Dispensing head and chip dispensing equipment

Abstract

The utility model discloses a dispensing head and dispensing equipment, comprising: a dispensing head main body, a cavity arranged in the dispensing head main body and used for storing glue, the lower end of the dispensing head main body being provided with a glue outlet, the glue outlet being communicated with the cavity; the opening shape of the glue outlet corresponds to the shape of the chip; the glue scraping plate comprises a glue scraping part protruding out of the lower end face of the glue dispensing head body, and the glue scraping part is arranged to be capable of reciprocating below the lower end face of the glue dispensing head body. According to the utility model, the technical effects of increasing the coverage area of the glue on the surface of the chip, controlling the use amount of the glue and preventing the use amount of the glue from being too large are realized.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor production, specifically, relate to a kind of point gum head and chip dispensing equipment. BACKGROUND

[0002] Semiconductor packaging process is: wafer from wafer front process is cut into small wafer after scribing process, then the wafer is attached to the base island of carrier plate with glue or solder, then the pad of wafer is connected to the corresponding pin of carrier plate by metal wire, and the required circuit is formed;Then the wafer is packaged and protected with plastic shell, and the carrier plate is singulated after plastic packaging, and the finished product is tested and packaged after packaging is completed, and finally put into warehouse and shipped.

[0003] The existing point gum head is arranged according to the size of chip, and the circular hole type glue outlet is arranged in matrix, such as horizontal line, X type, rice character type or double Y type, according to the pressure of chip pressing, the glue is pressed flat, so that the coverage area of glue is small, especially the four corners of chip are prone to the problem that glue cannot cover. When the pad is arranged at the corner of chip, the wafer crack is prone to occur during bonding, which causes packaging failure. When the dispensing amount is increased, the risk of overflow of bonding material from the frame base island is prone to occur. UTILITY MODEL CONTENT

[0004] The utility model mainly aims at providing a kind of point gum head and chip dispensing equipment to solve the problem that the coverage area of glue extruded by related technology point gum head on chip surface is small.

[0005] In order to achieve the above purpose, the utility model provides a kind of point gum head, comprising:

[0006] Point gum head main body, the cavity is arranged in the point gum head main body, the cavity is used to store glue, the lower end of the point gum head main body is provided with glue outlet, and the glue outlet is communicated with the cavity;

[0007] The opening shape of the glue outlet corresponds to the shape of chip;

[0008] Glue scraping plate, the glue scraping plate includes glue scraping part protruding from the lower end surface of the point gum head main body, and the glue scraping part is arranged to be able to reciprocate below the lower end surface of the point gum head main body.

[0009] Further, the glue scraping plate can be driven to reciprocate on the glue head main body along the first direction, the length of the glue scraping part in the second direction is greater than or equal to the length of the glue outlet in the second direction, and the first direction is perpendicular to the second direction.

[0010] Further, the two sides of the glue scraping part have glue scraping slope, and the distance between the two sides of the glue scraping slope gradually decreases from top to bottom.

[0011] Further, a sliding groove extending along the first direction is arranged on the glue dispensing head body, and the glue scraping plate comprises a sliding part in sliding connection with the sliding groove.

[0012] Further, the glue dispensing head further comprises a driving cylinder, a piston rod of the driving cylinder is fixedly connected with the glue scraping plate, and the glue scraping plate is driven to move linearly back and forth.

[0013] Further, a gas cavity is arranged in the glue dispensing head body, the gas cavity extends along the first direction, a piston is arranged in the gas cavity, the piston divides the gas cavity into a first cavity and a second cavity, a first gas port connected with the first cavity and a second gas port connected with the second cavity are arranged on the glue dispensing head body, the first gas port is used to be connected with an external gas source, and the first cavity is applied with positive pressure and negative pressure by the external gas source, and the second gas port is in communication with an external environment.

[0014] One end of the piston is fixedly connected with a piston rod, the piston rod extends out of the gas cavity and is sealed between the gas cavity, one end of the piston rod extending out of the gas cavity is provided with a connecting rod, the connecting rod is fixedly connected with the glue scraping plate, and the connecting rod and the glue dispensing head body have a space for meeting the moving stroke of the glue scraping plate.

[0015] Further, the connecting rod comprises a vertical rod and a horizontal rod, the vertical rod is fixedly connected with the piston rod, and the horizontal rod is fixedly connected with the glue scraping plate.

[0016] Further, a first protrusion and a second protrusion are arranged on the lower end face of the glue dispensing head body, the first protrusion and the second protrusion are oppositely distributed, and the lengths of the first protrusion and the second protrusion protruding from the lower end face of the glue dispensing head body are greater than the length of the glue scraping part protruding from the lower end face of the glue head body.

[0017] The first protrusion and the second protrusion are distributed at two ends of the glue dispensing head body along the first direction.

[0018] Further, the glue outlet has a size smaller than that of the chip, the length of the glue outlet is 60%-80% of the length of the chip, and the width of the glue outlet is 60%-80% of the width of the chip.

[0019] According to another aspect of the utility model, a chip glue dispensing equipment is provided, which comprises the above glue dispensing head.

[0020] In the embodiment of the utility model, through setting point gum head main part, point gum head main part is provided with cavity, cavity is used for storing glue, the lower end of point gum head main part is provided with glue outlet, glue outlet communicates with cavity, the opening shape of glue outlet corresponds with the shape of chip, glue scraping plate, glue scraping plate includes the glue scraping part of the lower end surface of point gum head main part, glue scraping part is set to reciprocatingly move below the lower end surface of point gum head main part reaches first glue outlet extruded glue is close to the surface profile of chip, then drive glue scraping plate reciprocatingly move and utilize the purpose that glue scraping part pushes part glue on the surface of chip moves, thereby realize the purpose that the coverage area of glue on the surface of chip is increased, control the amount of glue simultaneously, avoid the technical effect that the amount of glue is too large, further solve the problem that the coverage area of glue extruded by the point gum head of prior art on the surface of chip is small. BRIEF DESCRIPTION OF DRAWINGS

[0021] The accompanying drawings, which form a part of this application, are intended to provide further understanding of the application and are incorporated herein for a purpose of explanations. The specific embodiments of the present application and the accompanying drawings are intended to explain the present application, and do not constitute an improper limitation to the present application. In the drawings:

[0022] Figure 1 is a sectional view of the point gum head according to an embodiment of the present application;

[0023] Figure 2 is a structural view of the point gum head according to an embodiment of the present application;

[0024] Figure 3 is Figure 2 is a bottom view of the point gum head;

[0025] Figure 4 is a structural view of the point gum head according to another embodiment of the present application;

[0026] Figure 5 is Figure 4 is a bottom view of the point gum head;

[0027] Figure 6 is a sectional view of the point gum head according to another embodiment of the present application;

[0028] Wherein, 1 point gum head main part, 100 glue outlet assembly, 101 glue pipe fixing piece, 102 glue pipe, 103 rubber plug, 104 air pressure pipe, 2 cavity, 3 first protruding block, 4 second protruding block, 5 glue outlet, 6 glue scraping plate, 60 glue scraping part, 61 glue scraping inclined surface, 7 sliding groove, 8 air cavity, 80 first cavity, 81 second cavity, 82 first air port, 83 piston rod, 84 second air port, 85 piston, 9 sealing plug, 10 connecting rod, 11 vertical rod, 12 horizontal rod. DETAILED DESCRIPTION

[0029] In order to make the person skilled in the art better understand the technical scheme of the present application, the technical scheme in the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor should belong to the scope of protection of the present application.

[0030] It should be noted that the terms "first", "second" and the like in the description and claims of the present application and the above drawings are used to distinguish similar objects, and do not necessarily have to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged under appropriate circumstances, so as to describe the embodiments of the present application described herein.

[0031] In the present application, the terms "upper", "lower", "inner", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. These terms are mainly used to better describe the present application and its embodiments, and are not used to limit the indicated devices, elements or components to have a specific orientation, or to be constructed and operated in a specific orientation.

[0032] In addition, in addition to being used to indicate the orientation or positional relationship, the above-mentioned part of the terms can also be used to indicate other meanings, for example, the term "upper" can also be used to indicate a certain dependent relationship or connection relationship in some cases. For those skilled in the art, the specific meaning of these terms in the present application can be understood according to the specific circumstances.

[0033] In addition, the terms "set", "provided with", "connected", "fixed" and the like should be broadly understood. For example, "connected" can be fixedly connected, detachably connected, or integrally constructed; can be mechanically connected, or electrically connected; can be directly connected, or indirectly connected through an intermediate medium, or internal communication between two devices, elements or components. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0034] In addition, the meaning of the term "a plurality of" should be two or more.

[0035] It should be noted that the embodiments in the present application and the features in the embodiments can be combined with each other without conflict. The present application will be described in detail below with reference to the drawings and in conjunction with the embodiments.

[0036] To solve the related technical problems, such as Figures 1 to 5The utility model discloses an embodiment provides a point gum head, comprising:

[0037] Point gum head main body 1 is provided with cavity 2 in point gum head main body 1, and cavity 2 is used for storing glue, and the lower end of point gum head main body 1 is provided with glue outlet 5, and glue outlet 5 communicates with cavity 2;

[0038] The opening shape size of glue outlet 5 corresponds to the shape of chip;

[0039] Glue scraping plate 6, glue scraping plate 6 includes the glue scraping part 60 of the lower end surface of point gum head main body 1, and the glue scraping part 60 is set to be able to reciprocate under the lower end surface of point gum head main body 1, and in the process of moving glue scraping plate 6, glue scraping part 60 is extruded to the glue on chip from glue outlet 5 and is scraped flat.

[0040] In the embodiment, as shown, Figure 1 Point gum head main body 1 mainly includes glue outlet assembly 100, glue pipe fixing assembly 101, glue pipe 102, rubber plug 103 and air pressure pipe 104. Glue outlet assembly 100 is fixed at the lower end surface of glue pipe fixing assembly 101, and glue outlet assembly 100 and glue pipe fixing assembly 101 can be fixedly connected by screw, nut or welded. The upper end of glue outlet assembly 100 is provided with lower groove, the lower end of glue pipe fixing assembly 101 is provided with upper groove, and the upper groove corresponds to the lower groove, and together forms the cavity 2 in the point gum head assembly. Glue pipe fixing assembly 101 is provided with glue pipe 102 installation channel, and the glue pipe 102 installation channel communicates with the upper groove, and the lower end of the glue pipe 102 is installed in the glue pipe 102 installation channel. A certain amount of glue can be stored in the glue pipe 102, and the rubber plug 103 is fixed in the glue pipe 102, and the air pressure pipe 104 is connected to the rubber plug 103. The glue in the glue pipe 102 can be extruded into the cavity 2, and then extruded to the surface of the chip through the glue outlet 5.

[0041] Glue outlet 5 is arranged at the lower end of point gum head main body 1, that is, glue outlet 5 is arranged at the lower end of glue outlet assembly 100. The shape of glue outlet 5 matches the shape of chip, and in size, it is generally smaller than the size of chip. In an embodiment, the chip is square, and the corresponding glue outlet 5 is also square. The length and width of glue outlet 5 are 60%-80% of the length and width of chip, so that the projection of glue outlet 5 does not exceed the surface of chip. After such arrangement, the glue extruded from glue outlet 5 will not overflow the surface of chip and cover the island. Of course, the size of glue outlet 5 cannot be too small, otherwise the glue will not completely cover the surface of chip in the subsequent process.

[0042] The glue extruded from the glue outlet 5 is attached to the surface of the chip and has a certain spacing with the edge of the chip. At this time, in order to enable the glue to completely cover the surface of the chip, a glue scraping plate 6 is slidably arranged on the glue head body 1 in the embodiment, and the glue scraping plate 6 has a glue scraping portion 60 protruding from the lower end face of the glue head body 1. Before glue dispensing, the glue scraping portion 60 is located at a position capable of avoiding the glue outlet 5, so that the glue scraping portion 60 does not interfere with the extrusion of the glue. As shown in Figures 1 to 5 In an embodiment, the glue scraping portion 60 can be located on the left side of the glue outlet 5. After glue dispensing, the glue scraping plate 6 is driven to move towards the right side, thereby driving the glue scraping portion 60 to move towards the right side. In the process of moving of the glue scraping portion 60, the glue attached to the surface of the chip is pushed to move to the right, thereby increasing the coverage area of the glue on the chip. After the glue scraping portion 60 moves to the right side of the chip, the glue scraping plate 6 can be driven to move to the left side again, thereby driving the glue scraping portion 60 to move to the left side and pushing the glue to move to the left side, thereby further increasing the coverage area of the glue on the chip.

[0043] In an embodiment, the glue scraping plate 6 can be mounted on the glue head body 4 and slidably connected with the glue head body 1. In another embodiment, the glue scraping plate 6 can be separated from the glue head body 1, and the glue scraping plate 6 can be driven to reciprocate.

[0044] It should be noted that in the embodiment, the lower end of the glue scraping portion 60 has a certain spacing with the surface of the chip, and the maximum thickness of the glue extruded from the glue outlet 5 and attached to the surface of the chip should be greater than the spacing, so that the glue scraping portion 60 can push part of the glue to move, thereby increasing the coverage area of the glue on the surface of the chip. The specific value of the spacing can be designed according to actual requirements. In addition, due to the fluidity and tension of the glue, after the glue scraping portion 60 moves in one direction once, the height of part of the glue can still be pushed by the glue scraping portion 60. Therefore, the glue scraping portion 60 can reciprocate to maximize the coverage area of the glue on the surface of the chip.

[0045] The utility model reaches the purpose that the glue extruded from the glue outlet 5 is close to the surface profile of the chip first, and then the glue scraping plate 6 is driven to reciprocate and push part of the glue to move on the surface of the chip by the glue scraping portion 60, thereby realizing the purpose of increasing the coverage area of the glue on the surface of the chip, controlling the amount of glue, avoiding the technical effect that the amount of glue is too large, and further solving the problem that the coverage area of the glue extruded by the glue dispensing head on the surface of the chip is small.

[0046] In an embodiment, the glue scraping plate 6 can be driven to reciprocate on the glue head body 1 in the first direction. In order to enable the glue scraping portion 60 to push more glue to move as much as possible, the length of the glue scraping portion 60 in the second direction is greater than or equal to the length of the glue outlet 5 in the second direction, and the first direction is perpendicular to the second direction.

[0047] Specifically, as shown in Figure 3 and Figure 5 When the length of the glue scraping part 60 in the second direction is greater than or equal to the length of the glue outlet 5 in the second direction, the moving path of the glue scraping part 60 can completely cover the glue outlet 5 during the movement of the glue scraping plate 6, so that the glue can be better pushed to move, thereby increasing the coverage area of the glue on the surface of the chip.

[0048] To better push the glue to move, as shown in Figure 1 , the embodiment has glue scraping inclined surfaces 61 on both sides of the glue scraping part 60, and the distance between the two glue scraping inclined surfaces 61 gradually decreases from top to bottom, so that at least a part of the cross section of the glue scraping part 60 is trapezoidal or triangular.

[0049] To facilitate the linear movement of the glue scraping plate 6, as shown in Figure 4 , the embodiment has a sliding groove 7 extending along the first direction on the glue dispensing head body 1, and the glue scraping plate 6 includes a sliding part in sliding connection with the sliding groove 7. In a specific embodiment, the sliding groove 7 can be formed on both vertical sides of the glue dispensing head body 1, or on both sides of the lower end surface of the glue dispensing head body 1. The glue scraping plate 6 can be provided in a U-shaped structure, and the upper end of the glue scraping plate 6 is inwardly folded to form a sliding part matched with the sliding groove 7.

[0050] Since the glue scraping plate 6 needs to be driven to move linearly, in one embodiment, to drive the glue scraping plate 6 to move, the glue dispensing head further includes a driving air cylinder, the piston rod 83 of the driving air cylinder is fixedly connected with the glue scraping plate 6, and is used to drive the glue scraping plate 6 to reciprocatingly move linearly. The driving air cylinder can be fixedly installed on the glue dispensing head body 1, or on a base plate capable of following the glue dispensing head body 1.

[0051] In another embodiment in which the glue scraping plate 6 is driven to move linearly, a closed chamber is formed in the glue dispensing head body 1, a structure connected with the glue scraping plate 6 is arranged in the chamber, and the glue scraping plate 6 is pushed to move by applying positive pressure or negative pressure to the chamber.

[0052] Specifically, in the embodiment, as shown in Figure 6 , the glue dispensing head body 1 is provided with an air cavity 8 extending along the first direction, the air cavity 8 is provided with a piston 85, the piston 85 divides the air cavity 8 into a first cavity 80 and a second cavity 81, the glue dispensing head body 1 is provided with a first air port 82 connected with the first cavity 80, and a second air port 84 connected with the second cavity 81, the first air port 82 is used to connect with an external air source, the first cavity 80 is applied with positive pressure and negative pressure by the external air source, and the second air port 84 is in communication with the external environment;

[0053] One end of the piston 85 is fixedly connected with a piston rod 83, the piston rod 83 extends out of the air cavity 8 and is sealed with the air cavity 8, and one end of the piston rod 83 extending out of the air cavity 8 is provided with a connecting rod 10, the connecting rod 10 is fixedly connected with the glue scraping plate 6, and the connecting rod 10 and the glue dispensing head body 1 have a space for meeting the moving stroke of the glue scraping plate 6.

[0054] In the embodiment, when the external gas source applies positive pressure to the first cavity 80 through the first gas port 82, the piston 85 is pushed to move to the right, and the gas in the second cavity 81 is squeezed and discharged through the second gas port 84. When the external gas source applies negative pressure to the first cavity through the first gas port 82, the gas in the second cavity 81 is inhaled to form positive pressure, and the piston 85 is pushed to move to the left. In order to act the linear motion of the piston 85 on the glue scraping plate 6, the left end of the piston 85 is fixedly connected with the piston rod 83 in the embodiment, the left end of the piston rod 83 extends out of the air cavity 8 and is sealed with the air cavity 8 by a sealing ring or a sealing plug 9. The left end of the piston rod 83 is fixedly connected with the glue scraping plate 6 through the connecting rod 10, so that the movement of the piston 85 can drive the glue scraping plate 6 to move, thereby driving the glue scraping part 60 to move.

[0055] In the embodiment, the air cavity 8 is arranged on the glue dispensing head body 1, which can avoid arranging a large-volume cylinder or other driving structure on the glue dispensing head body 1, and reduce the weight of the glue dispensing head body 1.

[0056] Since the piston rod 83 needs to extend out of the left end of the glue dispensing head body 1 and drive the glue scraping part 60 located on the lower end face of the glue dispensing head body 1 to move through the connecting rod 10, the space between the connecting rod 10 and the glue dispensing head body 1 needs to meet the moving stroke of the glue scraping part 60. In one embodiment, as shown in Figure 6 The connecting rod 10 includes a vertical rod 11 and a horizontal rod 12, the vertical rod 11 is fixedly connected with the piston rod 83, and the horizontal rod 12 is fixedly connected with the glue scraping plate 6.

[0057] As shown in Figure 1 In order to facilitate fixing the glue dispensing head body 1 during dispensing, first and second protrusions 3 and 4 are arranged on the lower end face of the glue dispensing head body 1 in the embodiment, the first and second protrusions 3 and 4 are oppositely distributed, and the lengths of the first and second protrusions 3 and 4 protruding from the lower end face of the glue dispensing head body 1 are greater than the length of the glue scraping part 60 protruding from the lower end face of the glue head body. Specifically, during dispensing, the glue dispensing head body 1 is pressed downward, and the lower ends of the first and second protrusions 3 and 4 abut against the base, so as to stabilize the glue dispensing head body 1. In one embodiment, in order to avoid interference with the movement of the glue scraping part 60, the first and second protrusions 3 and 4 are distributed at the two ends of the glue dispensing head body 1 in the first direction.

[0058] According to another aspect of the utility model, a kind of chip dispensing equipment is provided, including above-mentioned glue dispensing head.

[0059] The above merely describes preferred embodiments of the present application and is not intended to limit the present application. For those skilled in the art, the present application can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A dispensing head, characterized in that, include: The dispensing head body has a cavity inside for storing glue, and a glue outlet is provided at the lower end of the dispensing head body, which communicates with the cavity. The shape of the dispensing port corresponds to the shape of the chip; The glue scraper includes a scraping portion protruding from the lower end face of the glue dispensing head body, the scraping portion being configured to reciprocate below the lower end face of the glue dispensing head body.

2. The dispensing head of claim 1, wherein, The scraper can be driven to reciprocate along a first direction on the glue head body, the length of the scraper in a second direction is greater than or equal to the length of the glue outlet in a second direction, and the first direction is perpendicular to the second direction.

3. The dispensing head of claim 1, wherein, The scraping part has scraping slopes on both sides, and the distance between the scraping slopes on both sides gradually decreases from top to bottom.

4. The dispensing head of claim 2, wherein, The dispensing head body is provided with a groove extending along a first direction, and the scraper includes a sliding part that is slidably connected to the groove.

5. The dispensing head of claim 1, wherein, The dispensing head also includes a drive cylinder, the piston rod of which is fixedly connected to the scraper and is used to drive the scraper to move back and forth in a linear motion.

6. The dispensing head of claim 2, wherein, The dispensing head body has an air cavity inside, which extends along the first direction. A piston is provided inside the air cavity, which divides the air cavity into a first cavity and a second cavity. The dispensing head body has a first air port connected to the first cavity and a second air port connected to the second cavity. The first air port is used to connect to an external air source to apply positive and negative pressure to the first cavity through the external air source. The second air port is in communication with the external environment. One end of the piston is fixedly connected to a piston rod, which extends out of the air chamber and seals the air chamber. A connecting rod is provided at the end of the piston rod extending out of the air chamber. The connecting rod is fixedly connected to the scraper plate, and there is space between the connecting rod and the dispensing head body to accommodate the movement stroke of the scraper plate.

7. The dispensing head of claim 6, wherein, The connecting rod includes a vertical rod and a horizontal rod. The vertical rod is fixedly connected to the piston rod, and the horizontal rod is fixedly connected to the scraper.

8. The dispensing head of claim 2, wherein, The lower end face of the dispensing head body is provided with a first protrusion and a second protrusion. The first protrusion and the second protrusion are distributed opposite to each other. The length of the first protrusion and the second protrusion protruding from the lower end face of the dispensing head body is greater than the length of the scraping part protruding from the lower end face of the dispensing head body. The first protrusion and the second protrusion are distributed at both ends of the dispensing head body along the first direction.

9. The dispensing head of claim 1, wherein, The size of the dispensing port is smaller than the size of the chip, the length of the dispensing port is 60%-80% of the length of the chip, and the width of the dispensing port is 60%-80% of the width of the chip.

10. A chip dispensing apparatus, characterized by comprising: Includes the dispensing head as described in any one of claims 1 to 9.

Images