Quartz crucible height measuring device

Abstract

The utility model discloses a height measuring device for a quartz crucible. The height measuring device comprises a bracket, a support frame, a conveyor, a mounting plate, a linear bearing, an operating rod and a proximity switch, a vertically-arranged supporting frame is fixed to the top end of the support, a vertically-arranged conveyor is fixed to the supporting frame, first sliding rails arranged in the length direction of the conveyor are arranged on the two sides of the conveyor respectively, a mounting plate is arranged between the two first sliding rails in a sliding mode, and the inner side of the mounting plate is fixedly connected with an outer-layer belt of the conveyor. A horizontally-arranged linear bearing is fixed to the bottom of the mounting plate, a vertically-arranged operating rod is slidably arranged in the linear bearing, a flat plate making contact with the quartz crucible is fixed to the bottom end of the operating rod, a spring is fixed to the top end of the operating rod, and a limiting block is fixed to the top end of the spring; a proximity switch opposite to the limiting block is fixed to the top of the mounting plate.

Description

TECHNICAL FIELD

[0001] The utility model relates to quartz crucible production technical field, specifically to quartz crucible height measuring device. BACKGROUND

[0002] Quartz crucible is a container made of quartz sand, with high purity, high temperature resistance, long service life and other characteristics, and is currently widely used in the production process of single crystal silicon rod in the field of semiconductor and photovoltaic, and is an important consumable in the process of silicon melting and crystal growth of semiconductor silicon wafer and photovoltaic silicon wafer production. In the crystal growth furnace, the quartz crucible is used as a heating container to directly hold the polycrystalline silicon material, and the silicon rod / silicon wafer is formed after the silicon material is heated and melted, and is further used for the production and processing of downstream semiconductor chips, photovoltaic cell panels and other products.

[0003] The single crystal furnace has high requirements for the use of quartz crucible, and the height error of the quartz crucible must be within plus or minus 3mm. Since the mouth of the quartz crucible is flush, but the bottom of the crucible is oval, and the quartz crucible is large in volume and heavy in weight, in order to ensure the stable placement of the quartz crucible, the pot opening of the quartz crucible needs to be downward during measurement, but the highest point of the bottom of the quartz crucible cannot be accurately found, so the height cannot be effectively measured. UTILITY MODEL CONTENTS

[0004] The utility model aims at providing a quartz crucible height measuring device.

[0005] The utility model discloses a quartz crucible height measuring device, which comprises a support, a supporting frame, a conveyor, a mounting plate, a linear bearing, an operating rod and a proximity switch.

[0006] The top end of the support is fixed with the vertically arranged supporting frame, the supporting frame is fixed with the vertically arranged conveyor, the two sides of the conveyor are provided with first sliding rails arranged along the length direction, the mounting plate is slidably arranged between the two first sliding rails, and the inner side of the mounting plate is fixedly connected with the outer belt of the conveyor.

[0007] The bottom of the mounting plate is fixed with the horizontally arranged linear bearing, the operating rod is slidably arranged in the linear bearing, the bottom end of the operating rod is fixed with a flat plate in contact with the quartz crucible, the top end of the operating rod is fixed with a spring, and the top end of the spring is fixed with a limiting block.

[0008] The top of the mounting plate is fixed with the proximity switch arranged opposite to the limiting block.

[0009] Further, a controller is further included, the input end of the controller is electrically connected with the proximity switch, and the output end of the controller is electrically connected with the motor of the conveyor.

[0010] Further, the top end of the support is fixed with symmetrically arranged second sliding rails, the second sliding rails are slidably provided with sliding blocks, two sliding blocks are fixed with a platform, the bottom end of the platform is connected with the support through a telescopic device, the top end of the platform is provided with more than one circular boundary lines with different diameters and the same center, and the boundary line of the innermost circle is matched with the shape of the platform.

[0011] Further, the support is fixed with a scale parallel to the conveyor, and the bottom end of the mounting plate is fixed with a horizontal marker on one side, and the marker is in movable contact with the scale.

[0012] The quartz crucible is aligned with the platform, the telescopic device and the platform under the cooperation of the conveyor, the operating rod, the proximity switch and the scale, the highest point is easily found, the measurement accuracy is ensured, the operating rod is in contact with the quartz crucible, the motor of the conveyor is stopped in time under the cooperation of the spring, the limiting block and the proximity switch, and the quartz crucible is effectively prevented from being damaged by force. BRIEF DESCRIPTION OF DRAWINGS

[0013] In order to more clearly illustrate the technical scheme in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiment or the prior art description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.

[0014] Figure 1 It is a structure schematic view of the alignment operation of the present application.

[0015] Figure 2 It is a structure schematic view of the measurement of the present application.

[0016] Figure 3 It is a structure schematic view of the measurement of the present application. Figure 2 It is a local enlarged schematic view of A in the figure.

[0017] Figure 4 It is a top view of the platform of the present application.

[0018] Figure 5 It is a control loop schematic view of the present application.

[0019] In the diagram: 1. Bracket; 2. Support frame; 3. Conveyor; 4. First slide rail; 5. Mounting plate; 6. Linear bearing; 7. Operating lever; 8. Quartz crucible; 9. Plate; 10. Spring; 11. Limit block; 12. Proximity switch K; 13. Control circuit; 13.1. Forward rotation branch; 14. Forward rotation relay KM1; 15. Reverse rotation relay KM2; 16. Forward rotation button SB1; 17. Reverse rotation button SB2; 18. Stop button SB3; 19. Second slide rail; 20. Slider; 11. Platform; 12. Telescopic device; 13. Circular dividing line; 14. Scale; 15. Marker; 16. Scale rod. Detailed Implementation

[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0021] like Figures 1-5 As shown, the quartz crucible height measuring device includes a bracket 1, a support frame 2, a conveyor 3, a mounting plate 5, a linear bearing 6, an operating lever 7, and a proximity switch K;

[0022] A vertically arranged support frame 2 is fixed at the top of the bracket 1. A vertically arranged conveyor 3 is fixed on the support frame 2. First slide rails 4 are provided on both sides of the conveyor 3 along its length. An mounting plate 5 is slidably arranged between the two first slide rails 4. The inner side of the mounting plate 5 is fixedly connected to the outer belt of the conveyor 3.

[0023] A horizontally arranged linear bearing 6 is fixed at the top and bottom of the mounting plate 5. A vertically arranged operating rod 7 is slidably arranged inside the linear bearing 6. A flat plate 9 that contacts the quartz crucible 8 is fixed at the bottom of the operating rod 7. A spring 10 is fixed at the top of the operating rod 7. A limit block 11 is fixed at the top of the spring 10. The spring 10 provides a buffering effect and effectively protects the quartz crucible 8 under the action of the spring 10.

[0024] The top of the mounting plate 5 is fixed with a proximity switch K that is opposite to the limit block 11. It also includes a controller. The input end of the controller is electrically connected to the proximity switch K, and the output end of the controller is electrically connected to the motor M of the conveyor 3. The controller includes a control circuit 13. The control circuit 13 includes the proximity switch K, the forward rotation relay KM1, the reverse rotation relay KM2, the forward rotation button SB1, the reverse rotation button SB2, and the stop button SB3. The normally closed contact of the proximity switch K is connected in series in the forward rotation branch 13.1. When the proximity switch K is triggered and energized, the forward rotation branch 13.1 is de-energized, and the motor M stops running.

[0025] The top end of the support 1 is fixed with symmetrically arranged second sliding rails 14, the second sliding rails 14 are slidably provided with sliding blocks 15, two sliding blocks 15 are fixed with a platform 16, the bottom end of the platform 16 is connected with the support 1 through an expansion device 17, the expansion device 17 is specifically a cylinder and a connecting rod, the expansion end of the cylinder is fixedly connected with the bottom end face of the platform 16 through the connecting rod, the top end face of the platform 16 is provided with one or more circular boundary lines 18 with different diameters and the same center, the boundary line 18 of the innermost circle is matched with the shape of the flat plate 9, the platform 16 is used for placing the quartz crucible 8, and the quartz crucible 8 is conveniently measured, the boundary line 18 is matched with different models of the quartz crucible 8, and when measurement is performed, only the crucible mouth of the quartz crucible 8 needs to be placed on the boundary line 18.

[0026] The support frame 2 is fixed with a scale 19 arranged in parallel with the conveyor 3, and the bottom end of the mounting plate 5 is fixed with a horizontal marker 20, the marker 20 is in movable contact with the scale surface of the scale 19, and the scale 19 and the marker 20 are matched to facilitate reading.

[0027] The specific operation process of the embodiment is as follows:

[0028] The forward rotation button SB1 is pressed, the motor M of the conveyor 3 is started, the conveyor 3 is forward rotated, the belt of the conveyor 3 drives the mounting plate 5 to move downwards, the mounting plate 5 drives the operating rod 7 to move downwards, at this time, when the flat plate 9 at the bottom end of the operating rod 7 approaches the platform 16, the stop button SB3 is pressed, the motor M of the conveyor 3 is stopped, then the platform 16 is pushed to the lower side of the operating rod 7 through the expansion device 17, and the boundary line 18 of the innermost circle is matched with the flat plate 9, so that the quartz crucible 8 is aligned with the flat plate 9;

[0029] The forward rotation button SB1 is pressed again, the motor M of the conveyor 3 is started, the belt of the conveyor 3 drives the mounting plate 5 to move downwards to the distance at which the limiting block 11 triggers the proximity switch K, when the proximity switch K is triggered, the motor M of the conveyor 3 is stopped, at this time, the marker 20 connected to the mounting plate 5 indicates the scale on the scale 19, and the scale is defined as the initial scale 0 cm, and the position of the scale 19 on the support frame 2 is adjusted;

[0030] The reverse rotation button SB2 is pressed, the conveyor 3 is reversed, the operating rod 7 is driven to move upwards, and the space of the quartz crucible 8 is reserved, then the quartz crucible 8 is invertedly placed (the crucible mouth faces downwards) on the platform 16, and the corresponding boundary line 18 is matched according to the model of the quartz crucible 8, the purpose of aligning the boundary line 18 is to align the quartz crucible 8 with the flat plate 9;

[0031] When the forward rotation button SB1 is pressed, the conveyor 3 is started to rotate forward, the belt of the conveyor 3 drives the mounting plate 5 to move downward, the mounting plate 5 drives the operating rod 7 to move downward, so that the flat plate 9 at the bottom end of the operating rod 7 approaches the proximity switch K, when the bottom end of the flat plate 9 contacts the top end of the quartz crucible 8, the supporting rod is kept stationary under the action of the linear bearing 6, and in the process of the belt of the conveyor 3 rotating, the proximity switch K contacts the limiting block 11 at the top end of the operating rod 7, so that the proximity switch K is triggered, at this time, the motor M of the conveyor 3 stops running, and the indicating value of the staff 20 at the side of the mounting plate 5 on the scale 19 is the height of the quartz crucible 8.

[0032] The above merely describes the preferred embodiments of the present application, and is not intended to limit the present application, and any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A quartz crucible height measuring device, characterized in that, It includes a bracket, support frame, conveyor, mounting plate, linear bearing, operating lever, and proximity switch; The top of the bracket is fixed with a vertically arranged support frame, and the vertically arranged conveyor is fixed on the support frame. The two sides of the conveyor are provided with first slide rails arranged along its length direction. The mounting plate is slidably arranged between the two first slide rails. The inner side of the mounting plate is fixedly connected to the outer belt of the conveyor. The bottom of the mounting plate is fixed with a horizontally arranged linear bearing, and the vertically arranged operating rod is slidably arranged inside the linear bearing. The bottom end of the operating rod is fixed with a plate that contacts the quartz crucible, and the top end of the operating rod is fixed with a spring. The top end of the spring is fixed with a limit block. A proximity switch is fixed to the top of the mounting plate and is positioned opposite to the limiting block.

2. The quartz crucible height measuring device according to claim 1, characterized in that, It also includes a controller, the input of which is electrically connected to the proximity switch, and the output of which is electrically connected to the motor of the conveyor.

3. The quartz crucible height measuring device according to claim 2, characterized in that, The top of the bracket is fixed with a symmetrically arranged second slide rail, and the second slide rail is slidably equipped with a slider. A platform is fixed between the two sliders. The bottom of the platform is connected to the bracket with a telescopic device. The top end face of the platform is provided with one or more circular dividing lines with different diameters but the same center. The innermost dividing line matches the shape of the flat plate.

4. The quartz crucible height measuring device according to claim 3, characterized in that, A scale parallel to the conveyor is fixed on the support frame, and a horizontally positioned marker is fixed on one side of the bottom of the mounting plate, with the marker in contact with the surface of the scale.

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