] Figure 3 It is a mask plate position diagram of the utility model;

[0024] Figure 4 It is a crucible shape diagram of the utility model;

[0025] Figure 5 It is a positioning assembly structure diagram of the utility model.

[0026] In the drawing: 1, device shell; 2, crucible; 20, discharge port; 3, substrate; 4, positioning assembly; 40, baffle; 400, round hole; 41, connecting rod; 42, support plate; 43, air cylinder; 5, mask plate; 6, mobile platform. DETAILED DESCRIPTION

[0027] The technical scheme in the embodiments of the utility model will be described clearly and completely in combination with the drawings of the embodiments of the utility model. The embodiments described below by referring to the drawings are exemplary and are only used to explain the utility model, and cannot be understood as limiting the utility model.

[0028] The embodiments of the utility model will be described below according to the overall structure of the utility model.

[0029] An evaporation deposition apparatus for OLED material preparation, such as Figure 1 - Figure 5 As shown, the device includes a housing 1 and a substrate 3. A crucible 2 is disposed on the inner wall of the housing 1, and a moving platform 6 for displacing the crucible 2 is disposed at the bottom of the crucible 2. A mask 5 is disposed on the top of the crucible 2, and the substrate 3 is disposed at one end of the mask 5. A discharge port 20 is opened at the top of the crucible 2, and a positioning component 4 for changing the shape of the discharge port 20 is disposed at the top of the discharge port 20. The positioning component 4 includes a baffle 40, a connecting rod 41, and a support plate 42. Through the arrangement of the crucible 2 and the moving platform 6, The crucible 2 is elongated and the moving platform 6 moves the crucible 2 to perform regular coating on the substrate 3. This not only improves the working efficiency of the equipment but also improves the uniformity of the coating on the substrate 3, thereby improving the quality of the substrate 3 vapor deposition. By setting the positioning component 4, a baffle 40 is added to the top of the crucible 2, which allows the crucible 2 to change the shape of the crucible 2 outlet 20 according to the shape of the through hole of the mask 5, so as to achieve uniform film thickness of the substrate 3, reduce material waste, and effectively improve the performance of the OLED device.

[0030] Please see Figure 1 - Figure 4 The crucible 2 is long and narrow, and multiple sets of discharge ports 20 are opened on the top of the crucible 2. The discharge ports 20 are rectangular. Most of the coatings on the substrate 3 are rectangular. The crucible 2 is rectangular and applies the coating to the substrate 3 near the substrate 3, which effectively reduces material waste.

[0031] Please see Figure 2 - Figure 5 A connecting rod 41 is installed at one end of the baffle 40, and a cylinder 43 is installed at the other end of the connecting rod 41. A support plate 42 is provided between the connecting rod 41 and the cylinder 43, and the bottom of the support plate 42 is connected to the outer wall of the crucible 2. The setting of the support plate 42 effectively improves the stability of the positioning component 4 during movement, and facilitates the coverage of the discharge port 20 by the baffle 40. The baffle 40 and the crucible 2 are made of the same material.

[0032] Please see Figure 1 - Figure 4 The number of positioning components 4 is two sets, and the two sets of positioning components 4 are located at both ends of the crucible 2 respectively. The setting of two sets of positioning components 4 effectively improves the working efficiency of the positioning components 4, and also improves the stability of the baffle 40 during movement. Furthermore, the engagement of the two sets of baffles 40 also improves the sealing performance of the surface of the baffle 40.

[0033] Please see Figure 1 - Figure 5The inner wall of the baffle 40 is provided with a plurality of groups of round holes 400, and the round holes 400 are arranged opposite to the discharge port 20, and the round holes 400 are located at the upper end of the discharge port 20, the shape of the discharge port 20 is changed, when the evaporation pattern of the substrate 3 is circular, the film thickness uniformity of the substrate 3 is effectively improved, and the waste of materials is avoided.

[0034] Please refer to Figure 1 - Figure 4 The top of the moving platform 6 is provided with the crucible 2, and the bottom of the moving platform 6 is connected with the inner wall of the device shell 1, the moving platform 6 is a device or structure capable of freely moving in a specific environment, can move in different planes or spaces, and can carry a certain weight or load, and the uniformity of the crucible 2 in operation is effectively improved through the arrangement of the moving platform 6, the crucible 2 can move regularly at the lower end of the mask plate 5 to coat the substrate 3, and the working efficiency is improved.

[0035] The working principle of the utility model is:

[0036] When it is necessary to evaporate the substrate 3, first, the same evaporation material is placed in the crucible 2, then the substrate 3 is placed in the evaporation cavity, the crucible 2 is moved through the moving platform 6, so that the distance between the substrate 3 and the crucible 2 is relatively low, then the device is vacuumized, and the device control button is started to heat the crucible 2, so that the material in the crucible 2 is heated to become gas molecules and evaporate and deposit through the mask plate 5 to the substrate 3, thereby forming an evaporation pattern, and through the close distance between the crucible 2 and the substrate 3, the waste of materials is effectively avoided, and the cost is saved;

[0037] Secondly, when the substrate 3 needs to evaporate a circular pattern, first, the mask plate 5 is replaced, then the moving platform 6 drives the crucible 2 to move downward through the control button, then the connecting rod 41 is driven to move upward through the air cylinder 43, so that the baffle 40 is located at the top of the crucible 2, and the round holes 400 are located at the upper end of the discharge port 20, the shape of the discharge port 20 is changed, finally, the crucible 2 is driven to move upward through the moving platform 6, so that the crucible 2 is located at the lower end of the mask plate 5, the crucible 2 is heated, so that the gas molecules evaporate and deposit through the mask plate 5 to the substrate 3, thereby forming an evaporation pattern, which not only improves the film thickness uniformity of the substrate 3, but also effectively avoids the waste of materials.

[0038] Although the embodiments of the utility model have been shown and described, the specific embodiments are only the explanation of the utility model, and are not the limitation of the utility model, and the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable way, and the person skilled in the art can make the modification, replacement and change of the embodiments without the creative contribution after reading the specification without departing from the principles and the purpose of the utility model, but as long as in the claim range of the utility model, it is protected by the patent law.

Claims

1. An OLED material preparation evaporation device comprising a device housing (1), a substrate (3), characterized in that: The inner wall of the device shell (1) is provided with a crucible (2), and the bottom of the crucible (2) is provided with a moving platform (6) for displacing the crucible (2), the top of the crucible (2) is provided with a mask (5), and one end of the mask (5) is provided with a substrate (3), the top of the crucible (2) is provided with a discharge port (20), and the top of the discharge port (20) is provided with a positioning assembly (4) for changing the shape of the discharge port (20), the positioning assembly (4) comprises a baffle (40), a connecting rod (41) and a supporting plate (42). 2.The OLED material preparation evaporation device according to claim 1, characterized in that: The crucible (2) is in a strip shape, and a plurality of discharge ports (20) are formed in the top of the crucible (2), and the discharge ports (20) are in a rectangular shape. 3.The OLED material preparation evaporation device according to claim 1, characterized in that: One end of the baffle (40) is provided with a connecting rod (41), and the other end of the connecting rod (41) is provided with a cylinder (43), the connecting rod (41) and the cylinder (43) are provided with a supporting plate (42) therebetween, and the bottom of the supporting plate (42) is connected with the outer wall of the crucible (2). 4.The OLED material preparation evaporation device according to claim 1, characterized in that: The number of the positioning assembly (4) is two, and the two positioning assemblies (4) are respectively located at the two ends of the crucible (2). 5.The OLED material preparation evaporation device according to claim 1, characterized in that: The inner wall of the baffle (40) is provided with a plurality of round holes (400), and the round holes (400) are oppositely arranged with the discharge ports (20). 6.The OLED material preparation evaporation device according to claim 1, characterized in that: The top of the moving platform (6) is provided with the crucible (2), and the bottom of the moving platform (6) is connected with the inner wall of the device shell (1).

Images