Efficient MEMS Pirani vacuum gauge
By designing a protective structure with a sealing baffle and control threaded post on the MEMS Pirani vacuum gauge, the problem of dust and moisture easily entering the interface is solved, achieving a stable connection and protection, and ensuring stable use over a long period of time.
Patent Information
- Application Number
- CN202520253422.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-02-18
- Publication Date
- 2025-12-23
- Estimated Expiration
- 2035-02-18
AI Technical Summary
The interfaces of existing MEMS Pirani vacuum gauges are prone to dust and moisture ingress, and the connections are easily loosened, affecting the stability of use.
A protective structure including a sealing baffle and a control threaded post is designed. The sealing baffle blocks the connection port, and the rotating control threaded post drives the compression fixing plate to fix the serial interface, ensuring a stable connection and preventing dust and moisture from entering when not in use.
It achieves stable fixation and protection of the connection port, preventing dust from entering and moisture from getting in, ensuring stable connection and use for a long time.
Smart Images
Figure CN223710907U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to Pirani vacuum gauge technical field, concretely is a kind of high-efficiency MEMS Pirani vacuum gauge. BACKGROUND
[0002] The working principle of Pirani vacuum gauge is based on the physical property that the thermal conductivity of gas changes with pressure, and its core design indirectly reflects the vacuum degree by measuring the temperature change of the heating element. MEMS Pirani vacuum gauge is a miniature vacuum sensor manufactured based on micro-electro-mechanical system (MEMS) technology, which combines the heat conduction principle of traditional Pirani vacuum gauge and micro-nano processing technology. Its core goal is to achieve high sensitivity, wide range vacuum measurement through miniaturization structure, suitable for the integration needs of miniature vacuum system, but the interface inside is easy to enter dust and be damp during the use of the existing MEMS Pirani vacuum gauge, and when the interface is connected with the external serial interface for use, it is easy to loosen, so that the use detection is inconvenient, therefore a high-efficiency MEMS Pirani vacuum gauge is needed to solve the above problems. SUMMARY
[0003] The utility model aims at providing a kind of high-efficiency MEMS Pirani vacuum gauge to solve the problems presented in the above background.
[0004] To achieve the above object, the utility model provides the following technical scheme: a kind of high-efficiency MEMS Pirani vacuum gauge, including MEMS Pirani vacuum gauge, protection main part, fixed threaded column and connecting port, the protection main part is set in the upper end of the MEMS Pirani vacuum gauge, the connecting port is set in the upper end of the MEMS Pirani vacuum gauge, the fixed threaded column is distributed in the two sides of the connecting port, the fixed threaded column is fixedly arranged on the MEMS Pirani vacuum gauge, the fixed threaded column and the connecting port are located in the inside of the protection main part.
[0005] Preferably, the protection main part includes sealing baffle, track frame and threaded locking column, the sealing baffle is slidably connected in the inside of the track frame, the threaded locking column is threadedly rotatably arranged in the middle of the two ends of the track frame, and the end of the threaded locking column is in extrusion contact with the outer wall of the sealing baffle.
[0006] Preferably, the end of the sealing baffle is provided with a pull-out slot.
[0007] Preferably, the middle of the track frame is fixedly provided with a limiting seat on both sides, a control threaded column is rotatably arranged in the inside of the limiting seat, an extrusion fixing disc is rotatably connected to the front end of the control threaded column, and the extrusion fixing disc is located in the inside of the limiting seat.
[0008] Preferably, the bottom end of the track frame is fixedly installed at the upper end of the MEMS Pirani vacuum gauge, and the sealing baffle seals the track frame.
[0009] Compared with the prior art, the utility model has the beneficial effects as follows:
[0010] When the MEMS Pirani vacuum gauge is not used, the track frame can be sealed by the sealing baffle, so that the connecting port in the track frame can be fully protected, dust cannot enter the inside of the connecting port, and the moisture-proof effect is assisted, so that the connecting port on the MEMS Pirani vacuum gauge can be stably connected for a long time, when the connecting port is connected with the serial interface for use, the control threaded column arranged on the both sides of the rotating track frame is rotated, the extrusion fixing disc is driven out from the inside of the limiting clamp seat and slides outward in the process of rotation of the control threaded column, at this time, the extrusion fixing disc extrudes and fixes the serial interface connected with the connecting port, so that the serial interface can be firmly inserted on the connecting port and cannot be displaced and shaken, so that the connecting port and the serial interface can be stably connected and used for a long time. BRIEF DESCRIPTION OF DRAWINGS
[0011] Fig. 1 It is a schematic view of the main body three-dimensional structure of the utility model;
[0012] Fig. 2 It is a schematic view of the main body upper end structure of the utility model;
[0013] Fig. 3 It is a schematic view of the protection main body structure of the utility model.
[0014] In the drawing: 1-MEMS Pirani vacuum gauge, 2-protection main body, 3-fixed threaded column, 4-connecting port, 5-pulling groove, 6-sealing baffle, 7-track frame, 8-control threaded column, 9-limiting clamp seat, 10-extrusion fixing disc, 11-threaded locking column. DETAILED DESCRIPTION
[0015] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model.
[0016] As Figs. 1-3As shown, the utility model provides an embodiment: a kind of high-efficiency MEMS Pirani vacuum gauge, including MEMS Pirani vacuum gauge 1, protective main body 2, fixed threaded column 3 and connecting port 4, protective main body 2 is arranged at the upper end of MEMS Pirani vacuum gauge 1, connecting port 4 is arranged at the upper end of MEMS Pirani vacuum gauge 1, fixed threaded column 3 is distributed at the two sides of connecting port 4, fixed threaded column 3 is fixedly arranged on MEMS Pirani vacuum gauge 1, fixed threaded column 3 and connecting port 4 are located in the inside of protective main body 2.
[0017] Protective main body 2 includes sealed baffle 6, track frame 7 and threaded lock column 11, sealed baffle 6 is slidably connected in the inside of track frame 7, threaded lock column 11 is screw rotationally arranged in the middle of both ends of track frame 7, the end of threaded lock column 11 is in extrusion contact with the outer wall of sealed baffle 6.
[0018] The end of sealed baffle 6 is provided with pull-out slot 5, so as to facilitate pulling out sealed baffle 6.
[0019] The middle portion of track frame 7 is fixedly installed with limit seat 9 on both sides, control threaded column 8 is screw rotationally installed in the inside of limit seat 9, extrusion fixing disc 10 is rotationally connected to the front end of control threaded column 8, and extrusion fixing disc 10 is located in the inside of limit seat 9, and extrusion fixing disc 10 plays the role of extrusion stabilization.
[0020] The bottom end of track frame 7 is fixedly installed on the upper end of MEMS Pirani vacuum gauge 1, and sealed baffle 6 seals track frame 7, so as to sufficiently protect connecting port 4 located in the inside of track frame 7.
[0021] Working principle: when connecting port 4 is connected with serial interface for use in the process of using MEMS Pirani vacuum gauge 1, rotate control threaded column 8 arranged on both sides of track frame 7, control threaded column 8 drives extrusion fixing disc 10 to be discharged from the inside of limit seat 9 and slide outward in the process of rotation, so that extrusion fixing disc 10 extrudes and fixes serial interface connected on connecting port 4 at this time, so that serial interface can be firmly inserted on connecting port 4 and will not be displaced and shaken, when MEMS Pirani vacuum gauge 1 is not used and placed, sealed baffle 6 can be slidably inserted into the inside of track frame 7 through pull-out slot 5, track frame 7 can be sealed by sealed baffle 6, so that connecting port 4 located in the inside of track frame 7 can be sufficiently protected, the inside of connecting port 4 will not enter dust, and auxiliary moisture-proof effect is achieved, so that connecting port 4 on MEMS Pirani vacuum gauge 1 can be stably connected for a long time.
[0022] Although the embodiments of the present application have been shown and described, it is to be understood that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present application, the scope of which is defined by the appended claims and their equivalents.
Claims
1. A high-efficiency MEMS Pirani vacuum gauge, comprising a MEMS Pirani vacuum gauge (1), a protective body (2), a fixed threaded column (3) and a connecting port (4), characterized in that: The protective body (2) is arranged at the upper end of the MEMS Pirani vacuum gauge (1), the connecting port (4) is arranged at the upper end of the MEMS Pirani vacuum gauge (1), the fixing threaded column (3) is arranged on both sides of the connecting port (4), the fixing threaded column (3) is fixedly arranged on the MEMS Pirani vacuum gauge (1), and the fixing threaded column (3) and the connecting port (4) are located in the protective body (2).
2. The high-efficiency MEMS Pirani vacuum gauge according to claim 1, wherein: The protective body (2) comprises a sealing blocking plate (6), a track frame (7) and a threaded locking column (11), the sealing blocking plate (6) is slidingly connected in the track frame (7), and the threaded locking column (11) is threadedly arranged at the middle of both ends of the track frame (7), and the end of the threaded locking column (11) is in extrusion contact with the outer wall of the sealing blocking plate (6).
3. The high-efficiency MEMS Pirani vacuum gauge according to claim 2, wherein: The end of the sealing blocking plate (6) is provided with a pull-out groove (5).
4. The high-efficiency MEMS Pirani vacuum gauge according to claim 3, wherein: The middle of the track frame (7) is fixedly provided with a limiting clamping seat (9), the limiting clamping seat (9) is internally threadedly provided with a control threaded column (8), the front end of the control threaded column (8) is rotatably connected with an extrusion fixing disc (10), and the extrusion fixing disc (10) is located in the limiting clamping seat (9).
5. A high-efficiency MEMS Pirani vacuum gauge according to claim 4, characterized in that: The bottom end of the track frame (7) is fixedly arranged at the upper end of the MEMS Pirani vacuum gauge (1), and the sealing blocking plate (6) seals the track frame (7).