Claw and roller type transmission structure of vacuum furnace

Abstract

The utility model discloses a claw and roller type transmission structure of a vacuum furnace, which solves the problem that the distance movement deviation of a product is large due to conventional chain conveying, avoids using a sensor in a high-temperature area, and greatly improves the stability of machinery. According to the technical scheme, the device comprises a claw part, a conveying part and a roller part; the roller parts are uniformly distributed and mounted on the guide rails of the heating area, the vacuum area and the cooling area, so that the effects of supporting and assisting the movement of products are achieved; the conveying part penetrates through the heating area, the vacuum area and the cooling area, and the claw part is movably arranged on the conveying part and cooperates with the conveying part to act; according to the utility model, the roller is used for assisting movement and the rotatable claw is used for movement, so that the problem that the distance movement deviation of a product is large due to conventional chain conveying is solved, a sensor is prevented from being used in a high-temperature area, and the mechanical stability is greatly improved; the device can be widely applied to the field of semiconductor chip welding.

Description

Technical Field

[0001] This utility model relates to a hook and roller type transmission structure for a vacuum furnace, belonging to the field of semiconductor chip welding technology. Background Technology

[0002] With the development of semiconductor technology, electronic technology is moving towards higher power, higher density, and greater integration, which places higher and more comprehensive reliability demands on the packaging and soldering of high-power devices. However, existing chain-type vacuum furnace transport methods often suffer from excessive deviations in the product's movement distance, making it impossible to move to the accurate position. Although there are methods to install sensors inside the furnace to sense and confirm the product's position, the high temperature inside the soldering furnace can seriously affect the lifespan and performance of the sensors. Utility Model Content

[0003] This invention overcomes the shortcomings of existing technologies and provides a hook and roller type transmission structure for a vacuum furnace, which solves the problem of large deviations in product distance movement caused by conventional chain conveying, and avoids the use of sensors in high-temperature areas, greatly improving the stability of the machinery.

[0004] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is as follows: a hook and roller type transmission structure for a vacuum furnace, including a hook part, a conveying part, and a roller part; the roller part is evenly arranged and installed on the guide rails of the heating zone, vacuum zone, and cooling zone, which plays a supporting and assisting role in product movement; the conveying part is arranged through the heating zone, vacuum zone, and cooling zone, and the hook part is movably arranged on the conveying part to cooperate with the movement of the conveying part;

[0005] The hook portion includes a hook, a shaft, a mounting block, a universal joint, a rotary cylinder, a limit buffer, and a tank chain. Rotary cylinders are provided on both sides along the product conveying direction. The rotary cylinders are connected to the shaft through the universal joints. The hooks are installed on the shaft at fixed intervals. The rotary cylinders are used to rotate the shaft to drive the hooks to rotate.

[0006] The conveying part comprises a driving hexagonal rod, a guide optical axis, a linear guide rail, a ball screw, a connecting piece, a chain, a connecting rod, a speed regulating motor, a servo motor, a synchronous belt, a transmission connecting rod, a commutator and a vertical plate; the speed regulating motor is located outside the vertical plate, the speed regulating motor is connected with the driving hexagonal rod, the driving hexagonal rod is connected with a driving wheel of the chain in a power manner, driving the chain to move and moving products on the driving chain to a designated position; the linear guide rail and the ball screw are both installed on the vertical plate, and the linear guide rail and the ball screw are connected through the connecting piece; the two connecting pieces are connected together through the connecting rod, the connecting rod is installed on the connecting piece to synchronize the movement of both sides; the servo motor is connected with one of the ball screws through the synchronous belt, and the other ball screw is connected with the commutator through the synchronous belt, and the transmission connecting rod is connected with the servo motor and the commutator.

[0007] The roller part comprises a roller and a shoulder screw, and the shoulder screw fixes the roller on the guide rail along the product transmission direction.

[0008] Further, the limiting buffer is arranged on the other end of the rotary cylinder away from the shaft rod, and the limiting buffer is used for limiting the rotation angle of the rotary cylinder.

[0009] Further, the two rotary cylinders are connected through the connecting rod and move with the conveying part, and the hook claws can be used to resist the products to move a fixed distance when the conveying part moves.

[0010] Further, the shaft rod of the part extending into the furnace is placed on the supporting block, and the supporting block plays a supporting and guiding role to prevent the position of the shaft rod from changing.

[0011] Further, the air pipe of the rotary cylinder and the reed are both located in the tank chain.

[0012] The utility model has the beneficial effects compared with prior art: the utility model discloses the roller auxiliary movement and the hook claw movement of rotatable, solve the problem of the big deviation of the product distance movement of conventional chain conveying, and avoid using the sensor in the high temperature area, greatly improve the stability of the machine. BRIEF DESCRIPTION OF DRAWINGS

[0013] The utility model will be further described below in combination with the drawings.

[0014] Figure 1 The structure diagram of the utility model Figure 1 .

[0015] Figure 2 The structure diagram of the utility model Figure 2 .

[0016] Figure 3 The structure diagram of the furnace of the utility model.

[0017] Figure 4 For Figure 3 A local enlarged view of the A region in the middle.

[0018] Figure: 1, hook claw; 2, shaft rod; 3, universal joint; 4, rotary cylinder; 5, limit buffer; 6, tank chain; 7, hexagonal rod; 8, guide optical axis; 9, linear guide rail; 10, ball screw; 11, connecting piece; 12, chain; 13, connecting rod; 14, speed regulating motor; 15, servo motor; 16, synchronous belt; 17, transmission connecting rod; 18, commutator; 19, vertical plate; 20, heating area; 21, vacuum area; 22, cooling area; 23, roller; 24, shaft shoulder screw; 24, block. DETAILED DESCRIPTION

[0019] The utility model will be further described below in combination with specific embodiments.

[0020] As Figures 1-4 shown, the utility model discloses a kind of hook claw and roller type transmission structure of vacuum furnace, including hook claw part, conveying part, roller part.

[0021] The hook claw part is composed of hook claw 1, shaft rod 2, block 25, universal joint 3, rotary cylinder 4, limit buffer 5, tank chain 6, the rotary cylinder 4 is connected with shaft rod 2 by universal joint 3, rotary cylinder 4 movement can make shaft rod 2 rotate drive hook claw 1 rotate, limit buffer 5 can limit the rotation angle of rotary cylinder 4.Rotary cylinder 4 is installed on conveying part by connecting piece 11, and moves with conveying part.The hook claw 1 is installed on shaft rod 2 with fixed spacing, when conveying part moves, hook claw 1 can resist product and move fixed distance.Shift into furnace portion's shaft rod 2 is placed on block 25, block 25 plays the role of support and guide, prevent shaft rod 2 position variation.Rotary cylinder 4's gas pipe and reed are all located in tank chain 6.

[0022] The conveying part includes driving hexagonal rod 7, guide optical axis 8, linear guide rail 9, ball screw 10, connecting piece 11, chain 12, connecting rod 13, speed regulating motor 14, servo motor 15, synchronous belt 16, transmission connecting rod 17, commutator 18, vertical plate 19.The speed regulating motor 14 is connected with driving hexagonal rod 7, drives chain 12 movement and moves product to specified position.The linear guide rail 9, ball screw 10 are installed on vertical plate 19, and are connected by connecting piece 11.Connecting rod 13 is installed on connecting piece 11 to make both sides movement synchronous.The servo motor 15 is connected with ball screw 10 by synchronous belt 16, and the other side ball screw 10 is connected with commutator 18 by synchronous belt 16, and transmission connecting rod 17 is connected with servo motor 15 and commutator 18.

[0023] The roller part includes rollers 23 and shaft shoulder screws 24, which are uniformly arranged and installed on the guide rails of the heating area 20, the vacuum area 21 and the cooling area 22, and play the effect of supporting and assisting the movement of the products.

[0024] The working principle of the utility model is as follows: firstly, the rotary cylinder 4 rotates to make the hook claw 1 in the lifted state, the chain 12 moves to move the product to the designated position, then the rotary cylinder 4 rotates, and the hook claw 1 is lowered. The shaft rod 2 and the hook claw 1 are moved by the work of the servo motor 15, the product is pushed to the designated position, then the hook claw 1 is lifted, the servo motor 15 reverses to take the hook claw 1 back to the initial position, and the next cycle is waited. Then the movement of the product will be on the roller part, which plays the effect of supporting and assisting the movement when the product moves, and the friction is reduced when the hook claw 1 moves the product 3, so that the product is prevented from deviating.

[0025] The movement principle of the utility model in the vacuum area is as follows: firstly, when the product enters the vacuum area 21 from the heating area 20, the hook claw 1 of the heating area 20 rotates and is lowered, the conveying part of the heating area 20 moves, the hook claw 1 pushes the product into the vacuum area 21, the hook claw 1 is lifted, and returns to the original position. Then the product enters the cooling area 22 from the vacuum area 21, the hook claw 1 of the cooling area 22 rotates and is lifted, the conveying part of the cooling area 22 moves, the hook claw 1 moves to the vacuum area 21, the hook claw 1 is lowered, the conveying part of the cooling area 22 moves, the hook claw 1 drags the product into the cooling area 22, and the hook claw 1 is lifted. The operation of the product entering and leaving the vacuum area is completed.

[0026] The embodiments of the utility model are described in detail in combination with the drawings above, but the utility model is not limited to the above-mentioned embodiments, and various changes can be made within the knowledge range of the ordinary skill in the art without departing from the purpose of the utility model.

Claims

1. A hook and roller type conveying structure of a vacuum furnace, characterized by, It comprises a hook claw part, a conveying part and a roller part; the roller part is evenly arranged and installed on the guide rail of the heating area (20), the vacuum area (21) and the cooling area (22), and plays a supporting and auxiliary product moving effect; the conveying part is arranged through the heating area (20), the vacuum area (21) and the cooling area (22), and the hook claw part is movably arranged on the conveying part and cooperates with the conveying part to act. The hook claw part comprises a hook claw (1), a shaft rod (2), a block (25), a universal joint (3), a rotary cylinder (4), a limiting buffer (5) and a tank chain (6), rotary cylinders (4) are arranged on both sides along the product transmission direction, the rotary cylinder (4) is connected with the shaft rod (2) through the universal joint (3), the hook claw (1) is installed on the shaft rod (2) at a fixed interval, and the rotary cylinder (4) is used for rotating the shaft rod (2) to drive the hook claw (1) to rotate. The conveying part comprises a driving hexagonal rod (7), a guide optical axis (8), a linear guide rail (9), a ball screw (10), a connecting piece (11), a chain (12), a connecting rod (13), a speed regulating motor (14), a servo motor (15), a synchronous belt (16), a transmission connecting rod (17), a commutator (18) and a vertical plate (19); the speed regulating motor (14) is located outside the vertical plate (19), the speed regulating motor (14) is connected with the driving hexagonal rod (7), the driving hexagonal rod (7) is connected with the driving wheel of the chain (12) in a power manner, the chain (12) is driven to move, and the product located on the driving chain (12) is moved to a specified position; the linear guide rail (9) and the ball screw (10) are both installed on the vertical plate (19), and the linear guide rail (9) and the ball screw (10) are connected through the connecting piece (11); the two connecting pieces (11) are connected together through the connecting rod (13), the connecting rod (13) is installed on the connecting piece (11) to make the two sides move synchronously; the servo motor (15) is connected with one of the ball screws (10) through the synchronous belt (16), the other ball screw (10) is connected with the commutator (18) through the synchronous belt (16), and the transmission connecting rod (17) is connected with the servo motor (15) and the commutator (18); The roller part comprises a roller (23) and a shaft shoulder screw (24), and the shaft shoulder screw (24) fixes the roller (23) on the guide rail along the product transmission direction.

2. The hook and roller type conveying structure of a vacuum furnace according to claim 1, characterized in that, The limiting buffer (5) is arranged on the other end of the rotary cylinder (4) away from the shaft rod (2), and the limiting buffer (5) is used for limiting the rotation angle of the rotary cylinder (4).

3. The hook and roller type conveying structure of a vacuum furnace according to claim 1, wherein The two rotary cylinders (4) are connected through the connecting rod (13) and move with the conveying part, and when the conveying part moves, the hook claw (1) can resist the product to move a fixed distance.

4. The hook and roller type conveying structure of a vacuum furnace according to claim 1, wherein The shaft rod (2) extending into the furnace is placed on the block (25), and the block (25) plays a supporting and guiding role to prevent the position of the shaft rod (2) from changing.

5. The hook and roller type conveying structure of a vacuum furnace according to claim 1, wherein The air pipe and the magnetic reed of the rotary cylinder (4) are both located in the tank chain (6).

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