Crystal bar containing and carrying device

Abstract

A crystal bar containing and carrying device belongs to the field of crystal bar containing and transferring equipment and comprises a horizontal supporting plate used for containing crystal bars and a fixing ring used for fixing the crystal bars, a plurality of rolling wheels are installed at the bottom of the horizontal supporting plate, a vertical fixing plate is arranged on the horizontal supporting plate, a vertical sliding way is formed in the vertical fixing plate, and a plurality of sliding grooves are formed in the vertical sliding way. A locking screw rod is arranged on the peripheral face of the fixing ring, the locking screw rod penetrates through the vertical sliding way and then is in threaded connection with a locking handle, at least one fixing screw is installed on the fixing ring, and the fixing screw can move in the radial direction of the fixing ring so that the inner end of the fixing screw can abut against the crystal bar. And operation can be carried out in a narrow closed interval.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of crystal bar holding and transferring equipment, in particular to a crystal bar holding and transferring device. BACKGROUND

[0002] In the advanced technical field of semiconductor material preparation, the production technology of single crystal silicon rods (referred to as crystal rods) is constantly changing. With the progress of crystal rod production technology and the change of market demand, the production scale of crystal rods is continuously expanding, and the economy required by the market also requires better control of the production cost of crystal rods. Currently, in the production process of crystal rods, the heat field scale continues to expand, the production raw material feeding amount of crystal rods increases significantly, and the depth of molten silicon liquid surface continues to increase. These factors not only increase the difficulty of controlling the temperature of the molten silicon liquid surface and make temperature stability a major challenge, but also increase the complexity of the drawing process, often requiring frequent execution of ignition to ensure stable process.

[0003] At present, the industry has explored a single crystal drawing technology to produce large-size crystal rods. As a highly precise and complex production process, the successful implementation of single crystal pulling technology is deeply affected by many variables, including but not limited to the stability of equipment performance, the accuracy of personnel operation, the quality consistency of raw and auxiliary materials, and the perfection degree of production process SOP. Any deviation in any link, such as equipment failure, human error, material quality fluctuation, or SOP execution, may cause abnormal operation of the single crystal furnace table, thereby causing crystal growth to be blocked, and ultimately leading to the occurrence of product dropping phenomenon. The requirements for silicon material single crystal drawing technology and related production processes are becoming higher and higher.

[0004] In order to pursue rapid cooling of crystal rods and shortening of production cycle, the industry has adopted a production method of continuous drawing of multiple crystal rods. This method requires the extraction of the current crystal rod to be completed within a short time in order to immediately draw the next round of crystal rod, which puts forward very high requirements for the holding and transferring efficiency of the crystal rod after extraction.

[0005] The prior art with application number 201921613418.4 discloses a crystal rod holding rack device that can realize multi-layer placement of crystal rods, has the characteristics of large single holding capacity of crystal rods, and the placement space of the crystal rods is provided with a buffer component that can protect the crystal rods during transfer. However, the crystal rod holding rack has the disadvantages of large volume, difficulty in passing through narrow roads, large height dimension of the device, and time-consuming and laborious taking and placing of crystal rods. UTILITY MODEL CONTENTS

[0006] In order to solve the problems of large equipment size, difficult to pass through narrow road, large equipment height, time-consuming and laborious to take and transport the crystal bar, the utility model provides a crystal bar holding and carrying device which has the advantages of simple crystal bar access, convenient transportation and operation in narrow and closed space.

[0007] In order to achieve the above technical purpose, the utility model adopts the technical scheme of:

[0008] A crystal bar holding and carrying device, comprising a horizontal support plate for placing the crystal bar and a fixing ring for fixing the crystal bar, a plurality of rolling wheels are installed on the bottom of the horizontal support plate, a vertical fixing plate is arranged on the horizontal support plate, and a vertical slide is formed on the vertical fixing plate, a locking screw is arranged on the outer periphery of the fixing ring, the locking screw is threadedly connected with a locking handle after penetrating through the vertical slide, at least one fixing screw is installed on the fixing ring, and the fixing screw can move radially along the fixing ring so as to abut against the crystal bar at the inner end.

[0009] As a further optimization of the utility model crystal bar holding and carrying device, the fixing screw is two symmetrically arranged, and the line connecting the two fixing screws is parallel to the plate surface of the vertical fixing plate.

[0010] As a further optimization of the utility model crystal bar holding and carrying device, the outer periphery of the fixing ring is provided with a first protrusion, a fixing screw hole matched with the fixing screw is formed on the fixing ring, and the fixing screw hole penetrates the first protrusion.

[0011] As a further optimization of the utility model crystal bar holding and carrying device, the outer periphery of the fixing ring is provided with a second protrusion, one side of the second protrusion opposite to the fixing ring is a plane, and the locking screw is vertically fixed on the second protrusion.

[0012] As a further optimization of the utility model crystal bar holding and carrying device, the locking handle is a circular ring, the outer periphery of the locking handle is provided with a third protrusion, one side of the third protrusion opposite to the locking handle is a plane, a locking screw hole matched with the locking screw is formed on the locking handle, and the locking screw hole penetrates the third protrusion.

[0013] As a further optimization of the utility model crystal bar holding and carrying device, one end of the fixing screw outside the fixing ring is provided with a rectangular block.

[0014] As a further optimization of the utility model crystal bar holding and carrying device, the upper surface of the horizontal support plate is provided with a fixed tray.

[0015] As further optimization of the utility model discloses a crystal bar's holding and carrying device, at least one side of the vertical fixed plate is provided with crystal bar length contrast mark, and the crystal bar length contrast mark is a plurality of grooves arranged in equal intervals upwards and downwards.

[0016] As further optimization of the utility model discloses a crystal bar's holding and carrying device, the vertical fixed plate is provided with pull handle on the side opposite to the fixed ring, and the pull handle is located on the upper portion of the vertical fixed plate.

[0017] As further optimization of the utility model discloses a crystal bar's holding and carrying device, the vertical fixed plate is provided with support column on the side opposite to the fixed ring, and the support column is located on the lower portion of the vertical fixed plate.

[0018] Compared with the prior art, the utility model has the following beneficial effects:

[0019] 1, the device is small in size, is suitable for the crystal bar's holding and transfer in the narrow space position, is flexible and convenient, the vertical slide way can make the locking handle and fixed ring move up and down, the locking handle can lock the fixed ring firmly on the vertical fixed plate, and the locking mode is safe and reliable, the fixed screw can be closely attached to the outer surface of the crystal bar, prevents the displacement of the crystal bar in the horizontal direction, and completes the multidimensional constraint of the crystal bar.

[0020] 2, the device holds the crystal bar in the straight up and down vertical single holding mode, instead of the horizontal holding of the prior art crystal bar, and needs to push and pull the holding box and carry up and down to hold the holding mode of layer placement, and the holding mode is relatively simple and convenient. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 It is the whole schematic diagram of crystal bar holding and carrying device;

[0022] Figure 2 It is the schematic diagram of device transfer state after installing the crystal bar;

[0023] Figure 3 It is the schematic diagram of device stationary state after installing the crystal bar;

[0024] Figure 4 It is the sectional view schematic diagram of locking handle and fixed ring;

[0025] Figure 5 It is the structure schematic diagram of locking handle;

[0026] Figure 6 It is the structure schematic diagram of fixed ring;

[0027] Reference signs: 1, vertical fixed plate, 2, fixed ring, 3, fixed screw, 4, reinforcing rib, 5, fixed tray, 6, horizontal support plate, 7, rolling wheel, 8, locking handle, 9, support column, 10, pulling handle, 11, vertical slide, 12, third protrusion, 13, first protrusion, 14, second protrusion, 15, locking screw, 16, fixed threaded hole, 17, locking threaded hole, 18, crystal bar, 19, rectangular block, 20, crystal bar length comparison mark. DETAILED DESCRIPTION

[0028] The technical scheme of the utility model will be further described in detail below in combination with specific embodiments. The parts not described and disclosed in the following embodiments of the utility model should be understood as the prior art known or known by those skilled in the art, such as the way of cutting and taking out the crystal bar from the auxiliary chamber of the single crystal furnace.

[0029] Embodiment 1

[0030] As shown in Figure 1 , Figure 2 , Figure 3 , Figure 6 , the embodiment provides a crystal bar containing and carrying device, which comprises a horizontal support plate 6 for placing a crystal bar 18 and a fixed ring 2 for fixing the crystal bar 18. The bottom of the horizontal support plate 6 is provided with a plurality of rolling wheels 7, which are universal wheels and can drive the whole device to move in the direction of the horizontal thrust under the action of the horizontal thrust. The rolling wheels 7 in the embodiment are four.

[0031] The horizontal support plate 6 is provided with a vertical fixed plate 1, which is rectangular, and the horizontal support plate 6 is square, and the width of the vertical fixed plate 1 is the same as the side length of the horizontal support plate 6. The vertical fixed plate 1 is fixedly connected to the edge of the horizontal support plate 6 perpendicularly, and the connection mode is effective fixed connection such as welding, riveting and bolt connection.

[0032] The vertical fixed plate 1 is provided with a vertical slide 11, which is a vertical strip. The vertical center line of the vertical slide 11 coincides with the vertical center line of the vertical fixed plate 1.

[0033] As shown in Figure 4 , Figure 5 , Figure 6 , the outer periphery of the fixed ring 2 is provided with a locking screw 15, and the locking handle 8 is threadedly connected to the locking screw 15 after passing through the vertical slide 11. The length of the locking screw 15 is greater than the thickness of the vertical fixed plate 1, and the outer diameter of the locking screw 15 is less than the width of the vertical slide 11 in the horizontal direction, so that the locking screw 15 can pass through the vertical slide 11 and move up and down along the vertical slide 11, so that the fixed ring 2 moves up and down along the vertical fixed plate 1.

[0034] A locking screw hole 17 is formed on the locking handle 8 and is used in cooperation with the locking screw 15. In use, the locking handle 8 is rotated to tighten the locking screw 15, and the locking handle 8 pulls the fixing ring 2 towards the vertical fixing plate 1, so that the fixing ring 2 is pressed against the vertical fixing plate 1, thereby locking the position of the fixing ring 2. When the locking handle 8 is loosened, the distance between the locking handle 8 and the fixing ring 2 is increased, and the fixing ring 2 is unlocked. The unlocked fixing ring 2 can move back and forth and can be pulled up and down by the locking handle 8 to move up and down along the vertical slide 11 of the vertical fixing plate 1.

[0035] The locking handle 8 can be long strip-shaped, circular ring-shaped or rectangular. In the embodiment, the locking handle 8 is circular ring-shaped.

[0036] In order to ensure the stability of the fixing ring 2 when locked on the vertical fixing plate 1, a third protrusion 12 is arranged on the outer circumferential surface of the locking handle 8. The surface opposite to the locking handle 8 of the third protrusion 12 is a vertical plane, and the locking screw hole 17 formed on the locking handle 8 penetrates through the third protrusion 12. A second protrusion 14 is arranged on the outer circumferential surface of the fixing ring 2. The surface opposite to the fixing ring 2 of the second protrusion 14 is a vertical plane, and the locking screw 15 is vertically fixed on the vertical plane and extends along the radial direction of the fixing ring 2. The vertical fixing point of the locking screw 15 and the vertical plane is located at the center of the vertical plane.

[0037] When the locking handle 8 is twisted to lock the fixing ring 2 on the vertical fixing plate 1, the locking screw hole 17 on the locking handle 8 will rotate relative to the locking screw 15 on the fixing ring 2. The relative rotation is manifested as the vertical surfaces of the third protrusion 12 and the second protrusion 14 moving closer to or away from each other in the axial direction of the locking screw 15. By selecting the rotation direction of the locking handle 8, the vertical surfaces of the third protrusion 12 and the second protrusion 14 can move closer to each other until they are completely attached to the vertical fixing plate 1. The third protrusion 12 and the second protrusion 14 are clamped on both sides of the vertical fixing plate 1, which completes the locking of the fixing ring 2 on the vertical fixing plate 1. By arranging the vertical surfaces on the third protrusion 12 and the second protrusion 14, the contact area between the locking handle 8, the fixing ring 2 and the vertical fixing plate 1 in the locked state is increased, thereby improving the stability of the fixing ring 2 when locked on the vertical fixing plate 1.

[0038] A fixing screw 3 is installed on the fixing ring 2. By twisting the fixing screw 3, the inner end of the fixing screw 3 can be tightly pressed against the crystal bar 18 in the fixing ring 2, thereby fixing the crystal bar 18 in the fixing ring 2. The fixing screw 3 is arranged at least once. When multiple fixing screws 3 are arranged, the multiple fixing screws 3 are evenly and circumferentially spaced apart along the fixing ring 2.

[0039] AsFigure 1 、 Figure 6 As shown in the figure, two fixing screws 3 are symmetrically arranged in the embodiment, the outer circumferential surface of the fixing ring 2 is provided with two first protrusions 13, the two first protrusions 13 are provided with fixing screw holes 16 which are used in cooperation with the fixing screws 3, the fixing screw holes 16 penetrate the first protrusions 13, and the connecting line of the central axes of the two fixing screw holes 16 is parallel to the plate surface of the vertical fixing plate 1. By arranging the first protrusions 13, on the one hand, the stability of the fixing ring 2 is strengthened, and the possibility of deformation of the fixing ring 2 is reduced, on the other hand, compared with only arranging the fixing screw holes 16 on the fixing ring 2, the axial length of the fixing screw holes 16 is extended by arranging the first protrusions 13, so that the contact area between the fixing screws 3 and the fixing screw holes 16 is increased, and the shaking of the fixing screws 3 due to the shortness of the fixing screw holes 16 is avoided when the fixing screws 3 move along the axial direction of the fixing screw holes 16 (i.e. the radial direction of the fixing ring 2).

[0040] The one end of the two fixing screws 3 located outside the fixing ring 2 is provided with a rectangular block 19, the rectangular block 19 is connected with the fixing screw 2 by welding or integral molding, the length of the rectangular block 19 is greater than the outer diameter of the fixing screw 3, so that it is more labor-saving when the fixing screw 3 is twisted. After the crystal bar 18 is put into the fixing ring 2, the rectangular block 19 is rotated to control the fixing screw 3 to move along the radial direction of the fixing ring 2, so that the inner end of the fixing screw 3 is tightly pressed on the crystal bar 18, the shaking of the crystal bar 18 along the radial direction of the fixing ring 2 is avoided, and the fixing of the crystal bar 18 is realized.

[0041] The vertical fixing plate 1 is provided with crystal bar length comparison marks 20 on one side or both sides, the crystal bar length comparison marks 20 are grooves arranged on the edge of the vertical fixing plate in equal intervals, and the grooves arranged in equal intervals are used as comparison objects, so that the stretching size of the crystal bar 18 can be roughly judged, and size parameters are provided for subsequent processing of the crystal bar 18.

[0042] The use process of the utility model is as follows:

[0043] When it is needed to hold and carry the crystal bar 18, first, the fixing ring 2 of the holding and carrying device is moved to the bottom of the vertical slide 11, the fixing ring 2 is adjusted to be in a horizontal state, then the holding and carrying device is placed on the gate valve of the single crystal furnace auxiliary chamber, the upper shaft in the single crystal furnace auxiliary chamber is lowered, the crystal bar 18 which needs to be taken out is placed on the horizontal support plate 6 of the holding and carrying device, the crystal bar 18 is located in the fixing ring 2, and the seed crystal is cut off;

[0044] Then, the fixing ring 2 is moved upwards to the target position (i.e. the middle upper part of the crystal bar 18), the fixing ring 2 is locked on the vertical fixing plate 1 by rotating the locking handle 8, and the crystal bar 18 is further fixed by tightening the fixing screws 3 on the fixing ring 2, so that the shaking of the crystal bar 18 in the moving process is prevented.

[0045] Finally, the crystal bar 18 is quickly transferred to a designated position by the rolling wheels 7 at the bottom of the horizontal support plate 6, and cooling of the crystal bar 18 is performed.

[0046] After the cooling of the crystal bar 18 is completed, the fixing screws 3 on the fixing ring 2 are loosened, the locking handle 8 is loosened, and then the fixing ring 2 is moved upward together with the locking handle 8, and after the crystal bar 18 is completely exposed, the fixing ring 2 is locked on the vertical fixing plate 1 by tightening the locking handle 8, and the exposed crystal bar 18 is taken out.

[0047] The above is the basic embodiment of the utility model, which can be further improved, optimized and limited on the basis of the above, so as to obtain the following embodiments:

[0048] Embodiment 2

[0049] This embodiment is an improved scheme based on embodiment 1, and the main structure is the same as that of embodiment 1, and the improvement point is that the horizontal support plate 6 is fixedly connected with a tray 5 at the center position of the upper surface, so as to better load the crystal bar 18.

[0050] Embodiment 3

[0051] This embodiment is an improved scheme based on embodiment 1, and the main structure is the same as that of embodiment 1, and the improvement point is that the horizontal support plate 6 and the vertical fixing plate 1 are provided with inclined reinforcing ribs 4 on both sides, and the reinforcing ribs 4 are located at the vertical connection position of the vertical fixing plate 1 and the horizontal support plate 6. The reinforcing ribs 4 are two and symmetrically arranged on both sides of the vertical fixing plate 1 and the horizontal support plate 6, one end of the reinforcing rib 4 is connected with the vertical fixing plate 1, and the other end is connected with the horizontal support plate 6. By arranging the reinforcing rib 4, the stability of the holding and carrying device can be improved.

[0052] Embodiment 4

[0053] This embodiment is an improved scheme based on embodiment 1, and the main structure is the same as that of embodiment 1, and the improvement point is that the vertical fixing plate 1 is provided with a pulling handle 10 on the upper part of the side away from the fixing ring 2, which facilitates the staff to transfer the crystal bar 18 on the device. The vertical fixing plate 1 is provided with a supporting column 9 on the lower part of the side away from the fixing ring 2, which can reduce the risk of overturning of the holding and carrying device. In addition, the supporting column 9 can also be used as a lower handle in cooperation with the upper pulling handle 10, which facilitates the carrying of the device.

[0054] The above description of disclosed embodiments enables one of ordinary skill in the art to make or use the application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein can be applied to other embodiments without departing from the spirit or scope of the application. Thus, the present application is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A crystal bar holding and carrying device, characterized by: The utility model provides a crystal rod fixing device, which comprises a horizontal support plate (6) for placing a crystal rod (18) and a fixing ring (2) for fixing the crystal rod (18), the bottom of the horizontal support plate (6) is provided with a plurality of rolling wheels (7), a vertical fixing plate (1) is arranged on the horizontal support plate (6), and a vertical sliding groove (11) is formed in the vertical fixing plate (1); a locking screw (15) is arranged on the outer periphery of the fixing ring (2), the locking screw (15) is screwed with a locking handle (8) after penetrating through the vertical sliding groove (11), at least one fixing screw (3) is arranged on the fixing ring (2), and the fixing screw (3) can be moved radially on the fixing ring (2) so as to abut against the crystal rod (18) at the inner end.

2. The crystal bar holding and carrying device according to claim 1, wherein: The fixing screw (3) is symmetrically arranged in two, and the line connecting the two fixing screws (3) is parallel to the plate surface of the vertical fixing plate (1).

3. The crystal bar holding and carrying device according to claim 1, wherein: The outer periphery of the fixing ring (2) is provided with a first protrusion (13), a fixing screw hole (16) is formed in the fixing ring (2) and matched with the fixing screw (3), and the fixing screw hole (16) penetrates through the first protrusion (13).

4. The crystal bar holding and carrying device according to claim 1, wherein: The outer periphery of the fixing ring (2) is provided with a second protrusion (14), one side of the second protrusion (14) away from the fixing ring (2) is a plane, and the locking screw (15) is fixed on the second protrusion (14) vertically.

5. The crystal bar holding and carrying device according to claim 1, wherein: The locking handle (8) is a circular ring, the outer periphery of the locking handle (8) is provided with a third protrusion (12), one side of the third protrusion (12) away from the locking handle (8) is a plane, a locking screw hole (17) is formed in the locking handle (8) and matched with the locking screw (15), and the locking screw hole (17) penetrates through the third protrusion (12).

6. The crystal bar holding and carrying device according to claim 1, wherein: One end of the fixing screw (3) located outside the fixing ring (2) is provided with a rectangular block (19).

7. The crystal bar holding and carrying device according to claim 1, wherein: The upper surface of the horizontal support plate (6) is provided with a fixing tray (5).

8. The crystal bar holding and carrying device according to claim 1, wherein: At least one side edge of the vertical fixing plate (1) is provided with a crystal rod length comparison mark (20), and the crystal rod length comparison mark (20) is a plurality of grooves arranged at equal intervals.

9. The crystal bar holding and carrying device according to claim 1, wherein: One side of the vertical fixing plate (1) away from the fixing ring (2) is provided with a pulling handle (10), and the pulling handle (10) is located at the upper part of the vertical fixing plate (1).

10. The crystal bar holding and carrying device according to claim 1, wherein: One side of the vertical fixing plate (1) away from the fixing ring (2) is provided with a supporting column (9), and the supporting column (9) is located at the lower part of the vertical fixing plate (1).

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