Waste acid collecting device for semiconductor industry

By combining a worm gear structure with a water pump, the problem of waste liquid not being able to be extracted in existing waste acid collection devices has been solved, achieving efficient extraction and treatment of waste liquid and reducing costs.

CN223722799UActive Publication Date: 2025-12-26FANYUAN TECH (SUZHOU) CO LTD
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Patent Information

Application Number
CN202520143065.5
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-01-21
Publication Date
2025-12-26
Estimated Expiration
2035-01-21

AI Technical Summary

Technical Problem

In existing waste acid collection devices, the water pump can only pump the waste liquid into the collection tank, but cannot extract the waste liquid from inside the collection tank, which leads to increased production and maintenance costs.

Method used

It adopts a worm gear structure and a water pump, and is connected to an external threaded drain pipe through an internal threaded joint. Combined with the adjustment structure, the waste liquid is extracted and discharged to the treatment equipment through the output pipe and hose.

Benefits of technology

The process of handling waste liquid has been simplified, production and maintenance costs have been reduced, and the practicality and adaptability of the equipment have been improved.

✦ Generated by Eureka AI based on patent content.

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Abstract

The waste acid collecting device for the semiconductor industry comprises a vehicle body and a waste acid water collecting tank, a first worm is meshed with a first worm gear, the first worm gear drives a mounting frame to rotate, a rotating column on the mounting frame rotates at the top of the vehicle body, and the mounting frame rotates through a water pump; at the moment, the input end of the water pump faces the position of the waste acid water collecting tank, then the internal thread connector is screwed into the outer side of the external thread liquid discharging pipe to be connected, then the valve is opened, the installation frame achieves position rotation of the long pipe through the adjusting structure, and the position, away from the waste liquid opening, of the long pipe is arranged on one side of the vehicle body. According to the waste acid water collecting device, waste liquid in the waste acid water collecting tank can be pumped out and discharged into to-be-treated equipment through the output pipe, the second hose and the long pipe to be treated, and due to the structural design, personnel operation is facilitated, and on the contrary, the production cost and the maintenance cost of the device are reduced.
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Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor industry, concretely relates to a waste acid collecting device for semiconductor industry. BACKGROUND

[0002] In the production of semiconductor devices, silicon wafers must be strictly cleaned, and trace contamination can also cause device failure. The purpose of cleaning is to remove surface contaminants, including organic and inorganic matter. Some of these impurities exist in atomic or ionic states, while others exist in thin film or particulate form on the surface of the silicon wafer, which can cause various defects. Silicon wafer cleaning usually uses a silicon wafer cleaning machine for wet cleaning. After cleaning the silicon wafer, the silicon wafer cleaning machine produces waste acid water. In order to avoid waste of resources, a collecting device is needed to collect the waste liquid for subsequent treatment in a treatment device.

[0003] In the existing waste acid collecting device, the device is provided with a water pump, which can only pump the waste liquid into the collecting tank, but cannot pump the waste liquid out of the collecting tank. Instead, it increases the number of hydraulic rods to realize pouring out the waste liquid in the collecting tank, thereby increasing the production cost and maintenance cost of the device. UTILITY MODEL CONTENTS

[0004] The utility model aims to provide a waste acid collecting device for semiconductor industry to solve the problem of setting a water pump in the prior art, which can only pump the waste liquid into the collecting tank, but cannot pump the waste liquid out of the collecting tank. Instead, it increases the number of hydraulic rods to realize pouring out the waste liquid in the collecting tank, thereby increasing the production cost and maintenance cost of the device.

[0005] The utility model solves the technical problem by adopting the following technical scheme:

[0006] A waste acid collecting device for semiconductor industry, comprising a vehicle body and a waste acid water collecting tank, the waste acid water collecting tank is fixedly connected to the top of the vehicle body, a waste liquid outlet is installed on the top of the waste acid water collecting tank, an external thread liquid discharge pipe is installed on the outside of the bottom end of the waste acid water collecting tank, a valve is installed on the outside of the external thread liquid discharge pipe, a rotating column is rotatably connected to one side of the top of the vehicle body, an installation bracket is fixedly connected to the top end of the rotating column, a first worm gear is fixedly connected to the outside of the top end of the installation bracket, a first worm is meshingly connected to the outside of the first worm gear, a water pump is installed in the inside of the bottom end of the installation bracket, a first hose is installed on the input end of the water pump, a connecting piece is arranged on one end of the first hose, an output pipe is installed on the output end of the water pump, the output pipe passes through the inside of the top end of the installation bracket and is fixedly connected with the installation bracket, a second hose is fixedly and communicatively connected to the top end of the output pipe, a long pipe is installed on one end of the second hose, the long pipe is arranged at the position of the waste liquid outlet, and an adjusting structure is arranged between the long pipe and the installation bracket.

[0007] Preferably, the car body bottom four corners are provided with universal wheels, and a containing box is arranged on one side of the car body.

[0008] Preferably, the first worm is rotatably connected with a support at both ends of the outer side, and the two supports are fixedly connected to the top of the car body.

[0009] Preferably, the connecting piece comprises a connecting pipe fixedly connected to one end of the first hose, and an internally threaded connector is rotatably connected to the outer side of one end of the connecting pipe, and the internally threaded connector is matched with the externally threaded liquid discharge pipe.

[0010] Preferably, the adjusting structure comprises a connecting frame arranged on the top of the mounting frame, and the second hose and the long pipe are arranged in the connecting frame, and one end of the long pipe penetrates through one side of the connecting frame and is fixedly connected with the connecting frame, and a threaded rod is fixedly connected to the bottom of the connecting frame, and an internally threaded cylinder is threadedly connected to the outer side of the threaded rod, and the bottom end of the internally threaded cylinder is rotatably connected with the mounting frame, and an L-shaped plate is rotatably connected to the outer side of the internally threaded cylinder, and the L-shaped plate is fixedly connected to the top of the mounting frame.

[0011] Preferably, the bottom end of the internally threaded cylinder is fixedly connected with a second worm, and the second worm is rotatably connected with a support plate at both ends of the outer side, and the support plate is fixedly connected to the top of the mounting frame.

[0012] Preferably, the internally threaded cylinder is provided with a telescopic rod on one side, and the telescopic rod is fixedly connected to the top of the mounting frame, and the telescopic rod penetrates through the L-shaped plate and is fixedly connected with the L-shaped plate, and the top end of the telescopic rod is fixedly connected with the connecting frame.

[0013] The beneficial effects of the utility model are:

[0014] 1、 the application is through the first worm and the first worm wheel engagement, the first worm wheel drives the mounting frame rotation, and the rotating column on the mounting frame rotates on the top of the vehicle body, the mounting frame rotates through the water pump, at this time the water pump input end is opposite to the waste acid water collecting tank position, then the internal thread joint is screwed into the outer thread liquid discharge pipe outside to connect, open the valve, and the mounting frame also realizes the position rotation of the long tube through the adjusting structure, the long tube is placed on one side of the vehicle body away from the waste liquid port, then start the water pump, so that the waste liquid in the waste acid water collecting tank can be pumped out, through the output pipe, the second hose and the long tube to the treatment equipment for treatment, this structure design is convenient for personnel operation, and reduces the production cost and maintenance cost of the device.

[0015] 2、 the application is through rotating the second handle, the second worm and the second worm wheel engagement, the second worm wheel drives the internal thread cylinder to rotate, the internal thread cylinder is screwed with the threaded rod, under the limiting action of the telescopic rod to the connecting frame, the threaded rod drives the second hose and the long tube to move up through the connecting frame, so the position of the long tube can be adjusted according to the height of the waste liquid treatment equipment, so as to adjust the long tube to the water inlet of the waste liquid treatment equipment, improve the practicability of the device. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 It is the whole structure schematic view of the waste acid collecting device for semiconductor industry of the utility model;

[0017] Figure 2 It is the waste acid collecting device for semiconductor industry of the utility model Figure 1 The A part structure enlarged view of the waste acid collecting device for semiconductor industry of the utility model;

[0018] Figure 3 It is the internal thread cylinder sectional view of the waste acid collecting device for semiconductor industry of the utility model;

[0019] Figure 4 It is the connecting pipe structure schematic view of the waste acid collecting device for semiconductor industry of the utility model;

[0020] Marked as in the figure:

[0021] 1, vehicle body;2, waste acid water collecting tank;200, outer thread liquid discharge pipe;3, waste liquid port;4, rotating column;5, mounting frame;6, water pump;7, first hose;8, connecting pipe;9, internal thread joint;10, output pipe;11, second hose;12, long tube;13, connecting frame;14, threaded rod;15, internal thread cylinder;16, L-shaped plate;17, telescopic rod;18, second worm wheel;19, second worm;20, first worm wheel;21, first worm;22, support;100, containing box. DETAILED DESCRIPTION

[0022] In order to make the above content, purposes and beneficial effects of the present application more obvious and easy to understand, the specific embodiments of the present application will be described in detail below with reference to the drawings. In the following description, many specific details are set forth in order to provide a thorough understanding of the present application. However, the present application can be practiced in a variety of ways other than those described herein, and those skilled in the art can make similar improvements without departing from the spirit of the present application, so the present application is not limited to the specific embodiments disclosed below.

[0023] It should be noted that, unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which the present application belongs. The terms used in the specification of the present application are only for the purpose of describing specific embodiments and are not intended to limit the present application. The term "and / or" used herein includes any and all combinations of one or more related listed items.

[0024] As shown in Figures 1-4 The utility model provides a kind of technical scheme of waste acid collecting device for semiconductor industry, including car body 1 and waste acid water collecting tank 2, waste acid water collecting tank 2 is fixedly connected to the top of car body 1, universal wheel is installed in the bottom of car body 1 four corners, car body 1 side is installed with containing box 100, waste liquid port 3 is installed in the top of waste acid water collecting tank 2, outer thread drain pipe 200 is installed in the bottom end outside of waste acid water collecting tank 2, valve is installed in the outside of outer thread drain pipe 200, rotating column 4 is rotatably connected in the top of car body 1 side, mounting bracket 5 is fixedly connected in the top end of rotating column 4, first worm gear 20 is fixedly connected in the top end outside of mounting bracket 5, first worm gear 20 outside is engaged with first worm 21, support 22 is rotatably connected in the outside both ends of first worm 21, two supports 22 are fixedly connected to the top of car body 1, first handle is installed in one end of first worm 21, water pump 6 is installed in the inside bottom end of mounting bracket 5, first hose 7 is installed in the input end of water pump 6, connecting piece is provided in one end of first hose 7, connecting piece includes connecting pipe 8, connecting pipe 8 is fixedly communicated in one end of first hose 7, inner thread joint 9 is rotatably connected in the outside one end of connecting pipe 8 by sealing bearing, inner thread joint 9 is adapted with outer thread drain pipe 200, output pipe 10 is installed in the output end of water pump 6, output pipe 10 passes through the inside top end of mounting bracket 5 and is fixedly connected with mounting bracket 5, second hose 11 is fixedly communicated in the top end of output pipe 10, long pipe 12 is installed in one end of second hose 11, long pipe 12 is arranged at waste liquid port 3 position, adjusting structure is arranged between long pipe 12 and mounting bracket 5.

[0025] Specifically, first, the female threaded joint 9 is unscrewed from the male threaded water outlet pipe on the cleaning machine, then the vehicle body 1 is moved to the position of the waste liquid treatment device, then the first handle is rotated, the first worm 21 is engaged with the first worm wheel 20, the first worm wheel 20 drives the mounting frame 5 to rotate, and the rotating column 4 on the mounting frame 5 rotates on the top of the vehicle body 1, the mounting frame 5 rotates through the water pump 6, at this time the input end of the water pump 6 is opposite to the position of the waste acid water collecting tank 2, then the female threaded joint 9 is screwed into the outside of the male threaded liquid discharge pipe 200 to be connected, the valve is opened, and the mounting frame 5 also realizes the rotation of the position of the long pipe 12 through the adjusting structure, the long pipe 12 is away from the position of the waste liquid outlet 3 and is placed on one side of the vehicle body 1, then the water pump 6 is started, so that the waste liquid in the waste acid water collecting tank 2 can be pumped out and discharged into the treatment device through the output pipe 10, the second hose 11 and the long pipe 12 for treatment. The structure design facilitates personnel operation, and reduces the production cost and maintenance cost of the device.

[0026] Embodiment: as shown in Figure 1 Figure 3 The adjusting structure includes a connecting frame 13, the connecting frame 13 is arranged on the top of the mounting frame 5, the second hose 11 and the long pipe 12 are arranged inside the connecting frame 13, one end of the long pipe 12 penetrates through one side of the inside of the connecting frame 13 and is fixedly connected with the connecting frame 13, a threaded rod 14 is fixedly connected at the bottom of the connecting frame 13, an internally threaded cylinder 15 is threadedly connected outside the threaded rod 14, the internally threaded cylinder 15 is rotatably connected with the mounting frame 5 at the bottom end, an L-shaped plate 16 is rotatably connected outside the internally threaded cylinder 15, the L-shaped plate 16 is fixedly connected to the top of the mounting frame 5, an extension rod 17 is arranged on one side of the internally threaded cylinder 15 and is fixedly connected to the top of the mounting frame 5, the extension rod 17 penetrates through the L-shaped plate 16 and is fixedly connected with the L-shaped plate 16, the extension rod 17 is fixedly connected with the connecting frame 13 at the top end, a second worm wheel 18 is fixedly connected outside the bottom end of the internally threaded cylinder 15, a second worm 19 is engagedly connected outside the second worm wheel 18, support plates are rotatably connected at both ends outside the second worm 19, the support plates are fixedly connected to the top of the mounting frame 5, and a second handle is arranged at one end of the second worm 19.

[0027] Specifically, the second handle is rotated, the second worm 19 is engaged with the second worm wheel 18, the second worm wheel 18 drives the internally threaded cylinder 15 to rotate, the internally threaded cylinder 15 is threadedly connected with the threaded rod 14, under the limiting action of the extension rod 17 on the connecting frame 13, the threaded rod 14 drives the second hose 11 and the long pipe 12 to move upwards through the connecting frame 13, so that the position of the long pipe 12 can be adjusted according to the height of the waste liquid treatment device, so as to adjust the long pipe 12 to the water inlet of the waste liquid treatment device, thereby improving the practicability of the device.

[0028] ​The above-described specific embodiments further specifically describe the purposes, technical solutions and beneficial effects of the present application, and it should be understood that the above-described specific embodiments are merely examples of the present application and are not intended to limit the present application. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present application shall be included in the protection scope of the present application.

Claims

1. A waste acid collecting device for use in the semiconductor industry, characterized by: Including the vehicle body (1) and waste acid water collection tank (2), waste acid water collection tank (2) is fixedly connected to the top of the vehicle body (1), the top of the waste acid water collection tank (2) is provided with waste liquid port (3), the bottom of the waste acid water collection tank (2) is provided with external thread drain pipe (200) outside, the external thread drain pipe (200) is provided with a valve outside, the top of the vehicle body (1) is rotatably connected with a rotating column (4), the top of the rotating column (4) is fixedly connected with a mounting bracket (5), the first worm wheel (20) is fixedly connected with the outside of the top of the mounting bracket (5), the first worm wheel (20) is engagedly connected with the first worm (21) outside, the water pump (6) is installed in the inside bottom of the mounting bracket (5), the first hose (7) is installed in the input end of the water pump (6), the first hose (7) is provided with a connecting piece at one end, the output pipe (10) is installed in the output end of the water pump (6), the output pipe (10) passes through the inside top of the mounting bracket (5) and is fixedly connected with the mounting bracket (5), the second hose (11) is fixedly communicated with the top of the output pipe (10), the long tube (12) is installed in one end of the second hose (11), the long tube (12) is arranged at the position of the waste liquid port (3), and the adjusting structure is arranged between the long tube (12) and the mounting bracket (5).

2. The waste acid collecting device for the semiconductor industry according to claim 1, characterized by: The bottom of the vehicle body (1) is provided with universal wheels at four corners, and the vehicle body (1) is provided with a containing box (100) on one side.

3. The waste acid collecting device for the semiconductor industry according to claim 1, characterized by: The first worm (21) is rotatably connected with a support (22) at both ends outside, and the two support (22) are fixedly connected to the top of the vehicle body (1), and the first worm (21) is installed with a first handle at one end.

4. The waste acid collecting apparatus for the semiconductor industry according to claim 1, characterized by: The connecting piece comprises a connecting pipe (8), the connecting pipe (8) is fixedly communicated with one end of the first hose (7), the connecting pipe (8) is rotatably connected with a female thread joint (9) outside one end through a sealing bearing, and the female thread joint (9) is matched with the external thread drain pipe (200).

5. The waste acid collecting apparatus for the semiconductor industry according to claim 1, characterized by: The adjusting structure comprises a connecting frame (13), the connecting frame (13) is arranged on the top of the mounting bracket (5), the second hose (11) and the long tube (12) are arranged in the inside of the connecting frame (13), the long tube (12) passes through one side of the inside of the connecting frame (13) and is fixedly connected with the connecting frame (13) at one end, the bottom of the connecting frame (13) is fixedly connected with a threaded rod (14), the threaded rod (14) is threadedly connected with a female thread cylinder (15) outside, the female thread cylinder (15) is rotatably connected with the mounting bracket (5) at the bottom, the female thread cylinder (15) is rotatably connected with an L-shaped plate (16) outside, and the L-shaped plate (16) is fixedly connected to the top of the mounting bracket (5).

6. The waste acid collecting apparatus for the semiconductor industry according to claim 5, characterized by: The bottom of the female thread cylinder (15) is fixedly connected with a second worm wheel (18), the second worm wheel (18) is engagedly connected with a second worm (19) outside, the second worm (19) is rotatably connected with a support plate at both ends outside, and the support plate is fixedly connected to the top of the mounting bracket (5), and the second worm (19) is installed with a second handle at one end.

7. The waste acid collecting apparatus for the semiconductor industry according to claim 5, characterized by: One side of the female threaded cylinder (15) is provided with a telescopic rod (17), the telescopic rod (17) is fixedly connected to the top of the mounting frame (5), the telescopic rod (17) passes through the L-shaped plate (16) and is fixedly connected with the L-shaped plate (16), and the top end of the telescopic rod (17) is fixedly connected with the connecting frame (13).