Electroplating air knife

Abstract

The utility model provides an electroplating air knife. The electroplating air knife comprises an air knife body and a plugging piece. The air knife body is provided with a top wall and a side wall, the top wall is arranged at one end of the side wall in the length direction, and an air cavity is defined by the top wall and the side wall. The side wall is provided with an air outlet extending in the length direction of the side wall. The blocking piece is arranged at the air outlet and can move in the length direction of the side wall so as to adjust the length size of the air outlet. According to the electroplating air knife, the length size of the air outlet of the electroplating air knife can be adjusted, so that the electroplating air knife can adapt to semiconductor products with different sizes of frames, and the situation that air blowing is invalid and waste is caused by the fact that the length of the air outlet is larger than the length needed by the products, and the areas, right opposite to the products, in the air outlet is avoided; the air volume matched with the product can be controlled easily, especially for the product with the relative small air outlet overall length, the air outlet volume can be more concentrated so that the blow-drying effect can be enhanced, chemical losses in the semi-conductive product preparation process can be reduced easily, the production cost can be reduced easily, and the product quality can be improved easily.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor technology, in particular to a kind of electroplating wind knife. BACKGROUND

[0002] As a drying equipment, the drying function of electroplating wind knife directly affects the situation of chemical loss (such as loss of chemical materials in the preparation process) of semiconductor products and product quality after tinning of semiconductor products, so optimizing the design of electroplating wind knife helps to save production cost and improve product quality. The length of the blowing port of the electroplating wind knife on the market is relatively long and fixed to meet the drying of semiconductor product preparation process of all size frames. Although the electroplating wind knife with fixed blowing port can be compatible with the drying of product preparation process of all size frames, it will cause a lot of wind waste for relatively small products, so that the wind volume of other parts corresponding to the product is not concentrated, the blowing effect is greatly reduced, which may cause the increase of chemical loss, the increase of production cost, and may also cause the product to be water-stained, affecting the product quality. SUMMARY

[0003] The electroplating wind knife provided by the embodiments of the present application comprises:

[0004] The wind knife body has a top wall and a side wall, the top wall is arranged at one end of the side wall in the length direction, and the top wall and the side wall form a wind cavity; the side wall is provided with an air outlet extending along the length direction of the side wall;

[0005] The plugging piece is arranged at the air outlet and can move along the length direction of the side wall to adjust the length size of the air outlet.

[0006] In some embodiments, the air outlet has opposite first and second ends along the length direction of the side wall, wherein the first end is closer to the top wall than the second end, the plugging piece is arranged at at least one of the first and second ends and can move from the one end to the other end by a preset distance to plug the air outlet of the preset distance.

[0007] In some embodiments, the air outlet edge is provided with a scale extending along the length direction of the side wall; and the plugging piece comprises an identification alignment part for aligning the scale of the scale to determine the plugging position of the plugging piece.

[0008] In some embodiments, the plugging piece is arranged at the second end, and the scale comprises a product identification scale having a plurality of product identification scales, each product identification scale being used to identify the position of the identification alignment part after moving required by the corresponding product.

[0009] In some embodiments, the blocking member comprises a blocking body arranged inside the air outlet and used for blocking the air outlet, and the identification alignment part is connected to the blocking body and extends out of the air outlet.

[0010] The side wall is provided with guide clamping grooves arranged on opposite sides of the air outlet and used for arranging the blocking body.

[0011] In some embodiments, the electroplating air knife further comprises:

[0012] The driving structure is drivingly connected to the blocking member and used for driving the blocking member to move along the length direction of the air outlet.

[0013] In some embodiments, the driving structure comprises a pushing handle connected to the blocking body and extending out of the air outlet; or,

[0014] The driving structure comprises an operation knob and a driving assembly; the operation knob is arranged on the top wall, and the driving assembly is a lead screw assembly connected to the operation knob and the blocking member.

[0015] In some embodiments, the electroplating air knife further comprises a fastener arranged on the side wall and used for fastening the blocking member when the blocking member moves to a preset length of the air outlet.

[0016] In some embodiments, the fastener is a bolt, and the side wall is provided with a through hole for arranging the fastener.

[0017] In some embodiments, the length of the air outlet is 100mm-150mm.

[0018] In some embodiments, the air knife body is provided with an air inlet communicated with the air cavity, and the air inlet is located at one end of the side wall away from the top wall in the length direction.

[0019] The main technical effects achieved by the embodiments of the present application are as follows:

[0020] The electroplating air knife provided by the embodiments of the present application can adjust the length of the air outlet, so that the electroplating air knife can adapt to different sizes of frame products, avoid the waste of blowing air in the area other than the product directly opposite to the air outlet due to the length of the air outlet being larger than the length required by the product, and be more conducive to controlling the air volume matched with the product, especially for the products with relatively small overall length of the air outlet, the air volume of the air outlet can be better concentrated to enhance the drying effect, which is conducive to reducing the chemical loss in the process of preparing semiconductor products, reducing production cost, and improving product quality. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 This is a three-dimensional structural schematic diagram of an electroplating air knife provided in an exemplary embodiment of this application;

[0022] Figure 2 This is a top view of an electroplating air knife provided in an exemplary embodiment of this application;

[0023] Figure 3 It is along Figure 2 The sectional view obtained by section line AA' shown;

[0024] Figure 4 A front view of a partial structure of an electroplating air knife provided as an exemplary embodiment of this application;

[0025] Figure 5 This is a three-dimensional structural schematic diagram of another electroplating air knife provided in an exemplary embodiment of this application;

[0026] Figure 6 This is a three-dimensional structural schematic diagram of another electroplating air knife provided in an exemplary embodiment of this application. Detailed Implementation

[0027] Exemplary embodiments will now be described in detail, examples of which are illustrated in the accompanying drawings. When the following description relates to the drawings, unless otherwise indicated, the same numerals in different drawings denote the same or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with this application. Rather, they are merely examples of apparatuses and methods consistent with some aspects of this application as detailed in the appended claims.

[0028] The terminology used in this application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. The singular forms “a,” “the,” and “the” used in this application and the appended claims are also intended to include the plural forms unless the context clearly indicates otherwise. It should also be understood that the term “and / or” as used herein refers to and includes any or all possible combinations of one or more of the associated listed items.

[0029] The following is in conjunction with the appendix Figures 1 to 6 The following describes some embodiments of this application in detail. Unless otherwise specified, the embodiments and features described below can be combined with each other.

[0030] Reference Figure 1 and combine when necessary Figures 2 to 6As shown, the present application provides a plating air knife 100, which comprises an air knife body 10 and a blocking member 20. The air knife body 10 has a top wall 12 and a side wall 11, the top wall 12 is arranged at one end of the side wall 11 in the length direction L, and forms an air cavity 1001 with the side wall 11; the side wall 11 is provided with an air outlet 101 extending along the length direction L of the side wall 11.

[0031] The blocking member 20 is arranged at the air outlet 101 and can move along the length direction L of the side wall 11 to adjust the length size of the air outlet 101.

[0032] The above-mentioned plating air knife 100 can adjust the length size of the air outlet 101, so that the plating air knife 100 can adapt to different size frame products, avoid the waste of blowing air in the area other than the product due to the length of the air outlet 101 being larger than the length required by the product, and be more conducive to controlling the air volume matched with the product, especially for the product with relatively small overall length of the air outlet, which can better concentrate the air volume of the corresponding air outlet to enhance the drying effect, be conducive to reducing the chemical loss in the process of preparing semiconductor products, reducing production cost, and improving product quality.

[0033] In some embodiments, the air outlet 101 has opposite first and second ends 1011 and 1012 along the length direction L of the side wall 11, wherein the first end 1011 is closer to the top wall 12 than the second end 1012, the blocking member 20 is arranged at at least one of the first and second ends 1011 and 1012 and can move from the one end to the other end by a preset distance to block the air outlet by the preset distance, so that the actual air outlet length of the air outlet 101 is reduced by the preset distance.

[0034] In order to facilitate the control of the length of the air outlet 101, the blocking member 20 is generally arranged at one end. As shown in Figure 1 In some embodiments, the blocking member 20 is arranged at the second end 1012 and can move from the second end 1012 to the first end 1011 by a preset distance L0 to block the air outlet 101 by the preset distance L0, and the remaining part of the air outlet 101 other than the part by the preset distance L0 is the effective air outlet area, that is, the actual air outlet length after adjustment, and the actual air outlet length of the air outlet 101 is reduced by the preset distance L0. As shown in Figure 1 The length between the one end of the blocking member 20 towards the first end 1011 and the first end 1011 is the effective air outlet area, which is used for blowing air to the corresponding product.

[0035] Of course, in other embodiments, the sealing element may be located at the first end, allowing it to move to the second end. Alternatively, the sealing element may consist of two parts that can move relative to each other from their respective ends, with the area between the two sealing elements forming the adjusted actual air outlet.

[0036] In some embodiments, the edge of the air outlet 101 is provided with a scale 50 extending along the length direction L of the sidewall 11.

[0037] Accordingly, the sealing member 20 may include an alignment mark 22 for aligning with the scale of the ruler 50 to determine the sealing position of the sealing member 20.

[0038] like Figure 1 As shown, in some embodiments, the sealing member 20 is disposed at the second end 1012, and the scale 50 includes a product identification scale with multiple product identification scales T1, T2, T3, T4, and T5. Each product identification is used to identify the position of the sealing member 20 after it has been moved for the corresponding product. In this way, the identification alignment part 22 of the sealing member 20 can be moved directly to the corresponding product identification scale according to the product.

[0039] The product markings T1, T2, T3, T4, and T5 can be specific product model markings, markings corresponding to product names, or other markings corresponding to the product.

[0040] Taking product markings T1, T2, T3, T4, and T5 as product model identifiers as an example, when it is necessary to air dry a product of model T1, the sealing component 20 can be raised or lowered until the marking alignment part 22 is just aligned with T1. Correspondingly, the part of the air outlet 101 other than that blocked by the sealing component 20 matches the size of the product of model T1.

[0041] It should be noted that in some other embodiments, the scale of the ruler can also be used to mark the size of the air outlet at the corresponding position. When drying the product, the required length of the air outlet can be determined according to the size of the product, and the scale to which the marking alignment part 22 needs to be moved can be determined. Then, the sealing part can be moved to the scale to which the marking alignment part 22 needs to be moved.

[0042] In some embodiments, the sealing member 20 includes a sealing body 21 disposed inside the air outlet 101 and used to seal the air outlet 101, and the marking alignment portion 22 is connected to the sealing body 21 and extends to the outside of the air outlet 101.

[0043] The sealing body 21 can be a sheet-like structure that adapts to the shape of the side wall 11 at the air outlet 101.

[0044] In some embodiments, the sidewall 11 is provided with guide slots located on opposite sides of the air outlet 101 for setting the sealing body 21.

[0045] When preparing the electroplating air knife 100, the sealing body 21 can be inserted into the guide slot through one end of the guide slot.

[0046] Combination Figure 3 and Figure 4 As shown, in some embodiments, the sidewall 11 is provided with slots 60 located on opposite sides of the air outlet 101, and a guide slot 601 extending along the length direction L is formed between the slots 60 and the interior of the sidewall 11. Of course, the slots can also be directly provided with guide slots. Alternatively, the slots can be formed in other ways.

[0047] In some embodiments, a sealing element (not shown) may be provided at the air outlet 101 between the sealing body 21 and the side wall 11 to prevent air leakage in the portion sealed by the sealing element 20. Alternatively, the sealing body itself may be designed as a flexible sheet structure, which can prevent air leakage in the portion sealed by the sealing element by the sealing body itself.

[0048] In some embodiments, the electroplating air knife 100 further includes a driving structure. The driving structure is drivenly connected to the sealing member 20 and is used to drive the sealing member 20 to move along the length direction L of the air outlet 101.

[0049] like Figure 1 As shown, in some embodiments, the drive structure includes an operating knob 30 and a drive assembly. The operating knob 30 may be located on the top wall 12, and the drive assembly is a lead screw assembly 40 connected to the operating knob and the sealing member 20.

[0050] The lead screw assembly 40 may include a threaded rod 41 coaxial with the operating knob 30, a sliding block 42 disposed on the threaded rod 41, and a sealing member 20 connected to the sliding block 42. The top wall 12 is provided with a through hole 1201 for the threaded rod 41 to pass through. When the operating knob 30 is rotated to drive the threaded rod 41 to rotate, the sealing member 20 may move up or down with the sliding block 42.

[0051] In some embodiments, the lead screw assembly 40 may include a connecting portion 43 through which the sealing member 20 can be connected to the sliding block 42.

[0052] In other embodiments, such as Figure 5 As shown, in the electroplating air knife 200, the driving structure includes a push handle 23 connected to the sealing body 21 and extending to the outside of the air outlet 101.

[0053] In some embodiments, the push handle 23 can be an operating handle connected to the blocking body 21 and extending out of the air outlet 101.

[0054] In other embodiments, the push handle can also be an integral structure with the logo alignment portion 22.

[0055] As shown in Figure 5 some embodiments, the electroplating air knife 200 further comprises a fastener 40 arranged on the side wall 11 to fasten the blocking member 20 when the length of the blocking member 20 moving to the air outlet 101 is a preset length.

[0056] In some embodiments, the fastener 40 is a bolt, and the side wall 11 is provided with a through hole for arranging the fastener 40.

[0057] In other embodiments, as shown in Figure 6 the electroplating air knife 300 comprises the fastener 40 in addition to the structures of the electroplating air knife 100, so as to more stably fix the blocking member 20.

[0058] In some embodiments, the length of the air outlet 101 is 100mm-150mm.

[0059] The length of the air outlet 101 can be adjusted to correspond to the lengths of various products, such as 30mm, 42mm, 45mm, 53mm, 59mm, etc. In some embodiments, the logo alignment portions 22 are respectively aligned with T1, T2, T3, T4, T5, and the corresponding lengths of the air outlets can be respectively 30mm, 42mm, 45mm, 53mm, 59mm.

[0060] The air knife body 10 is provided with an air inlet 1301 communicating with the air cavity 1001, so as to be connected with an air inlet device, such as a blower, etc., to introduce air flow into the air cavity 1001 to blow out air flow from the air outlet 101.

[0061] In combination with Figure 3 and Figure 4 shown in some embodiments, the air inlet 1301 is located at one end of the side wall 11 away from the top wall 12 in the length direction L.

[0062] As shown in Figure 3 and Figure 4 some embodiments, the inner wall of the side wall 11 can be provided with an inner thread 1101 of a partial length, so as to be fixedly connected with an air inlet pipe (not shown) matched therewith, so as to be connected with the air inlet device. Correspondingly, the air inlet pipe can be provided with an outer thread matched with the inner thread 1101.

[0063] In some other embodiments, external threads can also be arranged on the outer wall of the side wall to be fixedly connected with the air inlet pipe, so as to be connected with the air inlet device. Correspondingly, the air inlet pipe can be provided with internal threads matched with the external threads on the outer wall of the side wall.

[0064] It should be noted that the part of the area of the end where the air inlet is arranged can also be provided with a bottom wall, and the air inlet is provided with corresponding threads on the bottom wall to be fixedly connected with the air inlet pipe.

[0065] It should be further noted that other connecting structures, such as flanges, can also be arranged at the air inlet to be correspondingly connected with the air inlet pipe. The air inlet can also be arranged at other positions as needed.

[0066] Other embodiments of the application will be apparent to those skilled in the art from consideration of the specification and practice of the application disclosed herein. It is intended that the specification and examples be considered as exemplary only, with the true scope and spirit of the application being indicated by the following claims.

[0067] It should be understood that the application is not limited to the precise construction that has been described above and shown in the accompanying drawings, and that various modifications and changes can be made by those skilled in the art without departing from the scope of the application. The scope of the application is limited only by the appended claims.

Claims

1. An electroplating air knife, characterized in that, include: The air knife body has a top wall and a side wall. The top wall is located at one end of the side wall in the length direction and forms an air cavity with the side wall. The side wall is provided with an air outlet extending along the length direction of the side wall. A sealing element is provided at the air outlet and can move along the length of the side wall to adjust the length of the air outlet.

2. The electroplating air knife as described in claim 1, characterized in that, The air outlet has a first end and a second end opposite to each other along the length of the side wall, wherein the first end is closer to the top wall than the second end, and the sealing member is disposed at at least one of the first end and the second end, and is capable of moving a preset distance from one end toward the other end to block the air outlet at a preset distance.

3. The electroplating air knife as described in claim 2, characterized in that, The air outlet edge is provided with a scale extending along the length of the side wall; the sealing component includes a marking alignment part for aligning with the scale to determine the sealing position of the sealing component.

4. The electroplating air knife as described in claim 3, characterized in that, The sealing element is located at the second end, and the scale includes a product marking scale with multiple product marking graduations. Each product marking graduation is used to mark the position of the corresponding product after the required marking alignment part has been moved.

5. The electroplating air knife as described in claim 3, characterized in that, The sealing component includes a sealing body disposed inside the air outlet and used to seal the air outlet, and the marking alignment portion is connected to the sealing body and extends to the outside of the air outlet; The side wall is provided with guide slots located on both sides opposite the air outlet for setting the sealing body.

6. The electroplating air knife according to any one of claims 1 to 5, characterized in that, The electroplating air knife also includes: A driving structure is connected to the sealing component and is used to drive the sealing component to move along the length direction of the air outlet.

7. The electroplating air knife as described in claim 6, characterized in that, When the sealing component includes a sealing body disposed inside the air outlet and used to seal the air outlet, the driving structure includes a push handle connected to the sealing body and extending outside the air outlet; or, The drive structure includes an operating knob and a drive assembly; the operating knob is located on the top wall, and the drive assembly is a screw assembly connected to the operating knob and the sealing component.

8. The electroplating air knife as described in claim 1, characterized in that, The electroplating air knife also includes a fastener, which is disposed on the side wall and is used to abut against the sealing member and fasten the sealing member when the length of the sealing member moving to the air outlet is a preset length.

9. The electroplating air knife as described in claim 8, characterized in that, The fastener is a bolt, and the side wall is provided with through holes for installing the fastener.

10. The electroplating air knife as described in claim 1, characterized in that, The length of the air outlet is 100mm~150mm.

11. The electroplating air knife as described in claim 1, characterized in that, The air knife body is provided with an air inlet that communicates with the air cavity, and the air inlet is located at the end of the side wall that is away from the top wall in the length direction.

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