Automatic cleaning equipment for crystal grains
By designing an automatic grain cleaning device, and adopting a cleaning tray and an automatic liquid supply and return device, the problems of low efficiency and secondary pollution in the grain cleaning process are solved, achieving efficient and convenient automated cleaning and reducing labor costs.
Patent Information
- Application Number
- CN202423174293.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-23
- Publication Date
- 2025-12-26
- Estimated Expiration
- 2034-12-23
AI Technical Summary
In existing technologies, the grain cleaning process requires manual operation, which results in poor cleaning effect, low efficiency, and may cause secondary pollution, as well as high labor costs.
An automated grain cleaning device was designed, comprising a cleaning container, an ultrasonic oscillator, a liquid supply device, and a liquid return device. The grains are held by a cleaning tray, and the automated liquid supply and return are combined with nitrogen bubbling to achieve automated cleaning.
It improves cleaning effectiveness, reduces secondary pollution, lowers labor costs, and enhances cleaning efficiency and convenience.
Smart Images
Figure CN223717860U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model belongs to the technical field of semiconductor cleaning, especially relates to a crystal grain automatic cleaning equipment. BACKGROUND
[0002] In the semiconductor industry, after the chip crystal grain is produced, the crystal grain needs to be cleaned and then packaged, the cleaning process first needs to manually pour IPA solution into a container, then pour the crystal grain into the IPA solution, then open the ultrasonic oscillator to clean the crystal grain, and then take out the crystal grain after cleaning, and manually replace the IPA solution, which can cause secondary pollution of the crystal grain by the dirt particles falling from the crystal grain, has poor cleaning effect, and needs to manually pour and pour out the IPA solution, so the process is complicated, the efficiency is low, and the labor cost is wasted. SUMMARY
[0003] Therefore, in view of the above technical problems, the utility model provides a crystal grain automatic cleaning equipment.
[0004] To solve the above technical problems, the utility model adopts the following technical scheme:
[0005] A crystal grain automatic cleaning equipment, comprising a cleaning container and an ultrasonic oscillator, the cleaning container is arranged on the ultrasonic oscillator, characterized by further comprising a cleaning support plate, a liquid supply device for supplying cleaning solution to the cleaning container, and a liquid recovery device for recovering cleaning solution from the cleaning container, the wall of the cleaning container is provided with an inlet hole and an outlet hole, the inlet hole and the outlet hole are flush with the inner bottom surface of the cleaning container, the cleaning support plate is parallel to the inner bottom surface and higher than the inlet hole and the outlet hole, the cleaning support plate is fixed to the inner surface of the wall of the cleaning container and is provided with a plurality of through holes arranged uniformly in the up-down direction, the size of the through holes is smaller than that of the crystal grain to be cleaned, the liquid supply device and the liquid recovery device are connected with the inlet hole and the outlet hole respectively, the connection between the liquid supply device and the inlet hole is provided with a first valve, and the connection between the liquid recovery device and the outlet hole is provided with a second valve.
[0006] The utility model has a cleaning support plate, which can hold the crystal grain during cleaning, so that the dirt particles falling from the crystal grain can sink to the bottom of the cleaning container, the crystal grain is not easily secondarily polluted, the cleaning effect is good, the liquid supply and recovery are automatically performed by the liquid supply device and the liquid recovery device, the cleaning solution does not need to be manually poured in and out, which is convenient and efficient, and the labor cost is reduced. BRIEF DESCRIPTION OF DRAWINGS
[0007] Figure 1 It is a top view structural schematic diagram of the utility model;
[0008] Figure 2 It is a vertical sectional view of the cleaning container of the utility model. DETAILED DESCRIPTION
[0009] The embodiments of the present application will be described below with reference to the accompanying drawings. It should be noted that the embodiments described in the present specification are not exhaustive, and do not represent the only embodiment of the present application. The following examples are only for the purpose of clearly illustrating the content of the present application, and are not a limitation on the embodiments. For those skilled in the art, different forms of changes and modifications can be made on the basis of the embodiment description, and any changes or modifications within the technical concept and content of the present application are within the scope of protection of the present application.
[0010] As shown in Figure 1 and Figure 2 , the present application provides a kind of crystal grain automatic cleaning equipment, including cleaning container 110, ultrasonic oscillator 120, cleaning support plate 130, liquid supply device 140, liquid return device 150 and gas supply device 160.
[0011] As shown in Figure 2 , cleaning container 110 is arranged on ultrasonic oscillator 120, its cross section is rectangular, see Figure 1 .
[0012] As shown in Figure 2 , cleaning container 110 has liquid inlet hole 111, liquid outlet hole 112 and gas supply hole on wall body, liquid inlet hole 111 and liquid outlet hole 112 are flush with the inner bottom surface of cleaning container 110, wherein liquid inlet hole 111 is located at the left side of cleaning container 110, liquid outlet hole 112 and gas supply hole are located at the right side of cleaning container 110.
[0013] The inner surface of the wall body of cleaning container 110 has annular clamping groove 113, which is higher than liquid inlet hole 111, liquid outlet hole 112 and gas supply hole.
[0014] Cleaning support plate 130 is parallel to the inner bottom surface of cleaning container 110, which is plastic plate, has elasticity, edge and clamping groove 113 are connected, realize the detachable fixing of cleaning support plate 130 and the inner surface of the wall body of cleaning container 110.
[0015] Cleaning support plate 130 has multiple through holes arranged uniformly in up-down direction, the size of through hole is smaller than the size of crystal grain to be cleaned, for example, crystal grain is square, through hole is circular, then the diameter of through hole is smaller than the side length of crystal grain, according to the different particle size of crystal grain to be cleaned, cleaning support plate 130 with corresponding specification through hole can be replaced, of course, for the scene that the particle size of crystal grain to be cleaned is unchanged, cleaning support plate 130 can also be fixed with the inner surface of the wall body of cleaning container 110.
[0016] In order to facilitate disassembly and cleaning of the cleaning tray 130, the edge of the upper surface of the cleaning tray 130 is provided with a handle (not shown in the figure).
[0017] The liquid supply device 140 is used to supply cleaning solution to the cleaning container 110, and in this embodiment, the cleaning solution refers to IPA solution. The liquid supply device 140 is provided with a liquid tank, a liquid pump is arranged in the liquid tank, and the liquid tank is connected with the liquid inlet hole 111 through a pipeline. The connection is provided with a first valve 141, as shown in Figure 1 .
[0018] As shown in Figure 1 , the liquid recovery device 150 is used to recover the cleaning solution from the cleaning container 110, which is also provided with a liquid tank, a liquid pump is arranged in the liquid tank, and the liquid tank is connected with the liquid outlet hole 112 through a pipeline. The connection is provided with a second valve 151, as shown in Figure 1 .
[0019] Among them, the first valve 141 and the second valve 151 are both electromagnetic valves.
[0020] The gas supply device 160 is used to supply nitrogen to the cleaning container 110. The gas supply device 160 is connected with the gas supply hole. The gas supply device 160 can be a nitrogen generator or can be connected with an external nitrogen source.
[0021] Taking a square grain with a side length of 90 mil as an example, the cleaning process is as follows:
[0022] 1. Put the cleaning tray 130 (80 mil through hole) into the cleaning container 110. The first valve 141 and the liquid pump of the liquid supply device 140 can be opened by the controller, and the time is set to 3 min. The cleaning container 110 is supplemented with IPA solution, and after completion, the first valve 141 is closed.
[0023] 2. Put the grain into the IPA solution. At this time, since the diameter of the circular through hole on the cleaning tray 130 is smaller than the side length of the grain, the grain is supported by the cleaning tray 130.
[0024] 3. The ultrasonic oscillator 120 is started by the controller, and the ultrasonic oscillation time is set to 25 min. At the same time, the gas supply device 160 is started to input nitrogen into the cleaning container 110 to provide nitrogen bubbling function.
[0025] 4. After the oscillation is completed, the controller can start the alarm to alarm, and the second valve 151 and the liquid pump of the liquid recovery device 150 are opened to recover the IPA solution in the cleaning container 110.
[0026] From the above, the application provides a kind of crystal grain automatic cleaning equipment, with cleaning support plate, can hold up crystal grain when cleaning, so that the dirt particles that fall off from crystal grain can sink to the bottom of cleaning container, not easy to secondary pollution crystal grain, cleaning effect is good, simultaneously, by liquid supply device and liquid return device automatically supply liquid and return liquid, do not need to pour in and pour out cleaning solution manually, convenient and efficient, reduce labor cost.
[0027] In addition, nitrogen gas can be bubbled through the gas supply device during the cleaning process, further improving the cleaning effect, and different specifications of cleaning support plates can be replaced as needed, with a wide range of applications.
[0028] Obviously, those skilled in the art should realize that the above embodiments are only used to illustrate the present application, and are not used as a limitation on the present application, as long as the changes and modifications of the above described embodiments are within the scope of the present application.
Claims
1. A device for automatic cleaning of crystal grains, comprising a cleaning vessel and an ultrasonic oscillator, said cleaning vessel being provided on said ultrasonic oscillator, characterized in that, The cleaning tray is parallel to the inner bottom surface of the cleaning container and is higher than the liquid inlet hole and the liquid outlet hole, is fixed to the inner surface of the wall of the cleaning container, and has a plurality of through holes arranged uniformly and vertically, the size of the through holes being smaller than the size of the wafer to be cleaned.
2. The apparatus according to claim 1, wherein The cleaning container further has a gas supply hole in the wall thereof, the gas supply hole being lower than the cleaning tray, and a gas supply device is connected to the gas supply hole.
3. The apparatus according to claim 1, wherein The cleaning tray is detachably fixed to the inner surface of the wall of the cleaning container.
4. The apparatus according to claim 3, wherein The inner surface of the wall of the cleaning container has an annular clamping groove, and the cleaning tray is an elastic plate, the edge of which is clamped to the clamping groove.
5. The apparatus according to claim 4, wherein The edge of the upper surface of the cleaning tray has a handle.
6. The apparatus according to claim 1, wherein The liquid supply device and the liquid recovery device each have a liquid tank, the liquid tank being provided with a liquid pump, and the liquid tank is connected to the corresponding liquid hole through a pipeline.