Injection device

Abstract

The utility model belongs to the technical field of spraying devices, and particularly relates to a spraying device which comprises a spraying device body. The mounting blind hole is formed in the side wall of the spraying device body; the medium flow channel is formed in the spraying device body and comprises a flow inlet channel and a flow outlet channel, the flow inlet channel communicates with the bottom of the mounting blind hole, and the flow outlet channel communicates with the side wall of the mounting blind hole; the valve element is arranged in the mounting blind hole and is suitable for blocking the inflow channel to cut off the medium flow channel; when the injection device is used, a valve element is controlled to move away from a flow inlet channel so as to open a medium flow channel, and the medium flow direction F1 of the flow inlet channel and the moving direction F2 of the valve element are coaxially arranged. The direction of the impact force is the same as the moving direction of the valve element, and the impact force in the same direction enables the valve element not to be bent easily after being used for a long time.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the technical field of injection device, more particularly to a device for controlling discharge capacity. BACKGROUND

[0002] In the semiconductor production line, the chip box, the groove body, the equipment mesa and the like often need to use a large amount of water and gas to clean and dry. The use of water is limited to deionized water, on the one hand to prevent the powder particles in the water from polluting the wafer, and on the other hand to prevent the metal ions in the water, such as potassium and sodium ions, from polluting the band carrier channel of the metal-oxide-semiconductor transistor structure, affecting the working characteristics of the semiconductor components.

[0003] In the related art, a water pipe or a gas pipe is generally connected to the injection device to clean the semiconductor, such as a high-purity injection device disclosed in CN103357530A. The valve core is used to control the opening and closing of the flow channel. However, the moving direction of the valve core and the flow direction of the medium have a certain angle, so that most of the impact force of the medium acts on the side wall of the valve core at the moment of opening and closing of the flow channel, causing the valve core to bend easily after a long time of work, and the flow channel is difficult to be completely cut off.

[0004] Therefore, how to solve the technical problem that the valve core is easily bent when subjected to the impact force on the side wall for a long time, which makes it difficult to completely cut off the flow channel, is an urgent problem for those skilled in the art.

[0005] It should be noted that the above information disclosed in the background section of the present application is only used to understand the background of the present application, and therefore, the above description is not considered to constitute prior art information. CONTENT OF THE UTILITY MODEL

[0006] The present disclosure provides at least one injection device.

[0007] In a first aspect, the present disclosure provides an injection device, comprising: an injection device body; a mounting blind hole formed in the side wall of the injection device body; a medium flow channel formed in the injection device body, comprising: an inlet flow passage and an outlet flow passage, the inlet flow passage being in communication with the bottom of the mounting blind hole, and the outlet flow passage being in communication with the side wall of the mounting blind hole; and a valve core arranged in the mounting blind hole and adapted to block the inlet flow passage to cut off the medium flow channel; wherein when the injection device is in use, the medium flow channel is opened by controlling the valve core to move away from the inlet flow passage, and the medium flow direction F1 of the inlet flow passage is coaxially arranged with the moving direction F2 of the valve core.

[0008] In an alternative embodiment, the inlet channel comprises: a first outlet section; wherein the first outlet section is in communication with the bottom of the mounting blind hole, and the medium flow direction of the first outlet section is coaxial with the medium flow direction F1 of the inlet channel.

[0009] In an alternative embodiment, the outlet channel comprises: a second inlet section; wherein the second inlet section is in communication with the sidewall of the mounting blind hole, and the second inlet section is at an angle a with the first outlet section, and the angle a is in the range of 70-110°.

[0010] In an alternative embodiment, the outlet channel further comprises: a second outlet section; wherein the second outlet section is in communication with the second inlet section, and the outer end of the second outlet section is threadedly connected with a nozzle.

[0011] In an alternative embodiment, a filter is disposed between the second outlet section and the nozzle; wherein the filter is threadedly connected with the outer end of the second outlet section, and the nozzle is threadedly connected with the outer end of the filter.

[0012] In an alternative embodiment, a handle is disposed on the sidewall of the body of the spraying device; wherein the upper end of the handle is hingedly connected with the valve core, and the middle part of the handle is abutted with a fulcrum on the body of the spraying device.

[0013] In an alternative embodiment, the upper part of the body of the spraying device is provided with a detachable hook.

[0014] In an alternative embodiment, the valve core comprises: an on-off diaphragm and a linkage assembly; wherein the inner end of the linkage assembly is connected with the on-off diaphragm, and is adapted to push the on-off diaphragm to block the first outlet section of the inlet channel; the outer end of the linkage assembly is hingedly connected with the handle, and in use of the spraying device, the valve core is moved away from the first outlet section by pressing the handle.

[0015] In an alternative embodiment, the on-off diaphragm comprises: a piston part and a diaphragm part; the piston part is adapted to block the first outlet section of the inlet channel; and the diaphragm part is adapted to seal the middle part of the mounting blind hole.

[0016] In an alternative embodiment, the linkage assembly comprises: a limiting sleeve, which is threadedly connected with the mounting blind hole, and the inner end of the limiting sleeve is pressed against the diaphragm part to seal; a connecting shaft, the inner end of which is connected with the piston part, and the outer end of which extends out of the limiting sleeve and is hingedly connected with the handle; and a return spring, which is sleeved on the connecting shaft, and is adapted to push the connecting shaft to make the piston part block the first outlet section of the inlet channel; wherein in use of the spraying device, the piston part is opened by pulling the piston part through the connecting shaft by pressing the handle.

[0017] The utility model discloses beneficial effect is, the medium in the flow channel of this injection device produces the impact force to valve core, and the direction of the impact force is same with the moving direction of valve core, and the impact force of this same direction makes valve core not easy to bend after long -time use, namely, the sealing point of valve core will be very accurate, and it is not easy to cause the sealing failure condition of deviation.

[0018] Other features and advantages of the present utility model will be set forth in the following description of the application, and in part will become apparent to those skilled in the art upon examination of the following or can be learned by practice of the present utility model. The objects and other advantages of the present utility model will be realized and attained by the structure particularly pointed out in the description and the drawings.

[0019] In order to make the above-mentioned purpose, feature and advantage of the utility model more obvious and easy to understand, the text will be preferred embodiment, and cooperate the drawing, and make detailed description as follows. BRIEF DESCRIPTION OF DRAWINGS

[0020] In order to more clearly illustrate the specific embodiment of the utility model or the technical scheme in prior art, the following will be briefly introduced to the drawing needed to be used in the specific embodiment or prior art description, obviously, the drawing in the following description is some embodiments of the utility model, and for those skilled in the art, under the premise of not paying creative labor, other drawings can also be obtained according to these drawings.

[0021] Figure 1 The structure schematic diagram of a kind of injection device provided by the embodiment of the present disclosure without valve core is shown in the figure;

[0022] Figure 2 The structure schematic diagram of a kind of injection device provided by the embodiment of the present disclosure with valve core is shown in the figure;

[0023] Figure 3 The structure schematic diagram of a kind of injection device provided by the embodiment of the present disclosure is shown in the figure;

[0024] Figure 4 The structure schematic diagram of a kind of valve core provided by the embodiment of the present disclosure is shown in the figure;

[0025] Figure 5 The structure schematic diagram of a kind of linkage assembly provided by the embodiment of the present disclosure is shown in the figure.

[0026] In the figure:

[0027] Injection device body 1, hook 11, filter 12, nozzle 13, handle 14, fulcrum 15;

[0028] Mounting blind hole 2;

[0029] Medium flow channel 3, inlet flow channel 31, first outlet section 311, outlet flow channel 32, second outlet section 321, second inlet section 322;

[0030] Valve core 4, on-off diaphragm 41, piston part 411, diaphragm part 412, linkage assembly 42, connecting shaft 421, return spring 422, limiting sleeve 423. DETAILED DESCRIPTION

[0031] To make the purpose, technical scheme and advantages of the embodiments of the present application more clear, the technical scheme of the present application will be described clearly and completely below in conjunction with the drawings. Obviously, the described embodiments are some embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all the other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0032] It should be noted that: similar reference numbers and letters represent similar items in the following drawings, therefore, once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings. In addition, in the drawings, the thickness of components can be exaggerated or reduced for effective description of technical content.

[0033] Some embodiments of the present application will be described in detail below in conjunction with the drawings. In the case of no conflict, the following embodiments and features in the embodiments can be combined with each other.

[0034] As shown in Figure 1 , Figure 2 At least one embodiment provides a spraying device, comprising: a spraying device body 1; a mounting blind hole 2, which is opened on the side wall of the spraying device body 1; a medium flow channel 3, which is opened in the spraying device body 1 and comprises: an inlet flow channel 31 and an outlet flow channel 32, the inlet flow channel 31 is in communication with the bottom of the mounting blind hole 2, and the outlet flow channel 32 is in communication with the side wall of the mounting blind hole 2; and a valve core 4, which is arranged in the mounting blind hole 2 and is adapted to block the inlet flow channel 31 to cut off the medium flow channel 3.

[0035] In the present embodiment, when the spraying device is in use, the medium flow channel 3 is opened by controlling the valve core 4 to move away from the inlet flow channel 31, and the direction of the medium flow F1 in the inlet flow channel 31 is coaxial with the moving direction F2 of the valve core 4.

[0036] In the present embodiment, when the medium in the inlet flow channel 31 generates an impact force on the valve core 4, the direction of the impact force is the same as the moving direction of the valve core 4. Compared with the valve core 4 in the prior art which is subjected to a radial impact force, the valve core 4 in the present embodiment is not easy to bend after long-time use, that is, the sealing point of the valve core 4 is very accurate and is not easy to deviate to cause sealing failure.

[0037] As shown in the drawings, in some embodiments, the inlet flow channel 31 comprises a first outlet section 311 which is in communication with the bottom of the mounting blind hole 2, and the medium flow direction in the first outlet section 311 is the medium flow direction F1 of the inlet flow channel 31. Figure 2

[0038] In the present embodiment, the medium in the inlet flow channel 31 only collides with the valve core 4 in the flow channel first outlet section 311, so it is only necessary to ensure that the medium flow direction F1 in the first outlet section 311 is coaxial with the moving direction F2 of the valve core 4.

[0039] As shown in the drawings, in some embodiments, the outlet flow channel 32 comprises a second inlet section 322 which is in communication with the side wall of the mounting blind hole 2, and the second inlet section 322 is at an angle α with the first outlet section 311, and the angle α is in the range of 70°-110°, preferably 85° or 94° or 103°. Figure 1 As shown in the drawings, in some embodiments, the outlet flow channel 32 further comprises a second outlet section 321 which is in communication with the second inlet section 322, and the outer end of the second outlet section 321 is threadedly connected with the nozzle 13.

[0040] Figure 2 As shown in the drawings, in some embodiments, a filter 12 is arranged between the second outlet section 321 and the nozzle 13, the filter 12 is threadedly connected with the outer end of the second outlet section 321, and the nozzle 13 is threadedly connected with the outer end of the filter 12.

[0041] As shown in the drawings, in some embodiments, a filter 12 is arranged between the second outlet section 321 and the nozzle 13, the filter 12 is threadedly connected with the outer end of the second outlet section 321, and the nozzle 13 is threadedly connected with the outer end of the filter 12. Figure 2 In the present embodiment, the second outlet section 321 is where the medium is about to be sprayed out of the injection device, and the filter 12 is installed at this position to filter the impurities and particles in the medium flow channel 3, thereby preventing the impurities and particles from damaging the surface of the semiconductor.

[0042] In the present embodiment, the nozzle 13, the filter 12 and the injection device body 1 are all threadedly connected, which not only facilitates the replacement of nozzles 13 of different requirements, but also facilitates the replacement of filters 12.

[0043] As shown in the drawings, in some embodiments, the side wall of the injection device body 1 is provided with a handle 14; wherein the upper end of the handle 14 is hinged to the valve core 4, and the middle part is in abutment with a fulcrum 15 on the injection device body 1; due to the presence of the fulcrum 15, the handle 14 is more convenient to move the valve core 4 when pressed.

[0044] Figure 2 As shown in the drawings, in some embodiments, the side wall of the injection device body 1 is provided with a handle 14; wherein the upper end of the handle 14 is hinged to the valve core 4, and the middle part is in abutment with a fulcrum 15 on the injection device body 1; due to the presence of the fulcrum 15, the handle 14 is more convenient to move the valve core 4 when pressed.

[0045] As shown in the drawings, in some embodiments, the side wall of the injection device body 1 is provided with a handle 14; wherein the upper end of the handle 14 is hinged to the valve core 4, and the middle part is in abutment with a fulcrum 15 on the injection device body 1; due to the presence of the fulcrum 15, the handle 14 is more convenient to move the valve core 4 when pressed. Figure 3 ​​​As shown, in some embodiments, the upper part of the body 1 of the spraying device is provided with a detachable hook 11; the presence of the hook effectively prevents the nozzle 13 from being contaminated due to the falling or random placement of the body 1 of the spraying device.

[0046] As shown, in some embodiments, the valve core 4 comprises: an on-off diaphragm 41 and a linkage assembly 42; wherein the inner end of the linkage assembly 42 is connected to the on-off diaphragm 41, and is adapted to push the on-off diaphragm 41 to block the first outlet section 311 of the inflow passage 31; the outer end of the linkage assembly 42 is hingedly connected to the handle 14, and when the spraying device is in use, the valve core 4 is moved away from the first outlet section 311 by pressing the handle 14. Figure 2

[0047] Figure 4 As shown, in some embodiments, the on-off diaphragm 41 comprises: a piston part 411 and a diaphragm part 412; the piston part 411 is adapted to block the first outlet section 311 of the inflow passage 31; and the diaphragm part 412 is adapted to seal the middle part of the installation blind hole 2.

[0048] As shown, in some embodiments, the linkage assembly 42 comprises: a limiting sleeve 423, which is threadedly connected to the installation blind hole 2, and the inner end thereof is pressed against the diaphragm part 412 to seal; a connecting shaft 421, the inner end of which is connected to the piston part 411, and the outer end thereof extends out of the limiting sleeve 423 and is hingedly connected to the handle 14; and a return spring 422, which is sleeved on the connecting shaft 421, and is adapted to push the connecting shaft 421 to make the piston part 411 block the first outlet section 311 of the inflow passage 31; wherein when the spraying device is in use, the connecting shaft 421 pulls the piston part 411 to open the first outlet section 311 by pressing the handle 14. Figure 5

[0049] In some embodiments, the materials of the body 1 of the spraying device and the nozzle 13 can be, but are not limited to, PFA, PVDF, PP, and PTFE.

[0050] In summary, when the medium in the inflow passage 31 of the spraying device impacts the valve core 4, the direction of the impact force is the same as the moving direction of the valve core 4, and such impact force in the same direction makes the valve core 4 not easy to bend after long-time use, i.e., the sealing point of the valve core 4 is very accurate, and is not easy to deviate to cause sealing failure.

[0051] In this document, when it is mentioned that a first component is located on a second component, it can mean that the first component can be directly formed on the second component, or a third component can be interposed between the first component and the second component.

[0052] ​​​In this document, when an element or layer is referred to as being "on", "engaged to", "connected to", "attached to" or "coupled to" another element or layer, it can be directly on, engaged, connected, attached or coupled to the other element or layer, or intervening elements or layers can be present. In contrast, when an element is referred to as being "directly on", "directly engaged to", "directly connected to", "directly attached to" or "directly coupled to" another element or layer, there are no intervening elements or layers present. Other words used to describe the relationship between elements should be interpreted in a like fashion (e.g., "between" versus "directly between", "adjacent" versus "directly adjacent", etc.). As used herein, the term "and / or" includes any and all combinations of one or more of the associated listed items.

[0053] In this document, example embodiments of the disclosure will be described in greater detail with reference to the accompanying drawings. As used herein, expressions such as "at least one of," when preceding a list of two or more items, modify the entire list of items and do not modify the individual items of the list.

[0054] The terminology used herein is for the purpose of describing particular example configurations only and is not intended to be limiting. As used herein, the singular articles "a," "an," and "the" can be intended to include the plural forms as well, unless the context clearly indicates otherwise. The terms "comprises," "comprising," "including," and "having" are inclusive and therefore specify the presence of stated features, steps, operations, elements, and / or components, but do not preclude the presence or addition of one or more other features, steps, operations, elements, components, and / or groups thereof. The method steps, processes, and operations described herein are not to be construed as necessarily requiring their performance in the particular order

[0055] As used herein, the phrases "in an embodiment," "according to an embodiment," "in some embodiments," and the like, generally mean the particular feature, structure, or characteristic following the phrase can be included in at least one embodiment of the present disclosure. Thus, appearances of such phrases in various places throughout this specification do not necessarily all refer to the same embodiment. As used herein, the term "example" or "exemplary" means "serving as an example, instance, or illustration." Any implementation, aspect or design described herein as "example" or "exemplary" is not necessarily to be construed as preferred or advantageous over other implementations, aspects or designs. Rather, the term "example" or "exemplary" is intended to present concepts in a concrete manner.

[0056] In the description of the embodiments of the utility model, unless otherwise clear and definite, the terms "mount", "connect", "connection" should be understood in broad sense, for example, it can be fixed connection, also can be detachable connection, or integrally connected, it can be mechanical connection, also can be electrical connection, it can be direct connection, also can be indirect connection through intermediate medium, it can be the communication inside two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to specific circumstances.

[0057] In the description of the utility model, it needs to be explained that the orientation or position relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like is based on the orientation or position relationship shown in the drawings, and is only for the convenience of describing the utility model and simplifying the description, and therefore cannot be understood as limiting the utility model. In addition, terms such as "first", "second" and other numerical terms are used in this document, unless otherwise indicated in this document. Therefore, the above-discussed first element, component, region, layer or section can be referred to as the second element, component, region, layer or section without departing from the teachings of the example embodiments.

[0058] Spatially relative terms, such as "inner", "outer", "beneath", "below", "lower", "above", "upper" and the like, can be used herein for ease of description to describe one element or feature's relationship to another element(s) or feature(s) as illustrated in the figures. The spatially relative terms can be intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as "below" or "beneath" other elements or features would then be oriented "above" the other elements or features. Thus, the example term "below" can encompass both an orientation of above and below. The device can be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.

[0059] In the above discussion, unless otherwise stated, the terms "about", "approximately", "substantially" and the like, when used in describing numerical values, mean a + / -10% variation of the value.

[0060] With the above ideal embodiments according to the utility model as inspiration, through the above description, relevant staff can definitely make various changes and modifications without deviating from the technical idea of the utility model. The technical scope of the utility model is not limited to the contents in the specification, and the technical scope must be determined according to the scope of claims.

Claims

1. A spraying device, characterized in that The utility model relates to a kind of spray devices, including: Spray device body (1); Mounting blind hole (2) is opened in the side wall of spray device body (1); Medium flow channel (3) is opened in spray device body (1), and it includes: inflow passage (31) and outflow passage (32), the bottom of the inflow passage (31) is communicated with mounting blind hole (2), the side wall of the outflow passage (32) is communicated with mounting blind hole (2);And Valve core (4) is arranged in mounting blind hole (2), is suitable for blocking inflow passage (31) to cut off medium flow channel (3);Wherein When spray device is used, by controlling valve core (4) to move away from inflow passage (31) to open medium flow channel (3), and the medium flow direction F1 of the inflow passage (31) is coaxially arranged with the moving direction F2 of the valve core (4).

2. The spray device of claim 1, wherein The inflow passage (31) includes: first outlet section (311);Wherein The first outlet section (311) is communicated with the bottom of the mounting blind hole (2), and the medium flow direction of the first outlet section (311) is the medium flow direction F1 of the inflow passage (31); The medium flow direction F1 of the first outlet section (311) is coaxially arranged with the moving direction F2 of the valve core (4).

3. The spray device of claim 2, wherein The outflow passage (32) includes: second inlet section (322);Wherein The second inlet section (322) is communicated with the side wall of the mounting blind hole (2), and the second inlet section (322) is at an angle α with the first outlet section (311), and the angle of the angle α is between 70-110 °.

4. The spray device of claim 3, wherein The outflow passage (32) further includes: second outlet section (321);Wherein The second outlet section (321) is communicated with the second inlet section (322), and the outer end of the second outlet section (321) is threadedly connected with nozzle (13).

5. The spray device of claim 4, wherein A filter (12) is arranged between the second outlet section (321) and the nozzle (13);Wherein The filter (12) is threadedly connected with the outer end of the second outlet section (321), and the nozzle (13) is threadedly connected with the outer end of the filter (12).

6. The spray device of claim 1, wherein The side wall of the spray device body (1) is provided with a handle (14);Wherein The upper end of the handle (14) is hinged with the valve core (4), and the middle part is abutted with fulcrum (15) on the spray device body (1).

7. The spray device of claim 1, wherein The upper part of the spray device body (1) is provided with a detachable hook (11).

8. The spray device of claim 7, wherein The valve core (4) includes: on-off diaphragm (41) and linkage assembly (42);Wherein The inner end of the linkage assembly (42) is connected with the on-off diaphragm (41) and is adapted to push the on-off diaphragm (41) to block the first outlet section (311) of the inflow passage (31); The outer end of the linkage assembly (42) is hinged with the handle (14), and when the spraying device is used, the valve core (4) is moved away from the first outlet section (311) by pressing the handle (14).

9. The spraying device of claim 8, wherein, The on-off diaphragm (41) comprises a piston part (411) and a diaphragm part (412); The piston part (411) is adapted to block the first outlet section (311) of the inflow passage (31); The diaphragm part (412) is adapted to seal the middle part of the installation blind hole (2).

10. The spraying device of claim 9, wherein, The linkage assembly (42) comprises: a limiting sleeve (423) which is threadedly connected with the installation blind hole (2) and the inner end of which is pressed against the diaphragm part (412) to seal; a connecting shaft (421) whose inner end is connected with the piston part (411) and whose outer end extends out of the limiting sleeve (423) and is hinged with the handle (14); and a return spring (422) which is sleeved on the connecting shaft (421) and is adapted to push the connecting shaft (421) to make the piston part (411) block the first outlet section (311) of the inflow passage (31); wherein When the spraying device is used, the connecting shaft (421) pulls the piston part (411) to open the first outlet section (311) by pressing the handle (14).

Images