Device for testing pressure sensor chip

Abstract

The utility model relates to the field of pressure sensor chip testing, in particular to a device for testing a pressure sensor chip, which comprises a testboard, a connecting plug and a connecting piece, five groups of jacks are respectively arranged on the left side and the right side of the testboard, pressure detection modules are arranged in the jacks, one end of the connecting plug is inserted into the jacks, and the other end of the connecting plug is inserted into the connecting piece. The other end of the connecting plug is connected with one end of the first pressure sensor chip component, the connecting piece comprises a substrate, a guide pipe and output pipes, the guide pipe is fixed on the substrate, one end of the guide pipe is connected with an air inlet, the air inlet is connected with an air source system located in the test board through a pipeline, and five sets of output pipes are arranged at intervals and distributed on the guide pipe. The output pipe is communicated with the guide pipe, the output pipe is provided with an air outlet perpendicular to the guide pipe, the air outlet is connected with one end of the second pressure sensor chip component, the other end of the second pressure sensor chip component is connected with the other end of the first pressure sensor chip component, a control valve is arranged in the output pipe, and the detection efficiency is greatly improved.

Description

Technical Field

[0001] This utility model relates to the field of pressure sensor chip testing, and specifically to a device for testing pressure sensor chips. Background Technology

[0002] In the production process of pressure sensor chips, airtightness testing is a crucial step. Currently, existing airtightness testing methods for pressure sensor chips have many shortcomings, resulting in low testing efficiency. Traditional testing methods often employ a one-by-one approach, performing airtightness testing on each pressure sensor chip individually. This is not only time-consuming and labor-intensive, but also far from meeting production demands during large-scale manufacturing. Therefore, developing a device that can improve the efficiency of airtightness testing for pressure sensor chips is of significant practical importance. Utility Model Content

[0003] To address the problems of the prior art, this invention provides a device for testing pressure sensor chips.

[0004] The objective of this utility model can be achieved through the following technical solution: A device for testing pressure sensor chips includes a test platform, a connector, and a connector. The test platform has five sets of sockets on each side. Each socket contains a pressure detection module. One end of the connector is inserted into the socket, and the other end of the connector is connected to one end of a pressure sensor chip component. The connector includes a substrate, a conduit, and an output tube. The conduit is fixed to the substrate, and one end of the conduit is connected to an air inlet. The air inlet is connected to an air source system located inside the test platform via a pipe. Five sets of output tubes are spaced apart and distributed on the conduit. The output tubes are connected to the conduit and have an air outlet perpendicular to the conduit. The air outlet is connected to one end of a pressure sensor chip component, and the other end of the pressure sensor chip component is connected to the other end of the pressure sensor chip component. A control valve is provided inside the output tube.

[0005] In a further improvement, the test bench is equipped with a control module, which is electrically connected to the pressure detection module. Ten sets of indicator lights are provided on the upper part of the test bench, and the indicator lights are electrically connected to the control module.

[0006] As a further improvement, the connector surface is provided with insertion holes of different shapes.

[0007] As a further improvement, the end of the conduit is threaded with a sealing cap.

[0008] Compared with the prior art, the beneficial effects of the device for testing pressure sensor chips of this invention are as follows:

[0009] The test bench has five sets of sockets on each side, each containing a pressure detection module. A connector plugs connect to pressure sensor chip component one. One end of the connector's conduit connects to the internal air supply system of the test bench via an air inlet, while the output pipe connects to the conduit and is linked to pressure sensor chip component two. The air supply system generates gas, which is delivered to pressure sensor chip component one and pressure sensor chip component two via the conduit and output pipe. The pressure detection modules within the sockets detect pressure changes, thereby testing the airtightness of the pressure sensor chips. This system can simultaneously test ten pressure sensor chips, significantly improving testing efficiency. Attached Figure Description

[0010] Figure 1 This is a schematic diagram of the structure of the present invention.

[0011] Figure 2 This is a schematic diagram of the connecting member in this utility model.

[0012] Figure 3 This is a structural schematic diagram of the cross-section of the connector plug in this utility model.

[0013] Figure 4 This is a schematic diagram of the control valve in this utility model.

[0014] In the diagram, 1-test stand, 11-socket, 12-pressure detection module, 13-control module, 14-indicator light, 15-air supply system, 2-connector plug, 21-socket hole, 3-connector, 31-base plate, 32-conduit, 321-air inlet, 322-sealing cap, 33-output pipe, 34-air outlet, 41-pressure sensor chip component one, 42-pressure sensor chip component two, 5-control valve. Detailed Implementation

[0015] In the description of this utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0016] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0017] The following describes the embodiments and appendices. Figures 1-4The technical solution of this utility model will be further described below.

[0018] Example 1

[0019] A device for testing pressure sensor chips includes: a test platform 1, a connector 2, and a connector 3. The test platform 1 has five sets of sockets 11 on each side. Each socket 11 houses a pressure detection module 12. One end of the connector 2 is inserted into the socket 11, and the other end is connected to one end of a pressure sensor chip component 41. The connector 3 includes a substrate 31, a conduit 32, and an output tube 33. The conduit 32 is fixed to the substrate 31, and one end of the conduit 32 is connected to an inlet / outlet tube. Air inlet 321 is connected to air source system 15 located inside test bench 1 via a pipe. Five sets of output pipes 33 are arranged at intervals and distributed on conduit 2. The output pipes 33 are connected to conduit 32. The output pipes 33 are provided with air outlets 34 that are perpendicular to conduit 32. The air outlets 34 are connected to one end of pressure sensor chip component 42. The other end of pressure sensor chip component 42 is connected to the other end of pressure sensor chip component 41. A control valve 5 is provided inside the output pipes 33.

[0020] like Figures 1-4 As shown, the working principle of this utility model is as follows: Five sets of sockets 11 are provided on each side of the test bench 1. Pressure detection modules 12 are installed inside each socket 11. Connecting plugs 2 connect to pressure sensor chip component 41. One end of the conduit 32 of the connector 3 is connected to the air supply system 15 inside the test bench 1 through an air inlet 321. The output pipe 33 is connected to the conduit 32 and to pressure sensor chip component 42. The air supply system 15 generates gas, which is delivered to pressure sensor chip component 41 and pressure sensor chip component 42 through the conduit 32 and the output pipe 33. The pressure detection modules 12 inside the sockets 11 detect pressure changes, thereby testing the airtightness performance of the pressure sensor chips. This allows for the simultaneous testing of ten pressure sensor chips, greatly improving testing efficiency.

[0021] In a further preferred embodiment, the test bench 1 is equipped with a control module 13, which is electrically connected to the pressure detection module 12. Ten indicator lights 14 are located on the upper end of the test bench 1, and these indicator lights 14 are electrically connected to the control module 13. The control module 13 receives data from the pressure detection module 12, determines whether the pressure sensor chip is qualified according to preset standards, and displays the test results intuitively through the indicator lights 14. A red light indicates failure, and a green light indicates success. This allows operators to quickly understand the test results without complex data reading and analysis, further improving the convenience and efficiency of the test.

[0022] As a further preferred embodiment, the connector 2 has insertion holes 21 of different shapes on its surface. By using connectors 2 with insertion holes 21 of different shapes, different models of pressure sensor chip components 41 can be adapted, improving the versatility of the device and enabling it to meet the testing needs of various pressure sensor chips.

[0023] As a further preferred embodiment, the tail end of the conduit 32 is threaded with a sealing cap 322. When the device is not in use or when not all output tubes 33 are required to operate, the sealing cap 322 can prevent gas leakage and ensure that the gas output from the gas source system 15 effectively acts on the pressure sensor chip being tested.

[0024] The preferred embodiments of this utility model have been described in detail above. It should be understood that those skilled in the art can make numerous modifications and variations based on the concept of this utility model without creative effort. Therefore, all technical solutions that can be obtained by those skilled in the art based on the concept of this utility model through logical analysis, reasoning, or limited experimentation on the basis of existing technology should be within the scope of protection defined by the claims.

Claims

1. An apparatus for pressure sensor chip testing, characterized by, Include: Test platform, connecting plug and connecting piece, the test platform is equipped with five groups of jack left and right, the inside of the jack is equipped with pressure detection module, one end of the connecting plug is connected in the jack, the other end of the connecting plug is connected with the one end of pressure sensor chip component one, the connecting piece includes base plate, conduit and output pipe, the conduit is fixed on the base plate, one end of the conduit is connected with air inlet, the air inlet is connected with air source system in the test platform through pipeline, five groups of output pipes are arranged at intervals and distributed on the conduit, the output pipe is communicated with the conduit, the air outlet perpendicular to the conduit is arranged on the output pipe, the air outlet is connected with the one end of pressure sensor chip component two, the other end of pressure sensor chip component two is connected with the other end of pressure sensor chip component one, the control valve is arranged in the output pipe.

2. The apparatus for testing a pressure sensor chip according to claim 1, wherein, The inside of the test platform is equipped with control module, the control module is electrically connected with pressure detection module, ten groups of indicator lights are arranged on the upper end of the test platform, the indicator light is electrically connected with the control module.

3. The apparatus for testing a pressure sensor chip according to claim 1, wherein, The surface of the connecting plug is equipped with different shapes of plug holes.

4. The apparatus for testing a pressure sensor chip of claim 1, wherein, The tail end of the conduit is threadedly connected with sealing cap.

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