Pipeline angle measuring device

By designing a rotating pipe angle measuring device, which utilizes the rotating connection between a semi-circular dial and an indicator needle, the problem of inaccurate angle measurement of semiconductor pipes in existing technologies is solved, enabling accurate and convenient angle measurement of semiconductor pipes and adapting to pipe measurement of various specifications.

CN223727052UActive Publication Date: 2025-12-26鸿舸半导体设备(上海)有限公司
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Patent Information

Application Number
CN202520182114.6
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-02-05
Publication Date
2025-12-26
Estimated Expiration
2035-02-05

AI Technical Summary

Technical Problem

Existing angle gauges are difficult to use accurately when measuring semiconductor pipes, especially at welding and bending points, as they cannot accurately measure the actual angle of the pipes, affecting the installation quality and performance of semiconductor pipe systems.

Method used

A pipe angle measuring device is designed, including a first measuring element and a second measuring element rotatably connected. The pipe angle is determined by the joint contact of the first measuring element and the pipe using the semi-circular scale and the first guide component of the first measuring element, and the indicator needle and the second guide component of the second measuring element. The scale and the indicator needle are rotatably connected.

Benefits of technology

It enables accurate and convenient angle measurement of semiconductor pipes, adapts to various angle measurements, improves measurement accuracy and versatility, avoids the limitations of traditional measurement methods, and is applicable to semiconductor pipes of various specifications.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model provides a pipeline angle measuring device. The device comprises a first measuring piece and a second measuring piece which are rotationally connected; the first measuring piece comprises a semicircular dial and a first guide part which are integrally formed, and a first abutting piece connected with the first guide part, the symmetry axis of the dial is perpendicular to the length direction of the first guide part, and the second measuring piece comprises a pointer and a second guide part which are integrally formed; the pointer pointing direction of the pointer is parallel to the length direction of the second guide part, the first abutting part and the second abutting part are used for jointly abutting against a to-be-measured pipeline arranged at an angle, and the dial is rotationally connected with the pointer so that the scale pointed by the pointer can be determined as the angle of the to-be-measured pipeline. The angle measuring device can accurately and conveniently measure the angle of the pipeline for semiconductor production, and is simple in overall structure, few in parts, easy to operate, wide in application range and high in adaptability.
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Description

Technical Field

[0001] This application relates to the field of pipeline measurement technology, and in particular to a pipeline angle measuring device. Background Technology

[0002] Semiconductor piping systems play a crucial role in semiconductor manufacturing, ensuring precise material transport and accurate control of pressure and flow. Therefore, the connection and installation of semiconductor piping require precise angle measurements to guarantee the overall system's sealing, smooth operation, and functionality.

[0003] Existing angle gauges require close contact with the pipe to measure angles. Due to the small contact area, this often results in low measurement accuracy. Furthermore, in semiconductor manufacturing, pipes undergo welding and bending. The limitations of bend radii or welded elbows make it difficult to ensure a perfect fit between the angle gauge and the pipe, hindering accurate measurement of the actual pipe angle and consequently affecting the installation quality and performance of semiconductor piping systems.

[0004] Therefore, there is an urgent need for a pipe angle measuring device to solve the above-mentioned technical problems. Utility Model Content

[0005] In view of this, in order to overcome the shortcomings of the prior art, this application provides a pipe angle measuring device that can solve the problem that existing angle rulers cannot accurately measure the angle of semiconductor pipes.

[0006] This application provides a pipe angle measuring device, comprising: a first measuring component and a second measuring component rotatably connected; the first measuring component includes an integrally formed semi-circular dial and a first guide component, and a first abutment component connected to the first guide component, wherein the axis of symmetry of the dial is perpendicular to the length direction of the first guide component; the second measuring component includes an integrally formed indicator needle and a second guide component, and a second abutment component connected to the second guide component, wherein the pointer of the indicator needle points parallel to the length direction of the second guide component; the first abutment component and the second abutment component are used to jointly abut against the pipe to be measured, which is set at an angle, and the dial is rotatably connected to the indicator needle to determine the angle of the pipe to be measured as the scale indicated by the indicator needle.

[0007] Optionally, the outer periphery of the dial is provided with graduations, the graduations being in the range of 0°-180°;

[0008] The length of the first guide component is greater than the length of the second guide component, and when the second guide component is directly above the first guide component, the indicator needle points to 0°.

[0009] Optionally, the first guide part is provided with a first guide groove along the length direction of the first guide part, the first abutting part is in sliding connection with the first guide groove, the second guide part is provided with a second guide groove along the length direction of the second guide part, and the second abutting part is in sliding connection with the second guide groove, and the length of the first guide groove is greater than the length of the second guide groove.

[0010] Optionally, one side of the first abutting part is provided with an abutting recess, the abutting recess comprises a plurality of abutting surfaces connected with each other, each abutting surface is capable of abutting with a pipeline to be measured, the other side of the first abutting part is provided with a first protrusion, the first protrusion is in matched connection with the first guide groove so that the first abutting part is capable of sliding along the first guide part.

[0011] One side of the second abutting part is provided with an abutting recess, the abutting recess comprises a plurality of abutting surfaces connected with each other, each abutting surface is capable of abutting with a pipeline to be measured, the other side of the second abutting part is provided with a second protrusion, the second protrusion is in matched connection with the second guide groove so that the second abutting part is capable of sliding along the second guide part.

[0012] Optionally, the bottom of the first protrusion is provided with a first connecting hole, a first connecting part is arranged in the first connecting hole so as to fixedly connect the first abutting part with the first guide part, the bottom of the second protrusion is provided with a second connecting hole, and a second connecting part is arranged in the second connecting hole so as to fixedly connect the second abutting part with the second guide part.

[0013] Optionally, along the length direction of the first guide part, the first guide groove is provided with a first chamfer away from one side of the first abutting part, the first chamfer forms a first inclined surface for matched connection with the first connecting part, so that the first connecting part is embedded in the first guide groove.

[0014] Along the length direction of the second guide part, the second guide groove is provided with a second chamfer away from one side of the second abutting part, the second chamfer forms a second inclined surface for matched connection with the second connecting part, so that the second connecting part is embedded in the second guide groove.

[0015] Optionally, the height of the first abutting part is greater than the height of the second abutting part, and the height difference between the first abutting part and the second abutting part is the thickness of the second guide part.

[0016] Optionally, the center of the circular arc of the dial is provided with a third connecting hole, the middle part of the indicating needle is provided with a fourth connecting hole, and a third connecting part is arranged in the third connecting hole and the fourth connecting hole so as to rotationally connect the dial with the indicating needle.

[0017] Optionally, the pipe angle measuring device further comprises a fixing member, the fixing member is detachably connected with the first abutting member, and / or the fixing member is detachably connected with the second abutting member.

[0018] Optionally, the abutting recess of the first abutting member is V-shaped, the fixing member comprises a belt connecting member, one end of the belt connecting member is sleeved on one end of the first abutting member to make the one end of the belt connecting member fixedly connected with the one end of the first abutting member, and the other end of the belt connecting member is detachably connected with the other end of the first abutting member away from the first guide member.

[0019] Optionally, the abutting recess of the second abutting member is V-shaped, the fixing member comprises a belt connecting member, one end of the belt connecting member is sleeved on one end of the second abutting member to make the one end of the belt connecting member fixedly connected with the one end of the second abutting member, and the other end of the belt connecting member is detachably connected with the other end of the second abutting member away from the second guide member.

[0020] The pipe angle measuring device provided by the embodiments of the present application has at least the following beneficial technical effects:

[0021] The first measuring member and the second measuring member are rotatably connected and cooperated to accurately and conveniently measure the angle of the pipe used in semiconductor production. Specifically, the first measuring member in the pipe angle measuring device comprises a semicircular scale disc and a first guide member which are integrally formed, and a first abutting member connected with the first guide member, the symmetry axis of the scale disc is perpendicular to the length direction of the first guide member, the second measuring member in the pipe angle measuring device comprises a indicating needle and a second guide member which are integrally formed, and a second abutting member connected with the second guide member, the needle direction of the indicating needle is parallel to the length direction of the second guide member, the first abutting member and the second abutting member are used to jointly abut the pipe to be measured which is arranged at an angle, and the scale disc is rotatably connected with the indicating needle to determine the scale pointed by the indicating needle as the angle of the pipe to be measured. The overall structure of the pipe angle measuring device is simple, the number of parts is small, and the pipe used in semiconductor production can be easily operated to complete the angle measurement. In addition, the first abutting member and the second abutting member are used to jointly abut the pipe to be measured which is arranged at an angle, the pipe to be measured with various angles can be measured, the application range is wide, the adaptability is strong, and the measured angle is accurate.

[0022] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the following preferred embodiments are described in detail below, and the accompanying drawings are described as follows. BRIEF DESCRIPTION OF DRAWINGS

[0023] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed to be used in the embodiments will be briefly introduced as follows. It should be understood that the following drawings only show some of the embodiments of the present application, and therefore should not be regarded as a limitation on the scope, and for those of ordinary skill in the art, other related drawings can also be obtained without creative labor on the basis of these drawings.

[0024] Figure 1 A structural schematic view of a pipeline angle measuring device provided by an embodiment of the present application;

[0025] Figure 2 A bottom view of a pipeline angle measuring device provided by an embodiment of the present application;

[0026] Figure 3 A structural schematic view of a first measuring member in a pipeline angle measuring device provided by an embodiment of the present application;

[0027] Figure 4 A structural schematic view of a second measuring member in a pipeline angle measuring device provided by an embodiment of the present application;

[0028] Figure 5 A structural schematic view of a pipeline angle measuring device provided by an embodiment of the present application;

[0029] Figure 6 A structural schematic view of a first abutting member provided by an embodiment of the present application;

[0030] Figure 7 A structural schematic view of a first abutting member provided by an embodiment of the present application;

[0031] Figure 8 A structural schematic view of a belt connecting member provided by an embodiment of the present application;

[0032] Figure 9 A structural schematic view of a pipeline angle measuring device connected with a first pipeline to be measured provided by an embodiment of the present application;

[0033] Figure 10 A structural schematic view of a pipeline angle measuring device connected with a second pipeline to be measured provided by an embodiment of the present application.

[0034] 10 - first measuring member; 101 - dial; 102 - first guide component; 103 - first abutment member; 20 - second measuring member; 201 - indicator needle; 202 - second guide component; 203 - second abutment member; 1021 - first guide groove; 2021 - second guide groove; 1031 - abutment recess; 1032 - first protrusion; 1033 - first connecting hole; 1034 - first connecting member; 2034 - second connecting member; 1022 - first chamfer; 2022 - second chamfer; 1011 - third connecting hole; 2011 - fourth connecting hole; 3011 - third connecting member; 401 - belt connecting member; 30 - pipeline to be measured. DETAILED DESCRIPTION

[0035] In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the following will be combined with the accompanying drawings of the embodiments of the present application to make a clear and complete description of the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the accompanying drawings can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application.

[0036] In the description of the embodiments of the present application, it should be noted that the terms "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, or the orientation or positional relationship commonly used when the product of the application is used, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", "third" and the like are only used for differentiation in description and cannot be understood as indicating or implying relative importance.

[0037] In addition, the terms "horizontal", "vertical" and the like do not mean that the components must be absolutely horizontal or vertical, but can be slightly inclined. For example, "horizontal" only means that its direction is relatively more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly inclined.

[0038] In the description of the embodiments of the present application, it should also be noted that unless specifically defined and limited, the terms "set", "install", "communicate", "connect" should be broadly understood, for example, can be fixedly connected, can also be detachably connected, or integrally connected; can be mechanically connected, can also be electrically connected; can be directly connected, can also be indirectly connected through an intermediate medium, can be the internal communication of two elements. For those skilled in the art, the specific meanings of the above terms in the present application can be understood according to the specific circumstances.

[0039] The embodiments of the present application provide a pipeline angle measuring device, as shown in the drawings, the pipeline angle measuring device is used for angle measurement of an angle arranged to-be-measured pipeline, the pipeline angle measuring device comprises a first measuring member and a second measuring member connected in rotation, and the angle measurement of the to-be-measured pipeline is completed through the first measuring member and the second measuring member, which is simple in operation, convenient and fast, and can ensure accurate measurement results. Figures 1 to 10

[0040] The pipeline angle measuring device provided by the embodiments of the present application will be described exemplarily below, it should be noted that, Figures 1 to 10 , Figures 1 to 6 , Figures 8 to 10 The abutting recess 1031 is not marked in the drawings, and the specific implementation is as follows:

[0041] As shown in the drawings, Figure 1 and Figure 2 The first measuring member 10 comprises a semicircular scale disc 101 and a first guide component 102 which are integrally formed, and a first abutting member 103 connected with the first guide component 102, the symmetry axis of the scale disc 101 is perpendicular to the length direction of the first guide component 102, the second measuring member 20 comprises an indicating needle 201 and a second guide component 202 which are integrally formed, and a second abutting member 203 connected with the second guide component 202, the length direction of the second guide component 202 is parallel to the pointer direction of the indicating needle 201, the first abutting member 103 and the second abutting member 203 are used for abutting the to-be-measured pipeline arranged at an angle, the scale disc 101 is rotationally connected with the indicating needle 201, so as to determine the scale pointed by the indicating needle 201 as the angle of the to-be-measured pipeline.

[0042] ​Specifically, the first measuring member 10 is integrally formed by a semicircular scale disc 101 and a first guide component 102, the symmetry axis of the scale disc 101 is perpendicular to the length direction of the first guide component 102, and the middle line of the first guide component 102 along the length direction passes through the center of the circular arc of the semicircular scale disc 101; the first measuring member 10 further comprises a first abutting member 103 arranged on the first guide component 102, and the first abutting member 103 is used for abutting one end of the pipeline to be measured arranged at an angle. The second measuring member 20 is integrally formed by a pointer 201 and a second guide component 202, the pointer direction of the pointer 201 is parallel to the length direction of the second guide component 202, and the pointer direction of the pointer 201 is away from the second guide component 202, and the middle line of the pointer 201 is on a straight line with the middle line of the second guide component 202 along the length direction; the second measuring member 20 further comprises a second abutting member 203 arranged on the second guide component 202, and the second abutting member 203 is used for abutting the other end of the pipeline to be measured arranged at an angle. Here, when the first abutting member 103 and the second abutting member 203 abut the pipeline to be measured arranged at an angle together, the pointer 201 can rotate on the scale disc 101, and then the scale indicated by the pointer 201 is determined as the angle of the pipeline to be measured.

[0043] As shown in Figure 3 and Figure 4 , the first guide component 102 is provided with a first guide groove 1021 along the length direction of the first guide component 102, the first abutting member 103 is in sliding connection with the first guide groove 1021, the second guide component 202 is provided with a second guide groove 2021 along the length direction of the second guide component 202, the second abutting member 203 is in sliding connection with the second guide groove 2021, and the length of the first guide groove 1021 is greater than the length of the second guide groove 2021.

[0044] Here, the first abutting member 103 can move along the first guide groove 1021, and the moving distance of the first abutting member 103 is the length of the first guide groove 1021, and due to the limitation of the first guide groove 1021, the first abutting member 103 can only move but cannot rotate; similarly, the second abutting member 203 can move along the second guide groove 2021, and the moving distance of the second abutting member 203 is the length of the second guide groove 2021, and due to the limitation of the second guide groove 2021, the second abutting member 203 can only move but cannot rotate.

[0045] For example, the orthographic projection shape of the first guide groove 1021 is U-shaped, and the length of the first guide groove 1021 can be 180 mm. Similarly, the orthographic projection shape of the second guide groove 2021 is also U-shaped, and the length of the second guide groove 2021 can be 110 mm.

[0046] Further, since the length of the first guide groove 1021 is greater than the length of the second guide groove 2021, if the screw does not protrude from the second guide member 202 when the second abutting member 203 is fixed on the second guide member 202 by the screw, the second guide member 202 can be placed above the first guide member 102, as shown in Figure 5 Thus, the pipe angle measuring device is convenient to carry and store, does not occupy too much space, and is suitable for use in different working environments, achieving the effects of convenient storage and space saving.

[0047] Specifically, as shown in Figure 3 and Figure 5 , the outer periphery of the dial 101 is provided with a scale, and the range of the scale is 0°-180°; that is, the pipe angle measuring device can detect the angle of the pipe in the range of 0°-180°. The length of the first guide member 102 is greater than the length of the second guide member 202, and the indicating needle 201 points to 0° when the second guide member 202 is directly above the first guide member 102. That is, without using the pipe angle measuring device, the second guide member 202 can be placed above the first guide member 102 to save space.

[0048] Optionally, the dial and the indicating needle can be made of aluminum alloy material through precise milling, and the surface of the dial should meet the requirements of flatness and smoothness.

[0049] For the first abutting member and the second abutting member, one side of the first abutting member is provided with an abutting recess, the abutting recess includes a plurality of abutting surfaces connected to each other, each abutting surface can abut against the pipe to be measured, and the other side of the first abutting member is provided with a first protrusion, the first protrusion is connected to the first guide groove to enable the first abutting member to slide along the first guide member; one side of the second abutting member is provided with an abutting recess, the abutting recess includes a plurality of abutting surfaces connected to each other, each abutting surface can abut against the pipe to be measured, and the other side of the second abutting member is provided with a second protrusion, the second protrusion is connected to the second guide groove to enable the second abutting member to slide along the second guide member.

[0050] For example, as shown in Figure 6 and Figure 7As shown, one side of the first abutting piece 103 is provided with an abutting recess 1031, which comprises a plurality of abutting surfaces connected with each other, each of which can abut against the pipeline to be measured. Here, the abutting surface can be an arc surface, and the sizes of the plurality of abutting surfaces connected with each other can be different, and each abutting surface is provided with another abutting surface opposite to it, and through the two abutting surfaces, the side wall of the pipeline can be clamped and abutted to abut against pipelines of different specifications, such as the commonly used 1 / 4 inch PFA pipe, 3 / 8 inch PFA pipe and 1 / 2 inch PFA pipe in semiconductors. Specifically, each abutting surface can be preset according to the standard specification of the pipeline, but is not limited thereto, that is, the abutting recess of the first abutting piece can also be specially made according to the pipe diameter of the pipeline.

[0051] For example, when the pipe diameter of the pipeline to be measured is small, a smaller abutting surface can be used for abutment, and when the pipe diameter of the pipeline to be measured is large, a larger abutting surface can be used for abutment.

[0052] In this way, by placing the pipeline to be measured in the abutting recesses of the first abutting piece and the second abutting piece for measurement, it is not necessary to abut against the pipeline like a conventional angle ruler, and therefore it is not limited by the bend radius and the welded elbow, and can measure the angle of semiconductor pipelines of various shapes and specifications, and the measurement range is wide. In addition, the pipeline to be measured is fixed in the abutting recesses of the first abutting piece and the second abutting piece, compared with the abutment type measurement of the conventional angle ruler, the contact area with the pipeline to be measured is increased, and the position of the pipeline is stable during measurement, and displacement is not easy to occur, thereby effectively improving the measurement accuracy, and providing more accurate data support for the installation and connection of semiconductor pipelines; wherein the abutting recesses of the first abutting piece and the second abutting piece can adapt to various pipe diameters commonly used in semiconductors, and it is not necessary to replace the measurement tool for different pipe diameters, thereby improving the universality and use efficiency of the angle measuring device.

[0053] Further, as shown in Figure 3 and Figure 6 The other side of the first abutting piece 103 is provided with a first protrusion 1032, which is connected with the first guide groove 1021 in a matched manner, so that the first abutting piece 103 can slide along the first guide part 102. Before or during the pipeline angle measurement, if it is necessary to adjust the position of the first abutting piece 103 on the first guide part 102, the first abutting piece 103 can be slid, and the first abutting piece 103 can slide along the first guide groove 1021 through the cooperation between the first protrusion 1032 and the first guide groove 1021.

[0054] Here, the width of the first protrusion 1032 is the same as the slot width of the first guide slot 1021, so that the first abutting member 103 can slide in the first guide slot 1021 of the first guide member 102. Specifically, the first protrusion 1032 is square, and thus the first abutting member 103 cannot rotate due to the restriction of the square protrusion.

[0055] The first abutting member and the second abutting member in the embodiment of the present application have the same structure, and here the structure of the first abutting member is exemplarily described, and the structure of the second abutting member is not described again.

[0056] Further, as shown in Figure 2 , when it is needed to fix the first abutting member 103 after adjusting the position of the first abutting member 103 on the first guide member 102, the first connecting member 1034 can be used to achieve the purpose. In the embodiment of the present application, the first abutting member 103 and the first guide member 102 are fixedly connected through the first connecting member 1034, and similarly, the second abutting member 203 and the second guide member 202 are also fixedly connected through the second connecting member 2034. In order to make the structure simple and easy to operate, the structure of the first connecting member and the structure of the second connecting member can be the same.

[0057] Specifically, as shown in Figure 2 and Figure 6 , the bottom of the first protrusion 1032 is provided with a first connecting hole 1033, and the first connecting member 1034 is installed in the first connecting hole 1033 to fix the first abutting member 103 and the first guide member 102. Similarly, the bottom of the second protrusion is provided with a second connecting hole, and the second connecting member 2034 is installed in the second connecting hole to fix the second abutting member 203 and the second guide member 202. The structure of the second protrusion is the same as that of the first protrusion, and the structure of the first protrusion can be referred to, and here is not described again.

[0058] The connecting member here can be preferably a countersunk screw. By installing the countersunk screw in the first connecting hole and the second connecting hole, the first abutting member and the first guide member can be fixedly connected, and the second abutting member and the second guide member can be fixedly connected.

[0059] Specifically, as shown in Figure 2 , Figure 3 and Figure 4As shown, along the length direction of the first guide component 102, the first guide groove 1021 is provided with a first chamfer 1022 on the side away from the first abutting piece 103, and the first chamfer 1022 forms a first inclined surface for cooperating with the first connecting piece 1034 to enable the first connecting piece 1034 to be embedded in the first guide groove 1021. Similarly, along the length direction of the second guide component 202, the second guide groove 2021 is provided with a second chamfer 2022 on the side away from the second abutting piece 203, and the second chamfer 2022 forms a second inclined surface for cooperating with the second connecting piece 2034 to enable the second connecting piece 2034 to be embedded in the second guide groove 2021.

[0060] For example, when the first connecting piece is a countersunk screw, the bottom of the first guide groove is provided with a first chamfer slightly larger than the size of the head of the countersunk screw. This design can ensure that the countersunk screw does not protrude from the first guide component after being tightened, thereby avoiding interference with the measurement process. Similarly, when the second connecting piece is a countersunk screw, the bottom of the second guide groove is provided with a second chamfer slightly larger than the size of the head of the countersunk screw. This design can ensure that the countersunk screw does not protrude from the second guide component after being tightened, thereby avoiding interference with the measurement process.

[0061] In this way, the structure of embedding the first connecting piece in the first guide groove and the structure of embedding the second connecting piece in the second guide groove can ensure that the side of the first guide component away from the first abutting piece and the side of the second guide component away from the second abutting piece are smooth, thereby achieving the purpose of placing the second guide component above the first guide component. This not only saves space, but also avoids interference with the measurement process.

[0062] Optionally, as shown in Figure 1 The height of the first abutting piece 103 is greater than the height of the second abutting piece 203, and the height difference between the first abutting piece 103 and the second abutting piece 203 is the thickness of the second guide component 202.

[0063] The above arrangement can ensure that the abutting recesses of the first abutting piece 103 and the second abutting piece 203 are at the same height, thereby ensuring that the first abutting piece 103 and the second abutting piece 203 are at the same height when they are used to abut the angle-adjusted pipe to be measured, and facilitating accurate measurement of the angle of the pipe to be measured.

[0064] For the cooperating dial and indicator needle, as shown in Figure 2 , Figure 3 and Figure 4As shown, the center of the arc of the dial 101 is provided with a third connecting hole 1011, the middle of the indicating needle 201 is provided with a fourth connecting hole 2011, and a third connecting piece 3011 is installed in the third connecting hole 1011 and the fourth connecting hole 2011 to rotatably connect the dial 101 and the indicating needle 201.

[0065] Here, the third connecting piece 3011 can be a pin. By installing the pin in the third connecting hole 1011 and the fourth connecting hole 2011, the dial 101 and the indicating needle 201 can be rotatably connected, and the first guide component 102 and the second guide component 202 can be rotatably connected. After the pin is connected, the indicating needle can rotate around the dial, thereby realizing the function of angle measurement.

[0066] Alternatively, the pipeline angle measurement device provided by the embodiment of the present application further comprises a fixing piece, which is detachably connected with the first abutting piece and / or is detachably connected with the second abutting piece.

[0067] Here, the fixing piece can be arranged on the first abutting piece, or can be arranged on the second abutting piece, or can be arranged on both the first abutting piece and the second abutting piece. The fixing piece is used to fix the pipeline to be measured, thereby ensuring the stability of the position of the pipeline to be measured during the measurement, and improving the accuracy of the measurement.

[0068] As shown in Figure 1 , Figure 3 , Figure 7 and Figure 8 , the abutting recess 1031 of the first abutting piece 103 is V-shaped, the fixing piece comprises a belt connecting piece 401, one end of the belt connecting piece 401 is sleeved on one end of the first abutting piece 103 to fixedly connect the one end of the belt connecting piece 401 with the one end of the first abutting piece 103, and the other end of the belt connecting piece 401 is detachably connected with the other end of the first abutting piece 103 away from the first guide component 102.

[0069] Alternatively, the abutting recess of the second abutting piece is V-shaped, the fixing piece comprises a belt connecting piece, one end of the belt connecting piece is sleeved on one end of the second abutting piece to fixedly connect the one end of the belt connecting piece with the one end of the second abutting piece, and the other end of the belt connecting piece is detachably connected with the other end of the second abutting piece away from the second guide component. Here, the connection structure of the belt connecting piece and the second abutting piece is the same as the connection structure of the belt connecting piece and the first abutting piece, which will not be described herein.

[0070] Further, the belt connecting piece plays a role in fixing the pipeline to be measured, and can ensure the stability of the position of the pipeline to be measured during the measurement, thereby improving the accuracy of the measurement.

[0071] For example, as shown in Figure 9 andFigure 10 As shown in the drawings, in the semiconductor manufacturing workshop, when the angle of the welded semiconductor pipeline needs to be detected, the operator can put one end of the pipeline 30 to be measured into the V-shaped abutting recess of the first abutting piece 103 on the first guide part 102, fix the pipeline 30 to be measured through the belt connecting piece 401, and ensure the stability of the pipeline to be measured; then the other end of the pipeline 30 to be measured is placed in the V-shaped abutting recess of the second abutting piece 203 on the second guide part 202, and the pipeline 30 to be measured is arranged at an acute angle as shown in the drawings or at an obtuse angle as shown in the drawings, at this time, the scale indicated by the indicating needle 201 is read, and the welding angle of the pipeline 30 to be measured can be obtained. According to the measurement result, it can be judged whether the welding angle meets the process requirement, if not, it can be adjusted and corrected in time to ensure the installation quality of the semiconductor pipeline system. In the semiconductor pipeline installation site, for the pipeline that needs to be bent, after the bending operation is completed, the bending angle is measured by using the device to ensure that the angle is accurate and correct, so that the subsequent pipeline connection work can be smoothly carried out. Figure 9 Figure 10

[0072] Specifically, the pipeline angle measuring device provided by the embodiment of the present application is mainly manufactured through the following steps: first, appropriate materials such as light and high-strength metal materials such as aluminum alloy are selected to manufacture the first guide part, the second guide part, the first abutting piece, the second abutting piece, and the belt connecting piece; then, according to the designed size, the semicircular scale disc of the first guide part, the U-shaped first guide groove, the first connecting hole, and the first chamfer are accurately manufactured by mechanical processing; similarly, the indicating needle, the second connecting hole, and the U-shaped second guide groove are manufactured by processing the second guide part; then, the first abutting piece and the second abutting piece are processed to ensure that the size and angle of the V-shaped abutting recess can accurately adapt to semiconductor pipelines of different specifications, and the square protrusion at the bottom of the first abutting piece and the square protrusion at the bottom of the second abutting piece are also manufactured; then the first guide part and the second guide part are connected through the third connecting piece to ensure that the indicating needle can rotate flexibly around the scale disc; the first connecting hole is drilled at the corresponding position of the first abutting piece and the first guide groove, the first abutting piece is installed on the first guide part by using the first connecting piece, and it is ensured that the first connecting piece does not protrude from the first guide part after being tightened, and the first chamfer at the bottom of the first guide groove is used for limiting; similarly, the second connecting hole is drilled at the corresponding position of the second abutting piece and the second guide groove, the second abutting piece is installed on the second guide part by using the second connecting piece, and it is ensured that the second connecting piece does not protrude from the second guide part after being tightened, and the second chamfer at the bottom of the second guide groove is used for limiting; finally, the belt connecting piece is installed on the first abutting piece of the first guide part to ensure that it can firmly fix the pipeline to be measured.

[0073] ​​The pipeline angle measuring device provided by the embodiment of the application can accurately and conveniently measure the angle of the pipeline for semiconductor production through the cooperation of the rotationally connected first measuring member and the second measuring member. Specifically, the pipeline angle measuring device has a simple overall structure, few components, and clear functions of each component, and is easy to understand and operate. Compared with some complex angle measuring instruments, the manufacturing process is relatively simple, and the production cost is reduced. Due to the simple structure and clear connection mode between the components, when a fault occurs, the components can be easily repaired and replaced, and the maintenance cost is reduced. Meanwhile, the second guiding component can be accommodated above the first guiding component, which facilitates carrying and storage, does not occupy too much space, and is suitable for use in different working environments. The pipeline to be measured is placed in the abutting recesses of the first abutting member and the second abutting member for measurement, and does not need to be attached to the pipeline like a traditional angle ruler, so it is not limited by the bend radius and welded elbow, and can measure the angle of semiconductor pipelines of various shapes and specifications, and has a wide measurement range. In addition, the pipeline to be measured is fixed in the abutting recesses of the first abutting member and the second abutting member, compared with the abutting measurement of the traditional angle ruler, the contact area with the pipeline to be measured is increased, and the position of the pipeline is stable during the measurement process and is not prone to displacement, thereby effectively improving the measurement accuracy and providing more accurate data support for the installation and connection of the semiconductor pipeline. The abutting recesses of the first abutting member and the second abutting member can adapt to various pipe diameters commonly used in semiconductors, and do not need to replace the measuring tools for different pipe diameters, thereby improving the universality and use efficiency of the angle measuring device.

[0074] Finally, it should be noted that the above-described embodiments are merely specific implementations of the present application, and are used to illustrate the technical solutions of the present application, but not to limit the same. Although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that any person skilled in the art can make modifications or easily think of changes to the technical solutions described in the foregoing embodiments within the technical scope disclosed by the present application, or make equivalent replacements to some of the technical features; and such modifications, changes or replacements do not cause the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present application, and should be covered within the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A pipe angle measuring device, characterized by, The pipeline angle measuring device comprises a rotationally connected first measuring member and a second measuring member; the first measuring member comprises a semicircular scale and a first guide component which are integrally formed, and a first abutting member connected with the first guide component, the symmetry axis of the scale is perpendicular to the length direction of the first guide component; the second measuring member comprises a indicating needle and a second guide component which are integrally formed, and a second abutting member connected with the second guide component, the length direction of the indicating needle is parallel to the length direction of the second guide component; the first abutting member and the second abutting member are used for jointly abutting a pipeline to be measured which is arranged at an angle, the scale and the indicating needle are rotationally connected, so that the scale pointed by the indicating needle is determined as the angle of the pipeline to be measured.

2. The pipe angle measurement device of claim 1, wherein, The outer periphery of the scale is provided with a scale, and the scale ranges from 0° to 180°. The length of the first guide component is greater than the length of the second guide component, and the indicating needle points to 0° when the second guide component is directly above the first guide component.

3. The pipe angle measurement device of claim 1, wherein, The first guide component is provided with a first guide groove along the length direction of the first guide component, the first abutting member is slidably connected with the first guide groove, the second guide component is provided with a second guide groove along the length direction of the second guide component, and the second abutting member is slidably connected with the second guide groove, and the length of the first guide groove is greater than the length of the second guide groove.

4. The pipe angle measurement device of claim 3, wherein, One side of the first abutting member is provided with an abutting recess, the abutting recess comprises a plurality of abutting surfaces connected with each other, each abutting surface can abut with the pipeline to be measured, and the other side of the first abutting member is provided with a first protrusion, the first protrusion is connected with the first guide groove to enable the first abutting member to slide along the first guide component. One side of the second abutting member is provided with an abutting recess, the abutting recess comprises a plurality of abutting surfaces connected with each other, each abutting surface can abut with the pipeline to be measured, and the other side of the second abutting member is provided with a second protrusion, the second protrusion is connected with the second guide groove to enable the second abutting member to slide along the second guide component.

5. The pipe angle measuring device of claim 4, wherein, The bottom of the first protrusion is provided with a first connecting hole, a first connecting member is installed in the first connecting hole to fixedly connect the first abutting member with the first guide component, and the bottom of the second protrusion is provided with a second connecting hole, a second connecting member is installed in the second connecting hole to fixedly connect the second abutting member with the second guide component.

6. The pipe angle measurement device of claim 5, wherein, Along the length direction of the first guide component, the first guide groove is provided with a first chamfer away from one side of the first abutting member, a first inclined surface formed by the first chamfer is used for being connected with the first connecting member to enable the first connecting member to be embedded in the first guide groove; Along the length direction of the second guide component, the second guide groove is provided with a second chamfer away from one side of the second abutting member, a second inclined surface formed by the second chamfer is used for being connected with the second connecting member to enable the second connecting member to be embedded in the second guide groove.

7. The pipe angle measurement device of claim 1, wherein, The height of the first abutting piece is greater than the height of the second abutting piece, and the height difference between the first abutting piece and the second abutting piece is the thickness of the second guide component.

8. The pipe angle measurement device of claim 1, wherein, The center of the arc of the scale disc is provided with a third connecting hole, the middle part of the indicating needle is provided with a fourth connecting hole, and the third connecting hole and the fourth connecting hole are provided with a third connecting piece to rotate the scale disc and the indicating needle.

9. The pipe angle measurement device of claim 1, wherein, The pipeline angle measuring device further comprises a fixing piece, which is detachably connected with the first abutting piece and / or the second abutting piece.

10. The pipe angle measurement device of claim 9, wherein, The abutting recess of the first abutting piece is V-shaped, the fixing piece comprises a belt connecting piece, one end of the belt connecting piece is sleeved on one end of the first abutting piece to fixedly connect the one end of the belt connecting piece with the one end of the first abutting piece, and the other end of the belt connecting piece is detachably connected with the other end of the first abutting piece away from the first guide component. And / or, the abutting recess of the second abutting piece is V-shaped, the fixing piece comprises a belt connecting piece, one end of the belt connecting piece is sleeved on one end of the second abutting piece to fixedly connect the one end of the belt connecting piece with the one end of the second abutting piece, and the other end of the belt connecting piece is detachably connected with the other end of the second abutting piece away from the second guide component.