Fastening device for shielding frame of chemical vapor deposition equipment

Abstract

The utility model relates to a fastening device for a shielding frame of chemical vapor deposition equipment, the fastening device comprises a plurality of outer hexagon bolts and a plurality of pressing blocks, the plurality of pressing blocks are laid on the shielding frame of the chemical vapor deposition equipment, and each pressing block is provided with at least one counter bore. The shielding frame is provided with at least one counter bore for allowing the plurality of outer hexagon bolts to pass through the at least one counter bore to be fixed on the shielding frame, and the shielding frame comprises a rectangular shielding frame and a separable lip part arranged on the rectangular shielding frame; wherein the separable lip part comprises a plurality of rectangular strips and a plurality of L-shaped connecting pieces, the rectangular strips and the L-shaped connecting pieces are arranged on the inner side of the rectangular shielding frame, and a rectangular frame is formed by the rectangular strips and the L-shaped connecting pieces. The device can greatly reduce the risk that the outer hexagon bolt is loosened, falls off and is damaged, is favorable for ensuring the quality of coated glass produced by chemical vapor deposition equipment, and reduces the production cost.

Description

TECHNICAL FIELD

[0001] The utility model belongs to glass coating technology field, concretely relates to a fastening device for shielding frame of chemical vapor deposition equipment. BACKGROUND

[0002] Chemical vapor deposition (CVD) is often used for coating operation on glass, and the specific process includes the following main steps: S1, reactant transport: two or more gaseous raw materials are introduced into a reaction chamber, and chemical reactions occur between these gaseous raw materials to form new materials and deposit on the surface of the glass substrate; S2, surface reaction: on the surface of the glass substrate, the reactants undergo thermal chemical reactions to generate the desired solid products or thin films. Usually including crystal growth, coating formation and other processes; S3, solute diffusion: the solute produced by the reaction diffuses on the surface of the glass substrate, causing the thin film to gradually grow, and its structure and properties are determined by reaction conditions, substrate characteristics and gas phase components; S4, solid deposition: the deposited solid products gradually accumulate to form a thin film or coating, and ultimately form the desired functional material or structure. During the entire reaction process, the glass substrate is placed on the electrode plate. To avoid the phenomenon of arc discharge in the area of the electrode plate that is not covered by the glass substrate, affecting the quality of the coated glass, a shielding frame is used to cover the area of the electrode plate that is not covered by the glass substrate.

[0003] However, the existing fastening device for fixing the shielding frame is easily damaged and falls off, affecting the quality of the output coated glass. INVENTION CONTENTS

[0004] To solve the above problems in the prior art, the utility model provides a fastening device for shielding frame of chemical vapor deposition equipment. The technical problems to be solved by the utility model are realized through the following technical schemes:

[0005] The utility model provides a fastening device for shielding frame of chemical vapor deposition equipment, the fastening device includes: a plurality of outer hexagonal bolts and a plurality of pressing blocks, the plurality of pressing blocks are laid on the shielding frame of chemical vapor deposition equipment, and at least one counterbore is arranged on each pressing block to allow the plurality of outer hexagonal bolts to be fixed on the shielding frame through the at least one counterbore; Wherein, the shielding frame includes: a rectangular shielding frame, and a detachable lip part arranged on the rectangular shielding frame; Wherein, the detachable lip part includes: a plurality of rectangular bars and a plurality of L-shaped connecting pieces arranged on the inner side of the rectangular shielding frame, and the plurality of rectangular bars and the plurality of L-shaped connecting pieces constitute a rectangular frame.

[0006] In some embodiments, the type of the counterbore is one of an open hole and a closed hole.

[0007] In some embodiments, the material of the plurality of outer hexagonal bolts and the plurality of pressing blocks is ceramic.

[0008] In some embodiments, when the number of detachable lips arranged on the rectangular shielding frame is 1, each pressing block comprises: a first rectangular block and a second rectangular block; the second rectangular block is arranged on one side of the first rectangular block; wherein the length of the first rectangular block is greater than the length of the second rectangular block.

[0009] In some embodiments, when the number of detachable lips arranged on the rectangular shielding frame is 2, each pressing block comprises: a third rectangular block constituting a step and an L-shaped structure block.

[0010] In some embodiments, the plurality of pressing blocks are arranged at intervals on the connection between the plurality of rectangular strips and the plurality of L-shaped connectors, and on the plurality of L-shaped connectors, wherein the pressing block arranged at the joint of one rectangular strip and one L-shaped connector is provided with two closed holes; the pressing block arranged at one end of one rectangular strip or arranged on one L-shaped connector is provided with one open hole.

[0011] Compared with the prior art, the utility model has the advantages of:

[0012] In view of the problem that the existing fastening device for fixing the shielding frame is easy to damage and fall off, affecting the quality of the output coated glass, the utility model provides a fastening device for a shielding frame of a chemical vapor deposition equipment, which is characterized in that at least one counterbore is arranged on the pressing block, so that the outer hexagonal bolt is fixed on the shielding frame of the chemical vapor deposition equipment through the counterbore, the counterbore design can avoid the collision between other components of the chemical vapor deposition equipment and the outer hexagonal bolt, and the resistance between the nut of the outer hexagonal bolt and the counterbore of the pressing block is utilized to greatly reduce the risk of loosening, falling off and damage of the outer hexagonal bolt, which is beneficial to ensuring the quality of the coated glass output by the chemical vapor deposition equipment and reducing the production cost. BRIEF DESCRIPTION OF DRAWINGS

[0013] Figure 1 is the installation layout schematic diagram of the fastening device for the shielding frame of the chemical vapor deposition equipment provided by the utility model;

[0014] Figure 2 is the structural schematic diagram of the pressing block provided by the utility model.

[0015] REFERENCE SIGNS:

[0016] 1, hexagonal bolt; 2, pressing block; 3, rectangular shielding frame; 4, detachable lip; 5, glass substrate; 21, first pressing block; 22, second pressing block; 23, third pressing block; 24, fourth pressing block; 25, fifth pressing block; 26, sixth pressing block; 41, first rectangular strip; 42, L-shaped connecting piece; 43, second rectangular strip. DETAILED DESCRIPTION

[0017] The utility model will be described in further detail below in combination with specific embodiments, but the embodiments of the utility model are not limited thereto.

[0018] Now, the utility model provides a fastening device for shielding frame of chemical vapor deposition equipment is described in detail in combination with drawings.

[0019] Figure 1 It is the mounting layout schematic diagram of the fastening device for shielding frame of chemical vapor deposition equipment provided by the utility model. Figure 1 As shown in the figure, the fastening device comprises: a plurality of hexagonal bolts 1 and a plurality of pressing blocks 2, the plurality of pressing blocks 2 are laid on the shielding frame of the chemical vapor deposition equipment, and at least one counterbore is arranged on each pressing block 2 to allow the plurality of hexagonal bolts 1 to be fixed on the shielding frame through the at least one counterbore;Wherein, the shielding frame comprises a rectangular shielding frame 3 and a detachable lip 4 arranged on the rectangular shielding frame;Wherein, the detachable lip comprises: a plurality of rectangular strips (41 and 43 in the figure) and a plurality of L-shaped connecting pieces 42 arranged on the inner side of the rectangular shielding frame 31, and the plurality of rectangular strips and the plurality of L-shaped connecting pieces constitute a rectangular frame.

[0020] Specifically, the conventional fastening device is easily affected by vibration and falls off, causing the detachable lip 4 to be separated from the original position, thereby increasing the risk of arc discharge in the area of the electrode plate (not shown in the figure) not covered by the shielding frame. Therefore, the fastening device provided by the utility model is used to fix the rectangular shielding frame 3 and the detachable lip 4, especially to reinforce the four corners of the rectangular shielding frame 3 (or the positions where the rectangular strips 41, 43 and the L-shaped connecting pieces 42 meet). It should be noted that the reinforcement layout of the four corners of the rectangular shielding frame 3 is the same, and for the sake of brevity, Figure 1 only the schematic diagram of the reinforcement of one corner of the shielding frame by the fastening device is given.

[0021] Here, the original nut for fastening is cylindrical, and this design is easy to loosen and fall off due to vibration during equipment operation, so in the utility model, the shape of the nut of the original bolt is improved from cylindrical to hexagonal prism structure. After improvement, the resistance between the hexagonal bolt 1 and the pressing block 2 can greatly reduce the probability of bolt tooth collapse, tooth cracking and even loosening and falling off.

[0022] Here, the head of the external hexagonal bolt 1 is exposed to the outside, and is prone to colliding with devices in other parts of the chemical vapor deposition apparatus. By providing a counterbore in the pressing block 2 to conceal the head of the external hexagonal bolt 1 inside the pressing block 2, the effect of facilitating disassembly can be achieved. Specifically, as shown in Figure 2 the number of separable lips provided on the rectangular shielding frame is 1, each pressing block comprises: a first rectangular block and a second rectangular block; the second rectangular block is provided on one side of the first rectangular block; wherein the length of the first rectangular block is greater than the length of the second rectangular block. When the number of separable lips provided on the rectangular shielding frame is 2, each pressing block comprises: a third rectangular block constituting a step and an L-shaped structure block.

[0023] Please continue to refer to Figure 1 , the plurality of pressing blocks are arranged at intervals on the connection between the plurality of rectangular strips and the plurality of L-shaped connectors, and on the plurality of L-shaped connectors, wherein the pressing block arranged at the joint of one rectangular strip and one L-shaped connector is provided with two closed holes; the pressing block arranged at one end of one rectangular strip or arranged on one L-shaped connector is provided with one open hole.

[0024] Exemplarily, the first pressing block 21 is in the shape of a rectangular sheet structure, and has one open hole type counterbore; the first pressing block 21 is arranged at one end of the first rectangular strip 41 to prevent the first rectangular strip 41 from deforming and lifting. The second pressing block 22 is in the shape of a rectangular sheet structure, and has two closed hole type counterbores; the second pressing block 22 is arranged at the joint of the first rectangular strip 41 and the L-shaped connector 42 to cover the gap therebetween. The third pressing block 23 is in the shape of a rectangular sheet structure, and has one open hole type counterbore; the fourth pressing block 24 is in the shape of a rectangular sheet structure, and has one open hole type counterbore; the third pressing block 23 and the fourth pressing block 24 are arranged on the L-shaped connector 42 to prevent the L-shaped connector 42 from deforming and lifting. The fifth pressing block 25 is in the shape of a rectangular sheet structure, and has two closed hole type counterbores; the fifth pressing block 25 is arranged at the joint of the second rectangular strip 43 and the L-shaped connector 42 to cover the gap therebetween. The sixth pressing block 26 is in the shape of a rectangular sheet structure, and has one open hole type counterbore; the sixth pressing block 26 is arranged at one end of the second rectangular strip 43 to prevent the rectangular strip 23 from deforming and lifting.

[0025] In view of the problem that the existing fastening device for fixing the shielding frame is easy to damage and fall off, affecting the quality of the output coated glass, the utility model provides a fastening device for shielding frame of chemical vapor deposition equipment, the device is through setting at least one counterbore on the pressing block, so that the outer hexagonal bolt is fixed on the shielding frame of chemical vapor deposition equipment through the counterbore, the counterbore design can avoid the collision between other components of chemical vapor deposition equipment and the outer hexagonal bolt, and the resistance between the nut of outer hexagonal bolt and the counterbore of pressing block is utilized, the risk of loosening and falling off and damage of outer hexagonal bolt is greatly reduced, the quality of the coated glass output by chemical vapor deposition equipment is beneficial to ensure, and the production cost is reduced.

[0026] It should be noted that in this document, relational terms such as first and second and the like can be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but can include other elements not expressly listed or inherent to such process, method, article, or apparatus.

[0027] The above description shows and describes several preferred embodiments of the present utility model, but as before, it should be understood that the present utility model is not limited to the forms disclosed herein, and should not be considered as excluding other embodiments, but can be used in various other combinations, modifications and environments, and can be modified within the scope of the present utility model concept by the above teachings or related art or knowledge. The modification and change made by the person skilled in the art without departing from the spirit and scope of the present utility model should be within the protection scope of the claims of the present utility model.

Claims

1. A fastening device for a shadow frame of a chemical vapor deposition apparatus, characterized by, The fastening device comprises a plurality of hexagonal bolts and a plurality of pressing blocks, the plurality of pressing blocks are laid on a shielding frame of a chemical vapor deposition device, and at least one counterbore is arranged on each pressing block to allow the plurality of hexagonal bolts to be fixed on the shielding frame through the at least one counterbore; The shielding frame comprises a rectangular shielding frame and detachable lips arranged on the rectangular shielding frame, the detachable lips comprise a plurality of rectangular strips and a plurality of L-shaped connectors arranged inside the rectangular shielding frame, and the plurality of rectangular strips and the plurality of L-shaped connectors constitute a rectangular frame.

2. The fastening device for a shadow frame of a chemical vapor deposition apparatus according to claim 1, characterized by, The type of the counterbore is one of an open hole and a closed hole.

3. The fastening device for a shadow frame of a chemical vapor deposition apparatus according to claim 1, wherein The materials of the plurality of hexagonal bolts and the plurality of pressing blocks are ceramics.

4. The fastening device for a shadow frame of a chemical vapor deposition apparatus according to claim 1, wherein When the number of the detachable lips arranged on the rectangular shielding frame is 1, each pressing block comprises a first rectangular block and a second rectangular block, the second rectangular block is arranged on one side of the first rectangular block, and the length of the first rectangular block is greater than the length of the second rectangular block.

5. The fastening device for a shadow frame of a chemical vapor deposition apparatus according to claim 1, wherein When the number of the detachable lips arranged on the rectangular shielding frame is 2, each pressing block comprises a third rectangular block and an L-shaped structural block, the third rectangular block constitutes a step.

6. The fastening device for a shadow frame of a chemical vapor deposition apparatus according to claim 1, wherein The plurality of pressing blocks are laid at the connection positions of the plurality of rectangular strips and the plurality of L-shaped connectors and on the plurality of L-shaped connectors, a pressing block arranged at the connection position of one rectangular strip and one L-shaped connector is provided with two closed holes, and a pressing block arranged at one end of one rectangular strip or on one L-shaped connector is provided with one open hole.

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