X-axis and Y-axis magnetic preloading air floatation motion platform

Abstract

The utility model discloses an X-axis and Y-axis magnetic force preloading air-floating motion platform which comprises an X-axis air-floating guide rail base and a Y-axis air-floating guide rail base, and the Y-axis air-floating guide rail base is arranged on the top of the X-axis air-floating guide rail base. Shock absorbers are uniformly arranged at the bottom of the X-axis air-floating guide rail base, a first magnetic preloading device is arranged between the X-axis air-floating guide rail base and the Y-axis air-floating guide rail base, and a second magnetic preloading device is arranged on the Y-axis air-floating guide rail base; a first air floating cushion is arranged on the Y-axis air floating guide rail base and the X-axis air floating guide rail base, and a second air floating cushion is arranged on the Y-axis air floating guide rail base; an X-axis driving unit is arranged on the X-axis air floating guide rail base, and a Y-axis driving unit is arranged on the Y-axis air floating guide rail base. According to the XY-axis magnetic preloading air floating motion platform, the problems that in the prior art, vibration and abrasion of a mechanical structure cannot be effectively blocked, so that precision is reduced, and maintenance cost is increased are solved.

Description

TECHNICAL FIELD

[0001] The utility model relates to precision positioning device technical field, concretely relates to a XY axis magnetic force preloading air bearing movement platform. BACKGROUND

[0002] With the rapid development of super-precision positioning technology, precision movement platform plays an important role in many high-precision industries in various aspects, such as super-precision measurement, high-precision laser drilling, nanoscale surface topography measurement, etc.

[0003] Traditional air bearing platform generally cannot effectively block the vibration of mechanical structure in the movement process, and the precision of equipment is reduced due to mechanical wear during long-term use, and the maintenance cost of equipment is increased. UTILITY MODEL CONTENT

[0004] The utility model provides a XY axis magnetic force preloading air bearing movement platform, and the purpose is to solve the problems of unable to effectively block the vibration of mechanical structure, wear leading to precision reduction and maintenance cost increase in prior art.

[0005] The technical solution provided by the utility model is as follows:

[0006] A kind of XY axis magnetic force preloading air bearing movement platform, including X axis air bearing guide rail base and Y axis air bearing guide rail base, the Y axis air bearing guide rail base is set on the top of the X axis air bearing guide rail base;

[0007] The X axis air bearing guide rail base bottom is uniformly provided with shock absorber, first magnetic force preloading device is arranged between the X axis air bearing guide rail base and the Y axis air bearing guide rail base, second magnetic force preloading device is arranged on the Y axis air bearing guide rail base;

[0008] First air bearing pad is arranged on the Y axis air bearing guide rail base and the X axis air bearing guide rail base, second air bearing pad is arranged on the Y axis air bearing guide rail base;

[0009] X axis driving unit is arranged on the X axis air bearing guide rail base, Y axis driving unit is arranged on the Y axis air bearing guide rail base.

[0010] Further, the first magnetic force preloading device includes X axis iron bar and first magnet module;

[0011] The X axis iron bar is arranged at the middle groove of the X axis air bearing guide rail base, the Y axis air bearing guide rail base is provided with the first magnet module corresponding to the position of the X axis iron bar, the first magnet module and the X axis iron bar are attracted to each other by magnetic force and the spacing is adjustable.

[0012] Further, the X-axis driving unit comprises an X-axis motor stator fixing block, an X-axis motor rotor fixing block, an X-axis motor stator and an X-axis motor rotor;

[0013] The X-axis motor stator fixing block is symmetrically arranged on both sides of the X-axis air floating guide rail base, and the X-axis motor stator fixing block is connected with the X-axis motor stator.

[0014] The X-axis air floating guide rail base is provided with an X-axis support plate, the X-axis motor rotor fixing block is arranged on both sides of the X-axis support plate, and the X-axis motor rotor fixing block is connected with the X-axis motor rotor.

[0015] Further, the first air floating pad is fixed at the lower plate side position and the upper plate horizontal position of the X-axis support plate, and after air supply, the first air floating pad and the X-axis air floating guide rail base form an air film, and the first air floating pad is symmetrically installed at the lower plate side position.

[0016] The Y-axis air floating guide rail base is fixed on the X-axis support plate, and the first magnet module is assembled at the lowermost end position of the X-axis support plate.

[0017] Further, Y-axis side support plates are arranged on both sides of the Y-axis air floating guide rail base, and a Y-axis support plate is arranged on the top of the Y-axis air floating guide rail base, and the Y-axis support plate is connected with the Y-axis side support plates.

[0018] The second air floating pad is fixed on the Y-axis side support plate and the Y-axis support plate, and after air supply, the second air floating pad and the Y-axis air floating guide rail base form an air film, and the second air floating pad is symmetrically installed at the Y-axis side support plate position.

[0019] Further, the second magnetic preloading device comprises a Y-axis iron strip and a second magnet module.

[0020] The Y-axis iron strip is arranged on both sides of the guide rail surface of the Y-axis air floating guide rail base, and the second magnet module is assembled on the Y-axis support plate and is attracted to the Y-axis iron strip by magnetic force.

[0021] Further, the second magnet module and the Y-axis iron strip are filled with an insulating material mass block in the middle, and the second magnet module and the Y-axis support plate are connected through a magnet module adjusting bolt and a locking screw.

[0022] The Y-axis support plate is provided with a bearing adjusting bolt corresponding to the position of the second air floating pad, and in the air-off state, the second air floating pad is in contact with the bearing adjusting bolt.

[0023] Further, the Y-axis driving unit comprises a Y-axis motor moving part fixing block, a Y-axis motor moving part and a Y-axis motor stator, the Y-axis motor moving part fixing block is fixed on the Y-axis support plate, the Y-axis motor moving part is connected with the Y-axis motor moving part fixing block, and the Y-axis motor stator is fixed on the Y-axis air floating guide rail base.

[0024] Further, first stop blocks are arranged at both ends of X-axis movement starting and ending points of the X-axis air floating guide rail base.

[0025] Second stop blocks are arranged at both ends of Y-axis movement starting and ending points of the Y-axis air floating guide rail base.

[0026] Compared with the prior art, the utility model has the advantages that:

[0027] 1. The utility model provides a kind of XY axis magnetic force preloading air floating movement platform, the distance of magnet and iron strip is adjusted in platform horizontal direction by bolt, control X, Y axis magnetic preloading force makes gas film reach suitable rigidity, can increase platform load range and avoid air floating bearing to produce jitter when load is larger.

[0028] 2. The utility model provides a kind of XY axis magnetic force preloading air floating movement platform, all bearings of this platform are using gas lubrication, airflow sprayed from air floating pad can be cooled to platform by itself, friction is almost close to zero and there is no reverse gap, low in later maintenance cost, high precision.

[0029] 3. The utility model provides a kind of XY axis magnetic force preloading air floating movement platform, the magnetic force preloading device of a kind of positionable adjustment is used in this platform, with the gas film bearing force of air floating pad mutual balance, save the design space of air floating platform, and the magnetic force preloading can provide larger magnetic force compression gas film thickness, improve the high rigidity of gas film under different load and the high precision performance of platform. BRIEF DESCRIPTION OF DRAWINGS

[0030] Figure 1 It is structure schematic view of XY axis magnetic force preloading air floating movement platform in the utility model embodiment;

[0031] Figure 2 It is X axis schematic view of XY axis magnetic force preloading air floating movement platform in the utility model embodiment;

[0032] Figure 3 It is Y axis schematic view of XY axis magnetic force preloading air floating movement platform in the utility model embodiment;

[0033] Figure 4 It is Figure 3 Local enlarged view of P1 part in the utility model embodiment.

[0034] The reference signs are as follows:

[0035] 1-X axis air floating guide rail base, 2-damper, 3-X axis iron strip, 4-X axis motor stator fixing block, 5-X axis motor stator, 6-X axis motor rotor, 7-X axis motor rotor fixing block, 8-X axis support plate, 9-Y axis air floating guide rail base, 10-first stop block, 11-Y axis iron strip, 12-Y axis side support plate, 13-Y axis support plate, 14-first magnet module, 15-Y axis motor stator, 16-Y axis motor rotor, 17-Y axis motor rotor fixing block, 18-first air floating pad, 19-magnet module adjusting bolt, 20-tightening screw, 21-bearing adjusting bolt, 22-insulation material mass block, 23-second magnet module, 24-second air floating pad, 25-second stop block. DETAILED DESCRIPTION

[0036] In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the following will be combined with the drawings of the embodiments of the present application to make a clear and complete description of the technical solutions in the embodiments of the present application. Obviously, the following described embodiments are a part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings can be arranged and designed in various different configurations.

[0037] Therefore, the detailed description of the embodiments of the present application provided below in combination with the drawings is intended to represent only selected embodiments of the present application, and not to limit the scope of the present application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present application without creative labor are within the scope of the present application.

[0038] It should be understood that, in the description of the embodiments of the present application, the orientations or positional relationships indicated by the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the embodiments of the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements indicated must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the embodiments of the present application. In addition, the terms "first" and "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features limited by "first" and "second" can explicitly or implicitly include one or more of the features. In the description of the embodiments of the present application, the meaning of "multiple" is two or more, unless otherwise specifically limited.

[0039] In the description of the embodiments of the utility model, it needs to be explained that, unless there is explicit stipulation and limitation, the terms "arrange", "install", "connect", "connect" should be understood in broad sense, for example, it can be fixed connection, also can be detachable connection, or integrally connected, it can be mechanical connection, also can be electrical connection or can communicate with each other, it can be directly connected, also can be indirectly connected through intermediate medium, it can be the communication or interaction of two elements inside two elements. For ordinary skilled in the art, the specific meaning of the above terms in the embodiments of the utility model can be understood according to specific circumstances.

[0040] Referring to Figure 1 、 Figure 2 , the utility model provides a kind of XY axis magnetic force preloading air bearing movement platform, X axis air bearing guide rail base 1 is supported on four sub-uniform shock absorber 2, first stop block 10 is fixed at the both ends of X axis air bearing guide rail base 1 X axis movement start and end.

[0041] X axis motor stator fixed block 4 is fixed symmetrically in X axis air bearing guide rail base 1 both sides, X axis motor stator 5 is connected in X axis motor stator fixed block 4, X axis motor rotor 6 is connected with X axis motor rotor fixed block 7, X axis motor rotor fixed block 7 is fixed in X axis support plate 8 both sides, this part connection constitutes X axis drive unit.

[0042] X axis iron bar 3 is arranged in the recess of X axis air bearing guide rail base 1, first magnet module 14 is assembled at the most lower end position of X axis support plate 8 and is mutually attracted by magnetic force with X axis iron bar 3, Y axis air bearing guide rail base 9 is fixed on X axis support plate 8, the weight generated by Y axis air bearing guide rail base 9 and the parts supported by it becomes the load applied to air film, this part connection constitutes X axis preloading part, i.e. first magnetic force preloading device.

[0043] First air cushion 18 is fixed respectively in the side position of lower plate and the horizontal position of upper plate of X axis support plate 8, after air supply, air film is formed between first air cushion 18 and X axis air bearing guide rail base 1, first air cushion 18 is symmetrically installed at the side position of lower plate, air film reaches suitable rigidity by symmetric geometric assembly mode, the horizontal position of upper plate air film load and magnetic force preloading, the weight of the parts supported on X axis support plate 8 form balanced state, the distance of X axis iron bar 3 and first magnet module 14 can make air film reach suitable rigidity, adjustment part is same with Y axis magnetic force preloading part, see Figure 4 .

[0044] As shown in Figure 3 , second stop block 25 is fixed at the both ends of Y axis air bearing guide rail base 9 Y axis movement start and end.

[0045] The Y-axis motor moving block 17 is fixed to the Y-axis support plate 13, the Y-axis motor moving block 16 is connected with the Y-axis motor moving block 17, the Y-axis motor stator 15 is fixed to the Y-axis air floating guide rail base 9, and the Y-axis motor stator 15 is connected with the Y-axis motor moving block 17, and the Y-axis motor stator 15 is fixed to the Y-axis air floating guide rail base 9.

[0046] The Y-axis iron strip 11 is arranged on both sides of the guide rail surface of the Y-axis air floating guide rail base 9, and the second magnet module 23 is assembled on the Y-axis support plate 13 and is attracted to the Y-axis iron strip 11 through magnetic force, and the Y-axis magnetic preloading part, that is, the second magnetic preloading device, is formed.

[0047] The Y-axis side support plate 12 is connected with the Y-axis support plate 13, the second air floating pad 24 is fixed to the Y-axis side support plate 12 and the Y-axis support plate 13 respectively, and the second air floating pad 24 is connected with the Y-axis air floating guide rail base 9 after being supplied with air to form an air film, the second air floating pad 24 is symmetrically installed at the position of the Y-axis side support plate 12, the air film at the position of the Y-axis support plate 13 is balanced by magnetic preloading to adjust the distance between the X-axis iron strip 3 and the first magnet module 14 so that the air film reaches a suitable stiffness.

[0048] Further, the magnetic preloading and the second air floating pad 24 balance adjustment part are as follows Figure 4 The second magnet module 23 is filled with the insulating material mass block 22 between the Y-axis iron strip 11, the fixed screw 20 is screwed to contact the second magnet module 23, the magnet module adjusting screw 19 is screwed in to complete the fixation of the second magnet module 23, the bearing adjusting screw 21 is screwed in to the surface of the second air floating pad 24 to contact the Y-axis air floating guide rail base 9 in the air-off state, the air film is formed after being supplied with air, the insulating material mass block 22 is disconnected with the second magnet module 23, the insulating material mass block 22 is removed, the air film is balanced by the magnetic preloading, and the X-axis is the same.

[0049] The XY-axis magnetic preloading air floating movement platform provided by the embodiment adjusts the distance between the magnet and the iron strip through the bolt in the horizontal direction of the platform, controls the X-axis and Y-axis magnetic preloading force to make the air film reach a suitable stiffness, can increase the platform load range, and avoids the air floating bearing from shaking when the load is large.

[0050] All bearings of the XY-axis magnetic preloading air floating movement platform provided by the embodiment are gas lubricated, the airflow sprayed from the air floating pad can cool the platform, the friction is almost zero and there is no reverse gap, the maintenance cost is low in the later period, and the precision is high.

[0051] The XY-axis magnetic preloading air floating movement platform provided by the embodiment adopts a magnetic preloading device which can be positioned and adjusted, and the air film bearing force of the air floating pad is balanced with the magnetic preloading, the design space of the air floating platform is saved, and the magnetic preloading can provide larger magnetic force to compress the air film thickness, and the high stiffness of the air film under different loads and the high precision performance of the platform are improved.

[0052] The above merely provides a specific implementation of the present application, but the protection scope of the present application is not limited thereto, and any change or replacement within the technical scope disclosed by the present application should be covered in the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. An XY-axis magnetic preloading air floating motion platform, characterized in that: it comprises an X-axis air floating rail base and a Y-axis air floating rail base, the Y-axis air floating rail base is arranged on the top of the X-axis air floating rail base; the bottom of the X-axis air floating rail base is uniformly provided with dampers, the X-axis air floating rail base and the Y-axis air floating rail base are provided with a first magnetic preloading device, the Y-axis air floating rail base is provided with a second magnetic preloading device; the Y-axis air floating rail base and the X-axis air floating rail base are provided with a first air floating pad, the Y-axis air floating rail base is provided with a second air floating pad; the X-axis air floating rail base is provided with an X-axis driving unit, and the Y-axis air floating rail base is provided with a Y-axis driving unit.

2. The XY-axis magnetic preloading air floating motion platform according to claim 1, characterized in that: the first magnetic preloading device comprises an X-axis iron bar and a first magnet module; the X-axis iron bar is arranged at the middle groove of the X-axis air floating rail base, the Y-axis air floating rail base is provided with the first magnet module corresponding to the position of the X-axis iron bar, and the first magnet module and the X-axis iron bar are attracted to each other by magnetic force and the distance therebetween is adjustable.

3. The XY-axis magnetic preloading air floating motion platform according to claim 2, characterized in that: the X-axis driving unit comprises an X-axis motor stator fixed block, an X-axis motor rotor fixed block, an X-axis motor stator and an X-axis motor rotor; the X-axis motor stator fixed block is symmetrically arranged on both sides of the X-axis air floating rail base, and the X-axis motor stator fixed block is connected with the X-axis motor stator; the X-axis air floating rail base is provided with an X-axis support plate, the X-axis motor rotor fixed block is arranged on both sides of the X-axis support plate, and the X-axis motor rotor fixed block is connected with the X-axis motor rotor.

4. The XY-axis magnetic preloading air floating motion platform according to claim 3, characterized in that: the first air floating pad is respectively fixed at the lower plate side position and the upper plate horizontal position of the X-axis support plate, and after being supplied with air, the first air floating pad and the X-axis air floating rail base form an air film, and the first air floating pad is symmetrically installed at the lower plate side position; the Y-axis air floating rail base is fixed on the X-axis support plate, and the first magnet module is assembled at the lowermost end position of the X-axis support plate.

5. The XY-axis magnetic preloading air floating motion platform according to any one of claims 1-4, characterized in that: the Y-axis air floating rail base is provided with Y-axis side support plates on both sides, and the Y-axis air floating rail base is provided with a Y-axis support plate on the top, and the Y-axis support plate is connected with the Y-axis side support plates; the second air floating pad is respectively fixed on the Y-axis side support plates and the Y-axis support plate, and after being supplied with air, the second air floating pad and the Y-axis air floating rail base form an air film, and the second air floating pad is symmetrically installed at the position of the Y-axis side support plate.

6. The XY-axis magnetic preloading air floating motion platform according to claim 5, characterized in that: the second magnetic preloading device comprises a Y-axis iron bar and a second magnet module. ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ The Y-axis iron bar is arranged on both sides of the rail surface of the Y-axis air floating guide rail base, and the second magnet module is assembled on the Y-axis support plate and is attracted to the Y-axis iron bar by magnetic force. 7.The XY-axis magnetic preloaded air floating motion platform according to claim 6, characterized in that: The second magnet module is filled with an insulating material mass between the Y-axis iron bar, and the second magnet module and the Y-axis support plate are connected by magnet module adjusting bolts and locking screws; The Y-axis support plate is provided with a bearing adjusting bolt corresponding to the position of the second air floating pad, and the second air floating pad is in contact with the bearing adjusting bolt in the air-off state. 8.The XY-axis magnetic preloaded air floating motion platform according to claim 6 or 7, characterized in that: The Y-axis drive unit comprises a Y-axis motor rotor fixed block, a Y-axis motor rotor and a Y-axis motor stator, the Y-axis motor rotor fixed block is fixed on the Y-axis support plate, the Y-axis motor rotor is connected with the Y-axis motor rotor fixed block, and the Y-axis motor stator is fixed on the Y-axis air floating guide rail base. 9.The XY-axis magnetic preloaded air floating motion platform according to claim 8, characterized in that: The X-axis air floating guide rail base is provided with a first stop block at both ends of the X-axis motion starting point and the X-axis motion ending point; The Y-axis air floating guide rail base is provided with a second stop block at both ends of the Y-axis motion starting point and the Y-axis motion ending point.

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