Heat dissipation base and multi-cavity structure molecular pump

Abstract

The utility model relates to a molecular pump with a multi-cavity structure, which comprises a shell, a support body, a motor, a rotating shaft, a rotor, a gas circuit support part, a gas outlet, a gas inlet, a base and a cooling pipe, the shell is in interference fit connection with the support body, the gas inlet is arranged on the shell, and the rotating shaft is in interference fit connection with the rotor and is driven by the motor to rotate. A wedge-shaped air channel is formed between the air channel supporting part and the rotor, the air outlet is communicated with the wedge-shaped air channel, the air inlet is communicated with a first heat dissipation cavity below the motor, the first heat dissipation cavity is communicated with the wedge-shaped air channel, the supporting body is detachably connected with the base, and a cooling pipe is arranged on the contact face of the base and the supporting body. According to the scheme, the cooling pipe is buried between the shells, the heat dissipation cavity is formed around the cooling pipe to improve the heat dissipation efficiency, liquid leakage of the cooling pipe can be prevented from affecting the service life of the molecular pump, the upper shell and the lower shell are detachably connected, and later maintenance of the cooling pipe is facilitated.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of molecular pump especially relates to a heat dissipation base and multi-cavity structure molecular pump. BACKGROUND

[0002] Molecular pump with its high efficiency, oil-free pollution and high vacuum degree advantage, become the indispensable important equipment in modern vacuum technology. It is widely used in various need high vacuum and super high vacuum fields, such as semiconductor manufacturing, vacuum coating, accelerator and particle physics experiment, aerospace, etc.

[0003] The working principle of molecular pump is based on the momentum transfer of gas molecules, and the gas molecules are compressed and driven to the exhaust port after colliding with the high-speed rotating rotor to achieve the purpose of vacuumizing. The high-speed rotation of the molecular pump during work causes the internal temperature to rise. The wear of the internal parts (such as bearings, blades, etc.) of the molecular pump in the high-temperature environment will be intensified, thereby shortening the service life of the equipment. The internal temperature of the molecular pump is too high, which will cause the gas molecules to bounce back to the vacuum chamber, reducing the pumping efficiency. Therefore, a reasonable cooling circuit is needed to cool the molecular pump. SUMMARY

[0004] To solve the above problems, the utility model provides a heat dissipation base, including base and cooling pipe, the base is hollow structure, there is annular recess on the top of base, the cooling pipe can be detachably installed in the annular recess, the cooling pipe is equipped with input and output on the side of base.

[0005] Further, the annular recess on the base has a fixing ring.

[0006] Preferably, the base has a transverse plate inside, dividing the base into a second heat dissipation cavity and a third heat dissipation cavity, and the second heat dissipation cavity and the third heat dissipation cavity are connected through a hole.

[0007] Preferably, the first control panel, the second control panel and the third control panel are installed on the side of the base, and the control panel is inserted into the third heat dissipation cavity.

[0008] The utility model discloses still provide a kind of multi-cavity structure molecular pump, including shell, support and the heat dissipation base above, shell and support interference fit connection, there is on shell upper air inlet, still include motor, shaft and rotor, shaft and rotor interference fit connection, driven rotation by motor, still include air path support part, wedge air path is formed between air path support part and rotor, this wedge air path accurately guides and accelerates the gas entering the inside of molecular pump, so that gas molecules can flow according to predetermined trajectory and speed in wedge air path, to improve the compression ratio and pumping speed of molecular pump to gas. Still include air outlet and air inlet, air outlet is connected with wedge air path, air inlet is connected with the first heat dissipation cavity below motor, the first heat dissipation cavity is connected with wedge air path, the first heat dissipation cavity, second heat dissipation cavity and third heat dissipation cavity are interconnected.

[0009] Support and base can be detachably connected, which provides convenience for installation, maintenance and repair of the molecular pump.

[0010] When the internal components of the molecular pump need to be checked or repaired, the connection between the base and the support can be easily disassembled, so that the internal components can be conveniently accessed, greatly shortening the repair time and cost.

[0011] The contact surface of the base and the support has a cooling pipe, which can rapidly remove the heat transmitted by the support through the internal circulation of the cooling liquid, further enhancing the heat dissipation capacity of the molecular pump.

[0012] During the operation of the molecular pump, cold air is introduced into the first heat dissipation cavity through the air inlet, first cooling the motor, and as the gas circulates in the air path, the cold air will gradually spread to the second heat dissipation cavity and the third heat dissipation cavity due to air pressure and the sinking of cold air, and finally be squeezed out from the part where the first heat dissipation cavity is connected with the wedge air path, thereby achieving effective heat dissipation of the motor, the shell and the rotor, ensuring that the molecular pump can operate stably for a long time in a suitable temperature environment, and avoiding performance degradation or even failure due to overheating.

[0013] Preferably, the upper air inlet has a dust cover to prevent dust from entering during storage or idle.

[0014] Preferably, the communication pipes of the first heat dissipation cavity, the second heat dissipation cavity and the third heat dissipation cavity are L-shaped pipes.

[0015] Preferably, the contact surface of the base and the support is made of high thermal conductivity material, and high thermal conductivity material is also filled between the base and the support.

[0016] The multi-cavity structure molecular pump as described above has the following advantages:

[0017] 1. A plurality of heat dissipation cavities are arranged inside the molecular pump, and cooling pipes are arranged around the heat dissipation cavities, so that the cooling air is transported through the air inlet, and the heated gas is cooled through the cooling pipes at the same time, thereby improving the heat dissipation efficiency.

[0018] 2. The upper air inlet is provided with a cover, so that dust is prevented from entering during storage or idle state, and unnecessary part wear is reduced.

[0019] 3. The shell and the base are detachably connected, so that the leakage of the cooling pipe is prevented, parts are prevented from being damaged, and the later maintenance work is simplified. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 It is a perspective view of the molecular pump.

[0021] Figure 2 It is Figure 1 a sectional view of the molecular pump along the A-A direction.

[0022] Figure 3 It is a schematic view of the arrangement of the cooling pipes of the molecular pump. DETAILED DESCRIPTION

[0023] The utility model will be further explained in connection with the drawings below.

[0024] As Figures 1 to 3 shown, the embodiment provides a heat dissipation base including a base 31 and cooling pipes 9, the support body 3 is detachably connected with the base 31, the inside of the base 31 is hollow, the upper portion of the base 31 is provided with an annular recess, the contact surface of the base 31 and the support body 3 is provided with a cooling pipe, the cooling pipe 9 is detachably installed in the annular recess, and the side surface of the base 31 is provided with an input port and an output port. The annular recess of the base is provided with a fixing ring. The inside of the base 31 is provided with a transverse plate, so that the base is divided into a second heat dissipation cavity 6 and a third heat dissipation cavity 501, and the second heat dissipation cavity 6 and the third heat dissipation cavity 501 are connected through a hole. The first control panel 51, the second control panel 52 and the third control panel 53 are installed on the side surface of the base 31, and the back surface of the control panel is inserted into the third heat dissipation cavity 501.

[0025] The embodiment provides a multi-cavity structure molecular pump, which includes a shell 2, a support body 3 and the heat dissipation base, the shell 2 is connected with the support body 3 in an interference fit, the shell 2 is provided with an upper air inlet, further includes a motor 12, a rotating shaft 13 and a rotor 10, the rotating shaft 13 and the rotor 10 are connected in an interference fit and are driven to rotate by the motor 12, further includes a gas path support part 11, a wedge-shaped gas path is formed between the gas path support part 11 and the rotor 10, further includes an air outlet 7 and an air inlet 4, the air outlet 7 is connected with the wedge-shaped gas path, the air inlet 4 is connected with a first heat dissipation cavity 8 below the motor 12, the first heat dissipation cavity 8 is connected with the wedge-shaped gas path, and the first heat dissipation cavity 8, a second heat dissipation cavity 6 and a third heat dissipation cavity 501 are connected with each other.

[0026] The dustproof cover 1 is arranged at the air inlet, and the dustproof cover 1 plays a dustproof role, so that dust is prevented from entering when the molecular pump is idle, and unnecessary damage to parts is reduced.

[0027] The communication pipeline of the first heat dissipation cavity 8, the second heat dissipation cavity 6 and the third heat dissipation cavity 501 is an L-shaped pipeline.

[0028] The contact surface between the base 31 and the support body 3 is made of a high-thermal-conductivity material.

[0029] Thermal paste or a thermal pad is filled between the base 31 and the support body 3.

[0030] Working principle:

[0031] The molecular pump is divided into two air channels, one is a vacuum pumping air channel, air is pumped from the upper air inlet, passes through the rotor 10 and the wedge-shaped air channel and is introduced into the air outlet 7, and the other is a cooling air channel, cooling air is introduced into the first heat dissipation cavity 8 where the motor 12 is located from the air inlet 4, because the cold air is heavy, the cold air enters the second heat dissipation cavity 6 and the third heat dissipation cavity 501 along the L-shaped pipeline in the first heat dissipation cavity 8, and the relatively hot air is discharged from the first heat dissipation cavity 8 and reaches the air outlet through the wedge-shaped air channel below. Cooling pipes 9 are also filled around the first heat dissipation cavity 8 and the second heat dissipation cavity 6, and water cooling liquid is introduced into the cooling pipes 9, so that the temperature on the inner shell of the molecular pump can be rapidly reduced. The utility model combines air cooling and water cooling to rapidly cool the molecular pump. In addition, the water cooling pipes are filled between the support body 3 and the base 31, so that the inner shell of the molecular pump can be cooled, maintenance is facilitated, and damage to machine parts caused by liquid leakage is prevented.

[0032] The above only describes the preferred embodiments of the present application and is not used to limit the present application. Those skilled in the art can make various modifications and changes to the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included in the protection scope of the present application.

[0033] Although the specific embodiments of the utility model have been described above, the description is not a limitation on the protection scope of the utility model, and those skilled in the art should understand that various modifications or changes made by those skilled in the art on the basis of the technical solutions of the utility model without creative labor are still within the protection scope of the utility model.

Claims

1. A heat sink base characterized by, The base is internally hollow, and an annular recess is formed above the base, and a cooling pipe is detachably installed in the annular recess, and the cooling pipe is provided with an input port and an output port on the side of the base.

2. A heat spreader submount as claimed in claim 1, wherein, The annular recess on the base is provided with a fixing ring.

3. A heat spreader submount as claimed in claim 1, wherein, The base is internally provided with a transverse plate, which divides the base into a second heat dissipation cavity and a third heat dissipation cavity, and the second heat dissipation cavity and the third heat dissipation cavity are connected through a hole.

4. The heat spreader of claim 1, wherein, The side of the base is provided with a first control panel, a second control panel and a third control panel, and the back of the control panel is inserted into the third heat dissipation cavity.

5. A multi-cavity structure molecular pump, characterized by, Use a heat dissipation base according to any one of claims 1-4, comprising a shell and a support body, the shell and the support body are connected by interference fit, an upper air inlet is formed in the upper part of the shell, Further comprising a motor, a rotating shaft, a rotor and an air path support part, the rotating shaft and the rotor are connected by interference fit, and are driven to rotate by the motor, and a wedge-shaped air path is formed between the rotor and the air path support part, Further comprising an air outlet and an air inlet, the air outlet is connected with the wedge-shaped air path, the air inlet is connected with a first heat dissipation cavity below the motor, the first heat dissipation cavity is connected with the wedge-shaped air path, and the first heat dissipation cavity is connected with the second heat dissipation cavity and the third heat dissipation cavity.

6. A multi-chamber molecular pump as claimed in claim 5, characterized in that, The upper air inlet is provided with a dustproof cover.

7. A multi-chamber molecular pump as claimed in claim 5, characterized in that, The base and the support body are filled with high thermal conductivity material.

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