Connecting shaft mechanism of magnetic fluid sealing device

Abstract

The utility model discloses a connecting shaft mechanism of a magnetofluid sealing device, which belongs to the technical field of magnetofluid sealing and comprises a magnetofluid sealing sleeve and a connecting rod, an inner shaft is sleeved on the inner side of the magnetofluid sealing sleeve, and an elastic coupling is fixedly mounted between the bottom end of the inner shaft and the top end of the connecting rod. Mounting screw holes are formed in the side surfaces of the bottom end of the inner shaft and the top end of the connecting rod. According to the utility model, the inner shaft and the connecting rod are in transmission through the elastic coupling, the two fixing discs are respectively mounted on the outer sides of the connecting rod and the inner shaft through the matching of the insertion hole, the mounting screw hole and the fastening bolt, and the rubber protective cover is connected between the two fixing discs through the matching of the external threaded column and the threaded groove; and the outer side of the elastic coupling is protected through a fixing disc, a connecting disc and a rubber protective cover, the problem that waste liquid generated by cleaning falls onto the elastic coupling and influences the service life of the elastic coupling is solved, and practicability is good.

Description

TECHNICAL FIELD

[0001] The utility model relates to magnetic fluid sealing technical field more specifically, relate to a kind of magnetic fluid sealing device's connecting shaft mechanism. BACKGROUND

[0002] Magnetic fluid sealing technology is developed on the basis of magnetic fluid, when magnetic fluid is injected into the gap of magnetic field, it can fill the entire gap, form a kind of liquid O-shaped sealing ring, due to the environment of ultra-high vacuum can be achieved, and can be used to seal corrosive gas, magnetic fluid sealing is mostly used in semiconductor equipment, for example, in single crystal silicon furnace, chemical vapor deposition equipment, ion plating, etc. Vacuum equipment is sealed, and the sealing of high temperature and high pressure equipment and the equipment with higher environmental requirements.

[0003] After searching, the utility model patent with publication number CN221033972U discloses a kind of magnetic fluid sealing device's connecting shaft mechanism, comprising: elastic connecting piece, including upper fixed end, elastomer and lower fixed end, the elastomer is located between the upper fixed end and the lower fixed end, the upper fixed end is used to connect with the lower end of the inner shaft of magnetic fluid sealing device;Connecting rod, the upper end of the connecting rod is connected with the lower fixed end;When the connecting rod is driven to rotate, the elastomer in the elastic connecting piece is used to damp the inner shaft when relative rotation in the magnetic fluid sealing device;The patent can avoid the wear between the inner shaft and the outer shaft of magnetic fluid sealing device, to solve the problem that magnetic fluid leakage leads to cavity and wafer pollution.But the above patent still has the following deficiencies: although bellows coupling can effectively compensate the rotation deviation of inner shaft in radial, angular and axial direction, bellows coupling should be installed in dry, no corrosive gas environment and run, waste liquid generated by wafer cleaning can fall on bellows coupling, affect the service life of bellows coupling.Therefore we propose a kind of magnetic fluid sealing device's connecting shaft mechanism. UTILITY MODEL CONTENTS

[0004] In view of the problems existing in the prior art, the utility model aims at providing a kind of magnetic fluid sealing device's connecting shaft mechanism.

[0005] To solve the above problems, the utility model adopts the following technical solutions:

[0006] The utility model provides a kind of magnetic fluid sealing device's connecting shaft mechanism, including magnetic fluid sealing sleeve and connecting rod, the inside sleeve of the magnetic fluid sealing sleeve is equipped with inner shaft, and the bottom end of the inner shaft and the top end of connecting rod are fixedly installed with elastic coupling, the side of the bottom end of the inner shaft and the top end of connecting rod is equipped with mounting screw hole, the side of the bottom end of the inner shaft and the top end of connecting rod is equipped with fixed disc, two the fixed disc is equipped with threaded groove, the inner chamber of two threaded grooves is screw-mounted with outer thread column, the end of two outer thread columns is fixedly connected with connecting disc, the rubber protective cover is fixedly connected between two connecting discs, the rubber protective cover is equipped on the outside of elastic coupling, the side of the fixed disc is equipped with plugging screw hole, the end of the inner chamber of two plugging screw holes is equipped with insertion hole, the inner chamber of two plugging screw holes is equipped with fastening bolt, the end of two fastening bolts is respectively threaded to the inner chamber of mounting screw hole.

[0007] As a preferred scheme of the utility model, the middle part of the two fixed discs is provided with a perforation, and the inner wall of the two perforations is fixedly sleeved with a sealing ring.

[0008] As a preferred scheme of the utility model, one end of the inner chamber of the two plugging screw holes is screw-mounted with a plugging plug.

[0009] As a preferred scheme of the utility model, the side of the connecting disc is fixedly connected with a plurality of prying columns.

[0010] As a preferred scheme of the utility model, the outer diameter of the connecting rod and the inner shaft is equal.

[0011] As a preferred scheme of the utility model, the outer side of the connecting disc and the outer side of the fixed disc are flush, and the outer side of the connecting disc and the outer side of the rubber protective cover are flush.

[0012] Compared with the prior art, the utility model has the advantages that:

[0013] In the utility model, the inner shaft and the connecting rod are transmitted by the elastic coupling, and the two fixed discs are installed on the outer side of the connecting rod and the inner shaft by the cooperation of the insertion hole, the mounting screw hole and the fastening bolt, and the rubber protective cover is connected between the two fixed discs by the cooperation of the outer thread column and the threaded groove, the outer side of the elastic coupling is protected by the fixed disc, the connecting disc and the rubber protective cover, the problem that the service life of the elastic coupling is affected by the waste liquid generated during cleaning is avoided, and the utility is good. ACCURACY OF DRAWINGS

[0014] Figure 1 It is the whole structure schematic diagram of the utility model;

[0015] Figure 2 The overall structure of the utility model is shown in the exploded view;

[0016] Figure 3 The structure of the magnetic fluid sealing sleeve of the utility model is shown in the schematic view;

[0017] Figure 4 The split schematic view of the fixed disc and the external threaded column of the utility model is shown in the figure;

[0018] Figure 5 The sectional view of the fixed disc of the utility model is shown in the figure.

[0019] Marked numbers in the figure: 1, magnetic fluid sealing sleeve; 2, connecting rod; 3, elastic coupling; 4, inner shaft; 5, fixed disc; 6, threaded groove; 7, external threaded column; 8, connecting disc; 9, rubber protective cover; 10, mounting screw hole; 11, jack; 12, plugging screw hole; 13, fastening bolt; 14, plugging plug; 15, perforation; 16, sealing ring; 17, prying column. DETAILED DESCRIPTION

[0020] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the utility model.

[0021] In the description of the utility model, it should be noted that the terms "upper", "lower", "inner", "outer", "top / bottom end" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the utility model. In addition, the terms "first", "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0022] In the description of the utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "mounting", "provided with", "sleeved / connected", "connected" and the like should be broadly understood, for example, "connected" can be fixedly connected, can be detachably connected, or integrally connected; can be mechanically connected, can be electrically connected; can be directly connected, can be indirectly connected through an intermediate medium, and can be connected inside two elements. For those skilled in the art, the specific meanings of the above terms in the utility model can be understood according to the specific circumstances. Embodiment 1

[0023] Please refer to Figures 1-5 , a connecting shaft mechanism of a magnetic fluid sealing device, including a magnetic fluid sealing sleeve 1 and a connecting rod 2, the inner side of the magnetic fluid sealing sleeve 1 is sleeved with an inner shaft 4, the bottom end of the inner shaft 4 and the top end of the connecting rod 2 are fixedly installed with an elastic coupling 3, the side of the bottom end of the inner shaft 4 and the top end of the connecting rod 2 are both provided with a mounting screw hole 10, the side of the bottom end of the inner shaft 4 and the top end of the connecting rod 2 are both sleeved with a fixed disc 5, both of the two fixed discs 5 are provided with a threaded groove 6, the inner cavities of the two threaded grooves 6 are both threadedly installed with an external threaded column 7, the end portions of the two external threaded columns 7 are both fixedly connected with a connecting disc 8, the two connecting discs 8 are fixedly connected with a rubber protective cover 9, the rubber protective cover 9 is sleeved on the outer side of the elastic coupling 3, the side of the fixed disc 5 is provided with a plugging screw hole 12, the end portions of the inner cavities of the two plugging screw holes 12 are both provided with a insertion hole 11, the inner cavities of the two plugging screw holes 12 are both sleeved with a fastening bolt 13, the end portions of the two fastening bolts 13 are respectively inserted through the insertion hole 11 and are threadedly installed into the inner cavity of the mounting screw hole 10.

[0024] In the embodiment, the elastic coupling 3 can adopt an elastic coupling with a model of CPBSC25-10-10, which is a bellows coupling, and can more effectively compensate the rotating deviation of the inner shaft 4 and the connecting rod 2 in the radial direction, the angular direction and the axial direction, and in addition, the bottom end of the connecting rod 2 is connected with the output shaft of the motor.

[0025] Specifically, please refer to Figure 1 , Figure 2 and Figure 5 , the middle portions of the two fixed discs 5 are both provided with a through hole 15, the inner walls of the two through holes 15 are both fixedly sleeved with a sealing ring 16, the inner walls of the two sealing rings 16 are respectively and conformably connected with the side surfaces of the connecting rod 2 and the inner shaft 4.

[0026] In the embodiment, the through hole 15 and the connecting rod 2, and the through hole 15 and the inner shaft 4 are sealed by the sealing ring 16, and in addition, the sealing ring 16 is provided with a hole for the fastening bolt 13 to pass through.

[0027] Specifically, please refer to Figure 1 and Figure 2 , one end of the inner cavity of the plugging screw hole 12 is threadedly installed with a plugging screw plug 14.

[0028] In the embodiment, the plugging screw hole 12 is plugged by the plugging screw plug 14.

[0029] Specifically, please refer to Figure 4 , the side of the connecting disc 8 is fixedly connected with a plurality of prying columns 17.

[0030] In the embodiment, the connecting disc 8 is rotated by the prying column 17, and the external threaded column 7 on the connecting disc 8 is installed in the threaded groove 6 on the fixed disc 5.

[0031] Specifically, please refer to Figure 2 The outer diameter of the connecting rod 2 and the inner shaft 4 is equal.

[0032] In this embodiment, it is ensured that the elastic coupling 3 can be smoothly installed on the connecting rod 2 and the inner shaft 4.

[0033] Specifically, please refer to Figure 2 The outer side of the connecting disc 8 is flush with the outer side of the fixing disc 5, and the outer side of the connecting disc 8 is flush with the outer side of the rubber protective cover 9.

[0034] In this embodiment, the smoothness of the outer side of the fixing disc 5, the connecting disc 8 and the rubber protective cover 9 is ensured.

[0035] Working principle: in use, first, the fixing disc 5 is sleeved on the outer side of the inner shaft 4 and the connecting rod 2 respectively, and the fastening bolt 13 is inserted into the plugging screw hole 12, and the end of the fastening bolt 13 is threaded into the mounting screw hole 10 through the insertion hole 11, so that the two fixing discs 5 are installed on the side of the connecting rod 2 and the inner shaft 4, then the connecting disc 8 and the rubber protective cover 9 are sleeved on the outer side of the top end of the connecting rod 2, at this time, the elastic coupling 3 is installed between the connecting rod 2 and the inner shaft 4, then the outer threaded column 7 on the two connecting discs 8 is threaded into the threaded groove 6 on the two fixing discs 5, at this time, the rubber protective cover 9 is located on the outer side of the elastic coupling 3, finally, the connecting rod 2 is driven to rotate by the motor, the connecting rod 2 drives the inner shaft 4 to rotate through the elastic coupling 3, in addition, the fixing disc 5 on the connecting rod 2 and the inner shaft 4 rotates synchronously, at the same time, the rubber protective cover 9 also rotates on the outer side of the elastic coupling 3, and the elastic coupling 3 is protected by the fixing disc 5, the connecting disc 8 and the rubber protective cover 9, that is.

[0036] The above is only the preferred specific embodiment of the present application, but the protection scope of the present application is not limited to this, any skilled person in the art can make equivalent replacement or change according to the technical scheme and improvement concept of the present application within the technical range disclosed by the present application, which should be covered in the protection scope of the present application.

Claims

1. A coupling mechanism of a magnetic fluid seal device, comprising a magnetic fluid seal sleeve (1) and a connecting rod (2), characterized in that: The inner side of the magnetic fluid sealing sleeve (1) is sleeved with an inner shaft (4), an elastic coupling (3) is fixedly installed between the bottom end of the inner shaft (4) and the top end of the connecting rod (2), mounting screw holes (10) are arranged on the side surfaces of the bottom end of the inner shaft (4) and the top end of the connecting rod (2), fixed discs (5) are sleeved on the side surfaces of the bottom end of the inner shaft (4) and the top end of the connecting rod (2), threaded grooves (6) are arranged on the two fixed discs (5), outer threaded columns (7) are threadedly installed in the inner cavities of the two threaded grooves (6), connecting discs (8) are fixedly connected to the end portions of the two outer threaded columns (7), a rubber protective cover (9) is fixedly connected between the two connecting discs (8) and sleeved on the outer side of the elastic coupling (3), plugging screw holes (12) are arranged on the side surfaces of the fixed discs (5), insertion holes (11) are arranged at the end portions in the inner cavities of the two plugging screw holes (12), fastening bolts (13) are sleeved in the inner cavities of the two plugging screw holes (12), and the end portions of the two fastening bolts (13) respectively penetrate the insertion holes (11) and are threadedly installed into the inner cavities of the mounting screw holes (10).

2. A magnetic fluid seal shaft coupling mechanism according to claim 1, wherein: The middle portions of the two fixed discs (5) are provided with perforations (15), and the inner walls of the two perforations (15) are fixedly sleeved with sealing rings (16).

3. A magnetic fluid seal shaft coupling mechanism according to claim 1 wherein: One end of the inner cavity of the plugging screw hole (12) is threadedly installed with a plugging screw plug (14).

4. A magnetic fluid seal shaft coupling mechanism as defined in claim 1 wherein: The side surface of the connecting disc (8) is fixedly connected with a plurality of pulling columns (17).

5. A magnetic fluid seal shaft coupling mechanism as defined in claim 1 wherein: The outer diameters of the connecting rod (2) and the inner shaft (4) are equal.

6. A magnetic fluid seal shaft coupling mechanism according to claim 1 wherein: The outer side surface of the connecting disc (8) is flush with the outer side surface of the fixed disc (5), and the outer side surface of the connecting disc (8) is flush with the outer side surface of the rubber protective cover (9).

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